A wet scrubber

Abstract

The utility model discloses a kind of wet scrubbers, including the shell with air chamber and with air chamber upper end is equipped with air inlet and exhaust port, install the spray pipe in air chamber, the first nozzle connected with several spray pipes, the discharge cylinder of being equipped in air chamber lower end, the machine case of being installed in shell lower end and inside with discharge cylinder intercommunication, the sedimentation tank of being equipped in machine case and with discharge cylinder position corresponding, drain tank and circulating tank respectively located in the both sides of sedimentation tank and the universal spraying assembly equipped in machine case, universal spraying assembly includes universal bamboo joint pipe and the second nozzle connected with universal bamboo joint pipe, universal bamboo joint pipe can be driven by angle adjustment second nozzle directional alignment powder accumulation area in sedimentation tank, second nozzle can spray water flow to powder accumulation area, flush the powder accumulated in sedimentation tank to drain tank and discharge, universal spraying assembly flexibly adjusts angle, directional flush powder accumulation area in sedimentation tank, make powder discharge, solve powder accumulation and jam problem.

Description

Technical Field

[0001] This utility model belongs to the field of dust removal technology, specifically relating to a wet scrubber. Background Technology

[0002] In modern semiconductor manufacturing, the production process of thick epitaxial IGBTs (Insulated Gate Bipolar Transistors) or FRDs (Fast Recovery Diodes) plays a crucial role. During this process, unreacted trichlorosilane forms exhaust gases. These gases are complex in composition, and direct emission would cause severe environmental pollution and waste of raw materials. To address this exhaust gas problem, wet scrubbers are commonly used. By utilizing water to fully contact the exhaust gases, harmful components are dissolved or transformed. This process generates a large amount of silica powder.

[0003] In traditional wet scrubbers, silica powder accumulates in the sedimentation tank opposite the gas chamber outlet, making it impossible to remove the powder from the equipment in a timely and effective manner. This forces factories to perform frequent cleaning and maintenance, each session lasting approximately four hours. This not only results in significant losses of uptime but also reduces production efficiency, thereby increasing production costs. Utility Model Content

[0004] In view of the technical problems existing in the prior art, this utility model provides a wet scrubber.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A wet scrubber includes a housing with an air chamber and an air inlet and an air outlet communicating with the air chamber at its upper end; a spray pipe installed in the air chamber; a plurality of first nozzles connected to the spray pipe; a discharge cylinder located at the lower end of the air chamber; a casing installed at the lower end of the housing and communicating with the discharge cylinder internally; a sedimentation tank located in the casing and corresponding to the position of the discharge cylinder; a drainage tank and a circulation tank located on both sides of the sedimentation tank; and a universal spray assembly located in the casing. The liquid in the circulation tank is connected to the spray pipe via a water pump. The universal spray assembly includes a universal bamboo tube and a second nozzle connected to the universal bamboo tube. The universal bamboo tube can be angled to direct the second nozzle toward the powder accumulation area in the sedimentation tank. The second nozzle can spray water toward the powder accumulation area, flushing the powder accumulated in the sedimentation tank into the drainage tank for discharge.

[0007] Furthermore, the universal bamboo joint tube includes several single universal bamboo joint tubes and several branched universal bamboo joint tubes. The single universal bamboo joint tubes can be connected to each other, the single universal bamboo joint tubes can be connected to the branched universal bamboo joint tubes, and the branched universal bamboo joint tubes can be connected to each other via connectors.

[0008] Furthermore, the connector is at least one of a three-way valve, a two-way valve, a quick coupling, or a threaded coupling.

[0009] Furthermore, the wet scrubber also includes a support frame assembly for supporting the omnidirectional spray assembly. The support frame assembly includes a plurality of first support frames disposed on the side wall of the chassis, and a second support frame detachably connected to the discharge cylinder.

