Silicon barrel processing tool and silicon rod drilling apparatus

Abstract

The utility model relates to the technical field of silicon rod processing technology especially relates to a kind of silicon cylinder processing cutter and silicon rod drilling device, including handle and fixedly connected on the inner drill bushing and outer drill bushing of handle, inner drill bushing and outer drill bushing coaxial, and outer drill bushing is set in inner drill bushing outside;The end of inner drill bushing and outer drill bushing away from handle is formed first cutting part and second cutting part respectively, first cutting part protrudes from second cutting part in the direction away from handle, to make inner drill bushing contact silicon rod before outer drill bushing, its beneficial effect is that the silicon cylinder processing cutter passes through double sleeve coaxial structure design, effectively improves the processing efficiency of silicon material and significantly reduces the fracture risk in processing process.

Description

Technical Field

[0001] This utility model relates to the technical field of silicon rod processing technology, and in particular to a silicon cylinder processing tool and a silicon rod drilling device. Background Technology

[0002] The drilling efficiency of silicon ingots is affected by the number of processing cycles. Currently, the mainstream drilling machines on the market are equipped with single-cylinder cutting heads. If a silicon cylinder needs to be processed, the inner diameter needs to be processed first and then the outer diameter when drilling the silicon ingot. The two processing processes are independent, and the cutting head needs to be changed in the middle to complete the processing of a silicon cylinder.

[0003] This processing method requires tool changes, increasing the workload for workers and leading to reduced production efficiency and doubling the processing time. Furthermore, when processing the outer diameter, the lack of sufficient internal support makes the silicon cylinder prone to breakage. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a silicon cylinder processing tool and a silicon rod drilling device, which solves the technical problems of low silicon cylinder processing efficiency and easy breakage of silicon cylinders during processing in the prior art.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, the main technical solutions adopted by this utility model include:

[0008] In the first aspect, this utility model provides a silicon cylinder machining tool, including a tool holder and an inner drill sleeve and an outer drill sleeve fixedly connected to the tool holder. The inner drill sleeve and the outer drill sleeve are coaxial, and the outer drill sleeve is sleeved outside the inner drill sleeve.

[0009] The inner and outer drill sleeves have a first cutting section and a second cutting section at their ends away from the tool holder, respectively. The first cutting section protrudes from the second cutting section in a direction away from the tool holder, so that the inner drill sleeve contacts the silicon rod before the outer drill sleeve.

[0010] In one technical solution of this utility model, an outer channel is formed between the inner drill sleeve and the outer drill sleeve, and the inner drill sleeve surrounds the inner channel. The ends of both the outer channel and the inner channel away from the tool holder are open, and both the outer channel and the inner channel can be connected to the fluid supply device so that the cutting fluid is output through the open end.

[0011] In one technical solution of this utility model, a connecting plate is also included. The inner drill sleeve and the outer drill sleeve are fixedly connected to the tool holder through the connecting plate. An external liquid inlet hole and an internal liquid inlet hole are respectively opened on the connecting plate at the positions corresponding to the outer channel and the inner channel.

[0012] In one technical solution of this utility model, both the inner drill sleeve and the outer drill sleeve are detachably connected to the connecting plate;

[0013] The inner and outer drill bushings come in various models that can be matched to form a variety of silicon tube machining tools.

[0014] In one technical solution of this utility model, an outer connecting ring and an inner connecting ring are formed on the connecting plate. The outer connecting ring is threadedly connected to the outer drill sleeve, and the inner connecting ring is threadedly connected to the inner drill sleeve.

[0015] In one technical solution of this utility model, a rotating fluid supply assembly is also included. The rotating fluid supply assembly is supported on the side of the connecting plate near the tool holder and is used to connect the fluid supply device to input cutting fluid into the outer fluid inlet and the inner fluid inlet.

[0016] In one technical solution of this utility model, the rotating liquid supply assembly includes a first inner ring and a first outer ring that are fixedly connected to the connecting plate and coaxially nested. The first inner ring is located radially inside the inner liquid inlet hole, and the first outer ring is located radially outside the outer liquid inlet hole.

