Full-automatic FOUP storage cabinet

Abstract

The utility model discloses a full -automatic FOUP storage cabinet, including frame, the feeding assembly of the left end of frame, the discharge assembly of the right end of frame and install in the transfer subassembly and storage subassembly of frame inside, the feeding assembly includes the feeding board of left and right movement, the discharge assembly includes the discharge board of left and right movement, and the storage subassembly includes the storage board of several equal interval horizontal installation between two stand, the feeding board, discharge board, storage board top surface all are equipped with three primary positioning pin and two sensors, three primary positioning pin can cooperate with the three primary positioning hole of FOUP bottom surface, and the transfer subassembly includes the material taking plate of up and down, left and right, before and after movement, and the top surface of material taking plate is equipped with three secondary positioning pin and two sensors, and three positioning pin can cooperate with the three secondary positioning hole of FOUP bottom surface, and the outer end of material taking plate can stretch into the U type gap on the feeding board, discharge board, storage board, reduces the cleaning waiting time, and has improved production efficiency.

Description

Technical Field

[0001] This utility model relates to a storage cabinet, and more particularly to a fully automatic FOUP storage cabinet, belonging to the field of semiconductor cleaning tooling technology. Background Technology

[0002] In the semiconductor manufacturing field, such as Figure 1 As shown, the FOUP (Front-Opening Wafer Container) is a key container for wafer carriers, and its cleanliness directly affects the chip yield. Therefore, FOUPs need to be regularly sent to a fully automatic FOUP cleaning machine for professional cleaning. Furthermore, a typical fully automatic FOUP cleaning machine can clean 12 FOUPs at a time to ensure the cleanliness of the FOUPs themselves and avoid product contamination.

[0003] However, there is a timing mismatch between the operating cycle of the current fully automatic FOUP cleaning machine and the turnover cycle of FOUPs in the production equipment. This leads to periodic idleness of the cleaning machine and reduced production efficiency. To solve this problem, manual loading and unloading or AGV (Automated Guided Vehicle) loading and unloading methods are usually used to feed FOUPs into the fully automatic FOUP cleaning machine, but these still have the following technical drawbacks.

[0004] (1) Manual loading and unloading: Manually moving FOUP from the production equipment to the cleaning machine not only wastes manpower and increases labor costs, but also easily causes secondary pollution to the product during the manual handling process.

[0005] (2) Automatic loading and unloading of AGV carts: FOUPs are transported from the production equipment to the cleaning machine by AGV carts. However, the number of FOUPs that AGV carts can carry is limited, and multiple round trips are required to meet the number of FOUPs that the cleaning machine can clean at one time, which leads to a longer waiting time for the cleaning machine.

[0006] Therefore, there is an urgent need to develop a new FOUP loading and unloading method for fully automatic FOUP cleaning machines in order to achieve dynamic matching of cycle time. Summary of the Invention

[0007] To address the aforementioned technical problems, this utility model provides a fully automatic FOUP storage cabinet. By using a dedicated storage cabinet for transfer and temporary storage, it can meet the requirements of the number of FOUPs that a cleaning machine can clean at one time, thereby reducing the waiting time of the cleaning machine and improving production efficiency.

[0008] To achieve the above technical objectives, this utility model provides a fully automatic FOUP storage cabinet, including a frame, a feeding component penetrating the left end of the frame, a discharging component penetrating the right end of the frame, and a transfer component and a storage component installed inside the frame.

[0009] The feeding assembly includes a feeding plate that can move left and right; the right edge of the feeding plate is provided with a U-shaped notch extending to the left;

[0010] The discharge assembly includes a discharge plate that can move left and right; the left edge of the discharge plate has a U-shaped notch that extends to the right.

[0011] The storage component includes two vertically mounted columns on a frame, and several storage plates horizontally mounted at equal intervals between the two columns; each storage plate has a rearwardly extending U-shaped notch on its front edge;

[0012] Furthermore, the top surfaces of the feeding plate, discharging plate, and storage plate are each equipped with three primary positioning pins and two sensors; the three primary positioning pins can engage with the three primary positioning holes on the bottom surface of the FOUP; the two sensors are located next to two of the primary positioning pins.