[0010] Furthermore, the first support frame includes an L-shaped bracket connected to the side wall of the chassis and a side support plate detachably connected to the L-shaped bracket. The L-shaped bracket includes a vertical part connected to the chassis and a horizontal part perpendicularly connected to the vertical part. The horizontal part has a plurality of adjustment holes spaced apart along the length of the horizontal part. A screw connection part is fixedly provided on the inner side of the side support plate, and a screw connection hole is provided on the screw connection part. The adjustment hole is screwed to the screw connection hole by bolts.

[0011] Furthermore, the second support frame includes an inner ring screwed to the outer wall of the discharge cylinder, an outer ring concentrically arranged with the inner ring, a plurality of connecting rods connected between the outer ring and the inner ring and arranged at intervals, a plurality of vertical rods connected to the lower end of the outer ring and distributed at intervals, and a support ring concentrically distributed with the outer ring and connected to the lower end of all the vertical rods. A support area is formed between every two adjacent vertical rods, and the support area allows the universal bamboo tube and the second nozzle to enter / exit.

[0012] Furthermore, the chassis has an opening that communicates with the interior of the chassis, and a cover is hinged to the opening, with a handle fixed to the upper end of the cover.

[0013] Furthermore, the chassis is provided with a first partition and a second partition spaced apart. The first partition and the second partition can divide the space inside the chassis into three parts to form an independent sedimentation tank, a drainage tank and a circulation tank. The first partition has a notch that can connect the sedimentation tank and the circulation tank. The height of the second partition is lower than the height of the first partition.

[0014] Furthermore, the upper end of the first separator is provided with several spaced connection holes, through which several limiting blocks can be detachably connected. A limiting area is formed between every two adjacent limiting blocks, and the limiting area can be used to limit the position of the universal bamboo tube or the second nozzle.

[0015] Furthermore, each corner of the chassis is bolted with a support foot, which is used to adjust the height of the chassis.

[0016] In summary, the beneficial effects of this utility model are as follows: 1. The automatic powder cleaning function of the universal spray assembly replaces frequent manual cleaning, saving maintenance time and shortening the maintenance cycle. Furthermore, the single / branched universal bamboo-joint pipes in the universal spray assembly, along with the second nozzle, can flexibly adjust their angles to precisely target the powder accumulation area in the sedimentation tank (especially the core accumulation area below the discharge cylinder), concentrating the water flow impact force to disperse the agglomerated powder. The flushed powder-containing wastewater preferentially overflows into the drainage trough for discharge, preventing powder residue and blockage within the equipment. 2. The branched universal bamboo-joint pipes (such as Y-type) with connectors can achieve multi-path diversion, and the single bamboo-joint pipes can be connected in series for extension. Combined with the lateral adjustment function of the first support frame, it can adapt to the powder cleaning needs of different areas of the sedimentation tank, covering dead corners that are difficult to reach with traditional fixed pipelines. 3. The single-section universal bamboo-joint pipes and the branched universal bamboo-joint pipes (such as Y-type) can be freely combined through connectors such as three-way valves, two-way valves, quick couplings, or threaded couplings, allowing for flexible adjustment of the pipeline layout according to the shape of the sedimentation tank and the distribution characteristics of the powder accumulation area. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of a wet scrubber provided by this utility model.

[0018] Figure 2 This is a vertical sectional view of a wet scrubber.

[0019] Figure 3 This is a schematic diagram of the internal structure of the chassis in this utility model.

[0020] Figure 4 This is a three-dimensional structural diagram of the second support frame in this utility model.

[0021] In the diagram, 100-casing, 110-air chamber, 111-opening part, 112-discharge cylinder, 120-air inlet, 130-exhaust port, 200-spray pipe, 210-first nozzle, 300-chassis, 310-first partition, 311-connection hole, 312-limiting block, 320-second partition, 330-sedimentation tank, 340-drainage tank, 350-circulation tank, 360-port, 370-cover, 371-handle, 380-... - Gravity drain outlet, 390- Support foot, 391- Long strip hole, 400- Universal spray assembly, 410- Single section universal bamboo joint tube, 420- Forked universal bamboo joint tube, 430- Second nozzle, 500- First support frame, 510- L-shaped bracket, 511- Vertical part, 512- Horizontal part, 520- Side support plate, 600- Second support frame, 610- Inner ring, 620- Outer ring, 630- Connecting rod, 640- Vertical rod, 650- Support ring. Detailed Implementation

[0022] The present invention will be further illustrated below with reference to specific figures.

