An adaptive polishing device based on magnetostrictive material
Patent Information
- Application Number
- CN202522008329.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-18
- Publication Date
- 2026-08-18
- Estimated Expiration
- 2035-09-18
AI Technical Summary
[0002]现代尖端科技，尤其是光学、半导体、航空航天、精密仪器对复杂几何形状的硬脆材料提出了原子级光滑、无损伤、高面形精度表面的严苛要求，传统抛光技术在这些要求面前遇到了损伤、精度不足、成本高、曲面适应性差等问题，而磁致伸缩抛光能够满足这些超精密加工需求，适合于光学元件、半导体衬底、高端陶瓷部件等的最终超精加工，传统的刚性玻璃抛光工具面对复杂结构易造成加工损伤，而磁致伸缩抛光能通过磁矩的改变引起金属材料的弹性变形，从而改善上述问题，常用磁致伸缩抛光类型为以下几种：四棒式装置，其能够通过相位差电流控制抛光头椭圆运动，但输出力小、易造成断裂；双棒式装置，采用八面体硅钢片磁轭优化磁路，简化了结构，但振幅受限，抛光效率低；同时上述两种磁致伸缩装置的抛光头为固定，无法自适应凹槽形貌，面对不同情况的凹槽不易均匀抛光，且在高速抛光或局部高压强区域，摩擦产生的热量传导至抛光头内部无法及时散出，易导致局部过热，产生热应力裂纹甚至热炸裂
[0013]相比于现有技术，本实用新型的有益效果在于：设有阵列式独立磁控单元，能够生成精确可控的空间磁场分布，从而实现对磁致伸缩抛光头局部形变的精准激励，面对复杂面形时能够自适应抛光，提高抛光精度及均匀性；若干磨粒嵌入工作层内并在工作层外表面形成一层抛光面，减少振动能量在传递界面间的反射和损耗，确保磁致伸缩产生的高频微振动能够高效地传递给磨粒，从而提升了抛光效率和材料去除率；
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Figure CN224643071U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of glass precision processing technology, and more specifically, relates to an adaptive polishing device based on magnetostrictive materials. Background Technology
[0002] Modern cutting-edge technologies, especially optics, semiconductors, aerospace, and precision instruments, place stringent demands on hard and brittle materials with complex geometries to achieve atomically smooth, damage-free surfaces with high surface accuracy. Traditional polishing techniques encounter problems such as damage, insufficient precision, high cost, and poor adaptability to curved surfaces when faced with these requirements. Magnetostrictive polishing, however, can meet these ultra-precision machining needs and is suitable for the final ultra-precision machining of optical components, semiconductor substrates, and high-end ceramic parts. Traditional rigid glass polishing tools are prone to causing machining damage when dealing with complex structures, while magnetostrictive polishing can induce elastic deformation of metal materials through changes in magnetic moment. To improve the above problems, the commonly used magnetostrictive polishing types are as follows: four-bar device, which can control the elliptical motion of the polishing head through phase difference current, but the output force is small and it is easy to break; two-bar device, which uses octahedral silicon steel sheet magnetic yoke to optimize the magnetic circuit and simplify the structure, but the amplitude is limited and the polishing efficiency is low; at the same time, the polishing head of the above two types of magnetostrictive devices is fixed and cannot adapt to the groove morphology. It is not easy to polish the grooves in different situations evenly. Moreover, in high-speed polishing or local high pressure areas, the heat generated by friction is conducted to the inside of the polishing head and cannot be dissipated in time, which can easily lead to local overheating, thermal stress cracks or even thermal explosion.
[0003] Therefore, an adaptive polishing device is needed that has high polishing efficiency, can adapt to the groove morphology, has good polishing uniformity, and has good cooling effect. Utility Model Content
[0004] The technical problem to be solved by this utility model is to provide an adaptive polishing device based on magnetostrictive materials, which can meet the requirements of high polishing efficiency, adaptive groove morphology, good polishing uniformity and good cooling effect.