[0013] The transfer assembly includes a material-grabbing plate that can move up and down, left and right, and forward and backward; the top surface of the material-grabbing plate is equipped with three secondary positioning pins and two sensors; the three positioning pins can cooperate with three secondary positioning holes on the bottom surface of the FOUP; the two sensors are respectively located next to two of the secondary positioning pins.

[0014] Furthermore, the outer end of the material receiving plate can extend into the U-shaped notch on the feeding plate, the discharging plate, and the storage plate.

[0015] Furthermore, the feeding assembly of this utility model also includes a feeding base installed inside the frame, and a feeding platform installed on the top surface of the feeding base and extending to the left to the outside of the frame; the top surface of the feeding platform is equipped with two symmetrically arranged feeding guide rails that extend to the left and right, a feeding screw located on the axis of symmetry of the two feeding guide rails, a feeding nut fitted on the feeding screw, a feeding motor connected to the left end of the feeding screw, and a feeding frame;

[0016] The feeding rack includes two symmetrically placed feeding side plates; the bottom of the two feeding side plates are respectively installed on corresponding feeding guide rails and respectively connected to feeding nuts; the feeding plate is installed on the top surface of the two feeding side plates and can move left and right along the feeding guide rails.

[0017] Furthermore, the discharge assembly of this utility model also includes a discharge base installed inside the frame, and a discharge platform installed on the top surface of the discharge base and extending to the right to the outside of the frame; the top surface of the discharge platform is equipped with two symmetrically arranged and left-right extended discharge guide rails, a discharge screw located on the axis of symmetry of the two discharge guide rails, a discharge nut fitted on the discharge screw, a discharge motor connected to the right end of the discharge screw, and a discharge frame;

[0018] The discharge rack includes two symmetrically placed discharge side plates; the bottom of the two discharge side plates are respectively installed on corresponding discharge guide rails and respectively connected to discharge nuts; the discharge plate is installed on the top surface of the two discharge side plates and can move left and right along the discharge guide rails.

[0019] Furthermore, in this invention, the three primary positioning pins are arranged in a triangle around the U-shaped notch, with one primary positioning pin located on the outer side of the bottom end of the U-shaped notch and the other two primary positioning pins located on both sides of the opening end of the U-shaped notch; the two sensors are located next to the other two primary positioning pins.

[0020] Furthermore, the present invention provides three storage components, which are evenly arranged in an arc around the transfer component; each storage component has four storage plates.

[0021] Furthermore, the transfer assembly of this utility model also includes an R-axis rotating seat that can rotate horizontally on the bottom surface of the frame, a Z-axis guide rail that is vertically mounted on the top surface of the R-axis rotating seat, a Z-axis slider that is embedded in the Z-axis guide rail and can move up and down along the Z-axis guide rail, an A-axis guide rail that is horizontally mounted on the side of the Z-axis slider, and an A-axis slider that is embedded in the A-axis guide rail and can move back and forth along the A-axis guide rail.

[0022] The material handling plate is horizontally installed on the top surface of the A-axis slider and can move up and down, left and right, and forward and backward through the linkage of the R-axis, Z-axis and A-axis.

[0023] Furthermore, the material receiving plate adopts a cross-shaped structure and is located on the central axis of the A-axis guide rail. The bottom surface of its inner branch is connected to the A-axis guide rail through the A-axis slider, and a secondary positioning pin is installed on the top surface of its outer branch and the two side branches. A sensor is installed next to the secondary positioning pin on the top surface of the two side branches.

[0024] Furthermore, the front side of the frame is equipped with a cabinet door, and the left, right and rear sides are respectively equipped with cabinet panels.

[0025] Furthermore, the bottom surface of the frame is equipped with casters and height-adjustable feet.

[0026] In summary, this invention designs a dedicated storage cabinet for transferring and temporarily storing FOUPs. Utilizing arc-shaped storage components, it can hold 12 FOUPs, perfectly matching the number of FOUPs that a fully automatic FOUP washing machine can clean at one time. Furthermore, the FOUPs are transferred from the loading plate to the designated storage plate, or from the designated storage plate to the unloading plate, via a linkage of the R, Z, and A axes. Simultaneously, the primary positioning holes, in conjunction with the primary positioning pins on the loading rack, unloading rack, and storage plate, and the secondary positioning holes, in conjunction with the secondary positioning pins on the unloading plate, ensure that the FOUPs do not shift during the transfer process.