[0023] Please see Figure 1 and Figure 2This utility model provides a wet scrubber, including a housing 100 having an air chamber 110 and an air inlet 120 and an exhaust outlet 130 communicating with the air chamber 110 at the upper end, a spray pipe 200 installed in the air chamber 110, a plurality of first nozzles 210 connected to the spray pipe 200, a discharge cylinder 112 located at the lower end of the air chamber 110, a casing 300 installed at the lower end of the housing 100 and communicating with the discharge cylinder 112 inside, a sedimentation tank 330 located in the casing 300 and corresponding to the position of the discharge cylinder 112, a drainage tank 340 and a circulation tank 350 located on both sides of the sedimentation tank 330 respectively, and a universal spray assembly 400 located in the casing 300. The upper end of the discharge cylinder 112 is connected to the housing 100 through an open piece 111, and the liquid in the circulation tank 350 is connected to the spray pipe 200 through a water pump. The universal spray assembly 400 includes a universal bamboo-joint tube that can be bent at any angle and a second nozzle 430 connected to the universal bamboo-joint tube. The universal bamboo-joint tube can be angled to direct the second nozzle 430 towards the powder accumulation area within the sedimentation tank 330. The second nozzle 430 sprays water into the powder accumulation area, flushing the accumulated powder into the drainage tank 340 for discharge. Exhaust gas enters the gas chamber 110 through the air inlet 120, and water is sprayed through the first nozzle 210 to contact the exhaust gas. Powder and liquid flow through the open part 111 to the discharge cylinder 112. The powder accumulates in the sedimentation tank 330. The newly added universal spray assembly 400 (universal bamboo-joint tube and second nozzle 430) allows for flexible angle adjustment, directional flushing of the powder accumulation area within the sedimentation tank 330, and timely discharge of the powder into the drainage tank 340, thus solving the problems of powder accumulation and clogging. The powder does not require frequent manual cleaning, significantly shortening maintenance time, reducing equipment downtime losses, and indirectly reducing production cost increases caused by downtime.

[0024] The chassis 300 has an opening 360 that communicates with the interior of the chassis 300, and a cover 370 is hinged to the opening 360. A handle 371 is fixed to the upper end of the cover 370. The combination of the opening 360 and the cover 370 provides an openable access window for the internal structure of the chassis 300. By opening the cover 370, operators can directly access the internal components of the chassis 300 without disassembling the entire chassis 300, facilitating equipment maintenance.

[0025] Please see Figure 3The chassis 300 is equipped with a first partition 310 and a second partition 320 spaced apart. The first partition 310 and the second partition 320 divide the space inside the chassis 300 into three independent sections: a sedimentation tank 330, a drainage tank 340, and a circulation tank 350. The drainage tank 340 drains water outward through a gravity drain outlet 380 on the chassis 300. The chassis 300 also has a water inlet for supplying water to the universal spray assembly 400. The first partition 310 has a notch that connects the sedimentation tank 330 and the circulation tank 350, allowing the clear liquid in the sedimentation tank 330 to flow into the circulation tank 350 for recycling. The second partition 320 is lower than the first partition 310, and water overflows into the drainage tank 340. The sedimentation tank 330 focuses on the static sedimentation of wastewater containing powder (receiving the gas-liquid mixture flowing down from the discharge pipe), providing an independent space for solid-liquid separation and preventing unsettled wastewater containing powder from directly entering other areas. The circulation tank 350 only receives the clear liquid after sedimentation, serving as the water source for the spray system (first nozzle 210, universal spray assembly 400), ensuring the cleanliness of the circulating water and reducing nozzle clogging caused by impurities. The drainage tank 340 specifically collects wastewater exceeding standards (containing more powder or impurities) and discharges it through the gravity drain 380, avoiding mixing and contamination with the circulating water. As the liquid level in the sedimentation tank 330 gradually rises, the circulation tank 350 is prioritized for water intake: clear liquid preferentially flows into the circulation tank 350 through the notch (ensuring sufficient circulating water supply). When the liquid level exceeds the height of the second separator 320, water containing more impurities automatically overflows into the drainage tank 340, and the powder from the sedimentation tank 330 will preferentially overflow into the drainage tank 340 with the water flow and be discharged, preventing it from entering the circulation tank 350 and contaminating the water source.

