A tray sandblasting support device and a sandblasting support system

Abstract

The utility model relates to tray sandblast supporting device and sandblast supporting system in the technical field of tray sandblast maintenance, specifically relates to a kind of tray sandblast supporting device and sandblast supporting system, including support piece, support piece is configured as being installed between hanger bar and tray, support piece is provided with the support plane for supporting tray when sandblasting, support plane is provided with the fixed mounting position for fixing tray, the surface area of support plane is not less than the area of tray back, to be able to support tray completely when sandblasting;Support plane is also provided with the through-hole for the pipe column of tray back to pass, and the through-hole on support plane corresponds with the same effect through-hole on hanger bar. The back of tray is provided with all-round support by support plane, can avoid the bending concave deformation of tray when sandblasting by sand material impact from root, need not subsequent heat treatment procedure or oil pressure procedure to carry out plane correction, shorten tray maintenance cycle, reduce maintenance cost.

Description

Technical Field

[0001] This utility model relates to the field of tray sandblasting repair technology for coating, and specifically to a tray sandblasting support device and sandblasting support system. Background Technology

[0002] PECVD (Polyethylene Chemical Vapor Deposition) in TFT-LCD (Thin Film Transistor Liquid Crystal Display) manufacturing is a thin film deposition technology that uses chemical reactions to generate solid products from reactants (gases) and deposit them onto the surface of a substrate. It utilizes the activity of plasma to promote the reaction, enabling the chemical reaction to occur at relatively low temperatures. The process chamber controls all steps of the chemical vapor deposition process on a glass substrate, and it mainly consists of a chamber lid and a chamber body.

[0003] The susceptor is one of the key components of the Chamber Body in the TFT-LCD manufacturing process. Its main functions are: 1. to serve as the lower electrode of the parallel capacitor; 2. to serve as a support component for the substrate; 3. to provide heating conditions for the reaction; and 4. to move up and down to provide spacing conditions for the reaction.

[0004] Pallets require periodic replacement during use, and the replaced pallets are returned to the supplier for repair and cleaning. The surface roughness of the GLASS surface (sandblasted surface) in contact with the substrate is required to be 18-22 micrometers, while the roughness of the remaining parts (step surface) is required to be 3-4 micrometers. To ensure uniformity of roughness, all returned pallets need to undergo sandblasting treatment at a pressure of 2.5~4 MPa. During sandblasting, the sides of the pallet may bend and dent under pressure, causing the flatness of the pallet to exceed the control standard. Summary of the Invention

[0005] 1. The problem to be solved In view of the problem that existing pallets bend and deform during sandblasting, resulting in flatness exceeding the control standard, the present invention provides a pallet sandblasting support device and sandblasting support system, which can prevent pallets from bending and deforming during sandblasting.

[0006] 2. Technical Solution To solve the above problems, the technical solution adopted by this utility model is as follows: The first aspect of this utility model provides a pallet sandblasting support device, including a support member configured to be installed between a hanging rod and a pallet. The support member is provided with a support plane for supporting the pallet during sandblasting. The support plane is provided with a fixed mounting position for fixing the pallet. The surface area of ​​the support plane is not less than the area of ​​the back of the pallet, and it can support the pallet during sandblasting to prevent the flatness of the pallet from increasing.

[0007] The support plane is also provided with through holes for the tube column on the back of the tray to pass through, and the through holes on the support plane correspond to the through holes with the same function on the hanging rod.

[0008] In a preferred embodiment of the present invention, the support device further includes a pushing member disposed on the support member, the pushing member being used to apply a pushing force to the portion of the pallet that is bent or recessed toward the support plane, so as to correct the flatness of the pallet.

[0009] In a preferred embodiment of the present invention, the support member is further provided with a push hole that communicates with the support plane, and the push member can push the tray through the push hole.

