A fully automatic semiconductor high-pressure rotary spraying device

Abstract

The utility model relates to the technical field of semiconductor cleaning, and disclose a full -automatic semiconductor high pressure rotary sprinkler, including bottom drive motor, the bottom fixed connection of fixed mount has bottom drive motor, the output shaft of bottom drive motor is provided with rotary drive component, the top of rotary drive component is provided with rotary support component, the top front side of rotary drive component is provided with rotary water delivery connection component, the top rear side of rotary drive component is provided with rotary sprinkler component, the utility model advantage is obvious, it realizes the automatic spraying, and the cleaning efficiency is greatly promoted, reduces the manual cost, multi -angle spray design, can adjust the parameter according to product demand, accurate cleaning complex surface, improve the cleaning quality, stable structure design, guarantee equipment stable operation, reduce maintenance cost, satisfy the high requirement of semiconductor industry to product cleaning.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor cleaning technology, specifically a fully automatic semiconductor high-pressure rotary spray device. Background Technology

[0002] With the booming development of the semiconductor industry, the production scale of semiconductor products is constantly expanding, and the requirements for product cleanliness are becoming increasingly stringent. However, traditional semiconductor product cleaning methods have many drawbacks. Currently, the surface processes and structures of semiconductor products are complex and diverse. Traditional cleaning methods mainly rely on manual handheld water spraying. This method has revealed many problems in actual operation: First, the cleaning efficiency is extremely low. Faced with a large number of complex semiconductor products, manual spraying is slow and cannot meet the ever-increasing production demands. Second, the labor intensity is enormous. Due to the large market demand for semiconductor products, a large number of people are required for cleaning work, which not only increases the company's labor costs but also easily leads to worker fatigue, affecting work quality. Third, the cleaning effect is difficult to guarantee. For some precision or complex semiconductor products, manual spraying is difficult to achieve comprehensive and precise cleaning and cannot meet the ideal cleanliness standards. With the continuous advancement of semiconductor technology, the process structure of products is becoming increasingly complex, and the requirements for cleaning precision and efficiency are also increasing. Traditional manual spraying methods can no longer meet the needs of industry development. There is an urgent need for a high-efficiency, precise, and automated cleaning equipment, which has prompted the research and development of a fully automatic semiconductor high-pressure rotary spray device. To this end, we propose a fully automatic semiconductor high-pressure rotary spray device. Utility Model Content

[0003] To address the shortcomings of existing technologies, this invention provides a fully automatic semiconductor high-pressure rotary spray device, which solves the aforementioned problems.

[0004] To achieve the above-mentioned objectives, this utility model provides the following technical solution: A fully automatic semiconductor high-pressure rotary spray device includes a bottom drive motor, the bottom drive motor is fixedly connected to the bottom of the fixed frame, the output shaft of the bottom drive motor is provided with a rotary drive assembly, the top of the rotary drive assembly is provided with a rotary support assembly, the front side of the top of the rotary drive assembly is provided with a rotary water supply connection assembly, and the rear side of the top of the rotary drive assembly is provided with a rotary spray assembly. The rotary drive assembly includes a bottom drive motor, a transmission timing belt, and a drive timing pulley. The bottom drive motor is fixedly connected to the bottom of the fixed frame. The output shaft of the bottom drive motor is fixedly connected to the drive timing pulley. The transmission timing belt is frictionally connected to the outer side of the drive timing pulley. Gears mesh between the drive timing pulley and the transmission timing belt. The top inner side of the transmission timing belt is frictionally connected to equidistantly distributed top drive timing pulleys. The rotating water supply connection assembly includes a spray main pipe and a rotary joint. The rotary joint is rotatably connected to the front side of the spray main pipe, and the spray main pipe and the rotary joint are rotatably sealed together. The rotating spray assembly includes a spray nozzle, a three-way inlet pipe, a nozzle connecting rotary pipe, and a side connecting pipe. The three-way inlet pipe is fixedly connected to the rear side of the main spray pipe. The side connecting pipes are fixedly connected to both sides of the three-way inlet pipe. The nozzle connecting rotary pipe is fixedly connected to the other end of the side connecting pipe. The spray nozzle is fixedly connected to the other end of the nozzle connecting rotary pipe.

