A pure water PCW system special for semiconductor industry

Abstract

The utility model discloses a pure water PCW system special for semiconductor industry, including pure water tank, semiconductor technology equipment, heat exchanger and PLC controller, the water outlet of pure water tank is linked together with the water inlet of semiconductor technology equipment through pipeline no.

Description

Technical Field

[0001] This utility model relates to the field of water treatment technology, specifically a pure water PCW system for the semiconductor industry. Background Technology

[0002] The semiconductor industry refers to the industry that is based on semiconductor materials and engages in the design, manufacturing, packaging, testing of semiconductor devices and integrated circuits, as well as the supply of related equipment and materials. In the semiconductor industry production process, in order to avoid the temperature of process equipment being too high, process cooling water systems (PCW systems) are needed to cool the equipment and ensure the normal operation of production.

[0003] In the prior art, patent publication number CN 216855822 U proposes a pure water PCW system specifically for the semiconductor industry. A filter screen is installed at the water inlet of the connecting pipe. When water in the water tank is pumped into the cooling system by a variable frequency pump, the filter screen can filter out flexible substances in the water to avoid damage to the production equipment. However, when performing subsequent maintenance on the filter components, it is necessary to stop the water supply, which means that the operation of the pure water PCW system needs to be stopped, making subsequent maintenance of the filter components of the pure water PCW system inconvenient. Utility Model Content

[0004] The technical problem this invention aims to solve is to overcome existing defects and provide a dedicated pure water PCW system for the semiconductor industry. By adjusting the forward and backward movement of the inner shell, two sets of filter components can be switched to connect to the pure water pipeline. Without stopping the pure water PCW system, the baffle can be disassembled, and the filter components in the plugged-in state can be removed for cleaning or replacement. This makes the subsequent maintenance of the filter components of the pure water PCW system more convenient and faster, improves the production efficiency of the semiconductor industry, and effectively solves the problems in the background technology.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a dedicated pure water PCW system for the semiconductor industry, comprising a pure water tank, semiconductor process equipment, a heat exchanger, and a PLC controller. The outlet of the pure water tank is connected to the inlet of the semiconductor process equipment via a first pipe, and the outlet of the semiconductor process equipment is connected to the hot inlet of the heat exchanger via a second pipe. A circulating pump is connected in series in the middle of the second pipe, and the hot outlet of the heat exchanger is connected to the inlet of the pure water tank via a third pipe. The input terminal of the PLC controller is electrically connected to an external power supply, and the input terminal of the circulating pump is electrically connected to the output terminal of the PLC controller.

[0006] It also includes a filtration mechanism; the filtration mechanism includes a filter housing, an adjusting inner housing, a collecting housing, an insertion hole and a filter screen. The filter housing is connected in series in the middle of the first pipe. The adjusting inner housing is longitudinally slidably connected inside the filter housing. The collecting housing is inserted into the inside of each adjusting inner housing, and the collecting housing is inserted into the inside of each collecting housing.

[0007] Furthermore, the filtration mechanism also includes disassembly holes and baffles. The disassembly holes are respectively located on the left and right sides of the filter housing. The baffles are all gate-shaped plates. The horizontal plates of the baffles are fixedly connected to the front and rear sides of the filter housing, and the vertical plates of the baffles are slidably connected to the guide rails on the left and right sides of the filter housing, providing space for disassembly of the collection shell.

[0008] Furthermore, guide posts are respectively provided between the front and rear inner walls of the filter housing, and guide tubes are longitudinally slidably connected to the outer arc surfaces of the guide posts. The guide tubes are all located between two support plates on the upper surface of the adjusting inner shell, providing guiding support for the movement of the adjusting inner shell.

[0009] Furthermore, a screw is rotatably connected between the front and rear inner walls of the filter housing, a motor is provided on the front surface of the filter housing, the output shaft of the motor is fixedly connected to the rod body of the screw, an internal threaded tube is threadedly connected to the outer arc surface of the screw, the internal threaded tube is located between two support plates on the upper surface of the adjusting inner shell, and the input end of the motor is electrically connected to the output end of the PLC controller to provide power for the movement of the adjusting inner shell.

[0010] Furthermore, the adjusting inner shell is provided with mounting holes at both the front and rear ends, and the left and right ends of the mounting holes are open structures. The inner walls of the mounting holes are provided with sealing gaskets, and the collecting shells are respectively inserted into the interior of the mounting holes to seal the adjusting inner shell and the collecting shell.