[0005] This invention relates to an adaptive polishing device based on magnetostrictive materials, comprising a magnetostrictive polishing head, a multi-stage electromagnetic array, a shape sensing mechanism, a polishing table, and a drive motor. The magnetostrictive polishing head includes a working layer, a magnetostrictive layer, a cooling base, and a base, which are sequentially and fixedly connected. The head of the multi-stage electromagnetic array is connected to the magnetostrictive polishing head, and its tail end is connected to the output end of the drive motor. Both the magnetostrictive polishing head and the shape sensing mechanism are fixedly mounted on the polishing table via a frame. The multi-level electromagnetic array includes a frame and several independent magnetic control units. The magnetic poles of the independent magnetic control units are installed sequentially within the frame with the same orientation, forming a magnetic pole surface at one end. This end of the multi-level electromagnetic array is inserted into the base of the magnetostrictive polishing head, so that one end of the magnetic pole surface of the multi-level electromagnetic array is electromagnetically connected to the magnetostrictive layer. A directionally controllable and concentrated magnetic field is generated near the top pole surface, which acts perpendicularly on the magnetostrictive layer stack above. Through the array of independent magnetic control units, a precise and controllable spatial magnetic field distribution can be generated, thereby achieving precise excitation of local deformation of the magnetostrictive polishing head. When facing complex surfaces, it can adaptively polish, improving polishing accuracy and uniformity.
[0006] As a further improvement of this utility model, several spiral coolant delivery pipes are opened inside the cooling base, and several coolant outlets are formed on the end face of the cooling base near the polishing head along the path of the several coolant delivery pipes; a coolant delivery port is opened at the upper end of the multi-stage electromagnetic array, and several coil cooling pipes are opened downward from the coolant delivery port. The outlets of the coil cooling pipes are connected to the coolant delivery pipes one by one. Under the premise of ensuring the supply of coolant to the polishing working area, dual high-efficiency cooling of the electromagnetic coil and the polishing area is achieved at the same time, preventing the coil from overheating and damage, and the material properties of the polishing area from deterioration or workpiece thermal damage caused by temperature rise. This ensures the long-term stable operation and processing consistency of the device, and the structure is compact, without the need for additional cooling structures.
[0007] As a further improvement of this utility model, the upper part of the polishing table is a worktable fixedly installed by the frame. A pair of glass grooves are opened on the upper surface of the worktable. In the initial state, the polishing surface of the magnetostrictive polishing head faces downward and is directly facing one of the glass grooves, while the shape sensing mechanism faces the other glass groove. The polishing table also includes a pair of clamps, an adjusting shaft, and an adjusting motor. The pair of clamps are respectively fixedly installed on both sides of the pair of glass grooves. The lower end of the adjusting shaft is slidably and rotatably connected to the frame, and the upper end is fixedly connected to the bottom of the worktable. The output end of the adjusting motor is connected to the adjusting shaft to realize the rapid switching between polishing and inspection stations. With the adjustable worktable, the online inspection and position adjustment of the workpiece shape before and after polishing can be completed efficiently, improving the automation level and processing efficiency of the polishing process.
[0008] As a further improvement of this utility model, each independent magnetic control unit includes a magnetic yoke structure that provides a closed magnetic flux path and an independent excitation coil. The coil of each independent magnetic control unit can be connected to an external drive motor and control system through independent leads, so that the current magnitude of each coil can be independently controlled, thereby driving the polishing head to produce a corresponding high-precision micro-surface morphology, so as to realize the adaptive polishing of the device, while facilitating the assembly and maintenance of a single independent magnetic control unit.
[0009] As a further improvement of this utility model, a number of abrasive grains are embedded in the working layer and form a polished surface on the outer surface of the working layer, which reduces the reflection and loss of vibration energy between the transmission interfaces and ensures that the high-frequency micro-vibration generated by magnetostriction can be efficiently transmitted to the abrasive grains, thereby improving the polishing efficiency and material removal rate.
[0010] As a further improvement of this utility model, the outlet of the coil cooling pipe and the inlet of the coolant delivery pipe are detachably connected by a sealing connector, which facilitates the separation, maintenance and replacement of the multi-stage electromagnetic array and the polishing head, ensures the sealing reliability of the cooling circuit connection and avoids the risk of coolant leakage.