[0010] In a preferred embodiment of this utility model, multiple pushers and pushers are provided and correspond one-to-one. Each pusher can move independently along the axial direction of the corresponding pusher hole, so that an appropriate position and an appropriate number of pushers can be selected to form a pusher area that is adapted to the deformed part according to the actual location and deformation area of ​​the deformed part of the pallet.

[0011] In a preferred embodiment of this utility model, the pushing member is disposed on the back of the support member, the pushing hole penetrates the support member, and the width of the support member is greater than the width of the hanging rod, so as to leave operating space for the pushing member.

[0012] In a preferred embodiment of this utility model, the pusher is configured as a pusher screw, the pusher hole is configured as a threaded hole, and the pusher screw is threadedly connected to the threaded hole.

[0013] In a preferred embodiment of this utility model, a rotation operation position is provided at the end of the set screw away from the tray to facilitate rotation of the set screw.

[0014] In a preferred embodiment of the present invention, a protective part is fixedly provided at one end of the pusher for pushing the tray, so as to reduce the damage to the tray when it is pushed by the pusher.

[0015] In a preferred embodiment of this utility model, the protective part is configured as a nylon pad, which is fixedly installed to the end of the pusher by screws.

[0016] In a preferred embodiment of the present invention, the support member is composed of one or more support plates; wherein, when multiple support plates are provided, the multiple support plates are fitted and fixed together, and the support planes of the multiple support plates are located on the same plane.

[0017] In a preferred embodiment of this utility model, multiple sets of fixed mounting positions are provided on the supporting plane. The multiple sets of fixed mounting positions correspond to different specifications of the trays, and each set of fixed mounting positions is adapted to the hanging holes on the corresponding specification of the tray.

[0018] In a preferred embodiment of this utility model, each set of fixed mounting positions consists of multiple fixing holes, and the number and position of the multiple fixing holes are the same as the number of hanging holes on the back of the tray of the corresponding specification.

[0019] A second aspect of the present invention provides a pallet sandblasting system, including a hanging rod and the aforementioned support device for pallet sandblasting, wherein the support is detachably connected to the hanging rod.

[0020] 3. Beneficial effects Compared with the prior art, the beneficial effects of this utility model are as follows: (1) This utility model sets a support member between the hanging rod and the tray, and sets a support plane on the support member. When sandblasting, the tray is fixed on the support plane. The support plane provides all-round support to the back of the tray, which can fundamentally prevent the tray from bending and denting due to the impact of sand material during sandblasting. No subsequent heat treatment process or hydraulic process is required for plane correction, which shortens the tray maintenance cycle and reduces maintenance costs.

[0021] (2) This utility model provides a pusher on the support member. The pusher can apply a pusher force to the tray fixed on the support plane, causing the curved and concave part on the tray to deform upward. The simple pusher operation replaces the complex heat treatment process or hydraulic process to correct the flatness.

[0022] (3) In this utility model, the pushing force of the jacking component and the pressure of the sand material are used simultaneously. These two opposite forces can promote the recovery of the flatness of the pallet. After the flatness is restored, the pallet plane is located between the upward protrusion and the downward bending depression. The deformation of the pallet is small, which can extend the service life of the pallet. Attached Figure Description

[0023] Figure 1 This is a side view of the tray; Figure 2 This is a front view diagram of the tray; Figure 3 This is a rear view diagram of the tray; Figure 4 This is a schematic diagram of a pallet being directly mounted on a hanging rod, with the arrow indicating the direction of sandblasting. Figure 5 This is a front view schematic diagram of the support component; Figure 6 This is a side sectional view of the support component; Figure 7 A schematic diagram of the structure when the pallet is fixedly installed on the supporting plane; Figure 8 This is a schematic diagram of the sandblasting system. Figure 9 This is a schematic diagram of the structure after the set screws are installed on the support component; Figure 10 Figure A shows a cross-sectional view of the top screw and the gasket, while Figure B shows a bottom view.

