Cleaning mechanism for a sintering installation

Abstract

The utility model provides a kind of cleaning mechanism of sintering equipment, it is characterized by, including: dust absorption cavity, two dust absorption pipes, screw rod assembly, sealed pipeline and circulation sealing fan, wherein dust absorption cavity is equipped with a steel wire brush shaft, a blowing rod and the brushless motor for driving steel wire brush shaft rotation on it;Dust absorption cavity is equipped with two dust absorption pipes of interval parallel arrangement towards the one end of screw rod assembly, two the dust absorption pipe is communicated with circulation sealing fan by sealed pipeline;Screw rod assembly is used to drive dust absorption cavity and dust absorption pipe whole front and back movement, so it can fully clean sintering equipment mould surface dust particle, and it can cover mould cavity entire and the face of chip contact, avoid chip pollution, surface dirty;Even cause chip to produce crack problem to occur.

Description

Technical Field

[0001] This utility model relates to the field of sintering equipment, and more specifically to a cleaning mechanism for sintering equipment. Background Technology

[0002] In the field of semiconductor chip packaging, the connection between the chip and the substrate is generally achieved through sintering bonding. This involves fixing the chip using micro / nano silver paste or silver film, or micro / nano metals, or silver / copper solder paste. During the sintering process, pressure is applied to the semiconductor chip at 150–300°C using a pressure head to promote the densification and aggregation of the micro / nano metal particles, while simultaneously causing the organic solvents in the micro / nano metal solder paste to evaporate, thus achieving mechanical and electrical connections between the chip and the substrate. The control and uniformity of heating and pressure during the sintering process are critical indicators. Minimizing porosity in the silver paste, improving sintering quality, eliminating solder voids, increasing soldering efficiency, and reducing losses are core aspects that the sintering process must focus on. To prevent damage to the chip from the pressing device, a coating is placed between the pressing device and the chip; a new coating is needed for each hot pressing. Furthermore, during the sintering process, semiconductor products exposed to oxygen at elevated temperatures will oxidize, affecting the quality and reliability of the semiconductor package. Nitrogen gas, used in the sealed transfer chamber to control oxygen content, can effectively replace or dilute the oxygen within the chamber, thus requiring that the oxygen content be maintained at a low level. Additionally, dust control is crucial during sintering. Dust particles may adhere to the sintering interface, causing chip contamination and surface dirt; larger particles may even lead to chip cracks. Summary of the Invention

[0003] The purpose of this invention is to provide a cleaning mechanism for sintering equipment, which can thoroughly clean dust particles on the surface of the mold of the sintering equipment and cover the entire surface of the mold cavity that is in contact with the chip, so as to avoid chip contamination, surface dirt, and even chip cracking.

[0004] According to one aspect of the present invention, a cleaning mechanism for a sintering equipment is provided, characterized in that it comprises: The vacuum chamber includes two vacuum hoses, a lead screw assembly, a sealing pipe, and a circulating sealing fan. The vacuum chamber has a wire brush shaft, an air blower, and a brushless motor for driving the wire brush shaft to rotate. The suction chamber is provided with two parallel suction pipes at a distance from each other at one end facing the lead screw assembly. The two suction pipes are connected to a circulating sealing fan via a sealed pipe. The lead screw assembly is used to drive the suction chamber and suction hose to move back and forth as a whole.

[0005] In a preferred embodiment, the lead screw assembly includes a base, a servo motor, a coupling, a lead screw, a lead screw connector, and two tube guide sleeves. The servo motor is connected to the lead screw via the coupling. The two tube guide sleeves are fixedly disposed on both sides of the base. Guide grooves are provided on both sides of the base. The lead screw connector is threadedly connected to the lead screw. Both sides of the lead screw connector pass through the guide grooves and are limited and guided by the guide grooves. The ends of the two suction pipes away from the suction chamber pass through the tube guide sleeves and are fixed in the corresponding holes of the lead screw connector and communicate with the sealed pipe.