[0011] As a further improvement of this utility model, the magnetostrictive layer adopts a stacked thin sheet structure to reduce eddy current loss and improve response frequency; the magnetostrictive material selected is Terfenol-D, which has a high saturation magnetostrictive coefficient and Curie temperature, can produce greater deformation, and enhance high temperature stability.
[0012] As a further improvement of this utility model, a magnetic conductive layer is fixedly installed between the working layer and the magnetostrictive layer to reduce magnetic leakage, improve magnetic circuit closure and increase magnetic field utilization, so that the magnetostrictive material can obtain a stronger and more uniform driving magnetic field, thereby improving energy conversion efficiency and polishing head output performance.
[0013] Compared with the prior art, the advantages of this utility model are as follows: It is equipped with an array of independent magnetron control units, which can generate a precise and controllable spatial magnetic field distribution, thereby achieving precise excitation of local deformation of the magnetostrictive polishing head. It can adaptively polish complex surfaces, improving polishing accuracy and uniformity; Several abrasive grains are embedded in the working layer and form a polishing surface on the outer surface of the working layer, reducing the reflection and loss of vibration energy between the transmission interfaces, ensuring that the high-frequency micro-vibrations generated by magnetostriction can be efficiently transmitted to the abrasive grains, thereby improving polishing efficiency and material removal rate; While ensuring the supply of coolant to the polishing work area, the system simultaneously achieves efficient dual cooling for both the electromagnetic coil and the polishing area. This prevents overheating damage to the coil and material property degradation or workpiece thermal damage caused by temperature rise in the polishing area, ensuring long-term stable operation and consistent processing. Furthermore, its compact structure eliminates the need for additional cooling structures. The rotating worktable allows for rapid switching between polishing and inspection stations. Combined with an adjustable worktable, it enables efficient online detection and position adjustment of workpiece morphology before and after polishing, enhancing the automation and processing efficiency of the polishing process. Each independent magnetic control unit can be driven independently. The moving polishing head generates corresponding high-precision micro-surface morphology to achieve adaptive polishing of the device; the magnetostrictive layer adopts a stacked thin-film structure to reduce eddy current loss and improve response frequency; the magnetostrictive material is selected from Terfenol-D, which has a high saturation magnetostriction coefficient and Curie temperature, can produce greater deformation, and enhance high-temperature stability; a magnetic conductive layer is fixedly installed between the working layer and the magnetostrictive layer to reduce magnetic leakage, improve magnetic circuit closure and improve magnetic field utilization, so that the magnetostrictive material can obtain a stronger and more uniform driving magnetic field, thereby improving energy conversion efficiency and polishing head output performance. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the multi-level electromagnetic array structure of this utility model; Figure 3 This is a schematic diagram of the magnetostrictive polishing head structure when the working layer of this utility model is facing upwards. Figure 4 This is an exploded view of the magnetostrictive polishing head of this utility model connected to an electromagnetic array; Figure 5 This is a schematic diagram of the sealing connector structure of this utility model; Figure 6 This is a front sectional view of the magnetostrictive polishing head of this utility model; Figure 7 For the present utility model Figure 6 Enlarged view of region A in the middle; Figure 8 This is a schematic diagram of the shape sensing mechanism and polishing table structure of this utility model.