[0027] Compared with existing technologies, the technical advantages of this utility model are as follows:

[0028] (1) The loading plate, unloading plate, picking plate and storage plate complete the picking and placing of FOUP inside and outside the storage cabinet. No manual contact with FOUP is required, avoiding product contamination caused by human labor.

[0029] (2) By cooperating with the primary positioning holes and the primary positioning pins on the feeding rack, discharging rack and storage plate, and with the secondary positioning holes and the secondary positioning pins on the picking plate, the positioning, storage and transfer of FOUP are realized, and the operating efficiency is improved.

[0030] (3) The transfer component uses the linkage of the R-axis, Z-axis and A-axis to realize the flexible movement of the picking plate inside the storage cabinet in the up and down, left and right and forward and backward, which reduces the complexity of the transfer component and the size of the transfer component and the storage cabinet.

[0031] (4) The number of FOUPs stored by the storage component is perfectly matched with the number of FOUPs cleaned by the cleaning machine at one time, realizing the storage and transfer of 12 FOUPs at one time. This not only shortens the time for picking up and putting down FOUPs and reduces the waiting time of the cleaning machine, but also reduces the staffing and labor costs. Attached Figure Description

[0032] Figure 1 This is a bottom view of the FOUP structure in the prior art;

[0033] Figure 2 This is a schematic diagram of the structure of this utility model;

[0034] Figure 3 This is a schematic diagram of the internal structure of the present invention;

[0035] Figure 4 This is a top view of the internal structure of this utility model;

[0036] Figure 5 This is a schematic diagram of the internal structure of the loading platform in this utility model;

[0037] Figure 6 This is a schematic diagram of the internal structure of the discharge platform in this utility model;

[0038] Figure 7 This is a schematic diagram of the material discharge platform in this utility model;

[0039] Figure 8 This is a partial structural diagram of the storage component in this utility model;

[0040] Figure 9 This is a schematic diagram of the transfer component in this utility model;

[0041] Figure 10 This is a schematic diagram showing the cooperation between the material taking plate and the FOUP on the feeding rack in this utility model;

[0042] In the diagram: 1. Feeding assembly; 10. Feeding base; 11. Feeding platform; 12. Feeding motor; 13. Feeding guide rail; 14. Feeding screw; 15. Feeding nut; 16. Feeding rack; 17. Feeding plate; 2. Discharge assembly; 20. Discharge base; 21. Discharge platform; 22. Discharge motor; 23. Discharge guide rail; 24. Discharge screw; 25. Discharge nut; 26. Discharge rack; 27. Discharge top cover; 28. Discharge chute; 29. 29. Discharge plate; 3. Storage assembly; 31. Column; 32. Storage plate; 33. U-shaped notch; 34. Secondary positioning pin; 35. Sensor; 36. Primary positioning pin; 4. Transfer assembly; 41. R-axis rotary seat; 42. Z-axis guide rail; 43. Z-axis slider; 44. A-axis guide rail; 45. A-axis slider; 46. Pick-up plate; 5. FOUP; 51. Primary positioning hole; 52. Secondary positioning hole; 6. Frame; 61. Foot cup; 62. Caster. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below in conjunction with the embodiments of this utility model.

[0044] In the description of this application, terms such as "connection" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Those skilled in the art can understand the specific meaning of these terms in this application according to the specific circumstances. Furthermore, terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0045] In existing technologies, the FOUP 5 (Front-Opening Wafer Transfer Box) serves as the core transfer carrier in 12-inch wafer fabs, and its design and positioning must strictly adhere to SEMI standards. The SEMI standards are global semiconductor industry technical specifications developed by SEMI International, covering the entire industry chain, including wafer manufacturing, packaging and testing, and equipment design.

