A combustible dust centralized harmless treatment device

Abstract

The utility model provides a kind of flammable dust centralized harmless treatment device, the double-layer bottom plate design of scraper chain conveyer is used to realize the conveying and repeatedly turning over of material and falling, and combining the air volume automatic control system based on temperature feedback, the sufficiency and uniformity of dust oxidation reaction are ensured, and oxidation efficiency is significantly improved;The dust device integrated in the discharge end of scraper chain conveyer effectively solves the blockage problem caused by the hardened dust after oxidation, ensuring the continuity of material conveying;The louver dust discharging and weighing mechanism realizes online accurate measurement and automatic controllable discharging of dust after oxidation, providing preparation for subsequent steps;Finally, through the multi-step forward and reverse stirring and quantitative water spraying humidification program of spiral humidifier, the dust after oxidation is fully stirred, extruded and humidified, effectively reducing its specific surface area and passivating chemical structure, thereby realizing safe, automated, efficient and complete harmless centralized treatment of flammable dust.

Description

Technical Field

[0001] This utility model relates to the field of dust removal technology in semiconductor industrial production, and in particular to a centralized harmless treatment device for flammable dust. Background Technology

[0002] In semiconductor manufacturing, especially during the crystal pulling process of monocrystalline silicon, polycrystalline silicon, and heavily doped silicon monocrystalline silicon, inert gases are often used as a protective atmosphere to protect the process environment and equipment. These gases must be purified by filters before being recycled, resulting in the collection of a large amount of fine dust generated during the process. This dust, mainly composed of silicon powder and other materials, is extremely flammable and explosive, posing a significant safety hazard to production. Currently, the industry commonly employs an oxidation passivation treatment on the collected dust within or near the filter system, attempting to reduce its flammability through oxidation. Common structures include filter units integrated with heating or oxidation functions, or simple oxidation chambers located downstream of the filter.

[0003] However, existing technical solutions have several significant problems. First, the tight coupling of the oxidation process with the filtration equipment makes it highly susceptible to dust flashover or explosions during filter maintenance and repair due to operator error (such as introducing air) or residual heat from the equipment, resulting in injuries. Furthermore, the high-temperature oxidation process can easily burn through or damage the filter bags. Second, due to imprecise control of the oxidation environment, incomplete and uneven oxidation often occurs, making it difficult to guarantee the treatment effect. Incompletely oxidized dust still poses a risk in subsequent processing. More seriously, if the filter bags burn through undetected, a large amount of unfiltered dust will directly enter the downstream vacuum pump system, causing the vacuum pump to seize and shut down, interrupting the entire expensive crystal pulling process and causing significant direct economic losses and production stoppages for the company. In addition, existing equipment typically has a low level of automation, relying heavily on manual judgment and operation, resulting in low processing efficiency and poor consistency.

[0004] Therefore, there is an urgent need in this field to develop a special device that can separate the oxidation process from filtration, achieve automated and precise control, ensure sufficient and uniform oxidation, and ultimately achieve complete and harmless treatment of dust, in order to solve a series of prominent problems in the existing technology, such as poor safety, low reliability, unstable treatment effect and large potential economic losses. Utility Model Content

[0005] The purpose of this invention is to provide a centralized harmless treatment device for flammable dust, so as to solve the problems existing in the prior art.

[0006] To achieve the above objectives, this utility model provides the following solution:

[0007] This utility model provides a centralized harmless treatment device for flammable dust, comprising:

[0008] The feeding mechanism, oxidation chamber, dust humidification chamber, and electrical cabinet are connected in sequence.

[0009] The oxidation chamber is equipped with an oxidation conveying mechanism, including a rotary valve, a chain scraper conveyor, and a dust crushing device. The inlet of the rotary valve is located below the feed pipe and is driven by a universal coupling. Its outlet corresponds to the inlet of the chain scraper conveyor. The chain scraper conveyor is driven by a perforated coupling and includes an upper bottom plate and a lower bottom plate for conveying and agitating dust. The dust crushing device is located at the outlet of the chain scraper conveyor and is used to crush the clumps of dust after oxidation.

[0010] The outlet of the oxidation conveying mechanism is equipped with an exhaust filtration mechanism to filter the oxidized dust.

[0011] Preferably, the oxidation chamber, the dust humidification chamber, and the electrical cabinet are all housed within the shell of the centralized harmless treatment device. The shell of the centralized harmless treatment device includes a frame and a skin covering it. The top of the oxidation chamber is provided with an openable first cover, a second cover, a third cover, and a fourth cover. Its sides are provided with openable left and right side doors. Its bottom is provided with an oxidation chamber bottom plate, and all connections are sealed with sealing strips. The sides of the dust humidification chamber are provided with an openable left side door, a maintenance side door, a water supply maintenance door, a spiral humidifier discharge port door, and a filter maintenance door. Its bottom is provided with a dust humidification chamber bottom plate. The sides of the electrical cabinet are provided with an openable first electrical cabinet door and a second electrical cabinet door.

[0012] It also includes a feeding mechanism, which includes a feed port flange connected to upstream equipment via a connecting hose. The feed port flange is connected to a feed pipe, and the feed pipe is installed on the cover of the top of the oxidation chamber via a reducing pipe and a rectangular flange.

[0013] The drive mechanism includes a first motor reducer for driving the star-shaped ash discharge valve and a second motor reducer for driving the chain scraper conveyor.

[0014] The control system, located within the electrical cabinet, includes a PLC controller, a touch screen, a first temperature sensor and a second temperature sensor for detecting the temperature of the oxidation chamber, and a weighing sensor for detecting the weight of dust within the louvered ash discharge weighing mechanism. The first and second temperature sensors are connected to a first Kf connector and a second Kf connector, respectively. The control system is communicatively connected to the first motor reducer, the second motor reducer, the louvered ash discharge weighing mechanism, the spiral humidifier, the first temperature sensor, the second temperature sensor, and the weighing sensor to achieve automated control.