[0015] Explanation of the labels in the diagram: 1. Magnetostrictive polishing head; 11. Working layer; 12. Magnetostrictive layer; 13. Cooling base; 14. Base; 15. Polishing surface; 16. Coolant delivery pipeline; 17. Coolant outlet; 18. Magnetic conductive layer; 19. Abrasive grains; 2. Multi-level electromagnetic array; 21. Skeleton; 22. Independent magnetic control unit; 23. Coil cooling pipeline; 24. Coolant delivery port; 25. Sealing connector; 3. Shape sensing mechanism; 31. Scanning head; 32. Fiber optic sensor array; 4. Polishing table; 41. Working plate; 42. Glass groove; 43. Fixture; 44. Adjustment shaft; 45. Adjustment motor; 5. Drive motor. Detailed Implementation
[0016] Specific Implementation Example 1: Please refer to Figures 1-8 This utility model relates to an adaptive polishing device based on magnetostrictive materials, including a magnetostrictive polishing head 1, a multi-stage electromagnetic array 2, a shape sensing mechanism 3, a polishing table 4, and a drive motor 5. The magnetostrictive polishing head 1 includes a working layer 11, a magnetostrictive layer 12, a cooling base 13, a base 14, a coolant delivery pipeline 16, and a coolant outlet 17. The working layer 11, the magnetostrictive layer 12, the cooling base 13, and the base 14 are arranged and fixedly connected from bottom to top. The multi-stage electromagnetic array 2 includes a frame 21. Several independent magnetic control units 22 are sequentially installed within the frame 21, with their magnetic poles facing the same direction, forming a magnetic pole surface at one end. The multi-stage electromagnetic array 2 is inserted into the base 14 of the magnetostrictive polishing head 1, so that one end of the magnetic pole surface of the multi-stage electromagnetic array 2 is electromagnetically connected to the magnetostrictive layer 12. The multi-stage electromagnetic array 2 generates a directionally controllable and concentrated magnetic field near its top pole surface, acting perpendicularly on the upper magnetostrictive layer stack 12. The tail end of the multi-stage electromagnetic array 2 is connected to the output end of the drive motor 5. Both the magnetostrictive polishing head 1 and the shape sensing mechanism 3 are fixed in place by the frame. Mounted above the polishing table 4, the uppermost part of the polishing table 4 is a worktable 41 fixedly installed by a frame. A pair of glass grooves 42 are opened on the upper surface of the worktable 41. In the initial state, the polishing surface 15 of the magnetostrictive polishing head 1 faces downward and is directly facing one of the glass grooves 42, while the shape sensing mechanism 3 faces the other glass groove 42. Through the independent magnetic control unit 22 in the multi-level electromagnetic array 2, the degree and speed of expansion and contraction of a specific area of the magnetostrictive layer 12 can be precisely controlled, thereby realizing high-frequency micro-amplitude precise deformation of the polishing surface 15, adapting to the complex shape of the workpiece surface, and realizing high-precision adaptive polishing.
[0017] In a further embodiment, such as Figures 2-3As shown, the cooling base 13 has several spiral coolant delivery pipes 16. Along the path of these pipes, several coolant outlets 17 are formed on the end face of the cooling base 13 near the polishing head 15, allowing coolant to be added to the worktable 41 for cooling. The multi-stage electromagnetic array 2 has a coolant delivery port 24 at its upper end, allowing external coolant to be input into the multi-stage electromagnetic array 2 through the pipes. Several coil cooling pipes 23 extend downwards from the coolant delivery port 24. One end of the coolant delivery pipe 16 connected to the multi-stage electromagnetic array 2 has several inlets. The outlets of the coil cooling pipes 23 correspond one-to-one with the inlets of the coolant delivery pipes 16 to achieve multi-stage coolant flow. This ensures the delivery of polishing coolant while simultaneously achieving internal cooling of the magnetostrictive polishing head 1 and the multi-stage electromagnetic array 2 without adding redundant cooling structures. This suppresses the heat generated by the high-frequency drive of the polishing head 15 and the eddy currents of the multi-stage electromagnetic array 2, ensuring stable long-term operation of the device and reducing device wear.
[0018] In a further embodiment, such as Figure 8 As shown, the polishing table 4 also includes a pair of clamps 43, an adjusting shaft 44 and an adjusting motor 45. The pair of clamps 43 are respectively fixedly installed on both sides of a pair of glass grooves 42 to fix and clamp the glass workpiece. The lower end of the adjusting shaft 44 is slidably and rotatably connected to the frame, and the upper end is fixedly connected to the bottom of the work plate 41 to drive the work plate 41 to rotate and adjust the height of the work plate 41. The output end of the adjusting motor 45 is connected to the adjusting shaft 44.