[0017] The rotating liquid supply assembly also includes a second inner ring, a second outer ring, and a top ring. The second inner ring and the second outer ring are nested together and fixedly connected to the top ring. The knife handle passes through the top ring. The first inner ring and the second inner ring are rotatably sealed together, and the first outer ring and the second outer ring are rotatably sealed together, so that the first outer ring, the second outer ring, the first inner ring, the second inner ring, and the top ring form a liquid supply chamber, and the liquid supply chamber is kept in communication with the inner liquid inlet and the outer liquid inlet.

[0018] The second outer ring or top ring has an inlet that communicates with the liquid supply device.

[0019] In one technical solution of this utility model, the knife handle and the connecting plate are detachably connected.

[0020] Secondly, this utility model provides a silicon rod drilling device, including the silicon cylinder processing tool in the above technical solution, and also includes a spindle, with the tool holder detachably connected to the spindle.

[0021] (III) Beneficial Effects

[0022] The beneficial effects of this utility model are: the silicon cylinder processing tool and silicon rod drilling device of this utility model, the silicon cylinder processing tool, through the double sleeve coaxial structure design, effectively improves the processing efficiency of silicon materials and significantly reduces the risk of breakage during the processing.

[0023] First, by inserting the inner drill sleeve first, the tool provides support for the silicon cylinder during the machining of the outer drill sleeve. It also effectively releases residual stress inside the silicon rod, preventing cracks and material breakage caused by stress concentration during subsequent outer diameter machining, thus significantly improving the yield rate. Second, the coaxial arrangement of the inner and outer drill sleeves ensures the concentricity of the inner hole and outer diameter during machining, reducing vibration and stress unevenness caused by eccentric cutting, further enhancing machining stability. Third, this tool enables simultaneous inner and outer diameter drilling in a single operation, eliminating the cumbersome steps of multiple clamping and tool changes required in traditional processes, significantly shortening the machining cycle and greatly improving production efficiency. Attached Figure Description

[0024] Figure 1 This is one of the structural schematic diagrams of the silicon barrel machining tool of this utility model;

[0025] Figure 2 This is the second structural schematic diagram of the silicon cylinder machining tool of this utility model;

[0026] Figure 3 This is the third schematic diagram of the silicon cylinder machining tool of this utility model.

[0027] [Explanation of Labels in the Attached Image]

[0028] 1. Knife handle;

[0029] 2. Inner drill sleeve; 2a. Inner channel;

[0030] 3. External drill sleeve; A. Cutting section; 3a. External passage;

[0031] 4. Connecting plate; 4a. External liquid inlet; 4b. Internal liquid inlet;

[0032] 5. Rotate the liquid supply assembly;

[0033] 51. First inner ring; 52. First outer ring; 53. Second inner ring; 54. Second outer ring; 55. Top ring; B. Liquid supply chamber; 54a. Liquid inlet. Detailed Implementation

[0034] To better explain and facilitate understanding of this utility model, the following description is provided in conjunction with the appendix. Figures 1-3 This invention will be described in detail through specific embodiments. Wherein, directional terms such as "upper" and "lower" are used in this document. Figure 1 The orientation is used as a reference.

[0035] Example 1:

[0036] Reference Figures 1-3The present invention provides a silicon cylinder machining tool, including a tool holder 1 and an inner drill sleeve 2 and an outer drill sleeve 3 fixedly connected to the tool holder 1. The inner drill sleeve 2 and the outer drill sleeve 3 are coaxial, and the outer drill sleeve 3 is sleeved outside the inner drill sleeve 2.

[0037] The inner drill sleeve 2 and the outer drill sleeve 3 are respectively formed at the ends away from the tool holder 1, forming a first cutting part A and a second cutting part C. The first cutting part A protrudes from the second cutting part C in a direction away from the tool holder 1, so that the inner drill sleeve 2 contacts the silicon rod before the outer drill sleeve 3.

