A centering clamping mechanism

Abstract

The utility model belongs to the technical field of semiconductor manufacturing equipment especially relates to a kind of centering clamping mechanism, including drive mechanism, centering mechanism, moving mechanism and clamping mechanism. Drive mechanism includes base plate, drive cylinder and cylinder block. Centering mechanism mechanism includes first connecting plate, first toothed plate, gear, bearing, pivot, second connecting plate and second toothed plate. Clamping mechanism includes first clamping frame, second clamping frame. The centering clamping mechanism provided in the application, through the meshing transmission structure of gear and double toothed plate, when the first toothed plate of one side is moved by drive cylinder, the second toothed plate of the other side will be realized synchronous reverse movement by gear transmission, ensure that first clamping frame and second clamping frame always symmetric motion with mechanism center as reference, to guarantee that silicon crystal bar is automatically centered in clamping process, effectively avoid the phenomenon of deviation, and improve the length detection precision of silicon crystal bar.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, and in particular relates to a centering clamping mechanism. Background Technology

[0002] In the semiconductor material manufacturing process, the length of the silicon ingot is a critical inspection parameter, and its accuracy directly affects the quality control of subsequent processes such as slicing and machining. To ensure the accuracy of length inspection, the silicon ingot needs to be stably fixed by a clamping mechanism to ensure that its axis is aligned with the reference axis of the inspection equipment.

[0003] Traditional silicon ingot clamping mechanisms typically employ single-sided or dual-sided independent drive methods to achieve clamping action. Single-sided drive mechanisms use a single power source to move one clamping arm while the other is fixed. This structure easily leads to the silicon ingot shifting towards the fixed side during clamping, compromising center positioning accuracy. While dual-sided independent drive mechanisms can achieve bidirectional movement, synchronization errors between the two power sources (such as air pressure fluctuations or mechanical gaps) can easily cause the silicon ingot clamping center to shift, resulting in the detection reference not coinciding with the actual axis and thus generating significant length detection errors. Utility Model Content

[0004] The purpose of this invention is to provide a centering clamping mechanism, which aims to solve the technical problem in the prior art where the silicon crystal rod detection reference does not coincide with the actual axis, resulting in a large length detection error.

[0005] To achieve the above objectives, the present utility model provides a centering clamping mechanism, including a driving mechanism, a centering mechanism, a moving mechanism, and a clamping mechanism. The centering mechanism is disposed on the driving mechanism and the moving mechanism, the moving mechanism is disposed on the driving mechanism, and the clamping mechanism is disposed on the moving mechanism.

[0006] The driving mechanism includes a base plate, a driving cylinder, and a cylinder block. The driving cylinder is fixed to the base plate, and the cylinder block is fixed to the driving cylinder and the centering mechanism, respectively. The base plate is provided with a first movable groove and a second movable groove.

[0007] The centering mechanism includes a first connecting plate, a first toothed plate, a gear, a bearing, a rotating shaft, a second connecting plate, and a second toothed plate. The first connecting plate is fixed to the cylinder block and the first toothed plate, and both the first and second toothed plates are meshed with the gear. The gear is located in the middle of the base plate, and the bearing is fixed to the gear and the rotating shaft, respectively. The rotating shaft is fixed to the base plate. The second connecting plate is fixed to the second toothed plate and the moving mechanism.

[0008] The clamping mechanism includes a first clamping frame and a second clamping frame, both of which are disposed on the moving mechanism.

[0009] As an optional solution of this utility model, the moving mechanism includes a slide rail, a first moving component, and a second moving component. The slide rail is fixed to the bottom side of the base plate. The first moving component is respectively disposed on the first connecting plate, the slide rail, and the first clamping frame. The second moving component is respectively disposed on the second connecting plate, the slide rail, and the second clamping frame. The first moving component and the second moving component are arranged in parallel and opposite directions.

[0010] As an optional solution of this utility model, the first moving component includes a first moving base, a first moving plate, and a first slider. The first moving base is fixed to the first connecting plate and the first moving plate, and the first moving plate is fixed to the slider and the first clamping frame. The first slider is slidably connected to the slide rail.

[0011] As an optional embodiment of this utility model, the second moving component includes a second moving base, a second moving plate, and a second slider. The second moving base is fixed to the second connecting plate and the second moving plate, and the second moving plate is fixed to the slider and the second clamping frame. The second slider is slidably connected to the slide rail.

[0012] As an optional solution of this utility model, the first clamping frame and the second clamping frame are arranged in parallel and symmetrically, and the first clamping frame and the second clamping frame are arranged at intervals to form a clamping gap.

[0013] As an optional solution of this utility model, the first clamping frame is provided with a first anti-collision post, and there are multiple first anti-collision posts, which are evenly fixed to the first clamping frame; the second clamping frame is provided with a second anti-collision post, and there are multiple second anti-collision posts, which are evenly fixed to the second clamping frame; the first anti-collision posts and the second anti-collision posts are arranged in parallel and symmetrically.

[0014] As an optional solution of this utility model, a fixing frame is fixedly connected to the side of the substrate.