[0026] The upper end of the first separator 310 is provided with several spaced-apart connecting holes 311, through which several limiting blocks 312 can be detachably connected. A limiting area is formed between every two adjacent limiting blocks 312, which can be used to limit the position of the universal bamboo tube or the second nozzle 430. The first separator 310 is far away from the drainage tank 340, and can specifically limit the universal bamboo tube or the second nozzle 430 within the limiting area, aiming at the powder accumulation area in the sedimentation tank 330 and spraying the powder towards the drainage tank 340. The function of the limiting area to limit the position of the universal spray assembly 400 is to prevent the universal bamboo tube angle from shifting due to water flow impact, equipment vibration or long-term use. If the second nozzle 430 deviates from the accumulation area, it may disperse the powder to a non-target area of ​​the sedimentation tank 330 (such as the side near the circulation tank 350). Directional constraint concentrates the flushing water flow on the powder accumulation area, making the impact force more focused. It can quickly disperse agglomerated or deeply accumulated powder (such as silica powder). Combined with the low liquid level design of the second separator 320, the flushed powder can be quickly overflowed into the drainage tank 340 with the water flow, greatly improving the powder cleaning efficiency.

[0027] Each corner of the chassis 300 is bolted with a support foot 390, which is used to adjust the height of the chassis 300. The support foot 390 has several pairs of elongated holes 391 distributed along its height. In scenarios where the workshop floor is uneven (such as with slopes or bumps), the height of the four corners of the chassis 300 can be finely adjusted by individually adjusting the position (up and down) of the bolts on each support foot 390 within the elongated holes 391, ensuring that the chassis 300 is placed horizontally.

[0028] The universal bamboo joint pipe includes several single universal bamboo joint pipes 410 and several branched universal bamboo joint pipes 420. Each single universal bamboo joint pipe 410 is a single, independent universal bamboo joint pipe, and each branched universal bamboo joint pipe 420 is a Y-shaped branched universal bamboo joint pipe 420. Single universal bamboo joint pipes 410, branched universal bamboo joint pipes 420, and other branched universal bamboo joint pipes 420 can be connected via connectors. The connectors are at least one of a three-way valve, a two-way valve, a quick coupling, or a threaded coupling. The single-section universal bamboo joint tube 410 can be extended in series through a two-way valve or connector to adapt to the different depths or widths of the powder cleaning range in the sedimentation tank 330; the branched universal bamboo joint tube 420 can be transformed from one channel to multiple channels through a three-way valve. Combined with the extension of the single-section tube, it can simultaneously cover multiple dispersed powder accumulation areas (such as corners, below the discharge cylinder, etc.) in the sedimentation tank 330. There may be structural obstacles inside the machine housing 300 due to partitions, pipes, etc. By combining different bamboo joint tubes and connectors, obstacles can be flexibly bypassed to ensure that the second nozzle 430 accurately reaches the target flushing point, solving the problem of difficult coverage of dead corners in fixed pipelines.