[0015] Preferably, the chain scraper conveyor further includes:

[0016] Two chain scraper beams are arranged in parallel inside the oxidation chamber;

[0017] The sprocket drive shaft and the sprocket driven shaft are respectively mounted at both ends of the two chain scraper beams via bearing mounts;

[0018] A sprocket is installed at both ends of the sprocket drive shaft and the sprocket driven shaft;

[0019] A round chain is fitted onto the sprockets on both sides;

[0020] Multiple scrapers are fixedly installed at intervals between the two circular chains;

[0021] The dust-shredding device includes a fixed base, a dust-shredding plate, and a spring; the fixed base is fixedly installed at the end of the lower base plate; the dust-shredding plate is rotatably installed on the fixed base; the spring is sleeved on both sides of the dust-shredding plate to provide it with a restoring force.

[0022] Preferably, it also includes a louvered ash discharge and weighing mechanism, wherein the hopper ring edge of the louvered ash discharge and weighing mechanism is flexibly connected to the discharge port at the bottom of the oxidation chamber through a fireproof cloth, for receiving oxidized dust and weighing and intermittently unloading it;

[0023] The louvered ash discharge and weighing mechanism includes:

[0024] The hopper assembly includes a trapezoidal ash inlet hopper and rectangular flanges at its upper and lower ends;

[0025] The guide cylinder mechanism includes a mini cylinder, a first guide rod, a second guide rod, a first guide sleeve, a second guide sleeve, and a guide rod connecting plate;

[0026] The louvered ash discharge hopper mechanism includes a louvered ash discharge strip perforated plate, louvered ash discharge reversing blades rotatably mounted thereon, a louvered ash discharge rotating rod fixedly connected to the reversing blades, an unloading pulling rod, and an unloading connecting rod; the mini cylinder is driven to the unloading connecting rod through the guide cylinder mechanism to drive the louvered ash discharge reversing blades to open and close.

[0027] A weighing mechanism, including a weighing sensor and a weighing sensor mounting plate, is used to monitor the dust mass inside the hopper assembly in real time.

[0028] A pneumatic vibrator is installed on the hopper assembly to assist in unloading.

[0029] Preferably, it also includes a spiral humidifier, the inlet of which is connected below the outlet of the louvered dust unloading and weighing mechanism, for humidifying and stirring the received dust;

[0030] The spiral humidifier includes:

[0031] The humidifier casing has an inlet and an outlet at each end;

[0032] A spiral stirring shaft is rotatably disposed inside the humidifier housing, and has a forward spiral ribbon and a reverse spiral ribbon on it;

[0033] The output end of the servo motor reducer is connected to the spiral stirring main shaft via a key;

[0034] The first, second, third, and fourth water spray nozzles are arranged along the top of the humidifier housing and are connected to the water source through the first, second, third, and fourth solenoid valves and control pipelines, respectively.

[0035] Preferably, the exhaust filtration mechanism includes an exhaust duct, a filter, and a fan; one end of the exhaust duct is connected to the interior of the oxidation chamber, and the other end is connected to the inlet of the filter; the fan is connected to the outlet of the filter, and its outlet is connected to a pipeline for discharging the filtered gas through the exhaust duct.

[0036] The exhaust filtration mechanism also includes a damper and a damper pipe; one end of the damper pipe is connected to the outside, and the other end passes through the bottom plate of the oxidation chamber and is connected to the interior of the oxidation chamber; the damper is located on the damper pipe and is used to regulate the amount of air entering the oxidation chamber.

[0037] Preferably, it also includes a booster water pump; the inlet of the booster water pump is connected to an external water source through an inlet pipe, and its outlet is connected to a manifold through a water delivery hose; the manifold is connected to the first, second, third, and fourth spray nozzles on the spiral humidifier through multiple water distribution hoses via a first solenoid valve, a second solenoid valve, a third solenoid valve, and a fourth solenoid valve.

[0038] Preferably, the filter is fixed in the dust humidification chamber by a filter mounting bracket, an upper filter mounting plate, and a lower filter mounting plate; the filter includes a housing, a filter element, a clean air chamber housing, and an openable filter cover; the filter cover is locked and sealed by a hinged screw, a hinged nut, and a filter cover pressure rod.

[0039] The present invention achieves the following beneficial technical effects compared to the prior art:

[0040] This utility model provides a centralized harmless treatment device for flammable dust. Through an original layout that physically separates the oxidation chamber from the filtration equipment, it fundamentally eliminates the risk of filter bag burn-off during the dust oxidation process, greatly improving the safety and reliability of the filtration equipment. The double-layer bottom plate design of the chain scraper conveyor enables material conveying and repeated tumbling and dropping, combined with a temperature-feedback-based automatic airflow control system, ensuring the sufficiency and uniformity of the dust oxidation reaction and significantly improving oxidation efficiency. The dust-breaking device integrated into the discharge end of the chain scraper conveyor effectively solves the problem of post-oxidation caking. The problem of dust blockage was solved, ensuring the continuity of material conveying; the louvered ash unloading and weighing mechanism enabled online accurate measurement and automatic controllable unloading of oxidized dust, preparing for subsequent steps; finally, through the multi-step forward and reverse mixing and quantitative water spraying humidification program of the spiral humidifier, the oxidized dust was fully mixed, compressed and humidified, effectively reducing its specific surface area and passivating its chemical structure, thus achieving safe, efficient and thorough harmless centralized treatment of flammable dust. The whole process is automated, greatly saving labor costs and eliminating the risks caused by human operation. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is the main view of this application;