[0046] like Figure 1As shown, the bottom surface of the FOUP 5 is provided with three primary positioning holes 51 and three secondary positioning holes 52, which are used to match the positioning pins 34 of other devices (such as AMHS) to ensure accurate alignment of the wafer cassette during transport. The layout features of the primary positioning holes 51 and secondary positioning holes 52 are as follows: each primary positioning hole 51 has a secondary positioning hole 52 near its inner side; the three primary positioning holes 51 are distributed in a large triangle, and the three secondary positioning holes 52 are distributed in a small triangle and located inside the large triangle.

[0047] In practical implementation, the three primary positioning holes 51 are used to cooperate with the primary positioning pins 36 on the feeding rack 16, the discharging rack 26, and the storage plate 32 of this utility model, and the three secondary positioning holes 52 are used to cooperate with the secondary positioning pins 34 on the picking plate 46 of this utility model, to ensure that the FOUP 5 will not shift during the transfer process. Furthermore, a sensor 35 is provided next to each of the primary positioning pins 36 and the secondary positioning pins 34 to sense different positions on the bottom surface of the FOUP 5.

[0048] It should be noted that the position, shape and function of the primary positioning hole 51 and the secondary positioning hole 52, the dimensions of the primary positioning pin 36 and the secondary positioning pin 34, and the sensing position of the sensor 35 have been specifically specified in the SEMI standard, and will not be repeated here.

[0049] like Figures 2-4 As shown, this embodiment provides a fully automatic FOUP storage cabinet for temporarily storing FOUP 5, including a frame 6, a loading platform 1 penetrating the left end of the frame 6, a discharging platform 2 penetrating the right end of the frame 6, a transfer component 13 and a storage component 3 installed inside the frame 6, which are described in detail below.

[0050] like Figure 5 As shown, the feeding assembly 1 also includes a feeding base 10 installed inside the frame 6, and a feeding platform 11 installed on the top surface of the feeding base 10 and extending to the left to the outside of the frame 6; the top surface of the feeding platform 11 is equipped with two feeding guide rails 13, a feeding screw 14, a feeding nut 15, a feeding motor 12, a feeding rack 16, and a feeding plate 17 that can move left and right.

[0051] The two feeding guide rails 13 are symmetrically arranged in the left and right directions.

[0052] The feeding screw 14 is located on the axis of symmetry of the two feeding guide rails 13, and its left end is connected to the output shaft of the feeding motor 12.

[0053] The feeding nut 15 is fitted onto the feeding screw 14.

[0054] The feeding rack 16 includes two symmetrically placed feeding side plates. The bottom of the two feeding side plates are respectively installed on the corresponding feeding guide rails 13 and respectively connected to the feeding nuts 15.

[0055] The feeding plate 17 is installed on the top surface of the two feeding side plates. Its right edge is provided with a U-shaped notch 33 extending to the left. Three primary positioning pins 36 and two sensors 35 are installed on its top surface. The three primary positioning pins 36 can cooperate with the three primary positioning holes 51 on the bottom surface of the FOUP5. The two sensors 35 are located next to two of the primary positioning pins 36.

[0056] Specifically, the three primary locating pins 36 are arranged in a triangle around the U-shaped notch 33, with one primary locating pin 36 located on the left side of the bottom end of the U-shaped notch 33, and the other two primary locating pins 36 located on the front and rear sides of the opening end of the U-shaped notch 33, respectively; the two sensors 35 are located next to the other two primary locating pins 36. Furthermore, the installation of the three primary locating pins 36 and the two sensors 35 must comply with SEMI standards.

[0057] In practice, two sensors 35 detect the presence of FOUP 5 on the feeding plate 17 in real time. Three primary positioning pins 36 cooperate with three primary positioning holes 51 on the bottom surface of FOUP 5 to position FOUP 5 on the feeding plate 17. When FOUP 5 is detected on the feeding plate 17, the feeding motor 12 operates, driving the lead screw 12 to rotate, which in turn moves the feeding nut 15 axially along the lead screw 14. Since the feeding nut 15 is connected to the feeding rack 16, which is mounted on the feeding guide rail 13, the feeding nut 15 can drive the feeding rack 16 to move axially along the feeding guide rail 13, thereby moving the FOUP 5 on the feeding plate 17 to the right along the feeding guide rail 13 and feeding it into the frame 6. Afterward, the feeding plate 17 returns to its original position to the left along the feeding guide rail 13, waiting for the arrival of the next FOUP 5.