[0006] In this way, the cleaning mechanism of this sintering equipment can loosen and collect dust or debris adhering to the surface of the sintering equipment mold by rotating the steel wire brush shaft. When positive air pressure is applied through the air blower, the dust or debris collected by the steel wire brush shaft or the dust on the surface of the sintering equipment mold is blown into the dust collection chamber. When the dust collection pipe is formed by negative air pressure by the circulating sealing fan, the dust blown by the air blower and the dust particles and debris loosened and collected by the steel wire brush shaft are absorbed. When the base is fixedly installed on the sintering equipment, the rotation of the servo motor drives the lead screw to rotate through the coupling. The rotation of the lead screw is converted into linear movement of the lead screw connector. The linear movement of the lead screw connector, through the guiding assistance of the pipe guide sleeve, causes the dust collection chamber and the dust collection pipe to move back and forth as a whole, so as to clean different parts of the sintering equipment mold. It can thoroughly clean the dust particles on the surface of the sintering equipment mold and cover the entire surface of the mold cavity that contacts the chip, avoiding chip contamination, surface dirt, and even chip cracking.

[0007] In a preferred embodiment, the servo motor is fixedly mounted at the end of the base, while two tube guide sleeves are fixedly mounted at the other end of the base away from the base on both sides.

[0008] In a preferred embodiment, the sealing pipe has a two-way channel, with one end connected to a circulating sealing fan and the other end splitting into two, which are respectively connected to two suction pipes.

[0009] In a preferred embodiment, two or more sensors are spaced apart on the base along the linear movement path of the suction chamber and suction pipe to detect the positioning of the suction chamber and suction pipe in the front and back directions.

[0010] In a preferred embodiment, the extension direction of the lead screw is consistent with the extension direction of the suction pipe.

[0011] In a preferred embodiment, the suction pipe is a rigid hollow straight pipe.

[0012] In a preferred embodiment, the sealing conduit is a flexible hollow tube. Attached Figure Description

[0013] Figure 1This is a three-dimensional structural diagram of the cleaning mechanism of a sintering device according to one embodiment.

[0014] Figure 2 for Figure 1 A side view diagram.

[0015] Figure 3 for Figure 1 The diagram below illustrates this. Detailed Implementation

[0016] The following description is intended to disclose the present invention so that those skilled in the art can implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art. The basic principles of the present invention defined in the following description can be applied to other embodiments, modifications, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present invention.

[0017] Those skilled in the art should understand that, in the disclosure of this utility model, the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "X-axis", "Y-axis", "Z-axis", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as a limitation of this utility model.

[0018] It is understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple, and the term "a" should not be understood as a limitation on the number.

[0019] refer to Figures 1 to 3 A cleaning mechanism for a sintering equipment is provided, comprising a dust suction chamber 1, a dust suction pipe 2, a lead screw assembly 3, a sealing pipe 4, and a circulating sealing fan 5.

[0020] The dust collection chamber 1 has a wire brush shaft 11 and a brushless motor 13 for driving the wire brush shaft 11 to rotate. The wire brush shaft 11 loosens and collects dust or debris adhering to the surface of the sintering equipment mold by rotating. The dust collection chamber 1 also has an air blower 12, which, when positive air pressure is applied, blows the dust or debris collected by the wire brush shaft 11 or the dust on the surface of the sintering equipment mold into the dust collection chamber 1.

[0021] Two parallel suction pipes 2 are provided at one end of the suction chamber 1 facing the lead screw assembly 3. One end of the suction pipe 2 is connected to the suction chamber 1. When the suction pipe 2 is subjected to negative air pressure by the circulating sealing fan 5, it absorbs the dust blown by the air blower 12 and the dust and debris loosened and collected by the wire brush shaft 11.

[0022] The lead screw assembly 3 includes a base 31, a servo motor 34, a coupling 33, a lead screw 32, a lead screw connector 35, and two tube guide sleeves 36. The extension direction of the lead screw 32 is consistent with the extension direction of the suction pipe 2. The servo motor 34 is fixedly installed at the end of the base 31. The servo motor 34 is connected to the lead screw 32 through the coupling 33, and the rotation of the servo motor 34 drives the lead screw 32 to rotate through the coupling 33. The two tube guide sleeves 36 are fixedly arranged on both sides of the base 31. The ends of the two suction pipes 2 away from the suction chamber pass through the tube guide sleeves 36 and are fixed in the corresponding holes of the lead screw connector 35, then connect to the sealing pipe 4, and finally connect to the circulating sealing fan 5 through the sealing pipe 4. The lead screw connector 35 is threadedly connected to the lead screw 32. The base 31 has guide grooves 311 on both sides. The lead screw connector 35 extends out of the guide grooves 311 on both sides and is limited by the guide grooves 311. After the lead screw connector 35 extends out of the guide grooves 311 on both sides, it is fixedly connected to a dust suction pipe 2. When the base 31 is fixedly installed in the sintering equipment, the servo motor 34 rotates and drives the lead screw 32 to rotate through the coupling 33. The rotation of the lead screw 32 is converted into the linear movement of the lead screw connector 35. The linear movement of the lead screw connector 35 is assisted by the guide sleeve 36 to guide the dust suction pipe 2, so that the dust suction chamber 1 and the dust suction pipe 2 move back and forth as a whole to clean different parts of the sintering equipment mold.