[0005] Preferably, the rotating support assembly includes a rhomboid support bearing seat and a cylindrical bearing seat, with the rhomboid support bearing seat and the cylindrical bearing seat fixedly connected to the top of the fixed frame.

[0006] Preferably, the inner side of the rhomboid support bearing seat is rotatably connected to the spray main pipe, and the inner side of the cylindrical bearing seat is rotatably connected to the spray main pipe.

[0007] Compared with the prior art, the advantages of this utility model are: A fully automatic semiconductor high-pressure rotary spray device is provided, which has the following advantages: 1. High efficiency and automation, reducing labor costs: The device uses a motor to drive a synchronous pulley and synchronous belt, which drives the spray pipe and nozzles to rotate, realizing automated spraying. Compared with manual hand-held water gun spraying, it greatly improves cleaning efficiency. In the case of high demand for semiconductor products, it can significantly reduce manpower input, reduce enterprise labor costs, and can work continuously and stably, avoiding the impact of human fatigue on cleaning progress.

[0008] 2. Precise multi-angle spraying for improved cleaning quality: The spray assembly is cleverly designed with multi-angle nozzles that can comprehensively cover the complex surface process structure of semiconductor products. The spraying speed, pressure, nozzle structure, and number can be flexibly adjusted according to product characteristics to ensure that the cleaning fluid is sprayed evenly and at high pressure onto the product surface, effectively removing impurities and achieving higher cleanliness standards to meet the semiconductor industry's requirements for high-precision product cleaning.

[0009] 3. Stable structure and guaranteed equipment performance: The diamond-shaped support bearing seat and the cylindrical bearing seat provide stable support for the main spray pipe, reducing shaking during rotation, ensuring stable operation of the nozzles, and making the spraying effect more uniform. The rotary joint is rotated and sealed with the main spray pipe, which can not only ensure the smooth entry of high-pressure cleaning fluid, but also prevent leakage, improve the stability of equipment operation, extend the service life of equipment, and reduce maintenance costs. Attached Figure Description

[0010] Figure 1 This is a top view of the overall structure of this utility model; Figure 2 This is a front view schematic diagram of the overall structure of this utility model; Figure 3 This is a side view of the overall structure of this utility model; Figure 4 for Figure 3 A magnified view of part A in the diagram.

[0011] In the diagram: 1. Spray nozzle; 2. Bottom drive motor; 3. Transmission timing belt; 4. Drive timing pulley; 5. Diamond-shaped support bearing seat; 6. Cylindrical bearing seat; 7. Main spray pipe; 8. Rotary joint; 9. Three-way inlet pipe; 10. Spray nozzle connecting pipe; 11. Side connecting spray pipe. Detailed Implementation