[0038] This silicon barrel machining tool, with its double-sleeve coaxial structure design, effectively improves the machining efficiency of silicon materials and significantly reduces the risk of breakage during processing. Specifically, the inner drill sleeve 2 and the outer drill sleeve 3 are both firmly fixed to the tool holder 1 and maintain a strict coaxial relationship. The outer drill sleeve 3 is arranged around the outside of the inner drill sleeve 2, forming a stable concentric support structure. At the tip of the tool, i.e., the cutting part of the inner drill sleeve 2 is located in front of the outer drill sleeve 3, this stepped cutting part layout allows the inner drill sleeve 2 to contact and cut into the silicon rod material first during the internal drilling and external diameter machining of the silicon rod, forming the internal hole first, and then the outer drill sleeve 3 simultaneously machines the outer diameter of the silicon rod.

[0039] First, by inserting the inner drill sleeve 2 first, it provides support for the silicon cylinder during the machining of the outer drill sleeve 3, and effectively releases residual stress inside the silicon rod. This prevents cracking and material breakage caused by stress concentration during subsequent outer diameter machining, greatly improving the yield rate. Second, the coaxial arrangement of the inner drill sleeve 2 and the outer drill sleeve 3 ensures the concentricity of the inner hole and outer diameter during machining, reducing vibration and stress unevenness caused by eccentric cutting, further improving machining stability. Third, this tool enables simultaneous completion of inner hole drilling and outer diameter drilling in one operation, eliminating the cumbersome steps of multiple clamping and tool changing required in traditional processes, significantly shortening the machining cycle and greatly improving production efficiency.

[0040] Example 2:

[0041] Reference Figures 1-3 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0042] An outer channel 3a is formed between the inner drill sleeve 2 and the outer drill sleeve 3. The inner drill sleeve 2 surrounds the inner channel 2a. The ends of the outer channel 3a and the inner channel 2a away from the tool holder 1 are both open. Both the outer channel 3a and the inner channel 2a can be connected to the fluid supply device so that the cutting fluid can be output through the open end.

[0043] In this embodiment, the design of the cooling and chip removal system is further optimized, significantly improving the heat dissipation efficiency and cleanliness of the machining process. Specifically, an annular outer channel 3a is formed between the inner drill sleeve 2 and the outer drill sleeve 3, while the inner drill sleeve 2 itself encloses and forms the inner channel 2a. Both of these independent fluid channels extend from the tool holder 1 to the cutting area at the tip of the tool. Both the outer channel 3a and the inner channel 2a have openings at their ends away from the tool holder 1. These openings are located near the first cutting section A and the second cutting section C, enabling precise direct delivery of cutting fluid to the cutting edge areas of the inner drill sleeve 2 and the outer drill sleeve 3 that contact the silicon rod. Both the inner channel 2a and the outer channel 3a can be connected to an external fluid supply device to achieve a continuous and stable supply of cutting fluid.

[0044] First, the inner channel 2a directly delivers cutting fluid to the cutting area at the front end of the inner drill sleeve 2, achieving efficient cooling and lubrication of the inner hole machining surface. This effectively suppresses high temperatures generated by friction and prevents microcracks or thermal damage to the silicon material due to excessive local thermal stress. Second, the outer channel 3a sprays cutting fluid from the annular gap between the inner and outer drill sleeves 3, covering the cutting edge of the outer drill sleeve 3 and the outer diameter machining surface of the silicon rod. This not only enhances the cooling effect of the outer diameter cutting area but also promptly washes away silicon chips generated during machining, preventing surface scratches or accelerated tool wear caused by chip accumulation. The dual-channel synchronous fluid supply ensures that both the inner hole and outer diameter machining areas receive sufficient and uniform cooling and cleaning, effectively balancing the temperature and stress fields of the entire cutting area. This further reduces the risk of silicon barrel fracture due to thermal or mechanical stress concentration. Simultaneously, the excellent chip removal capability ensures the continuity and stability of the machining process, reducing abnormal tool wear or machining interruptions caused by blockages or interference. This improves machining efficiency while ensuring the machining quality and dimensional accuracy of the inner and outer surfaces of the silicon barrel. Therefore, this integrated cooling and chip removal structure not only improves the functionality of the cutting tool, but also works in conjunction with the aforementioned stepped cutting design to achieve efficient, safe, and high-yield integrated machining of silicon barrels.