[0024] Explanation of the labels in the diagram: 1. Support component; 11. Support plane; 12. Fixed mounting position; 121. Fixing hole; 13. Through hole; 14. Pushing component; 15. Pushing hole; 16. Protective part; 17. Rotation operating position; 2. Hanging rod; 3. Tray; 31. Pipe column; 32. Hanging hole; 33. Bending recess; 34. Protrusion; 35. Sandblasted surface. Detailed Implementation

[0025] To further understand the content of this utility model, a detailed description of this utility model will be provided in conjunction with the accompanying drawings and embodiments.

[0026] The structures, proportions, and sizes illustrated in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the invention. They are not intended to limit the scope of the invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of the invention, should still fall within the scope of the technical content disclosed in this utility model. Furthermore, terms such as "upper," "lower," "left," "right," and "middle" used in this specification are merely for clarity and not intended to limit the scope of implementation. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention's implementation.

[0027] Example 1 like Figures 1-10As shown, this embodiment provides a pallet sandblasting support device, including a support member 1. During sandblasting, the support member 1 is disposed between the hanging rod 2 and the pallet 3 to support the pallet 3 from the back of the pallet 3 during sandblasting, so as to prevent the pallet 3 from bending and deforming due to the impact force of sandblasting.

[0028] The aforementioned support member 1 is provided with a support plane 11, which is located on the side of the support member 1 near the tray 3. The support plane 11 has a high degree of horizontality and is ideally a plane without depressions or bends.

[0029] Before sandblasting the pallet 3, the pallet 3 is placed on the support plane 11 and fixed on the support plane 11 by the fixed mounting position 12 on the support plane 11. When placed, the back of the pallet 3 faces the support plane 11, while the sandblasted surface 35 faces away from the support plane 11.

[0030] Since the back of the tray 3 has a column 31, a through hole 13 is also provided on the support plane 11, and a through hole 13 is also provided on the hanging rod 2. The through hole 13 on the support plane 11 is aligned with the through hole 13 on the hanging rod 2. When the tray 3 is placed on the support plane 11, the column 31 on the back of the tray 3 passes through the through hole 13 on the support member 1 and the hanging rod 2.

[0031] The surface area of ​​the aforementioned support plane 11 is not less than the surface area of ​​the tray 3 facing the support member 1 (back side). During sandblasting, the support plane 11 can provide comprehensive support for the tray 3 to prevent the flatness of the tray 3 from increasing. It can be understood that flatness refers to the degree to which the sandblasted surface 35 of the tray 3 approaches an ideal plane. The higher the flatness grade, the greater the deviation from the ideal plane, and vice versa. Therefore, the smaller the flatness grade of the sandblasted surface 35 of the tray 3, the better.

[0032] In existing technology, when sandblasting the surface 35, the tray 3 is fixed to the hanging rod 2. Due to the large size of the tray 3 and the small width of the hanging rod 2, the sides of the tray 3 will bend and dent under pressure during sandblasting, causing the flatness of the tray 3 to exceed the control standard. The tray 3 that exceeds the standard needs to be corrected for flatness, requiring additional heat treatment or hydraulic pressing processes. Since heat treatment and hydraulic pressing processes are time-consuming, they not only extend the cleaning and maintenance cycle of the tray but also increase maintenance costs. This utility model adds a support member 1, using the wide support plane 11 of the support member 1 to provide support for the sandblasting of the tray 3. This can fundamentally prevent the tray 3 from bending and denting due to the impact of the sand material during sandblasting, eliminating the need for subsequent heat treatment or hydraulic pressing processes for flatness correction, shortening the maintenance cycle of the tray 3, and reducing maintenance costs.

[0033] In one embodiment, the support member 1 is plate-shaped; specifically, the support member 1 may be composed of one or more support plates; when multiple support plates are provided, the multiple support plates are spliced ​​and fixed to each other, and the support plane 11 of the multiple support plates used to support and fix the tray 3 is located in the same plane. When one of the support plates is damaged, the support plate can be disassembled and replaced separately to reduce maintenance costs.