[0058] In other embodiments, the loading platform 11 is also equipped with a loading top cover; the top surface of the loading top cover is provided with loading grooves corresponding to the positions of the two loading guide rails 13, so that the two loading side plates can be connected to the loading guide rails 13 through the loading grooves on the corresponding sides respectively; the top surface of the loading top cover is located below the loading plate 17 and covers the connection area of ​​the two loading side plates as much as possible, thereby effectively preventing dust from entering the working area of ​​the loading platform 11.

[0059] like Figure 6As shown, the discharge assembly 2 includes a discharge base 20 installed inside the frame 6, and a discharge platform 21 installed on the top surface of the discharge base 20 and extending to the right outside the frame 6; the top surface of the discharge platform 21 is equipped with two symmetrically arranged and left-right extending discharge guide rails 23, a discharge screw 24 located on the axis of symmetry of the two discharge guide rails 23, a discharge nut 25 fitted on the discharge screw 24, a discharge motor 22 connected to the right end of the discharge screw 24, a discharge frame 26, and a discharge plate 29 that can move left and right.

[0060] The discharge rack 26 includes two symmetrically placed discharge side plates; the bottom of the two discharge side plates are respectively installed on corresponding discharge guide rails 23 and respectively connected to discharge nuts 25; the discharge plate 29 is installed on the top surface of the two discharge side plates, and a U-shaped notch 33 extending to the right is opened on its left edge, and three primary positioning pins 36 and two sensors 35 are installed on its top surface; the three primary positioning pins 36 can cooperate with the three primary positioning holes 51 on the bottom surface of the FOUP 5; the two sensors 35 are located next to two of the primary positioning pins 36.

[0061] Specifically, similar to the feeding assembly 1, the three primary positioning pins 36 are arranged in a triangle around the U-shaped notch 33, with one primary positioning pin 36 located on the right side of the bottom end of the U-shaped notch 33, and the other two primary positioning pins 36 located on the front and rear sides of the opening end of the U-shaped notch 33, respectively; the two sensors 35 are located next to the other two primary positioning pins 36. Furthermore, the installation of the three primary positioning pins 36 and the two sensors 35 must comply with SEMI standards.

[0062] As can be seen from the above, the discharge component 2 and the feeding component 1 adopt a symmetrical structural design, wherein the discharge plate 29 and the feeding plate 17 are mirror images of each other, and the opening directions of the U-shaped notch 33 are opposite.

[0063] In practice, two sensors 35 on the discharge plate 29 continuously detect the presence of FOUP 5, while three primary positioning pins 36 precisely engage with three primary positioning holes 51 on the bottom surface of FOUP 5 to position FOUP 5 on the discharge plate 29. When the sensors 35 detect that FOUP 5 is in place, the discharge motor 22 drives the discharge screw 24 to rotate, and through the transmission action of the discharge nut 25, drives the discharge rack 26 and discharge plate 29 to move to the right along the discharge guide rail 23, smoothly sending FOUP 5 out of the storage cabinet; after the feeding is completed, the discharge rack 26 and discharge plate 29 then reset to the left along the discharge guide rail 23, preparing for the next cycle of operation.

[0064] In other embodiments, similar to the feeding component 1, such as Figure 7As shown, the discharge platform 21 is also equipped with a discharge top cover 27; the top surface of the discharge top cover 27 is provided with a discharge groove 28 corresponding to the position of the two discharge guide rails 23, and the two discharge side plates are connected to the corresponding discharge guide rails 23 through the discharge groove 28 on the corresponding side; the top surface of the discharge top cover 27 is located below the discharge plate 29 and is used to cover the connection area of ​​the two discharge side plates.

[0065] like Figure 4 , Figure 8 As shown, the storage component 3 includes two vertically mounted columns 31 on the frame 6, and several storage plates 32 horizontally mounted at equal intervals between the two columns 31 in the vertical direction; the front edge of the storage plate 32 has a rearwardly extending U-shaped notch 33, and three primary positioning pins 36 and two sensors 35 are mounted on its top surface; the three primary positioning pins 36 can cooperate with the three primary positioning holes 51 on the bottom surface of the FOUP 5; the two sensors 35 are located next to two of the primary positioning pins 36.