[0011] Furthermore, the right side of the collection shell is open, and the left side of the collection shell near the pipe is also open. The insertion holes are all tilted from left to right towards the pipe, so that the filter screen is installed at an angle, which facilitates the collection of filtered impurities.

[0012] Furthermore, it also includes a chiller, the inlet of which is connected to the cold outlet of the heat exchanger via a four-way pipe, and the outlet of which is connected to the cold inlet of the heat exchanger via a five-way pipe. The input of the chiller is electrically connected to the output of the PLC controller to provide chilled water for cooling.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] By adjusting the forward and backward movement of the inner shell, the two sets of filter components can be switched to connect to the pure water pipeline. Without stopping the pure water PCW system, the baffle can be removed, and the filter components in the plugged-in state can be taken off for cleaning or replacement. This makes the later maintenance of the filter components of the pure water PCW system more convenient and quick, and improves the production efficiency of the semiconductor industry. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a schematic diagram of the filter mechanism of this utility model;

[0017] Figure 3 This is an exploded structural diagram of the filtration mechanism of this utility model;

[0018] Figure 4 This is a structural diagram of the filter screen of this utility model in its disassembled state;

[0019] Figure 5 This is a top view of the filtration mechanism of this utility model.

[0020] In the diagram: 1 Pure water tank, 2 Semiconductor process equipment, 3 Heat exchanger, 4 Chiller, 5 Circulating pump, 6 PLC controller, 7 Filtration mechanism, 71 Filter housing, 72 Adjustment inner shell, 73 Collection shell, 74 Insertion hole, 75 Filter screen, 76 Disassembly hole, 77 Baffle, 8 Guide column, 9 Guide tube, 10 Screw, 11 Motor, 12 Internal threaded tube, 13 Sealing gasket. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figure 1-5 This embodiment provides a technical solution: a semiconductor industry-specific pure water PCW system, including a pure water tank 1, a semiconductor process equipment 2, a heat exchanger 3, and a PLC controller 6. The outlet of the pure water tank 1 is connected to the inlet of the semiconductor process equipment 2 through a pipe 1. The outlet of the semiconductor process equipment 2 is connected to the hot inlet of the heat exchanger 3 through a pipe 2. A circulation pump 5 is connected in series in the middle of the pipe 2. The hot outlet of the heat exchanger 3 is connected to the inlet of the pure water tank 1 through a pipe 3. The input terminal of the PLC controller 6 is electrically connected to an external power supply. The PLC controller 6 is located on the front side of the semiconductor process equipment 2 and is used to control the start and stop of the pure water PCW system. The input terminal of the circulation pump 5 is electrically connected to the output terminal of the PLC controller 6.

[0023] It also includes a chiller 4, whose inlet is connected to the cold outlet of the heat exchanger 3 via a pipe four, and whose outlet is connected to the cold inlet of the heat exchanger 3 via a pipe five. The input of the chiller 4 is electrically connected to the output of the PLC controller 6.

[0024] The system also includes a filtration mechanism 7. The filtration mechanism 7 includes a filter housing 71, an adjusting inner housing 72, a collecting housing 73, an insertion hole 74, and a filter screen 75. The filter housing 71 is connected in series in the middle of the pipe. The adjusting inner housing 72 is longitudinally slidably connected inside the filter housing 71. The collecting housing 73 is inserted into the inside of the adjusting inner housing 72, and the filter screen 75 is inserted into the inside of each collecting housing 73.

[0025] The filter mechanism 7 also includes a disassembly hole 76 and a baffle 77. The disassembly holes 76 are respectively located on the left and right sides of the filter housing 71. The baffles 77 are all door-shaped plates. The horizontal plates of the baffles 77 are fixedly connected to the front and rear sides of the filter housing 71, and the vertical plates of the baffles 77 are respectively slidably connected to the guide rails on the left and right sides of the filter housing 71. The disassembly hole 76 allows the collection shell 73 to be easily pulled out from the mounting hole of the adjusting inner shell 72. The baffle 77 seals the disassembly hole 76.

[0026] Among them, guide posts 8 are respectively provided between the front and rear inner walls of the filter housing 71. The outer arc surface of the guide posts 8 is longitudinally slidably connected to guide tubes 9. The guide tubes 9 are all located between two support plates on the upper surface of the adjusting inner housing 72. The longitudinal sliding of the guide tubes 9 and the guide posts 8 provides guiding support for the movement of the adjusting inner housing 72.