[0015] The above-mentioned technical solutions of the centering clamping mechanism provided in this embodiment of the utility model have at least one of the following technical effects:

[0016] The centering clamping mechanism provided in this application uses a gear and double toothed plate meshing transmission structure. When the drive cylinder drives the first toothed plate on one side to move, the second toothed plate on the other side will move synchronously in the opposite direction through gear transmission. This ensures that the first clamping frame and the second clamping frame always move symmetrically with the center of the mechanism as the reference, thereby ensuring that the silicon crystal rod is automatically centered during the clamping process, effectively avoiding the deviation phenomenon, and improving the accuracy of silicon crystal rod length detection. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A perspective view of the centering clamping mechanism provided in an embodiment of this utility model.

[0019] Figure 2 A perspective view of the centering clamping mechanism provided in this embodiment of the utility model, omitting the fixing frame.

[0020] Figure 3 A perspective view of the centering clamping mechanism provided in this embodiment of the utility model, omitting the fixing frame.

[0021] Figure 4 A perspective view of the centering clamping mechanism provided in this embodiment of the utility model, omitting the fixing frame.

[0022] The following are the labeling elements in the figure:

[0023] 1. Drive mechanism; 2. Centering mechanism; 3. Clamping mechanism; 4. Slide rail; 5. First moving component; 6. Second moving component; 7. Fixing frame;

[0024] 11. Substrate; 12. Drive cylinder; 13. Cylinder block;

[0025] 21. First connecting plate; 22. First gear plate; 23. Gear; 24. Bearing; 25. Shaft; 26. Second connecting plate; 27. Second gear plate;

[0026] 31. First clamping frame; 32. Second clamping frame;

[0027] 51. First movable seat; 52. First movable plate; 53. First slider;

[0028] 61. Second movable seat; 62. Second movable plate; 63. Second slider;

[0029] 111. First movable slot; 112. Second movable slot;

[0030] 311. First anti-collision post;

[0031] 321. Second anti-collision post. Detailed Implementation

[0032] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the embodiments of this utility model, and should not be construed as limiting the utility model.

[0033] In the description of the embodiments of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0035] In this embodiment of the invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment of the invention according to the specific circumstances.

[0036] In one embodiment of this utility model, such as Figures 1-4 As shown, a centering clamping mechanism is provided, including a drive mechanism 1, a centering mechanism 2, a moving mechanism, and a clamping mechanism 3.

[0037] The drive mechanism 1 serves as the mounting base and power source for the entire device, and includes a base plate 11, a drive cylinder 12, and a cylinder block 13. The drive cylinder 12 is fixed to the left side of the upper surface of the base plate 11 by bolts. The cylinder block 13 is made of aluminum alloy and is fixed to the end of the piston rod of the drive cylinder 12 by threaded connection. Two parallel square movable slots are formed on the base plate 11: a first movable slot 111 located on the left and a second movable slot 112 located on the right.

[0038] The centering mechanism 2 is mounted on the upper surface of the base plate 11 to achieve bidirectional synchronous movement. It includes a first connecting plate 21, a first gear plate 22, a gear 23, a bearing 24, a rotating shaft 25, a second connecting plate 26, and a second gear plate 27. The first connecting plate 21 is an L-shaped steel plate, one end of which is fixed to the cylinder block 13 by bolts, and the other end is fixed to the first gear plate 22 by welding. The first gear plate 22 and the second gear plate 27 are both spur gears with a specific module, arranged parallel to each other with their tooth surfaces facing each other. The gear 23 is a spur gear with a specific module and number of teeth, fixed to the outer ring of the bearing 24 by a flat key. The bearing 24 is a deep groove ball bearing, and its inner ring is interference-fitted with the rotating shaft 25. The rotating shaft 25 is vertically welded to the center of the base plate 11. The second connecting plate 26 has a structure symmetrical to the first connecting plate 21, one end of which is welded to the second gear plate 27, and the other end is connected to the second moving seat 61 of the moving mechanism.

[0039] The moving mechanism is installed on the bottom side of the substrate 11 and includes a slide rail 4, a first moving assembly 5, and a second moving assembly 6. The slide rail 4 is fixed to the center of the bottom side of the substrate 11 by bolts. The first moving assembly 5 includes a first moving seat 51, a first moving plate 52, and a first slider 53. The upper end of the first moving seat 51 is fixed to the first connecting plate 21 by bolts, and the lower end passes through the first movable groove 111 and is welded to the first moving plate 52. One side of the first moving plate 52 is fixed to the first slider 53 by bolts, and the other side is welded to the first clamping frame 31. The first slider 53 is slidably engaged with the slide rail 4. The second moving assembly 6 includes a second moving seat 61, a second moving plate 62, and a second slider 63. The second moving assembly 6 is symmetrical in structure to the first moving assembly 5. Its second moving seat 61 passes through the second movable groove 112 and is connected to the second moving plate 62. The second moving plate 62 is fixedly connected to the second slider 63 and the second clamping frame 32 respectively. The second slider 63 is also slidably engaged with the slide rail 4.