[0043] Figure 2 This is a top view of this application;

[0044] Figure 3 This is a rear view of this application;

[0045] Figure 4 This is a cross-sectional view of this application;

[0046] Figure 5 This is a front view of the casing of the centralized harmless treatment device of this application;

[0047] Figure 6 This is a cross-sectional view of the shell of the centralized harmless treatment device of this application;

[0048] Figure 7 This is a cross-sectional view of the shell of the centralized harmless treatment device of this application;

[0049] Figure 8 This is a cross-sectional view of the shell of the centralized harmless treatment device of this application;

[0050] Figure 9 This is the main view of the chain scraper conveyor of this application;

[0051] Figure 10 This is a top view of the chain scraper conveyor of this application;

[0052] Figure 11 This is a sectional view of the chain plate scraper conveyor of this application;

[0053] Figure 12 This is a partial view of the chain plate scraper conveyor of this application;

[0054] Figure 13 This is the front view of the louvered ash unloading and weighing mechanism of this application;

[0055] Figure 14 This is a top view of the louvered ash unloading and weighing mechanism of this application;

[0056] Figure 15 This is an isometric view of the louvered ash unloading and weighing mechanism of this application;

[0057] Figure 16 This is a front view of the spiral humidifier of this application;

[0058] Figure 17 This is a front view of the main shaft of the spiral humidifier in this application;

[0059] Figure 18 This is a diagram showing the installation of the filter in this application;

[0060] Figure 19 This is the main view of the filter in this application;

[0061] Figure label:

[0062] 1. Flexible connecting pipe; 2. Damper; 3. Damper piping; 4. First motor reducer; 5. First temperature sensor; 6. Universal coupling; 7. Second motor reducer; 8. Clasp coupling; 9. Air outlet connecting pipe; 10. Clamp; 11. Pipe joint; 12. Exhaust duct; 13. Water inlet pipe; 14. Manifold mounting plate; 15. Manifold; 16. Water distribution hose; 17. Right-angle pipe joint; 18. First solenoid valve; 19. Second solenoid valve; 20. ... 21. Three solenoid valves; 22. Fourth solenoid valve; 23. Water supply hose; 24. Second temperature sensor; 25. Touch screen; 26. Fireproof cloth; A. Centralized harmless treatment device shell; A1. Inlet flange; A2. First compartment cover; A3. Left side door of oxidation chamber; A4. Left side door; A5. Skin; A6. Frame; A7. Water supply maintenance door; A8. Spiral humidifier discharge port door; A9. Filter maintenance door; A10. Electrical cabinet door; A11. Oxidation chamber Right side hatch; A12, Motor mounting bracket; A13, Exhaust pipe; A14, Motor mounting bracket; A15, First Kf connector; A16, Electrical cabinet hatch; A17, Maintenance side hatch; A18, Oxidation chamber bottom plate; A19, Hat cover sealing strip; A20, Hat door sealing strip; A21, Oxidation chamber discharge port; A22, Dust humidification chamber bottom plate; A23, Filter mounting bracket; A24, Rectangular flange; A25, Feed pipe; A26, Reducer; A27, Second Hatch cover; A28, Third hatch cover; A29, Fourth hatch cover; A30, Upper filter mounting plate; A31, Lower filter mounting plate; A32, Second Kf connector; A33, Exhaust air inlet; B, Chain scraper conveyor; B1, Bearing with seat; B2, Bearing mounting plate; B3, Chain scraper conveyor beam; B4, Adjusting screw; B5, Dust shield; B6, Sprocket driven shaft; B7, Sprocket; B8, Round chain; B9, Chain hook; B10, Scraper; B11, Upper bottom plate;

[0063] B12, Lower base plate; B13, Fixed seat; B14, Dust crushing plate; B15, Spring; B16, Sprocket drive shaft; C, Rotary star-shaped ash discharge valve; D, Louvered ash discharge weighing mechanism; D1, Hopper rim; D2, Trapezoidal ash inlet hopper; D3, Hopper rectangular flange; D4, Mini cylinder; D5, First guide rod; D6, First guide sleeve; D7, Guide rod connecting plate; D8, Second guide sleeve; D9, Cylinder mounting plate; D10, Second guide rod; D11, Pneumatic vibrator; D12, Rectangular sheet metal tube; D13, Hopper rectangular flange; D14, Ash discharge cone; D15, Hopper bottom support plate; D 16. Side connection to bottom support ring edge; D17. Lower welded discharge round tube; D18. Discharge round tube ring edge; D19. Weighing sensor mounting plate; D20. Plate connecting round tube; D21. Weighing mounting plate connecting round tube ring edge; D22. Louvered ash discharge strip perforated plate; D23. Hopper reversing blade; D24. Louvered ash discharge rotating rod; D25. Discharge pulling rod; D26. Discharge pulling rod; D27. Louvered ash discharge cylinder actuating connecting rod; D28. Weighing sensor; D29. Hex socket head cap screw; D30. Nut; E. Spiral humidifier; E1. First humidifier housing; E2. Second humidifier housing; E3. Third humidifier housing Body; E4, Bearing housing; E5, Bearing cover; E6, First sealing ring; E7, Feed inlet; E8, First spray nozzle; E9, Second spray nozzle; E10, Third spray nozzle; E11, Fourth spray nozzle; E12, Clamp; E13, Spiral mixing main shaft; E14, Shaft flange; E15, Motor side bearing housing; E16, Motor connecting seat; E17, Servo motor reducer; E18, Key; E19, Discharge port; E20, Double row angular contact ball bearing; E21, Lock nut; E22, Retaining ring; E23, Second sealing ring; E24, Wool sealing gasket; E25, Sealing cover plate; E26, Wool Sealing plate; E27, Third sealing ring; E28, Sealing cover; E29, Deep groove ball bearing; E30, Main shaft; E31, Forward spiral ribbon; E32, Ribbon support rod; E33, Reverse spiral ribbon; F, Filter; F1, Housing; F2, Air inlet Kf connector; F3, Housing flange; F4, Clean air chamber housing; F5, Screw fixing seat; F6, Screw nut; F7, Screw; F8, Filter cover pressure rod; F9, Filter cover support; F10, Filter cover; F11, Filter cover shaft seat; F12, Filter outlet duct; F13, Fan; F14, Filter element; G, Booster pump. Detailed Implementation