[0027] A screw 10 is rotatably connected between the front and rear inner walls of the filter housing 71. A motor 11 is provided on the front surface of the filter housing 71. The output shaft of the motor 11 is fixedly connected to the rod body of the screw 10. An internal threaded tube 12 is threadedly connected to the outer arc surface of the screw 10. The internal threaded tube 12 is located between two support plates on the upper surface of the adjusting inner housing 72. The input end of the motor 11 is electrically connected to the output end of the PLC controller 6. When the motor 11 is started, the output shaft of the motor 11 drives the screw 10 to rotate. Through the threaded connection between the screw 10 and the internal threaded tube 12, power is provided for the movement of the adjusting inner housing 72.

[0028] The filter housing 71 is equipped with limit switches on its front and rear inner walls. When the support plate of the inner housing 72 contacts the detection end of the limit switch, the limit switch sends a signal to the PLC controller 6. The PLC controller 6 controls the motor 11 to stop. At this time, the position adjustment of the collection housing 73 is completed, ensuring the accuracy of the position adjustment of the collection housing 73.

[0029] The inner shell 72 is equipped with a bellows between the front and rear inner walls of the filter shell 71 and the support plate of the inner shell 72. The bellows are movably sleeved on the outer arc surface of the screw 10. During the movement of the inner shell 72, the bellows extend and retract, always providing protection for the screw 10.

[0030] The inner shell 72 is equipped with mounting holes at both the front and rear ends. Both ends of the mounting holes are open. The inner walls of the mounting holes are equipped with sealing gaskets 13 to seal the inner shell 72 and the collection shell 73, ensuring that pure water flows accurately through the inside of the collection shell 73.

[0031] The collection shells 73 are inserted into the installation holes. The right side of the collection shells 73 is open, and the left side of the collection shells 73 near the pipe is also open. The holes 74 are all tilted from left to right towards the pipe, so that the filter screen 75 is tilted. After the filter screen 75 is installed, a space with an open right end is formed between the side of the filter screen 75 away from the pipe and the inner wall of the collection shell 73. The filtered impurities will be concentrated in this space under the flushing of pure water.

[0032] The working principle of this utility model is as follows:

[0033] In the semiconductor industry production process, when it is necessary to cool the semiconductor process equipment 2, the circulating pump 5 is started by the PLC controller 6 to make the pure water in the pure water tank 1 circulate between the pure water tank 1, the semiconductor process equipment 2 and the heat exchanger 3.

[0034] During the circulation process, the chiller 4 is started, and the chilled water generated by the chiller 4 enters the chilled water chamber of the heat exchanger 3. The pure water absorbs heat inside the semiconductor process equipment 2. After absorbing heat, the pure water exchanges heat with the chilled water generated by the chiller 4 in the heat exchanger 3 to cool the pure water. The cooled pure water returns to the pure water tank 1 for storage, thus achieving continuous cooling of the semiconductor process equipment 2.

[0035] During the flow of pure water, under the series connection of filter housings 71, the pure water enters the interior of the collection housing 73 through the opening on the right side of the collection housing 73 and flows out through the opening on the left side of the collection housing 73 due to the influence of the left and right sides of the regulating inner housing 72 contacting the inner wall of the filter housing 71. The pure water is filtered by the filter screen 75 to prevent impurities from entering the cooling channel.

[0036] When it is necessary to clean impurities or replace the filter 75, there is no need to stop the pure water PCW system. Simply start the motor 11. The output shaft of the motor 11 drives the screw 10 to rotate. Through the threaded connection between the screw 10 and the internal threaded tube 12, and under the guidance and support of the guide post 8, the front and rear positions of the adjusting inner shell 72 are adjusted to switch the collection shell 73 that the pure water passes through during the flow. After the switching is completed, simply turn the screw to remove the baffle 77. Then, the collection shell 73 can be pulled out from the mounting hole of the adjusting inner shell 72 through the disassembly hole 76 to clean the impurities inside. Alternatively, the filter 75 can be pulled out from the insertion hole 74 to clean the impurities on the surface of the filter 75 or to replace the filter 75.

[0037] After cleaning, reinsert the filter screen 75 into the socket 74, and then reinsert the collection shell 73 into the mounting socket of the adjusting inner shell 72 through the disassembly hole 76. Under the limiting position of the adjusting inner shell 72, the filter screen 75 is prevented from leaving the socket 74. Then, the baffle 77 is connected to the filter housing 71. With the cooperation of the filter housing 71 and the baffle 77, the collection shell 73 is prevented from leaving the mounting socket of the adjusting inner shell 72, which facilitates the later maintenance of the filter components of the pure water PCW system.