[0045] Example 3:

[0046] Reference Figures 1-3 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0047] It also includes a connecting plate 4, and the inner drill sleeve 2 and the outer drill sleeve 3 are fixedly connected to the tool holder 1 through the connecting plate 4. The connecting plate 4 has an outer liquid inlet hole 4a and an inner liquid inlet hole 4b respectively at the positions corresponding to the outer channel 3a and the inner channel 2a.

[0048] In this embodiment, the silicon barrel machining tool further achieves a stable connection between the various functional components of the tool and precise flow of fluid channels by introducing a connecting plate 4. The connecting plate 4, as a transition and connection component, firmly integrates the inner drill sleeve 2, the outer drill sleeve 3, and the tool holder 1, ensuring the rigidity and coaxiality of the entire tool structure during high-speed rotation and cutting. The connecting plate 4 not only enhances the overall mechanical strength of the tool but also provides a reliable foundation for the integration of the cooling system.

[0049] The connecting plate 4 has an external inlet hole 4a and an internal inlet hole 4b at positions corresponding to the outer channel 3a and inner channel 2a, respectively. The external inlet hole 4a communicates with the outer channel 3a, and the internal inlet hole 4b communicates with the inner channel 2a. These two inlets can be connected to the output end of an external fluid supply device, thereby introducing cutting fluid into the outer channel 3a and inner channel 2a respectively, ensuring that the coolant can be efficiently and stably delivered to the front cutting area. At the same time, this structure facilitates modular assembly and maintenance of the tool, and the connecting plate 4 can be machined and inspected as an independent component, improving overall manufacturing accuracy and assembly efficiency.

[0050] The inner inlet hole 4b guides the cutting fluid into the inner channel 2a, directly reaching the front end of the inner drill sleeve 2, achieving concentrated cooling and lubrication of the inner hole cutting area. The outer inlet hole 4a introduces the cutting fluid into the outer channel 3a, allowing it to be transported forward along the annular space between the inner and outer drill sleeves 3, and finally ejected from the opening at the front end of the outer channel 3a, covering the cutting edge and outer cylindrical machining surface of the outer drill sleeve 3. The dual-path fluid supply ensures that both the inner and outer cutting areas receive sufficient cooling and chip removal support, effectively suppressing the accumulation of machining heat and reducing the risk of cracks in the silicon material due to uneven thermal stress.

[0051] Example 4:

[0052] Reference Figures 1-3 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0053] Both the inner drill sleeve 2 and the outer drill sleeve 3 are detachably connected to the connecting plate 4; the inner drill sleeve 2 and the outer drill sleeve 3 have various models that can be matched with each other to form various models of silicon cylinder machining tools.

[0054] In this embodiment, the silicon barrel machining tool further adopts a detachable connection structure, which significantly improves the tool's flexibility, adaptability, and economy.

[0055] Specifically, the inner drill sleeve 2, the outer drill sleeve 3 and the tool holder 1 are connected by a detachable method, such as by a thread, quick-change interface or precision positioning sleeve, to achieve stable assembly and convenient disassembly. The inner drill sleeve 2 and the outer drill sleeve 3 can be replaced according to actual processing needs without replacing the entire tool holder 1, thereby reducing tool maintenance and usage costs.