[0064] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). In the description of this utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0065] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0066] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0067] The purpose of this invention is to provide a centralized harmless treatment device for flammable dust to solve the problems existing in the prior art.

[0068] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0069] Example 1:

[0070] This embodiment provides a centralized, harmless treatment device for flammable silicon dust in semiconductor crystal pulling processes. For example... Figures 1-19As shown, this device integrates oxidation, crushing, metering, and humidification, enabling controlled oxidation, agglomeration and crushing, batch weighing, and forced humidification of flammable dust such as aluminum and magnesium in a closed environment, achieving the harmless, reduced-volume, and resource-based disposal of dust. The device has a rectangular cabin structure, consisting of a centralized harmless treatment unit shell A. The interior of the shell is divided into three functional spaces from top to bottom: an oxidation chamber, a dust humidification chamber, and an electrical cabinet chamber. The chambers are airtightly isolated by welding, bolts, and seals. The outer wall of the shell is covered with a continuous skin A5, ensuring both strength and aesthetics. The shell frame is supported by a frame A6 made of welded rectangular tubing. The doors, inspection ports, and observation windows of each functional compartment are located at the corresponding openings of frame A6 for easy assembly and maintenance.

[0071] Specifically, the oxidation chamber is located on the upper layer of the shell and is enclosed by a first cover A2, a second cover A27, a third cover A28, a fourth cover A29, a left side door A3, a right side door A11, and a bottom plate A18. Each cover and door is reliably sealed with a cover sealing strip A19 and a door sealing strip A20 to prevent dust from escaping during oxidation. A feed inlet flange A1 is located at the center of the top of the oxidation chamber. The feed inlet flange A1 is flexibly connected to an external dust collection pipeline via a flexible connecting pipe 1 to isolate it from mechanical vibration and thermal expansion and contraction. Below the feed inlet flange A1, a feed pipe A25, a reducing pipe A26, and a rectangular flange A24 are welded sequentially. The rectangular flange A24 is welded and fixed to the second cover A27, forming a vertical material drop channel from the top of the shell to the interior of the oxidation chamber.

[0072] Furthermore, a rotary valve C and a chain scraper conveyor B are arranged sequentially from top to bottom within the oxidation chamber. The housing of the rotary valve C is bolted to the upper part of the oxidation chamber, and its rotor is driven by the first motor reducer 4 via a universal coupling 6. The universal coupling 6 can compensate for installation errors and reduce impact, allowing the rotary valve C to evenly and quantitatively distribute dust onto the upper bottom plate B11 of the chain scraper conveyor B. The entire chain scraper conveyor B is hoisted below the bottom plate A18 of the oxidation chamber via the chain scraper beam B3. The chain scraper beam B3 consists of two parallel channel steel structures, with their ends welded and fixed to the frame A6. The sprocket drive shaft B16 and sprocket driven shaft B6 are respectively mounted on both ends of the chain scraper beam B3 via seated bearings B1. The sprocket B7 is fixed to the shaft end, and a round chain B8 is sleeved on the sprocket B7. Chain hooks B9 are riveted at equal intervals to the outside of the round chain B8. The scraper B10 spans the two round chains B8 and is secured with screws, forming a closed scraping circuit. The second motor reducer 7 is fixed to the motor mounting base A12, which is welded to the outer wall of the oxidation chamber. The second motor reducer 7 drives the sprocket drive shaft B16 through a perforated coupling 8, causing the chain scraper beam B to circulate in a set direction. A material discharge gap is left between the upper bottom plate B11 and the lower bottom plate B12. When the scraper B10 moves forward, it throws the dust from top to bottom, ensuring that the dust fully contacts the oxidizing air. On the return trip, the scraper B10 scrapes the material in the opposite direction on the lower bottom plate B12, pushing the oxidized dust to the discharge port A21 of the oxidation chamber. To prevent dust from agglomerating and causing blockage during the oxidation process, a dust crushing mechanism is provided at the discharge end of the chain scraper conveyor B. The dust crushing mechanism consists of a fixed seat B13, a dust crushing plate B14, and a spring B15. The fixed seat B13 is welded to the end of the lower bottom plate B12. The dust crushing plate B14 is hinged to the fixed seat B13 by a pin. The spring B15 is sleeved on both ends of the pin and applies a preload force to the dust crushing plate B14 in the direction of the chain plate. When the flaky dust moves with the scraper B10 to the dust crushing plate B14, the dust crushing plate B14 is squeezed and rotates downward around the pin axis, and the flaky dust is forcibly crushed; after the scraper B10 passes, the dust crushing plate B14 is quickly reset under the action of the spring B15, ready for the next crushing action.