[0066] Specifically, similar to the feeding assembly 1, the three primary positioning pins 36 are arranged in a triangle around the U-shaped notch 33, with one primary positioning pin 36 located on the rear side of the bottom end of the U-shaped notch 33, and the other two primary positioning pins 36 located on the left and right sides of the opening end of the U-shaped notch 33, respectively; the two sensors 35 are located next to the other two primary positioning pins 36. Furthermore, the installation of the three primary positioning pins 36 and the two sensors 35 must comply with SEMI standards.

[0067] In other embodiments, the storage component 3 is provided in three parts, which are evenly arranged in an arc around the transfer component 4; each storage component 3 is provided with four storage boards 32.

[0068] In practice, each storage board 32 is equipped with two sensors 35 that monitor the storage status of the FOUP 5 in real time. Three primary positioning pins 36 cooperate with three primary positioning holes 51 on the bottom surface of the FOUP 5 to position the FOUP 5 on the storage board 32. The three storage components 3 are configured with a total of twelve storage boards 32, each storage board 32 carrying one FOUP 5, and the entire storage cabinet carries twelve FOUP 5, which perfectly matches the number of FOUP 5 that the fully automatic FOUP cleaning machine cleans at one time. Furthermore, all the storage boards 32 are distributed in an arc around the transfer component 13, which facilitates the transfer component 13 to pick up and place FOUP 5 on any storage board 32, which not only shortens the picking and placing time of the transfer component 13, but also reduces the overall size of the storage cabinet.

[0069] like Figure 3 , Figure 4 , Figure 9As shown, the transfer assembly 13 includes an R-axis mounted on the bottom surface of the frame 6, an R-axis rotating seat 41 mounted on the R-axis and capable of horizontal rotation, a Z-axis guide rail 42 vertically mounted on the top surface of the R-axis rotating seat 41, a Z-axis slider 43 embedded in the Z-axis guide rail 42 and capable of moving up and down along the Z-axis guide rail 42, an A-axis guide rail 44 horizontally mounted on the side of the Z-axis slider 43, an A-axis slider 45 embedded in the A-axis guide rail 44 and capable of moving back and forth along the A-axis guide rail 44, and a material picking plate 46 capable of moving up and down, left and right, and forward and backward.

[0070] The material-taking plate 46 is horizontally mounted on the top surface of the A-axis slider 45, and its top surface is equipped with three secondary positioning pins 34 and two sensors 35. The three positioning pins 34 can cooperate with the three secondary positioning holes 52 on the bottom surface of the FOUP 5. The two sensors 35 are located next to two of the secondary positioning pins 34 respectively. Figure 4 As shown, the outer end of the picking plate 46 can extend into the U-shaped notch 33 on the feeding plate 17, the discharging plate 29, and the storage plate 32, thereby achieving full-position coverage and minimizing the picking and placing path.

[0071] Specifically, such as Figure 10 As shown, the material handling plate 46 adopts a cross-shaped structure and is located on the central axis of the A-axis guide rail 44. Its inner branch bottom surface is connected to the A-axis guide rail 44 via an A-axis slider 45 to achieve stable transmission. A secondary positioning pin 34 is installed on the top surface of its outer branch and both side branches, for engaging with the secondary positioning hole 52 of the FOUP 5. A sensor 35 is installed next to each of the secondary positioning pins 34 on the top surface of the side branches. The sensors 35 work in conjunction with the secondary positioning pins 34 to achieve fast and reliable status feedback for the FOUP 5. Furthermore, the installation positions of the three secondary positioning pins 34 and the two sensors 35 all comply with SEMI requirements, ensuring equipment compatibility.