[0012] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0013] Please see Figure 1-4 This utility model provides a technical solution: A fully automatic semiconductor high-pressure rotary spray device includes a bottom drive motor 2, a bottom drive motor 2 is fixedly connected to the bottom of a fixed frame, a rotary drive assembly is provided on the output shaft of the bottom drive motor 2, a rotary support assembly is provided on the top of the rotary drive assembly, a rotary water supply connection assembly is provided on the front side of the top of the rotary drive assembly, and a rotary spray assembly is provided on the rear side of the top of the rotary drive assembly. The rotary drive assembly includes a bottom drive motor 2, a transmission timing belt 3, and a drive timing pulley 4. The bottom drive motor 2 is fixedly connected to the bottom of the fixed frame. The output shaft of the bottom drive motor 2 is fixedly connected to the drive timing pulley 4. The transmission timing belt 3 is frictionally connected to the outer side of the drive timing pulley 4. Gears mesh between the drive timing pulley 4 and the transmission timing belt 3. The top inner side of the transmission timing belt 3 is frictionally connected to the equidistantly distributed top drive timing pulleys 4. Through the action of the rotary drive assembly, rotational power is provided to the spray nozzle 1. The rotary water supply connection assembly includes a spray pipe 7 and a rotary joint 8. The rotary joint 8 is rotatably connected to the front side of the spray pipe 7. The spray pipe 7 and the rotary joint 8 are rotatably sealed together. Through the function of the rotary water supply connection assembly, the communication and transportation between the external water supply and the spray pipe 7 is realized. The rotary spray assembly includes a spray nozzle 1, a three-way inlet pipe 9, a nozzle connecting pipe 10, and a side connecting pipe 11. The three-way inlet pipe 9 is fixedly connected to the rear side of the main spray pipe 7. The side connecting pipe 11 is fixedly connected to both sides of the three-way inlet pipe 9. The nozzle connecting pipe 10 is fixedly connected to the other end of the side connecting pipe 11. The spray nozzle 1 is fixedly connected to the other end of the nozzle connecting pipe 10. Through the action of the rotary spray assembly, high-pressure spraying of the rotating system is achieved.

[0014] Furthermore, the rotating support assembly includes a rhomboid support bearing seat 5 and a cylindrical bearing seat 6. The top of the fixed frame is fixedly connected to the rhomboid support bearing seat 5 and the top of the fixed frame is fixedly connected to the cylindrical bearing seat 6. Through the action of the rotating support assembly, the overall support of the rotating spray is realized.

[0015] Furthermore, the inner side of the rhomboid support bearing seat 5 is rotatably connected to the spray main pipe 7, and the inner side of the cylindrical bearing seat 6 is rotatably connected to the spray main pipe 7.