[0056] The inner drill sleeve 2 and outer drill sleeve 3 are designed with multiple compatible models. For example, inner drill sleeves 2 with different inner diameters can be combined with outer drill sleeves 3 with different outer diameters to meet the needs of machining silicon cylinders of different specifications. By adjusting the diameter of the inner drill sleeve 2, the inner hole size of the silicon cylinder can be controlled, while changing the outer drill sleeve 3 with different outer diameters can precisely control the outer diameter of the silicon cylinder. The modular combination method allows the same tool holder 1 to be adapted to various combinations of inner and outer drill sleeves 3, thus forming a series of silicon cylinder machining tools with different machining specifications. First, by changing different models of inner and outer drill sleeves 3, machining tasks of silicon cylinders of different sizes can be flexibly handled without changing the tool holder 1 or reclamping the workpiece, greatly improving the versatility and production adaptability of the tools, reducing downtime caused by changing the tool system, and further improving machining efficiency. Second, the modular design facilitates tool maintenance and management. When a component, such as the inner drill sleeve 2, is worn or damaged, only that component needs to be replaced, instead of scrapping the entire tool set, effectively reducing production costs. In addition, the combination of multiple models enables the tooling system to accurately match the size differences of different silicon rod raw materials, optimize cutting parameters, reduce material waste, and improve material utilization.

[0057] Combining the aforementioned stepped cutting structure, dual-channel cooling system, and four-inlet design of the connecting plate, this detachable and multi-model combination solution not only enhances the practicality of the cutting tools but also achieves efficient, stable, and low-cost precision machining of silicon barrels. Through flexible configuration, it can quickly respond to diverse machining needs while maintaining high precision and high yield, completely solving the problems of traditional cutting tools being highly specialized, inconvenient to replace, costly, and difficult to adapt to multi-specification production. This provides reliable technical support for the efficient and flexible machining of silicon materials.

[0058] Example 5:

[0059] Reference Figures 1-3 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0060] An outer connecting ring and an inner connecting ring are formed on the connecting plate 4. The outer connecting ring is threaded to the outer drill sleeve 3, and the inner connecting ring is threaded to the inner drill sleeve 2. The screwing direction of the inner drill sleeve 2 and the outer drill sleeve 3 is opposite to the rotation direction of the inner drill sleeve 2 and the outer drill sleeve 3 when processing silicon rods.

[0061] In this embodiment, an outer connecting ring and an inner connecting ring are integrally formed or precision machined on the connecting plate 4. The outer connecting ring is connected to the outer drill sleeve 3 via a threaded engagement, and the inner connecting ring is connected to the inner drill sleeve 2 via a threaded engagement. The thread direction design is opposite to the rotation direction of the tool when machining the silicon rod. That is, when the tool rotates clockwise or counterclockwise for cutting under normal working conditions, the thread direction setting ensures that the rotational motion will not cause the connection to loosen, but will instead cause the inner and outer drill sleeves 3 to tighten under the cutting force. This effectively prevents the risk of the inner drill sleeve 2 or the outer drill sleeve 3 loosening during high-load machining.

[0062] Operators can easily loosen the drill bushing in reverse rotation for replacement or maintenance while the machine is stopped. During processing, the connection automatically locks in, balancing ease of assembly and disassembly with operational safety. Especially in applications like silicon material processing where precision and stability are extremely critical, this prevents minor vibrations or eccentricities caused by loose connections, thus ensuring the coaxiality of the inner and outer diameters of the silicon cylinder and its surface finish.

[0063] Combining the aforementioned stepped cutting, dual-channel cooling, and modular multi-model configuration features, this self-tightening threaded connection structure further enhances the overall reliability and durability of the cutting tool. It not only solves the technical hazard of loosening of detachable cutting tools under dynamic conditions but also improves the continuity and safety of the machining process, effectively preventing machining interruptions or workpiece scrap caused by connection failure. Therefore, this technical solution achieves efficient and flexible silicon barrel machining while ensuring long-term stable operation of the cutting tool under complex working conditions.

[0064] Example 6:

[0065] Reference Figures 1-3 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0066] It also includes a rotating fluid supply assembly 5, which is supported on the connecting plate 4 near the tool holder 1 and is used to connect the fluid supply device to input cutting fluid into the outer fluid inlet 4a and the inner fluid inlet 4b.

[0067] In this embodiment, the silicon barrel machining tool further integrates a rotating fluid supply component 5 to achieve a continuous and stable supply of cutting fluid to the tool when it is rotating at high speed.