[0072] It should be noted that, since the primary positioning hole 51 is used to engage with the primary positioning pins 36 on the feeding plate 17, the discharging plate 29, and the storage plate 32, while the secondary positioning hole 52 is used to engage with the secondary positioning pins 34 on the picking plate 46, when the picking plate 46 extends into the U-shaped notch 33 on the feeding plate 17, the discharging plate 29, and the storage plate 32, as... Figure 10As shown, even if FOUP 5 is positioned on the loading plate 17 or storage plate 32 through the cooperation of primary positioning hole 51 and primary positioning pin 36, the picking plate 46 can still dock with FOUP 5 through the cooperation of secondary positioning hole 52 and secondary positioning pin 34. By moving the picking plate 46 upward, the primary positioning hole 51 and primary positioning pin 36 are disengaged, thereby transferring FOUP 5 from the loading plate 17 or storage plate 32 to the picking plate 46. Conversely, even if FOUP 5 is positioned on the picking plate 46 through the cooperation of secondary positioning hole 52 and secondary positioning pin 34, the storage plate 32 or discharge plate 29 can still dock with FOUP 5 through the cooperation of primary positioning hole 51 and primary positioning pin 36. By moving the picking plate 46 downward, the secondary positioning hole 52 and secondary positioning pin 34 are disengaged, thereby transferring FOUP 5 from the picking plate 46 to the storage plate 32 or discharge plate 29.

[0073] In specific implementation, the picking plate 46 is made in a cross shape to reduce weight and avoid the U-shaped notch 33 on the loading rack 16, unloading rack 26, or storage plate 32. The two sensors 35 are used to detect in real time whether there is a FOUP 5 on the picking plate 46. The three secondary positioning pins 34 can cooperate with the three secondary positioning holes 52 on the bottom surface of the FOUP 5 to guide and position the FOUP 5 to be transferred. The R-axis rotating seat 41 can rotate 360 ​​degrees in the horizontal direction with the R-axis as the center; the Z-axis slider 43 can drive the A-axis guide rail 44 and its components to move back and forth in the vertical direction along the Z-axis guide rail 42; the A-axis slider 45 can drive the picking plate 46 on it to move back and forth in the horizontal direction along the A-axis guide rail 44. By linking the R-axis, Z-axis and A-axis, the FOUP 5 on the upper plate 17 can be picked up by the picking plate 46 and transferred to the designated storage plate 32, or the FOUP 5 can be picked up from the designated storage plate 32 and transferred to the discharge rack 26.

[0074] In other embodiments, such as Figure 2 As shown, the front side of the frame 6 is equipped with a cabinet door, and the left, right, and rear sides are equipped with cabinet panels. In specific implementation, the frame 6 is rectangular. To protect and prevent dust from the FOUP 5 temporarily stored in the storage cabinet, the frame 6 is sealed around its perimeter with cabinet doors and cabinet panels. Furthermore, the left and right side cabinet panels are respectively provided with inlets and outlets, facilitating the placement of the loading platform 1 through the inlet and the placement of the unloading platform through the outlet.

[0075] In other embodiments, such as Figure 2As shown, the bottom surface of the frame 6 is equipped with casters 62 and height-adjustable feet 61. In a specific implementation, the frame 6 is rectangular, with a caster 62 and a foot 61 installed at each of its four corners. Nuts are installed on the bottom surface of the frame 6, and screws are installed on the top surface of the foot 61, with the screws inserted into the corresponding nuts. Turning the screws with a wrench adjusts the height of the bottom surface of the foot 61. When the bottom surface of the foot 61 is lower than the bottom surface of the caster 62, the storage cabinet can be parked in the desired position using the foot 61. When the bottom surface of the foot 61 is higher than the bottom surface of the caster 62, the foot 61 can be folded up, and the storage cabinet can be moved to the desired position using the casters 62.

[0076] In summary, when this utility model is in operation, firstly, FOUP 5 is placed on the top surface of the loading plate 17, so that the primary positioning hole 51 on the bottom surface of FOUP 5 is connected with the primary positioning pin 36 on the top surface of the loading plate 17, thereby realizing the reference positioning of FOUP 5 in the static work position.

[0077] Secondly, the material is transferred from the loading plate 17 to the taking plate 46: the transfer assembly 3 moves the taking plate 46 along the U-shaped notch 33 of the loading plate 17 into the target position through the linkage of the R-axis, Z-axis and A-axis, so that the secondary positioning pin 34 on the top surface of the taking plate 46 is connected with the secondary positioning hole 52 on the bottom surface of the FOUP 5; the taking plate 46 performs a vertical upward movement, so that the primary positioning pin 36 on the top surface of the loading plate 17 is completely disengaged from the primary positioning hole 51 on the bottom surface of the FOUP 5, at which point the FOUP 5 is transferred to the taking plate 46.