[0016] Structural Description: Bottom drive motor 2: Bottom drive motor 2 is the power source of the entire device. It is usually selected as a motor with high torque and good stability, such as an AC servo motor. It is fixedly installed at the bottom of the fixed frame and secured by bolts and other connecting parts. After the motor is powered on, the output shaft starts to rotate, providing power to the rotation drive component. Its output shaft is tightly connected to the drive synchronous pulley 4. With stable speed and torque output, it drives the drive synchronous pulley 4 to rotate, thereby causing the transmission synchronous belt 3 to move, and finally realizing the rotation of the spray component, providing power support for the cleaning of semiconductor products. The transmission timing belt 3 is a key component for force transmission. It is generally made of materials such as rubber or polyurethane, which have good wear resistance and flexibility. Its inner side is frictionally connected to the drive timing pulley 4 and the top drive timing pulley 4. When the drive timing pulley 4 rotates, the transmission timing belt 3 moves accordingly, driving the top drive timing pulley 4 to rotate synchronously, realizing efficient power transmission and ensuring the stable rotation of the main sprinkler pipe 7. Drive synchronous pulley 4: Installed on the output shaft of the bottom drive motor 2, it meshes with the transmission synchronous belt 3 gear. It is usually made of metal and the surface is specially treated to increase the friction with the transmission synchronous belt 3. Drive synchronous pulley 4 converts the rotational motion of the motor into the linear motion of the transmission synchronous belt 3, thereby driving the top drive synchronous pulley 4 and providing power for the rotation of the spray main pipe 7. Top drive synchronous pulley 4: Equally distributed on the inner side of the top of the transmission synchronous belt 3, and frictionally connected with the transmission synchronous belt 3. Its structure and material are similar to those of the drive synchronous pulley 4. Under the drive of the transmission synchronous belt 3, it rotates synchronously, providing uniform rotational power to the spray pipe 7, and ensuring the stability and consistency of the spray pipe 7 during rotation. Diamond-shaped support bearing seat 5: Fixed to the top of the fixed frame, it is generally made of high-strength metal materials, such as aluminum alloy. Its unique diamond structure gives it good stability and support force, providing a stable support point for the sprinkler main pipe 7. The inner side is rotatably connected to the sprinkler main pipe 7, which effectively reduces the shaking during the rotation process while ensuring that the sprinkler main pipe 7 can rotate freely, thus ensuring the accuracy of the sprinkler operation. Cylindrical bearing seat 6: Also fixed on the top of the fixed frame, working together with the diamond support bearing seat 5. It is generally made of wear-resistant metal material, such as bearing steel. The inner side of the cylindrical bearing seat 6 is also rotatably connected to the spray pipe 7, further enhancing the support effect on the spray pipe 7, ensuring the stability of the spray pipe 7 when rotating at high speed, preventing it from becoming eccentric or swaying, and ensuring the stable operation of the entire spray device. Spray main pipe 7: As a pipeline for delivering high-pressure cleaning fluid, it is usually made of corrosion-resistant and high-strength materials, such as stainless steel or engineering plastics. One end of it is rotatably connected to the rotary joint 8, and the other end is connected to the rotary spray assembly. Spray main pipe 7 rotates under the drive of the rotary drive assembly, delivering the high-pressure cleaning fluid input from the rotary joint 8 to the rotary spray assembly, providing a source of cleaning fluid for the cleaning of semiconductor products. Rotary joint 8: Rotary joint is rotatably connected to the front side of the spray pipe 7 and is connected to the spray pipe 7 by a rotary seal. Special sealing materials are generally used, such as fluororubber sealing rings. One end of the rotary joint 8 is connected to the external cleaning fluid supply system, and the other end is connected to the spray pipe 7. When the spray pipe 7 rotates, it remains relatively stationary, continuously and stably delivering high-pressure cleaning fluid to the spray pipe 7, while preventing cleaning fluid leakage and ensuring the normal operation of the cleaning operation. Spray nozzle 1: It is a key component for achieving spray cleaning. It is usually made of plastic or metal and is designed with different shapes and structures according to different cleaning needs. It is installed at the end of the nozzle connecting tube 10 and can spray the cleaning liquid at a specific angle, pressure and flow rate to efficiently clean the surface of semiconductor products, ensuring that the cleaning liquid evenly covers the product surface and improves the cleaning effect. Three-way nozzle 9: Fixed to the rear side of the spray main pipe 7, it is generally made of metal or high-strength plastic. It diverts the cleaning liquid in the spray main pipe 7 to the side-connected spray pipes 11 on both sides, so that the cleaning liquid can be evenly distributed to each spray nozzle 1, ensuring the realization of multi-angle spraying and enhancing the cleaning ability of complex structures on the surface of semiconductor products. Sprayer head connecting pipe 10: Connects the side connecting pipe 11 and the spray nozzle 1. It is usually made of a material with a certain degree of flexibility and strength, such as a metal hose or reinforced plastic. It can adapt to the rotation of the spray pipe 7 while ensuring the smooth delivery of cleaning liquid, so that the spray nozzle 1 can flexibly adjust the spray angle and ensure that the cleaning liquid can be accurately sprayed to various parts of the product surface. Side-connecting nozzle 11: Connects the three-way inlet pipe 9 and the nozzle connecting tube 10. It is generally made of metal or plastic. It delivers the cleaning fluid diverted by the three-way inlet pipe 9 to the nozzle connecting tube 10, and then to the spray nozzle 1. Its length and angle design are determined according to the overall structure of the device and the cleaning requirements to ensure that the cleaning fluid can reach each spray nozzle 1 smoothly, so as to achieve multi-angle and all-round spray cleaning. Working principle: When this utility model is needed, the bottom drive motor 2 is powered on and operates. Its output shaft drives the drive synchronous pulley 4 to rotate. Since the drive synchronous pulley 4 and the transmission synchronous belt 3 are connected by gear meshing and external friction, the rotation of the drive synchronous pulley 4 will drive the transmission synchronous belt 3 to move. The inner side of the top of the transmission synchronous belt 3 is in frictional contact with the equidistantly distributed top drive synchronous pulleys 4, thereby driving the top drive synchronous pulleys 4 to rotate synchronously, transmitting the power of the bottom drive motor 2 to the spray pipe 7, providing a power source for the rotation of the entire spray assembly. The diamond-shaped support bearing seat 5 and the cylindrical bearing seat 6 at the top of the fixed frame provide stable support for the spray pipe 7. The two ends of the spray pipe 7 are respectively rotatably connected to the inner side of the diamond-shaped support bearing seat 5 and the cylindrical bearing seat 6. This connection method ensures that the spray pipe... While the main spray pipe 7 can rotate freely, its shaking during rotation is effectively reduced, ensuring the stability and accuracy of the spraying operation. The high-pressure cleaning fluid enters the main spray pipe 7 through the rotary joint 8. The rotary joint 8 and the main spray pipe 7 are rotatably sealed together, ensuring a continuous and stable flow of cleaning fluid into the main spray pipe 7 while preventing leakage. The three-way port pipe 9 fixed at the rear of the main spray pipe 7 diverts the cleaning fluid to the side connecting spray pipes 11 on both sides. The side connecting spray pipes 11 deliver the cleaning fluid to the spray nozzles 1 through the nozzle connecting pipe 10. When the main spray pipe 7 rotates, it drives the nozzle connecting pipe 10 and the spray nozzles 1 to rotate synchronously, so that the spray nozzles 1 can spray the high-pressure cleaning fluid evenly onto the surface of the semiconductor product from multiple angles, achieving comprehensive and efficient cleaning of the semiconductor product.