[0068] The rotating liquid supply assembly 5 includes a first inner ring 51 and a first outer ring 52, which are fixedly connected to the connecting plate 4 and coaxially nested. The first inner ring 51 is located radially inside the inner liquid inlet 4b, and the first outer ring 52 is located radially outside the outer liquid inlet 4a. The rotating liquid supply assembly 5 also includes a second inner ring 53, a second outer ring 54, and a top ring 55. The second inner ring 53 and the second outer ring 54 are nested together and fixedly connected to the top ring 55. The knife handle 1 passes through the top ring 55. The first inner ring 51 and the second inner ring 53 are rotatably and sealingly connected, and the first outer ring 52 and the second outer ring 54 are rotatably and sealingly connected, so that the first outer ring 52, the second outer ring 54, the first inner ring 51, the second inner ring 53, and the top ring 55 form a liquid supply chamber B, and the liquid supply chamber B is kept in communication with the inner liquid inlet 4b and the outer liquid inlet 4a. The second outer ring 54 or the top ring 55 has a liquid inlet 54a that communicates with the liquid supply device.

[0069] In the assembled state, a rotational seal is formed between the first inner ring 51 and the second inner ring 53, and another rotational seal is formed between the first outer ring 52 and the second outer ring 54. Through these two precise dynamic seals, the first outer ring 52, the second outer ring 54, the first inner ring 51, the second inner ring 53, and the top ring 55 together form a closed fluid supply chamber B. This fluid supply chamber B is spatially continuously connected to the inner fluid inlet 4b and the outer fluid inlet 4a on the connecting plate 4, thereby ensuring that the cutting fluid input from the external fluid supply device can stably enter the dual-channel cooling system inside the tool.

[0070] The second outer ring 54 or the top ring 55 is provided with an inlet 54a connected to an external fluid supply device. The cutting fluid enters the fluid supply chamber B through this inlet, and after being evenly distributed within the chamber, flows into the outer inlet hole 4a corresponding to the first outer ring 52 and the inner inlet hole 4b corresponding to the first inner ring 51, respectively. Finally, it is transported to the front cutting area via the outer channel 3a and the inner channel 2a. Because the first inner ring 51 and the second outer ring 54, and the first outer ring 52 and the second outer ring 54 are both rotary seal structures, even when the tool holder 1 and the connecting plate 4 are rotating at high speed, the fluid supply chamber B can still maintain good sealing performance, effectively preventing cutting fluid leakage or cross-flow, and ensuring the reliability and efficiency of fluid transmission.

[0071] The double-layer nested annular structure, combined with a dynamic seal, achieves efficient coupling between the rotating components and the stationary fluid supply system. The annular layout of the fluid supply chamber B ensures even pressure and uniform distribution of the cutting fluid before it enters the inner and outer channels 3a, avoiding insufficient cooling or uneven cooling due to uneven flow, and further improving thermal management capabilities during silicon barrel machining. This structure integrates the fluid supply assembly into the root of the tool holder 1, resulting in a compact layout that does not occupy additional axial space, facilitating rapid tool clamping and integrated application in automated equipment.

[0072] Specifically, the rotating sealing structure can be achieved through a sealing ring or by referring to the principle of a rotary joint, which will not be elaborated here.

[0073] Example 7:

[0074] Reference Figures 1-3 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0075] The tool holder 1 and the connecting plate 4 are detachably connected, allowing different silicon barrel machining tools to share the same tool holder 1, reducing the cost of silicon barrel machining tools and improving component interchangeability. The detachable connection method can be a threaded connection, and the direction of thread tightening is opposite to the rotation direction of the machining tool.

[0076] Example 8:

[0077] In addition to providing a silicon rod drilling device, the embodiments of this utility model include the silicon cylinder processing tool in any of the above embodiments, and also include a spindle. The tool holder 1 is detachably connected to the spindle. Therefore, the silicon rod drilling device includes all the beneficial effects of any of the above technical solutions. To avoid repetition, it will not be described in detail here.