[0034] In one embodiment, multiple sets of fixed mounting positions 12 are provided, each set of fixed mounting positions 12 corresponds to a tray 3 of a certain size, and each set of fixed mounting positions 12 is adapted to the hanging hole 32 on the corresponding size of the tray 3, so that trays 3 of different sizes can be fixed on the support plane 11 through the adapted fixed mounting positions 12.

[0035] The aforementioned mounting holes 32 are located on the back of the tray 3 itself, and there may be 4, 6 or 8 of them. They are arranged in a matrix on the tray 3. As the size of the tray 3 increases, the spacing between adjacent mounting holes 32 increases. This utility model ingeniously utilizes the mounting holes of the tray 3 itself to fix and install the tray 3. The structure is simple and easy to operate.

[0036] The aforementioned fixed mounting position 12 may be composed of multiple fixing holes 121. The through hole 13 on the support member 1 should be set in the middle position of the fixed mounting position 12. The fixing holes 121 in each set of fixed mounting positions 12 correspond to the hanging holes 32 on the corresponding specification of the tray 3.

[0037] Example 2 It is understandable that when the tray 3 is deformed, as long as there is a downward bending indentation 33, there must be an upward protrusion 34. Both upward and downward are relative to the support plane 11. When the deformed tray 3 is fixedly placed on the support plane 11, the side closer to the support plane 11 is downward, and the side farther away from the support plane 11 is upward.

[0038] like Figure 9 As shown, when the deformed tray 3 is fixedly placed on the support plane 11, the downward curved recesses 33 on both sides of the tray 3 contact the support plane 11, while the upward protrusions 34 cannot contact the support plane 11, and there is a gap between the protrusions 34 and the support plane 11. During sandblasting, the downward impact force of the sandblasting on the tray 3 can cause the protrusions 34 to deform downward to restore flatness. However, it is difficult for the tray 3 to quickly restore its flatness by relying solely on the pressure exerted by the sand material sprayed from the sandblasting gun.

[0039] Based on Embodiment 1, the support device in this embodiment further includes a pusher 14 disposed on the support member 1. The pusher 14 can apply a pushing force to the tray 3 fixed on the support plane 11, causing the curved recess 33 on the tray 3 to deform upward, so as to correct the flatness of the tray 3. The flatness is corrected by replacing the complex heat treatment process or hydraulic process through the simple pushing action of the pusher 14.

[0040] In this embodiment, the coordinated restoration of the flatness of the tray 3 by the pusher 14 and the sandblasting force also has the following outstanding effects: First, the upward pushing force applied by the push rod to the downward bending recess 33 of the tray 3 is a pair of opposite forces to the downward pressure applied by the sandblasting to the protrusion 34 of the tray 3. Both of these forces can promote the restoration of the flatness of the tray 3 itself. When these two opposite forces act together on the tray 3, the flatness correction efficiency of the tray 3 can be improved.

[0041] Secondly, by relying on the pushing force of the jacking component 14 and the pressure of the sand material, these two opposing forces can promote the recovery of the flatness of the pallet 3. After the flatness is restored, the flatness of the pallet 3 is located between the upward protrusion 34 and the downward bending depression 33. The deformation of the pallet 3 is small, which can extend the service life of the pallet 3 to a certain extent.

[0042] If the flatness of the pallet 3 is restored solely by the pusher 14, the flatness of the pallet 3 will be flush with the highest point of the upward protrusion 34 after restoration. If the flatness of the pallet 3 is restored solely by the pressure of the sprayed sand on the protrusion 34, the flatness of the pallet 3 will be flush with the lowest point of the downward curved recess 33 after restoration, i.e., it will fit with the support plane 11. Whether relying solely on the pusher 14 or solely on the pressure of the sand, the pallet 3 will undergo a large deformation when restoring its flatness.

[0043] In one embodiment, the pusher 14 is disposed on the back side of the support member 1. The support member 1 is also provided with a push hole 15 connecting the back side of the support member 1 and the support plane 11. The pusher 14 can pass through the push hole 15 to apply an upward push force to the curved recess 33 on the tray 3 to correct the flatness of the tray 3. Optionally, the pusher 14 can also be disposed in the cavity in the middle of the support member 1. In this case, the push hole only needs to connect to the support plane 11.