[0029] Please continue reading. Figure 2 The wet scrubber also includes a support frame assembly for supporting the universal spray assembly 400. The support frame assembly includes several first support frames 500 mounted on the side wall of the housing 300, and a second support frame 600 detachably connected to the discharge tube. The first support frames 500 provide lateral support from the side of the housing 300, transferring part of the weight of the universal spray assembly 400 to the frame of the housing 300, preventing pipe sagging or displacement due to excessively long universal tubes, water flow impact, or equipment vibration. When the universal tube assembly is long (e.g., multiple single-section tubes connected in series) or has many branches (e.g., multiple nozzles operating simultaneously), the side support effectively counteracts the water flow reaction force, preventing the overall structure from swaying. The second support frame 600 is connected to the discharge cylinder 112, which is directly above the sedimentation tank 330 (receiving wastewater from the gas chamber 110). This positional characteristic allows the supported universal spray assembly 400 to be aligned with the core accumulation area of ​​the sedimentation tank 330 (the area below the discharge cylinder 112 is where powder is most easily accumulated), ensuring the accuracy of the flushing direction from the installation source.

[0030] The first support frame 500 includes an L-shaped bracket 510 connected to the side wall of the chassis 300 and a side support plate 520 screwed to the L-shaped bracket 510. The L-shaped bracket 510 includes a vertical part 511 connected to the chassis 300 and a horizontal part 512 vertically connected to the vertical part 511. The horizontal part 512 has a plurality of adjustment holes spaced apart along the length of the horizontal part 512. A screw connection part is fixedly provided on the inner side of the side support plate 520, and a screw connection hole is provided on the screw connection part. The adjustment hole is screwed to the screw connection hole by bolts. Several adjustment holes distributed along the length of the horizontal section 512 provide space for the lateral position adjustment of the side support plate 520. When the pipeline layout of the universal spray assembly 400 changes (such as adding or removing single bamboo tubes or adjusting the bifurcation angle), the lateral fixing point of the side support plate 520 can be changed by selecting different adjustment holes to connect with the screw holes of the side support plate 520, so as to ensure that it always accurately supports the key parts of the bamboo tube (such as the joint and the middle stress point).

[0031] Please see Figure 4 The second support frame 600 includes an inner ring 610 screwed to the outer wall of the discharge cylinder 112, an outer ring 620 concentrically arranged with the inner ring 610, a plurality of connecting rods 630 spaced between the outer ring 620 and the inner ring 610, a plurality of vertical rods 640 spaced between the lower end of the outer ring 620, and a support ring 650 concentrically distributed with the outer ring 620 and connected to the lower end of all the vertical rods 640. A support area is formed between every two adjacent vertical rods 640, and the support area allows the universal bamboo tube and the second nozzle 430 to enter / exit. The second support frame 600 provides radial support in the powder concentration area, and the second nozzle 430 can be stably aligned for rinsing. Multiple support areas can be flexibly selected, and the universal bamboo tube can be bent at any angle, making it very convenient to concentrate on rinsing key areas.

[0032] This wet scrubber features: 1. An automatic powder-removing function in the universal spray assembly 400, replacing frequent manual cleaning, saving maintenance time and shortening maintenance cycles. Furthermore, the single / branched universal bamboo-joint tubes 420 within the universal spray assembly 400, along with the second nozzle 430, can flexibly adjust their angles to precisely target the powder accumulation area within the sedimentation tank 330 (especially the core accumulation area below the discharge cylinder). The concentrated water flow impact force disperses the clumps of powder, and the flushed powder-containing wastewater preferentially overflows into the drain trough 340 for discharge, preventing powder residue and blockage within the equipment. 2. The branched universal bamboo-joint tubes 420 (e.g., Y-type) with connectors can achieve multi-channel flow. Single bamboo-joint tubes can be connected in series for extension. Combined with the lateral adjustment function of the first support frame 500, it can adapt to the powder-removing needs of different areas within the sedimentation tank 330, covering dead zones that are difficult to reach with traditional fixed pipelines. 3. The single-section universal bamboo joint pipe 410 and the branched universal bamboo joint pipe 420 (such as Y type) can be freely combined through connecting parts such as three-way valve, two-way valve, quick connector or threaded connector, and the pipeline layout can be flexibly adjusted according to the shape of the sedimentation tank 330 and the distribution characteristics of the powder accumulation area.