[0023] The sealing pipe 4 has a two-way channel. One end of the sealing pipe 4 is connected to the circulating sealing fan 5, and the other end is split into two, which are respectively connected to two suction pipes 2.

[0024] Preferably, two or more sensors 37 are spaced apart on the base 31 along the linear movement path of the suction chamber 1 and the suction pipe 2 to detect the overall forward and backward displacement of the suction chamber 1 and the suction pipe 2, that is, to identify whether the set forward position has been reached and whether the set backward position has been reached. The suction pipe 2 is a rigid hollow straight pipe. The sealing pipe 4 is a flexible hollow pipe.

[0025] Dust on the surface of the sintering equipment mold is blown into the dust collection chamber 1 by the air blower 12 and the wire brush shaft 11. Then, the dust is sucked out by the circulating sealing fan 5 through the dust collection pipe 2 and the sealed pipe 4, and finally discharged into the exhaust pipe connected to the circulating sealing fan 5. The lead screw assembly 3 drives the dust collection chamber 1 and the dust collection pipe 2 to move linearly to clean different parts of the sintering equipment mold, or to clean them reciprocally.

[0026] It will be understood by those skilled in the art that the above embodiments are merely examples, and features of different embodiments can be combined with each other to obtain implementation methods that are readily conceived of according to the content disclosed in this utility model but are not explicitly shown in the accompanying drawings.

[0027] Those skilled in the art should understand that the embodiments of the present invention described above and shown in the accompanying drawings are merely examples and do not limit the present invention. The purpose of the present invention has been fully and effectively achieved. The functions and structural principles of the present invention have been shown and explained in the embodiments. Without departing from the stated principles, the implementation of the present invention may have any variations or modifications.

Claims

1. A cleaning mechanism of a sintering apparatus, characterized by, include: The vacuum chamber includes two vacuum hoses, a lead screw assembly, a sealing pipe, and a circulating sealing fan. The vacuum chamber has a steel wire brush shaft, an air blower, and a brushless motor for driving the steel wire brush shaft to rotate. The suction chamber is provided with two parallel suction pipes at a distance from each other at one end facing the lead screw assembly. The two suction pipes are connected to a circulating sealing fan via a sealed pipe. The lead screw assembly is used to drive the suction chamber and suction hose to move back and forth as a whole.

2. The cleaning mechanism of a sintering apparatus according to claim 1, characterized by, The lead screw assembly includes a base, a servo motor, a coupling, a lead screw, a lead screw connector, and two tube guide sleeves. The servo motor is connected to the lead screw via the coupling. The two tube guide sleeves are fixedly mounted on both sides of the base. Guide grooves are provided on both sides of the base. The lead screw connector is threadedly connected to the lead screw. Both sides of the lead screw connector pass through the guide grooves and are limited and guided by the guide grooves. The ends of the two suction pipes away from the suction chamber pass through the tube guide sleeves and are fixed in the corresponding holes of the lead screw connector and connected to the sealed pipe.

3. The cleaning mechanism of a sintering apparatus according to claim 2, characterized by, The servo motor is fixedly installed at the end of the base, while the two tube guide sleeves are fixedly installed at the other end of the base, away from the base.

4. The cleaning mechanism of a sintering apparatus according to claim 2, wherein The sealed pipe has a two-way channel. One end of the sealed pipe is connected to a circulating sealing fan, and the other end is split into two, which are respectively connected to two suction pipes.

5. The cleaning mechanism of a sintering apparatus according to claim 2, wherein Two or more sensors are spaced apart on the base along the linear movement path of the suction chamber and suction pipe to detect the positioning of the suction chamber and suction pipe in the front and back.

6. The cleaning mechanism of a sintering apparatus according to claim 2, wherein The extension direction of the lead screw is consistent with the extension direction of the suction pipe.

7. The cleaning mechanism of a sintering apparatus according to claim 6, characterized by The suction pipe is a rigid hollow straight pipe.

8. The cleaning mechanism of a sintering apparatus according to claim 7, characterized by The sealed pipe is a flexible hollow pipe.

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