[0017] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fully automatic semiconductor high-pressure rotary spray device, comprising a bottom drive motor (2), characterized in that: A bottom drive motor (2) is fixedly connected to the bottom of the fixed frame. The output shaft of the bottom drive motor (2) is provided with a rotary drive assembly. A rotary support assembly is provided on the top of the rotary drive assembly. A rotary water supply connection assembly is provided on the front side of the top of the rotary drive assembly. A rotary spray assembly is provided on the rear side of the top of the rotary drive assembly. The rotary drive assembly includes a bottom drive motor (2), a transmission timing belt (3), and a drive timing pulley (4). The bottom drive motor (2) is fixedly connected to the bottom of the fixed frame. The output shaft of the bottom drive motor (2) is fixedly connected to the drive timing pulley (4). The transmission timing belt (3) is frictionally connected to the outer side of the drive timing pulley (4). The drive timing pulley (4) and the transmission timing belt (3) are meshed with gears. The top inner side of the transmission timing belt (3) is frictionally connected to the equidistantly distributed top drive timing pulleys (4). The rotating water supply connection assembly includes a spray pipe (7) and a rotary joint (8). The front side of the spray pipe (7) is rotatably connected to the rotary joint (8), and the spray pipe (7) and the rotary joint (8) are rotatably sealed together. The rotating spray assembly includes a spray nozzle (1), a three-way inlet pipe (9), a nozzle connecting pipe (10), and a side connecting pipe (11). The three-way inlet pipe (9) is fixedly connected to the rear side of the main spray pipe (7). The side connecting pipes (11) are fixedly connected to both sides of the three-way inlet pipe (9). The nozzle connecting pipe (10) is fixedly connected to the other end of the side connecting pipe (11). The spray nozzle (1) is fixedly connected to the other end of the nozzle connecting pipe (10).

2. The fully automatic semiconductor high-pressure rotary spray device according to claim 1, characterized in that: The rotating support assembly includes a rhomboid support bearing seat (5) and a cylindrical bearing seat (6). The top of the fixed frame is fixedly connected to the rhomboid support bearing seat (5) and the top of the fixed frame is fixedly connected to the cylindrical bearing seat (6).

3. The fully automatic semiconductor high-pressure rotary spray device according to claim 2, characterized in that: The inner side of the rhomboid support bearing seat (5) is rotatably connected to the spray pipe (7), and the inner side of the cylindrical bearing seat (6) is rotatably connected to the spray pipe (7).

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