[0044] In one embodiment, multiple pushers 14 and push holes 15 are provided, and each pusher 14 corresponds to one push hole 15. That is, one pusher 14 and one push hole 15 form a group, and each pusher 14 can move independently along the axis of the corresponding push hole 15. In this case, each pusher 14 is an independent flatness restoration unit. When the working surface corresponding to a single pusher 14 is smaller and the number of pushers 14 is larger, it is possible to more flexibly select appropriate positions and an appropriate number of pushers 14 to form a push area adapted to the deformed part according to the actual location and deformation area of ​​the deformed part of the tray 3, so as to accurately push the downward bending recess 33 of the tray 3 and restore the flatness of the tray 3.

[0045] The specific operating procedure is as follows: When the deformed tray 3 is fixedly placed on the support plane 11, first confirm the position of the downward bending recess 33 of the tray 3 on the support plane 11; then, the pusher 14 located below the bending recess 33 pushes the tray 3 upward through the pusher hole 15. Since the entire tray 3 is fixed to the support plane 11 by screws, the upward pusher 14 applies an upward force to the downward bending part of the tray 3, which can cause the downward bending recess 33 to deform upward, thereby restoring the flatness of the tray 3.

[0046] Preferably, when multiple pushers 14 are provided on the back of the support member 1, the width of the hanging rod 2 should be less than the width of the back of the support member 1, so as to reserve sufficient operating space for the pushers 14.

[0047] Optionally, the plurality of pushers 14 and the plurality of push holes 15 may be arranged in a matrix on the support 1.

[0048] In one embodiment, the pusher 14 is configured as a pusher screw with an external thread, and the pusher hole 15 is configured as a threaded hole with an internal thread. The external thread of the pusher screw is threadedly connected to the internal thread of the threaded hole. By rotating the pusher screw, the pusher screw can be moved forward or backward along the axial direction of the threaded hole. After the front end of the pusher screw protrudes from the threaded hole, a pusher force can be applied to the tray 3.

[0049] Furthermore, a rotation operation position 17 is provided at the end of the set screw away from the tray 3 to facilitate rotation of the set screw; specifically, the rotation operation position 17 can be set as a regular hexagonal socket at the end of the set screw.

[0050] In another embodiment, the pusher 14 can also be configured as a pneumatic telescopic rod, and the pusher hole 15 can be configured as a smooth hole with a smooth inner wall.

[0051] In one embodiment, a protective part 16 is fixedly provided at one end of the pusher 14 used to push the tray 3, which can prevent the end of the pusher from damaging the tray when pushing the tray 3.

[0052] Optionally, the protective part 16 is configured as a pad, specifically a nylon pad, which is fixedly installed to the end of the pusher 14 by screws.

[0053] The function of the protective part 16 will be further explained below through three embodiments in which the top screw and the protective part 16 are combined.

[0054] In the first implementation method, since the set screw is generally made of stainless steel, which has high hardness, and the contact area between the set screw and the tray 3 is small when the set screw pushes the tray 3, in order to prevent the end of the set screw from crushing the tray 3, a nylon pad is fixed to the end of the set screw with screws. This transforms the rigid contact between the set screw and the tray 3 into a flexible contact, thus preventing the end of the set screw from crushing the tray 3. The nylon pad can also be replaced with other flexible materials with strong pressure resistance.

[0055] In the second implementation method, since the set screw pushes the tray 3 during rotation, the end of the set screw will experience rotational friction with the tray 3. To reduce this friction, a top cover can be rotatably configured at the end of the set screw. The top cover and the set screw can rotate relative to each other. At this time, the number of rotations of the set screw is equal to the sum of the number of rotations of the set screw relative to the top cover and the number of rotations of the top cover relative to the tray 3. That is, under the condition that the set screw rotates the same number of times, the top cover rotates less times relative to the tray 3, which can reduce the friction on the tray 3.