[0073] Furthermore, an oxidation chamber discharge port A21 is opened on the bottom plate A18 of the oxidation chamber. The oxidation chamber discharge port A21 is flexibly connected to the louvered ash discharge weighing mechanism D through fireproof cloth 25, which prevents dust from flying and allows the weighing module to float freely. The louvered ash discharge weighing mechanism D is located inside the dust humidification chamber. From top to bottom, it consists of a feeding hopper assembly, a guide cylinder mechanism, a louvered ash discharge hopper mechanism, a dynamic feeding hopper mechanism, and a weighing bottom plate assembly mechanism. The feeding hopper assembly consists of a hopper ring edge D1, a trapezoidal ash hopper D2, and a hopper rectangular flange D3. The hopper ring edge D1 is welded to the outer edge of the upper opening of the trapezoidal ash hopper D2 and can be pressed and sealed with the fireproof cloth 25 by pressure plates and bolts. The hopper rectangular flange D3 is welded to the lower opening of the trapezoidal ash hopper D2 and is locked to the second hopper rectangular flange D3 by hexagonal screws D29 and nuts D30, forming a rigid transition section. The guide cylinder mechanism is installed on the outside of the rectangular sheet metal tube D12. The mini cylinder D4 has a built-in magnetic ring and can output reciprocating linear motion. The piston rod end of the mini cylinder D4 is threadedly connected to the guide rod connecting plate D7. The first guide rod D5 and the second guide rod D10 are respectively inserted through the four corners of the guide rod connecting plate D7. The first guide rod D5 is slidably engaged with the cylinder mounting plate D9 through the first guide sleeve D6, and the second guide rod D10 is slidably engaged with the cylinder mounting plate D9 through the second guide sleeve D8. The cylinder mounting plate D9 is welded to the outer wall of the rectangular sheet metal tube D12 to ensure smooth movement. The end of the second guide rod D10 is fixedly connected to the unloading rod D25 via nut D30. The unloading rod D25 is hinged to the louvered ash discharge cylinder actuation link D27 via louvered ash discharge link D26. The other end of the louvered ash discharge cylinder actuation link D27 is welded to the louvered ash discharge rotating rod D24. Both ends of the louvered ash discharge rotating rod D24 are mounted on the louvered ash discharge strip perforated plate D22 via bearings. The hopper reversing blades D23 are riveted to the louvered ash discharge strip perforated plate D22, thus forming a four-bar linkage mechanism. The extension and retraction of the mini cylinder D4 can drive the hopper reversing blades D23 to rotate between 0° and 90°, realizing the opening and closing of the discharge port. The louvered ash discharge hopper mechanism is bolted to the feed hopper assembly via a rectangular sheet metal tube D12. Inside, there is a louvered ash discharge strip perforated plate D22 and hopper reversing blades D23. The plate surface has strip holes, which allow dust to fall and form a sealing surface when closed. The dynamic feeding hopper mechanism is located below the louvered ash discharge hopper mechanism. The upper opening of the movable ash discharge cone hopper D14 is welded to the rectangular flange D13 of the feeding hopper. The bottom support plate D15 of the feeding hopper is welded between the movable ash discharge cone hopper D14 and the lower welded feeding circular pipe D17. The side connection between the bottom support ring D16 and the feeding circular pipe ring D18 is used to strengthen and prevent hand cuts.The weighing base plate assembly is located below the dynamic unloading hopper mechanism. The weighing sensor D28 adopts a cantilever beam structure. Its fixed end is bolted to the dust humidification chamber base plate A22 via the weighing sensor mounting plate D19, and its free end is connected to the unloading hopper bottom support plate D15 via the hexagonal screws D29. The plate connecting tube D20 is sleeved on the outside of the lower welded unloading tube D17 and welded to the weighing sensor mounting plate D19 via the edge D21 of the weighing mounting plate connecting tube, forming a rigid frame to ensure weighing accuracy. The pneumatic vibrator D11 is fixed to the outer wall of the rectangular sheet metal tube D12 by a bracket. It starts synchronously when the unloading signal is triggered, using high-frequency vibration to prevent dust bridging.

[0074] Furthermore, the dust humidification chamber is located on the lower left side of the shell, and it houses the spiral humidifier E, filter F, and booster pump G. The spiral humidifier E has a U-shaped groove structure and is welded together from three sections: the first humidifier shell E1, the second humidifier shell E2, and the third humidifier shell E3. The inlet E7 and outlet E19 are welded to both ends of the shell, respectively. The inlet E7 is connected to the flange of the discharge pipe D17 welded under the louvered ash discharge weighing mechanism D, and the outlet E19 is connected to the flange of the spiral humidifier discharge hatch A8, facilitating maintenance. The spiral mixing main shaft E13 runs through the interior of the shell. Its structure is composed of a main shaft E30, a forward-rotating spiral ribbon E31, a reverse-rotating spiral ribbon E33, and a ribbon support rod E32. The forward-rotating spiral ribbon E31 and the reverse-rotating spiral ribbon E33 rotate in opposite directions, allowing for material propulsion and back-mixing during both forward and reverse rotations, ensuring uniform humidification. One end of the main shaft E30 is connected to the output shaft of the servo motor reducer E17 via key E18. The servo motor reducer E17 is mounted on the outer end of the motor-side bearing housing E15 via motor connector E16. The motor-side bearing housing E15 is fixed to the bearing housing flange E14 by bolts. The bearing housing flange E14 is connected to the flange of the third humidifier housing E3. The other end of the main shaft E30 is supported in the bearing housing E4 by double-row angular contact ball bearings E20. The bearing housing E4 is fixed to the bearing housing flange E3 by bolts. The bearing housing flange E3 is connected to the flange of the first humidifier housing E1. Both the bearing housing E4 and the motor-side bearing housing E15 are equipped with deep groove ball bearings E29 or double-row angular contact ball bearings E20 to meet the requirements of axial and radial combined loads. Wool gasket sealing plates E26, wool gaskets E24, and sealing covers E25 are arranged sequentially on the outer side of each bearing to form multiple seals and prevent dust or moisture from entering the bearing cavity. Four threaded holes are equally spaced along the axial direction on the top of the first humidifier housing E1. First spray nozzle E8, second spray nozzle E9, third spray nozzle E10, and fourth spray nozzle E11 are respectively installed using clamps E12. The four spray nozzles are connected to manifold 15 via water distribution hose 16, right-angle pipe connector 17, and first solenoid valve 18, second solenoid valve 19, third solenoid valve 20, and fourth solenoid valve 21. Manifold 15 is connected to the outlet of booster pump G via water supply hose 22. The inlet of booster pump G is connected to the external tap water network via inlet pipe 13. Manifold mounting plate 14 is welded to the bottom plate A22 of the dust humidification chamber to fix manifold 15. The PLC system controls the opening and closing of each solenoid valve and the degree of opening based on the dust mass feedback from weighing sensor D28, achieving precise water addition and ensuring that the moisture content meets environmental protection requirements.