[0033] The above are merely embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structure made using the contents of this utility model specification and drawings, whether directly or indirectly applied to other related technical fields, shall also be within the patent protection scope of this utility model.

Claims

1. A wet scrubber, characterized in that: The device includes a housing with an air chamber and an air inlet and an exhaust outlet communicating with the air chamber at its upper end; a spray pipe installed inside the air chamber; a plurality of first nozzles connected to the spray pipe; an exhaust cylinder located at the lower end of the air chamber; a chassis installed at the lower end of the housing and communicating with the exhaust cylinder internally; a sedimentation tank located inside the chassis and corresponding to the position of the exhaust cylinder; a drainage tank and a circulation tank located on both sides of the sedimentation tank; and a universal spray assembly located inside the chassis. The liquid in the circulation tank is connected to the spray pipe via a water pump. The universal spray assembly includes a universal bamboo tube and a second nozzle connected to the universal bamboo tube. The universal bamboo tube can be angled to direct the second nozzle toward the powder accumulation area in the sedimentation tank. The second nozzle can spray water toward the powder accumulation area, flushing the powder accumulated in the sedimentation tank into the drainage tank for discharge.

2. The wet scrubber according to claim 1, characterized in that: The universal bamboo joint tube includes several single universal bamboo joint tubes and several branched universal bamboo joint tubes. The single universal bamboo joint tubes can be connected to each other, the single universal bamboo joint tubes can be connected to the branched universal bamboo joint tubes, and the branched universal bamboo joint tubes can be connected to each other via connectors.

3. The wet scrubber according to claim 2, characterized in that: The connector is at least one of a three-way valve, a two-way valve, a quick coupling, or a threaded coupling.

4. The wet scrubber according to claim 1, characterized in that: The wet scrubber also includes a support frame assembly for supporting the universal spray assembly. The support frame assembly includes a plurality of first support frames disposed on the side wall of the chassis, and a second support frame detachably connected to the discharge cylinder.

5. The wet scrubber according to claim 4, characterized in that: The first support frame includes an L-shaped bracket connected to the side wall of the chassis and a side support plate detachably connected to the L-shaped bracket. The L-shaped bracket includes a vertical part connected to the chassis and a horizontal part perpendicularly connected to the vertical part. The horizontal part has a plurality of adjustment holes spaced apart along the length of the horizontal part. A screw connection part is fixedly provided on the inner side of the side support plate, and a screw connection hole is provided on the screw connection part. The adjustment hole is screwed to the screw connection hole by bolts.

6. The wet scrubber according to claim 4, characterized in that: The second support frame includes an inner ring screwed to the outer wall of the discharge cylinder, an outer ring concentrically arranged with the inner ring, a plurality of connecting rods connected between the outer ring and the inner ring and arranged at intervals, a plurality of vertical rods connected to the lower end of the outer ring and distributed at intervals, and a support ring concentrically distributed with the outer ring and connected to the lower end of all the vertical rods. A support area is formed between every two adjacent vertical rods, and the support area allows the universal bamboo tube and the second nozzle to enter / exit.

7. The wet scrubber according to any one of claims 1-6, characterized in that: The chassis has an opening that allows communication with the interior of the chassis, and a cover is hinged to the opening. A handle is fixed to the upper end of the cover.

8. The wet scrubber according to claim 7, characterized in that: The chassis is provided with a first partition and a second partition spaced apart. The first partition and the second partition can divide the space inside the chassis into three parts to form an independent sedimentation tank, a drainage tank and a circulation tank. The first partition has a notch that can connect the sedimentation tank and the circulation tank. The height of the second partition is lower than the height of the first partition.

9. The wet scrubber according to claim 8, characterized in that: The upper end of the first separator is provided with several spaced connection holes, through which several limiting blocks can be detachably connected. A limiting area is formed between every two adjacent limiting blocks, and the limiting area can be used to limit the position of the universal bamboo tube or the second nozzle.

10. The wet scrubber according to claim 8, characterized in that: Each corner of the chassis is bolted with a support foot, which is used to adjust the height of the chassis.

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