[0056] In the third embodiment, the aforementioned protective pad is positioned at the end of the top cover away from the top screw, so that the protective part 16 can reduce the possibility of the top screw end crushing the tray 3, and also reduce the friction experienced by the tray 3 during the process of being pushed by the top screw.

[0057] Example 3 This embodiment provides a pallet sandblasting system, which includes a hanging rod 2 and a support 1. Before sandblasting, the pallet 3 is fixed to the support 1 using the hanging holes on the pallet 3 itself and the corresponding fixed mounting positions 12 on the support 1. Then, the support 1 is fixed to the hanging rod 2. Then, the hanging rod 2 is mounted on the mobile trolley by a crane, and the trolley is moved to the sandblasting room for sandblasting operation.

[0058] The present invention and its embodiments have been described above illustratively. This description is not restrictive, and the figures shown are only one embodiment of the present invention; the actual structure is not limited thereto. Therefore, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A pallet sandblasting support device, characterized in that: Includes a support member (1), which is configured to be installed between a hanging rod (2) and a tray (3). The support member (1) is provided with a support plane (11) for supporting the tray (3) during sandblasting. The support plane (11) is provided with a fixed mounting position (12) for fixing the tray (3). The surface area of ​​the support plane (11) is not less than the surface area of ​​the tray (3) facing the support member (1), and it can support the tray (3) during sandblasting. The support plane (11) is also provided with a through hole (13) through which the column (31) on the back of the tray (3) passes, and the through hole (13) is configured to correspond to the hole on the hanging rod (2).

2. The pallet sandblasting support device according to claim 1, characterized in that: It also includes a pusher (14) disposed on the support (1), the pusher (14) being used to apply a pusher force to the portion of the pallet (3) that is bent or recessed toward the support plane (11).

3. The pallet sandblasting support device according to claim 2, characterized in that: The support member (1) is also provided with a push hole (15) that communicates with the support plane (11), and the push member (14) can push the tray (3) through the push hole (15).

4. The pallet sandblasting support device according to claim 3, characterized in that: Multiple pushers (14) and push holes (15) are provided and correspond one to one. Each pusher (14) can move independently along the axis of the corresponding push hole (15).

5. The pallet sandblasting support device according to claim 3, characterized in that: The pusher (14) is located on the back of the support (1), and the pusher hole (15) passes through the support (1).

6. The pallet sandblasting support device according to claim 5, characterized in that: The pusher (14) is set with a pusher screw, and the pusher hole (15) is set with a threaded hole. The pusher screw and the threaded hole are threadedly connected.

7. The pallet sandblasting support device according to claim 6, characterized in that: A rotating operating position (17) is provided at the end of the set screw away from the tray (3).

8. The pallet sandblasting support device according to claim 2, characterized in that: The pusher (14) is provided with a protective part (16) at one end for pushing the tray (3).

9. The pallet sandblasting support device according to claim 8, characterized in that: The protective part (16) is configured as a pad, which is fixedly installed at the end of the pusher (14) by screws.

10. The pallet sandblasting support device according to claim 1, characterized in that: The support member (1) consists of one or more support plates; wherein, when multiple support plates are provided, the multiple support plates are attached and fixed together, and the support planes (11) of the multiple support plates are located on the same plane.

11. The pallet sandblasting support device according to claim 1, characterized in that: The fixed mounting positions (12) are provided in multiple sets on the support plane (11). The multiple sets of fixed mounting positions (12) are used to correspond to different specifications of pallets (3), and each set of fixed mounting positions (12) is configured to be compatible with the mounting holes (32) on the corresponding specifications of the pallet (3).

12. A pallet sandblasting support system, characterized in that: Includes a hanging rod (2) and a pallet sandblasting support device as described in any one of claims 1-11, wherein the support member (1) is detachably connected to the hanging rod (2).

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