[0075] Furthermore, filter F is located on the right side of the dust humidification chamber and is bolted to the housing frame via filter mounting bracket A23. Filter F is a sealed cavity formed by housing F1, clean air chamber housing F4, and filter cover F10. Housing flange F3 is welded between housing F1 and clean air chamber housing F4 for installing filter element F14. Filter element F14 is a cylindrical high-efficiency membrane filter media, with its open end pressed between housing flange F3 and clean air chamber housing F4, and the other end closed, providing a large filtration area and low resistance. Air inlet Kf connector F2 is welded to the side wall of housing F1 and connected to the oxidation chamber bottom plate A18 via clamp 10, pipe connector 11, and exhaust pipe 12. High-temperature dust-laden gas in the oxidation chamber enters filter F under the negative pressure of fan F13, and after being filtered by filter element F14, the clean gas enters the air outlet connecting pipe 9 through filter outlet pipe F12, and is finally discharged into the atmosphere through exhaust pipe A13. The filter cover F10 is connected to the clean air chamber housing F4 on one side via a hinge, and locked on the other side via a hinged screw fixing seat F5, a hinged screw F7, a hinged nut F6, and a filter cover pressure rod F8. The filter cover support F9 and the filter cover shaft seat F11 cooperate to achieve quick opening and closing, facilitating filter element replacement and maintenance. The fan F13 is a variable frequency centrifugal fan, whose speed is automatically adjusted by the PLC based on the real-time temperature signals fed back by the first temperature sensor 5 and the second temperature sensor 23 in the oxidation chamber, realizing closed-loop temperature control of the oxidation process.

[0076] Furthermore, the electrical cabinet compartment is located on the lower right side of the shell, enclosed by electrical cabinet doors A10 and A16, and a skin A5. The doors are sealed by a door sealing strip A20 to prevent dust and moisture intrusion. A touchscreen 24 is installed on the outside of electrical cabinet door A10, serving as a human-machine interface to display real-time parameters such as temperature, weight, and flow rate. It also allows for manual / automatic mode switching, parameter setting, and fault diagnosis. The compartment houses electrical components such as PLCs, frequency converters, relays, circuit breakers, and switching power supplies. All cables enter and exit through waterproof connectors to ensure safe and reliable system operation.

[0077] This embodiment also provides a method for centralized harmless treatment of flammable dust based on the above-mentioned device, including the following steps:

[0078] S1. The dust to be processed falls into the star-shaped ash discharge valve C through the feed port 1 under the action of weight. The star-shaped ash discharge valve C is connected to the universal coupling 6 and driven by the first motor reducer 4. The speed is matched with that of the chain plate scraper machine B, and the material is evenly distributed on the upper bottom plate B11 of the chain plate scraper machine B.

[0079] S2. The dust begins to be controlled to oxidize in the oxidation chamber of the centralized harmless treatment device A. The chain scraper conveyor B is driven by the second motor reducer 7. The dust is pushed to the end by the scraper B10 and falls into the lower bottom plate B12 of the chain scraper conveyor B. The dust is re-distributed to make it more fully oxidized. The scraper B10 scrapes back in the opposite direction. The movement of the scraper B10 collides with the dust crushing plate B14. The sheet-like dust is squeezed and broken. As the scraper B10 continues to move, the dust crushing plate B14 moves around the fixed seat B13 and is pressed down. When the scraper B10 has completely passed, the dust crushing plate B14 is reset under the action of the spring B15. During the oxidation process, outside air enters the oxidation chamber of the centralized harmless treatment device A through the damper 2. The damper roughly adjusts the air intake volume, and the gas in the oxidation chamber of the centralized harmless treatment device A is transported to the filter F through the exhaust pipe 12 and pipe joint 11. After filtration, it is discharged to the atmosphere by the fan F13 and the exhaust pipe A13. The first temperature sensor 5 and the second temperature sensor 23 collect the dust temperature at different locations in the oxidation chamber in real time and feed it back to the PLC control system. The system controls the speed of the fan F13 and controls the air intake speed of the oxidation chamber by controlling the exhaust speed, thereby controlling the oxidation process.

[0080] S3. The oxidized dust is discharged into the louvered ash discharge weighing mechanism D through the discharge port A21 of the oxidation chamber. At this time, the louvered ash discharge rotating blades D23 inside the louvered ash discharge weighing mechanism D are in the closed state. The weighing sensor D28 monitors the dust quality in real time. After the dust continues to fall and reaches the set quality, the weighing sensor D28 below the louvered ash discharge weighing mechanism D gives a signal, which is processed by the PLC and transmitted to the mini cylinder D4 to drive the hopper rotating blades D23 to rotate 90 degrees and send a positioning feedback signal. At the same time, the pneumatic vibrator D11 is started to help accelerate the ash discharge.