[0019] In a further embodiment, such as Figure 2 As shown, the multi-level electromagnetic array 2 consists of 128 independent magnetic control units 22 arranged in a 4×8×4 matrix. Each independent magnetic control unit 22 is a highly integrated miniature electromagnetic actuator. The unit itself provides a closed magnetic flux path, replacing the conventional four-bar cross-groove structure or double-bar rod-shaped magnetic yoke to realize the magnetic yoke function. Each independent magnetic control unit 22 contains an independent excitation coil for generating a controllable magnetic field and can act on the magnetostrictive layer 12 with magnetic flux to cause expansion and contraction in a specific area. By controlling the magnitude and frequency of the current flowing into the coil, the degree and speed of expansion and contraction of the magnetostrictive layer 12 can be precisely controlled. The independent magnetic control unit 22 integrates the magnetic yoke, coil, and driving functions into one unit. It adopts a compact structure while improving the accuracy and efficiency of magnetic field control and is also convenient for the assembly and maintenance of a single independent magnetic control unit 22.
[0020] In a further embodiment, such as Figures 6-7 As shown, several abrasive grains 19 are embedded in the working layer 11 and form a polished surface 15 on the outer surface of the working layer 11, which reduces the reflection and loss of vibration energy between the transmission interfaces and ensures that the high-frequency micro-vibration generated by magnetostriction can be efficiently transmitted to the abrasive grains 19, thereby improving polishing efficiency and material removal rate.
[0021] In a further embodiment, such as Figures 4-5 As shown, the multi-stage electromagnetic array 2 also includes several sealing connectors 25. The outlet of the coil cooling pipe 23 is connected to one end of the sealing connector 25, and the other end of the sealing connector 25 is connected to the inlet of the coolant delivery pipe 16, so that the coil cooling pipe 23 and the coolant delivery pipe 16 are interconnected, which facilitates the separation, maintenance and replacement of the multi-stage electromagnetic array and the polishing head, ensures the sealing reliability of the cooling circuit connection, and avoids the risk of coolant leakage.
[0022] In a further embodiment, such as Figure 8 As shown, the shape sensing mechanism 3 includes a scanning head 31 and a fiber optic sensor array 32. The scanning head 31 is electrically connected to the fiber optic sensor array 32. The fiber optic sensor array 32 is fixedly mounted on a frame above the polishing table 4. The scanning end of the scanning head 31 is directed towards one of the glass grooves 42 to scan relevant data of the glass groove 42 and to check the polishing accuracy of the product.
[0023] In a further embodiment, such as Figure 6 As shown, the magnetostrictive layer 12 adopts a stacked thin sheet structure to reduce eddy current loss and improve response frequency. The magnetostrictive material selected is Terfenol-D, which has a high saturation magnetostrictive coefficient and Curie temperature, can produce greater deformation, and enhance high temperature stability.
[0024] In a further embodiment, such as Figure 7 As shown, a thin sheet of silicon steel is fixedly installed between the working layer 11 and the magnetostrictive layer 12 as a magnetic conductive layer 18 to improve the magnetic circuit closure, prevent magnetic leakage, and enhance the local field strength of the magnetic field to improve efficiency.
[0025] In use, the glass workpiece to be polished is placed in a glass groove 42 of the polishing table 4 and fixed by a clamp 43. The shape sensing mechanism 3 scans the initial shape of the workpiece before polishing to obtain high-precision three-dimensional surface shape data. The control system generates control commands based on the shape data, driving specific independent magnetic control units 22 in the multi-level electromagnetic array 2 to generate a customized spatial magnetic field distribution. This magnetic field acts on the magnetostrictive layer 12 of the magnetostrictive polishing 1, causing precise micro-stretching deformation in the corresponding area, thereby driving the magnetic conductive layer 18 and the working layer 11 on it to generate high-frequency micro-amplitude vibration. The abrasive grains 19 embedded in the working layer 11 selectively remove material from the workpiece surface under the action of vibration. Coolant enters from the coolant inlet 24 at the top of the multi-stage electromagnetic array 2, flows through the coil cooling pipe 23 to cool the excitation coil, and then continues to enter the coolant delivery pipe 16 at the top of the magnetostrictive polishing head 1 through the sealed connector 25, and finally sprays out from the coolant outlet 17. At the same time, it provides efficient cooling to the polishing area and the inside of the device to ensure thermal stability. During the polishing process, the adjusting motor 45 can adjust the height of the worktable 4 through the adjusting shaft 44 to optimize the polishing contact state. After polishing, the worktable 4 can be moved quickly to rotate the workpiece to the bottom of the shape sensing mechanism 3 for online detection, and the polishing parameters are adjusted again according to the detection results until the surface accuracy of the workpiece meets the requirements.