[0078] It can be understood that, except for conflicting parts, the above embodiments 1-9 can be freely combined to form other embodiments of this utility model.

[0079] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0080] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0081] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0082] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0083] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A silicon barrel processing tool characterized by: It includes a tool holder (1) and an inner drill sleeve (2) and an outer drill sleeve (3) fixedly connected to the tool holder (1). The inner drill sleeve (2) and the outer drill sleeve (3) are coaxial, and the outer drill sleeve (3) is sleeved outside the inner drill sleeve (2). The inner drill sleeve (2) and the outer drill sleeve (3) form a first cutting part (A) and a second cutting part (C) respectively at the ends away from the tool holder (1). The first cutting part (A) protrudes from the second cutting part (C) in a direction away from the tool holder (1) so that the inner drill sleeve (2) contacts the silicon rod before the outer drill sleeve (3).

2. The silicon barrel processing tool of claim 1, wherein: An outer channel (3a) is formed between the inner drill sleeve (2) and the outer drill sleeve (3). The inner drill sleeve (2) surrounds the inner channel (2a). The outer channel (3a) and the inner channel (2a) are both open at the ends away from the tool holder (1). The outer channel (3a) and the inner channel (2a) can both be connected to the fluid supply device so that the opening can output cutting fluid.

3. The silicon barrel processing tool of claim 2, wherein: It also includes a connecting plate (4), the inner drill sleeve (2) and the outer drill sleeve (3) are fixedly connected to the tool holder (1) through the connecting plate (4), and the connecting plate (4) is provided with an outer liquid inlet hole (4a) and an inner liquid inlet hole (4b) respectively corresponding to the positions of the outer channel (3a) and the inner channel (2a).

4. The silicon barrel processing tool of claim 3, wherein: Both the inner drill sleeve (2) and the outer drill sleeve (3) are detachably connected to the connecting plate (4); The inner drill sleeve (2) and the outer drill sleeve (3) have various models that can be matched with each other to form various models of silicon tube machining tools.

5. The silicon barrel machining tool as described in claim 4, characterized in that: An outer connecting ring and an inner connecting ring are formed on the connecting plate (4). The outer connecting ring is threaded to the outer drill sleeve (3), and the inner connecting ring is threaded to the inner drill sleeve (2).

6. The silicon barrel machining tool as described in claim 3, characterized in that: It also includes a rotating fluid supply assembly (5), which is supported on the side of the connecting plate (4) near the tool holder (1) and is used to connect the fluid supply device to input cutting fluid into the outer fluid inlet (4a) and the inner fluid inlet (4b).

7. The silicon barrel machining tool as described in claim 6, characterized in that: The rotating liquid supply assembly (5) includes a first inner ring (51) and a first outer ring (52) that are fixedly connected to the connecting plate (4) and coaxially nested. The first inner ring (51) is located on the radial inner side of the inner liquid inlet hole (4b), and the first outer ring (52) is located on the radial outer side of the outer liquid inlet hole (4a). The rotating liquid supply assembly (5) further includes a second inner ring (53), a second outer ring (54), and a top ring (55). The second inner ring (53) and the second outer ring (54) are nested together and fixedly connected to the top ring (55). The knife handle (1) passes through the top ring (55). The first inner ring (51) is rotatably and sealingly connected to the second inner ring (53). The first outer ring (52) is rotatably and sealingly connected to the second outer ring (54), so that the first outer ring (52), the second outer ring (54), the first inner ring (51), the second inner ring (53), and the top ring (55) form a liquid supply chamber (B), and the liquid supply chamber (B) is kept in communication with the inner liquid inlet (4b) and the outer liquid inlet (4a). The second outer ring (54) or top ring (55) has an inlet (54a) that communicates with the liquid supply device.

8. The silicon barrel machining tool as described in claim 3, characterized in that: The handle (1) is detachably connected to the connecting plate (4).

9. A silicon rod drilling device, characterized in that: The tool includes a silicon barrel machining tool as described in any one of claims 1-8, and also includes a spindle, wherein the tool holder (1) is detachably connected to the spindle.

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