[0040] The clamping mechanism 3 includes a first clamping frame 31 and a second clamping frame 32, both of which are L-shaped aluminum alloy frames with openings facing each other. A first anti-collision post 311 and a second anti-collision post 321 are respectively fixed to the clamping surfaces of the first clamping frame 31 and the second clamping frame 32 by threaded connections, with the positions of the anti-collision posts on both sides corresponding one-to-one.

[0041] Furthermore, a mounting bracket 7 is fixedly connected to the side of the substrate 11 to facilitate the fixed installation of the entire mechanism.

[0042] The working process of this embodiment is as follows:

[0043] When it is necessary to clamp the silicon ingot, the piston rod of the drive cylinder 12 extends, pushing the cylinder block 13 to move to the right, which drives the first toothed plate 22 to move to the right through the first connecting plate 21; the first toothed plate 22 meshes with the gear 23, driving the gear 23 to rotate counterclockwise, which in turn drives the second toothed plate 27 meshing with it to move to the left, and the second toothed plate 27 drives the second moving component 6 to move through the second connecting plate 26; under the guidance of the moving mechanism, the first clamping frame 31 moves to the right with the first moving component 5, and the second clamping frame 32 moves to the left with the second moving component 6, and the two move closer together until the anti-collision post contacts the surface of the silicon ingot and applies an appropriate clamping force. At this time, the axis of the silicon ingot coincides with the center of the mechanism.

[0044] After the test is completed, the piston rod of the drive cylinder 12 retracts, and through the above-mentioned transmission relationship, it drives the first clamping frame 31 and the second clamping frame 32 to move synchronously in opposite directions, releasing the silicon crystal rod.

[0045] The centering clamping mechanism provided in this application uses a gear 23 and a double-toothed plate meshing transmission structure. When the drive cylinder 12 drives the first toothed plate 22 on one side to move, the second toothed plate 27 on the other side will move synchronously in the opposite direction through the gear 23 transmission. This ensures that the first clamping frame 31 and the second clamping frame 32 always move symmetrically with the center of the mechanism as the reference, thereby ensuring that the silicon crystal rod is automatically centered during the clamping process, effectively avoiding the deviation phenomenon, and improving the accuracy of silicon crystal rod length detection.

[0046] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A centering clamping mechanism, characterized in that It includes a driving mechanism, a centering mechanism, a moving mechanism, and a clamping mechanism. The centering mechanism is disposed on the driving mechanism and the moving mechanism, the moving mechanism is disposed on the driving mechanism, and the clamping mechanism is disposed on the moving mechanism. The driving mechanism includes a base plate, a driving cylinder, and a cylinder block. The driving cylinder is fixed to the base plate, and the cylinder block is fixed to the driving cylinder and the centering mechanism, respectively. The base plate is provided with a first movable groove and a second movable groove. The centering mechanism includes a first connecting plate, a first toothed plate, a gear, a bearing, a rotating shaft, a second connecting plate, and a second toothed plate. The first connecting plate is fixed to the cylinder block and the first toothed plate, and both the first and second toothed plates are meshed with the gear. The gear is located in the middle of the base plate, and the bearing is fixed to the gear and the rotating shaft, respectively. The rotating shaft is fixed to the base plate. The second connecting plate is fixed to the second toothed plate and the moving mechanism. The clamping mechanism includes a first clamping frame and a second clamping frame, both of which are disposed on the moving mechanism.

2. A centering chucking mechanism according to claim 1, characterized in that The moving mechanism includes a slide rail, a first moving component, and a second moving component. The slide rail is fixed to the bottom side of the base plate. The first moving component is respectively disposed on the first connecting plate, the slide rail, and the first clamping frame. The second moving component is respectively disposed on the second connecting plate, the slide rail, and the second clamping frame. The first moving component and the second moving component are arranged in parallel and opposite directions.

3. The centering clamping mechanism according to claim 2, characterized in that, The first moving component includes a first moving base, a first moving plate, and a first slider. The first moving base is fixed to the first connecting plate and the first moving plate, and the first moving plate is fixed to the slider and the first clamping frame. The first slider is slidably connected to the slide rail.

4. The centering clamping mechanism according to claim 2, characterized in that, The second moving component includes a second moving base, a second moving plate, and a second slider. The second moving base is fixed to the second connecting plate and the second moving plate, and the second moving plate is fixed to the slider and the second clamping frame. The second slider is slidably connected to the slide rail.

5. The centering clamping mechanism according to claim 1, characterized in that, The first clamping frame and the second clamping frame are arranged in parallel and symmetrically, and the first clamping frame and the second clamping frame are spaced apart to form a clamping gap.

6. The centering clamping mechanism according to claim 1, characterized in that, The first clamping frame is provided with a first anti-collision post, and there are multiple first anti-collision posts, which are evenly fixed to the first clamping frame; the second clamping frame is provided with a second anti-collision post, and there are multiple second anti-collision posts, which are evenly fixed to the second clamping frame; the first anti-collision posts and the second anti-collision posts are arranged in parallel and symmetrically.

7. The centering clamping mechanism according to claim 1, characterized in that, A mounting bracket is fixedly connected to the side of the substrate.

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