[0038] It is worth noting that the PLC controller 6 disclosed in the above embodiments can be an NX7 model PLC controller. The circulating pump 5, motor 11 and chiller 4 can be freely configured according to the actual application scenario. The circulating pump 5 can be a 100R-37A model circulating pump, the motor 11 can be a 3M57-42A model stepper motor, and the chiller 4 can be an HC-1000B-1HP model industrial chiller. The PLC controller 6 controls the operation of the circulating pump 5, motor 11 and chiller 4 using methods commonly used in the prior art.

[0039] The above are merely embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A dedicated pure water PCW system for the semiconductor industry, comprising a pure water tank (1), semiconductor process equipment (2), a heat exchanger (3), and a PLC controller (6), wherein the outlet of the pure water tank (1) is connected to the inlet of the semiconductor process equipment (2) via a first pipe, the outlet of the semiconductor process equipment (2) is connected to the hot inlet of the heat exchanger (3) via a second pipe, a circulating pump (5) is connected in series in the middle of the second pipe, the hot outlet of the heat exchanger (3) is connected to the inlet of the pure water tank (1) via a third pipe, the input terminal of the PLC controller (6) is electrically connected to an external power supply, and the input terminal of the circulating pump (5) is electrically connected to the output terminal of the PLC controller (6); characterized in that: It also includes a filtration mechanism (7); The filtration mechanism (7) includes a filter housing (71), an adjusting inner shell (72), a collection shell (73), an insertion hole (74), and a filter screen (75). The filter housing (71) is connected in series in the middle of the first pipe. The adjusting inner shell (72) is longitudinally slidably connected inside the filter housing (71). The collection shell (73) is inserted into the inside of the adjusting inner shell (72), and the filter screen (75) is inserted into the inside of each collection shell (73).

2. The semiconductor industry-specific pure water PCW system according to claim 1, characterized in that: The filter mechanism (7) also includes a disassembly hole (76) and a baffle (77). The disassembly hole (76) is respectively located on the left and right sides of the filter housing (71). The baffles (77) are all door-shaped plates. The horizontal plates of the baffles (77) are respectively fixedly connected to the front and rear sides of the filter housing (71). The vertical plates of the baffles (77) are respectively slidably connected to the guide rails on the left and right sides of the filter housing (71).

3. The semiconductor industry-specific pure water PCW system according to claim 1, characterized in that: The filter housing (71) is provided with guide posts (8) between the front and rear inner walls respectively. The outer arc surface of the guide posts (8) is longitudinally slidably connected with guide tubes (9). The guide tubes (9) are all located between two support plates on the upper surface of the adjusting inner shell (72).

4. A semiconductor industry-specific pure water PCW system according to claim 3, characterized in that: A screw (10) is rotatably connected between the front and rear inner walls of the filter housing (71). A motor (11) is provided on the front surface of the filter housing (71). The output shaft of the motor (11) is fixedly connected to the rod body of the screw (10). An internal threaded tube (12) is threadedly connected to the outer arc surface of the screw (10). The internal threaded tube (12) is located between two support plates on the upper surface of the adjusting inner shell (72). The input end of the motor (11) is electrically connected to the output end of the PLC controller (6).

5. A semiconductor industry-specific pure water PCW system according to claim 1, characterized in that: The adjusting inner shell (72) is provided with mounting holes at both the front and rear ends. Both the left and right ends of the mounting holes are open structures. The inner walls of the mounting holes are provided with sealing gaskets (13). The collecting shells (73) are respectively inserted into the interior of the mounting holes.

6. A semiconductor industry-specific pure water PCW system according to claim 1, characterized in that: The right side of the collection shell (73) is open, and the left side of the collection shell (73) near the pipe is also open. The insertion holes (74) gradually tilt from left to right towards the pipe.

7. A semiconductor industry-specific pure water PCW system according to claim 1, characterized in that: It also includes a chiller (4), the inlet of the chiller (4) is connected to the cold outlet of the heat exchanger (3) through a four-way pipe, the outlet of the chiller (4) is connected to the cold inlet of the heat exchanger (3) through a five-way pipe, and the input end of the chiller (4) is electrically connected to the output end of the PLC controller (6).

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