Claims
1. An adaptive polishing device based on magnetostrictive materials, characterized in that: The system includes a magnetostrictive polishing head (1), a multi-level electromagnetic array (2), a shape sensing mechanism (3), a polishing table (4), and a drive motor (5). The magnetostrictive polishing head (1) includes a working layer (11), a magnetostrictive layer (12), a cooling base (13), and a base (14). The working layer (11), the magnetostrictive layer (12), the cooling base (13), and the base (14) are fixedly connected in sequence. The head of the multi-level electromagnetic array (2) is connected to the magnetostrictive polishing head (1), and the tail end is connected to the output end of the drive motor (5). The magnetostrictive polishing head (1) and the shape sensing mechanism (3) are both fixedly installed on the polishing table (4) by a frame. The multi-level electromagnetic array (2) includes a frame (21) and several independent magnetic control units (22). The several independent magnetic control units (22) are installed in the frame (21) with the same magnetic pole orientation and form a magnetic pole surface at one end. The end of the multi-level electromagnetic array (2) is inserted into the base (14) of the magnetostrictive polishing head (1) so that one end of the magnetic pole surface of the multi-level electromagnetic array (2) is electromagnetically connected to the magnetostrictive layer (12).
2. The adaptive polishing device based on magnetostrictive materials according to claim 1, characterized in that: The cooling base (13) has several spiral coolant delivery pipes (16) inside, and the cooling base (13) has several coolant outlets (17) along the path on the end face of the cooling base (13) near the polished surface (15); the multi-level electromagnetic array (2) has a coolant delivery port (24) at the top, and several coil cooling pipes (23) are opened downward from the coolant delivery port (24), and the outlets of the coil cooling pipes (23) are connected to the coolant delivery pipes (16) one by one.
3. The adaptive polishing device based on magnetostrictive materials according to claim 1, characterized in that: The upper end of the polishing table (4) is a worktable (41) fixedly installed by the frame. A pair of glass grooves (42) are opened on the upper surface of the worktable (41). In the initial state, the polishing surface (15) of the magnetostrictive polishing head (1) faces downward and is directly facing one of the glass grooves (42). The shape sensing mechanism (3) faces the other glass groove (42). The polishing table (4) also includes a pair of clamps (43), an adjustment shaft (44) and an adjustment motor (45). The pair of clamps (43) are fixedly installed on both sides of the pair of glass grooves (42). The lower end of the adjustment shaft (44) is slidably and rotatably connected to the frame, and the upper end is fixedly connected to the bottom of the worktable (41). The output end of the adjustment motor (45) is connected to the adjustment shaft (44).
4. The adaptive polishing device based on magnetostrictive materials according to claim 1, characterized in that: Each independent magnetic control unit (22) includes a yoke structure that provides a closed path for magnetic flux and an independent excitation coil. The coils of each independent magnetic control unit (22) can be connected to an external drive motor (5) and control system through independent leads, so that the current magnitude of each coil can be controlled independently.
5. The adaptive polishing device based on magnetostrictive materials according to claim 1, characterized in that: Several abrasive grains (19) are embedded in the working layer (11) and form a polished surface (15) on the outer surface of the working layer (11).
6. The adaptive polishing device based on magnetostrictive materials according to claim 2, characterized in that: The multi-level electromagnetic array (2) also includes several sealing connectors (25), the two ends of which are detachably connected to the outlet of the coil cooling pipe (23) and the inlet of the coolant delivery pipe (16).
7. The adaptive polishing device based on magnetostrictive materials according to claim 1, characterized in that: The magnetostrictive layer (12) adopts a stacked sheet structure.
8. The adaptive polishing device based on magnetostrictive materials according to claim 1, characterized in that: A magnetic conductive layer (18) is fixedly installed between the working layer (11) and the magnetostrictive layer (12).
9. The adaptive polishing device based on magnetostrictive materials according to claim 1, characterized in that: Terfenol-D was selected as the magnetostrictive material.