[0081] S4. The oxidized dust falls into the spiral humidifier E through the feed inlet E7. When the dust in the louvered ash discharge and weighing mechanism D reaches the set humidification batch mass, the weighing sensor D28 sends a signal again. The hopper reversing blade D23 closes again under the drive of the mini cylinder D4 and sends a closing feedback signal. At the same time, the pneumatic vibrator D11 stops working. While the louvered ash discharge and weighing mechanism D discharges ash, the spiral humidifier E completes the material humidification and discharge operation through seven steps.

[0082] Furthermore, the seven steps include:

[0083] In the first step, the servo motor reducer E17 drives the spiral mixing spindle E13 to rotate forward a preset number of times. The spiral ribbon E31 on the spiral mixing spindle E13 pushes the dust out of the humidifier housing. At the same time, the first solenoid valve 18, the second solenoid valve 19, the third solenoid valve 20, and the fourth solenoid valve 21 open, and water is sprayed onto the dust in a metered amount through the first water spray nozzle E8, the second water spray nozzle E9, the third water spray nozzle E10, and the fourth water spray nozzle E11 respectively.

[0084] In the second step, the spiral stirring main shaft E13 reverses the preset number of revolutions, and at the same time, the second solenoid valve 19 and the fourth solenoid valve 21 open to spray water.

[0085] In the third step, the spiral mixing main shaft E13 rotates forward a preset number of times, and at the same time, the first solenoid valve 18 and the third solenoid valve 20 open to spray water.

[0086] In the fourth step, the spiral stirring spindle E13 reverses the preset number of revolutions, and at the same time, the second solenoid valve 19 and the fourth solenoid valve 21 open to spray water.

[0087] In the fifth step, the spiral mixing spindle E13 rotates forward a preset number of times, and at the same time, the first solenoid valve 18 and the third solenoid valve 20 open to spray water.

[0088] The sixth step involves reversing the spiral mixing spindle E13 a preset number of times without spraying water.

[0089] In the seventh step, the spiral mixing main shaft E13 rotates forward to discharge the mixed humidified powder, which is finally discharged through the discharge port E19 of the spiral humidifier E.

[0090] Through the above structure and control strategy, this embodiment realizes centralized processing of flammable dust from collection, oxidation, crushing, metering to humidification and passivation. It not only completely solves the safety and reliability hazards caused by the coupling of oxidation and filtration in traditional technologies, but also significantly improves oxidation uniformity, processing efficiency and automation level through innovative designs such as double-layer conveying of chain plates and scrapers, closed-loop temperature and air volume control, and online weighing and batch humidification. It provides a safe, economical and sustainable dust harmless solution for high-value process environments in the semiconductor industry.

[0091] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0092] It should be noted that the components mentioned in the above embodiments are all general standard parts or components known to those skilled in the art. Their structures and principles can be learned by those skilled in the art through technical manuals or conventional experimental methods.

[0093] This utility model uses specific examples to illustrate its principles and implementation methods. The above description of the embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the idea of ​​this utility model. In summary, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A centralized harmless treatment device for flammable dust, characterized in that, include: The feeding mechanism, oxidation chamber, dust humidification chamber, and electrical cabinet are connected in sequence. The oxidation chamber is equipped with an oxidation conveying mechanism, including a star-shaped ash discharge valve (C), a chain scraper conveyor (B), and a dust crushing device. The inlet of the star-shaped ash discharge valve (C) is located below the feed pipe (A25) and is driven by a universal coupling (6). Its outlet corresponds to the feed end of the chain scraper conveyor (B). The chain scraper conveyor (B) is driven by a plum blossom coupling (8) and includes an upper bottom plate (B11) and a lower bottom plate (B12) for conveying and turning over dust. The dust crushing device is located at the discharge end of the chain scraper conveyor (B) for crushing the dust that has clumped after oxidation. The outlet of the oxidation conveying mechanism is equipped with an exhaust filtration mechanism to filter the oxidized dust.

2. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, The oxidation chamber, dust humidification chamber, and electrical cabinet are all housed within the shell (A) of the centralized harmless treatment device. The shell (A) of the centralized harmless treatment device includes a frame (A6) and a skin (A5) covering it. The top of the oxidation chamber is equipped with an openable first cover (A2), a second cover (A27), a third cover (A28), and a fourth cover (A29). Its sides are equipped with an openable left-side door (A3) and a right-side door (A11). The bottom is equipped with an oxidation chamber bottom plate (A18), and each connection is sealed with a sealing strip; the dust humidification chamber has an openable left side door (A4), a maintenance side door (A17), a water supply maintenance door (A7), a spiral humidifier discharge port door (A8), and a filter maintenance door (A9) on its side, and a dust humidification chamber bottom plate (A22) is installed at its bottom; the electrical cabinet compartment has an openable first electrical cabinet door (A10) and a second electrical cabinet door (A16) on its side. It also includes a feeding mechanism, which includes a feed port flange (A1) connected to an upstream device via a connecting hose (1), the feed port flange (A1) being connected to a feed pipe (A25), and the feed pipe (A25) being installed on the cover (A27) at the top of the oxidation chamber via a reducing pipe (A26) and a rectangular flange (A24); The drive mechanism includes a first motor reducer (4) for driving the star-shaped ash discharge valve (C) and a second motor reducer (7) for driving the chain scraper conveyor (B). The control system, located within the electrical cabinet, includes a PLC controller, a touch screen (24), a first temperature sensor (5) and a second temperature sensor (23) for detecting the temperature of the oxidation chamber, and a weighing sensor (D28) for detecting the weight of dust in the louvered ash discharge weighing mechanism (D). The first temperature sensor (5) and the second temperature sensor (23) are respectively connected to the first Kf connector (A15) and the second Kf connector (A32). The control system is communicatively connected to the first motor reducer (4), the second motor reducer (7), the louvered ash discharge weighing mechanism (D), the spiral humidifier (E), the first temperature sensor (5), the second temperature sensor (23), and the weighing sensor (D28) to achieve automated control.

3. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, The chain scraper conveyor (B) also includes: Two chain scraper beams (B3) are arranged in parallel inside the oxidation chamber; The sprocket drive shaft (B16) and the sprocket driven shaft (B6) are respectively mounted on both ends of the two chain scraper beams (B3) via bearings (B1). A sprocket (B7) is installed at both ends of the sprocket drive shaft (B16) and the sprocket driven shaft (B6); A round chain (B8) is fitted onto the sprockets (B7) on both sides; Multiple scrapers (B10) are fixedly installed at intervals between the two circular chains (B8); The dust-shredding device includes a fixed base (B13), a dust-shredding plate (B14), and a spring (B15); the fixed base (B13) is fixedly installed at the end of the lower base plate (B12); the dust-shredding plate (B14) is rotatably installed on the fixed base (B13); the spring (B15) is sleeved on both sides of the dust-shredding plate (B14) to provide it with a restoring force.

4. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, It also includes a louvered dust discharge and weighing mechanism (D), wherein the hopper ring edge (D1) of the louvered dust discharge and weighing mechanism (D) is flexibly connected to the discharge port (A21) at the bottom of the oxidation chamber through fireproof cloth (25), for receiving oxidized dust and weighing and intermittently unloading it; The louvered ash unloading and weighing mechanism (D) includes: The hopper assembly includes a trapezoidal ash inlet hopper (D2) and rectangular flanges (D3) located at its upper and lower ends. The guide cylinder mechanism includes a mini cylinder (D4), a first guide rod (D5), a second guide rod (D10), a first guide sleeve (D6), a second guide sleeve (D8), and a guide rod connecting plate (D7). The louvered ash discharge hopper mechanism includes a louvered ash discharge strip perforated plate (D22), louvered ash discharge reversing blades (D23) rotatably mounted thereon, a louvered ash discharge rotating rod (D24) fixedly connected to the reversing blades, an unloading pull rod (D25), and an unloading connecting rod (D26); the mini cylinder (D4) is driven to the unloading connecting rod (D26) through the guide cylinder mechanism to drive the louvered ash discharge reversing blades (D23) to open and close; The weighing mechanism includes a weighing sensor (D28) and a weighing sensor mounting plate (D19) for real-time monitoring of the dust mass inside the hopper assembly. A pneumatic vibrator (D11) is installed on the hopper assembly to assist in unloading.

5. The centralized harmless treatment device for flammable dust according to claim 1, characterized in that, It also includes a spiral humidifier (E), the feed inlet (E7) of which is connected below the discharge outlet of the louvered dust discharge and weighing mechanism (D) for humidifying and stirring the received dust; The spiral humidifier (E) includes: The humidifier housing has an inlet (E7) and an outlet (E19) at its two ends. The spiral stirring shaft (E13) is rotatably disposed inside the humidifier housing, and is provided with a forward spiral ribbon (E31) and a reverse spiral ribbon (E33). The output end of the servo motor reducer (E17) is connected to the spiral stirring main shaft (E13) via a key (E18); The first spray nozzle (E8), the second spray nozzle (E9), the third spray nozzle (E10), and the fourth spray nozzle (E11) are arranged along the top of the humidifier housing and are connected to the water source through the first solenoid valve (18), the second solenoid valve (19), the third solenoid valve (20), the fourth solenoid valve (21), and control pipelines, respectively.

6. The centralized harmless treatment device for flammable dust according to claim 2, characterized in that, The exhaust filtration mechanism includes an exhaust pipe (12), a filter (F), and a fan (F13); one end of the exhaust pipe (12) is connected to the interior of the oxidation chamber, and the other end is connected to the inlet of the filter (F); the fan (F13) is connected to the outlet of the filter (F), and its outlet is connected to the pipe (9) for discharging the filtered gas through the exhaust pipe (A13); The exhaust filtration mechanism also includes a damper (2) and a damper pipe (3); one end of the damper pipe (3) is connected to the outside, and the other end passes through the bottom plate (A18) of the oxidation chamber and is connected to the inside of the oxidation chamber; the damper (2) is set on the damper pipe (3) and is used to regulate the amount of air entering the oxidation chamber.

7. The centralized harmless treatment device for flammable dust according to claim 5, characterized in that, It also includes a booster pump (G); the inlet of the booster pump (G) is connected to an external water source through an inlet pipe (13), and its outlet is connected to a manifold (15) through a water delivery hose (22); the manifold (15) is connected to the first spray nozzle (E8), the second spray nozzle (E9), the third spray nozzle (E10), and the fourth spray nozzle (E11) on the spiral humidifier (E) through multiple water distribution hoses (16) via the first solenoid valve (18), the second solenoid valve (19), the third solenoid valve (20), and the fourth solenoid valve (21).

8. The centralized harmless treatment device for flammable dust according to claim 6, characterized in that, The filter (F) is fixed in the dust humidification chamber by a filter mounting bracket (A23), an upper filter mounting plate (A31), and a lower filter mounting plate (A30); the filter (F) includes a housing (F1), a filter element (F14), a clean air chamber housing (F4), and an openable filter cover (F10); the filter cover (F10) is locked and sealed by a hinged screw (F7), a hinged nut (F6), and a filter cover pressure rod (F8).

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