[0078] Next, the material picker plate 46 is transferred to the storage plate 32: the material picker plate 46 enters the target position along the U-shaped notch 33 of the target storage plate 32, so that the primary positioning pin 36 on the top surface of the storage plate 32 aligns with the primary positioning hole 51 on the bottom surface of the FOUP 5; the material picker plate 46 performs a vertical descent motion, so that the secondary positioning pin 34 on the top surface of the material picker plate 46 completely disengages from the secondary positioning hole 52 on the bottom surface of the FOUP 5, at which point the FOUP 5 completes the transfer to the storage plate 32.

[0079] Furthermore, the transfer from storage plate 32 to picking plate 46: the picking plate 46 enters the target position along the U-shaped notch 33 of the target storage plate 32, so that the secondary positioning pin 34 on the top surface of the picking plate 46 is connected with the secondary positioning hole 52 on the bottom surface of the FOUP 5; the picking plate 46 performs a vertical upward movement, so that the primary positioning pin 36 on the top surface of the storage plate 32 is completely disengaged from the primary positioning hole 51 on the bottom surface of the FOUP 5, at which point the FOUP 5 is transferred to the picking plate 46.

[0080] Finally, the material is transferred from the pick-up plate 46 to the discharge plate 29: the pick-up plate 46 enters the target position along the U-shaped notch 33 of the discharge plate 29, so that the primary positioning pin 36 on the top surface of the discharge plate 29 aligns with the primary positioning hole 51 on the bottom surface of the FOUP 5; the pick-up plate 46 performs a vertical descent motion, so that the secondary positioning pin 34 on the top surface of the pick-up plate 46 completely disengages from the secondary positioning hole 52 on the bottom surface of the FOUP 5, at which point the FOUP 5 completes its transfer to the discharge plate 29.

[0081] In this way, the storage cabinet of this utility model can automatically complete the transfer and storage of FOUP 5, which not only reduces the number of personnel, but also avoids product contamination caused by human labor, reduces equipment waiting time, and improves production efficiency.

[0082] The technical solutions provided by the embodiments of this utility model have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this utility model. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this utility model. At the same time, for those skilled in the art, based on the ideas of this utility model, modifications can be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. However, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the ideas and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A fully automatic FOUP storage cabinet, characterized in that, It includes a frame, a feeding assembly running through the left end of the frame, a discharging assembly running through the right end of the frame, and a transfer assembly and a storage assembly installed inside the frame. The feeding assembly includes a feeding plate that can move left and right; the right edge of the feeding plate is provided with a U-shaped notch extending to the left; The discharge assembly includes a discharge plate that can move left and right; the left edge of the discharge plate has a U-shaped notch that extends to the right. The storage component includes two vertically mounted columns on a frame, and several storage plates horizontally mounted at equal intervals between the two columns; each storage plate has a rearwardly extending U-shaped notch on its front edge; Furthermore, the top surfaces of the feeding plate, discharging plate, and storage plate are each equipped with three primary positioning pins and two sensors; the three primary positioning pins can engage with the three primary positioning holes on the bottom surface of the FOUP; the two sensors are located next to two of the primary positioning pins. The transfer assembly includes a material-grabbing plate that can move up and down, left and right, and forward and backward; the top surface of the material-grabbing plate is equipped with three secondary positioning pins and two sensors; the three positioning pins can cooperate with three secondary positioning holes on the bottom surface of the FOUP; the two sensors are respectively located next to two of the secondary positioning pins. Furthermore, the outer end of the material receiving plate can extend into the U-shaped notch on the feeding plate, the discharging plate, and the storage plate.

2. The fully automatic FOUP storage cabinet according to claim 1, characterized in that, The feeding assembly also includes a feeding base installed inside the frame, and a feeding platform installed on the top surface of the feeding base and extending to the left outside the frame; the top surface of the feeding platform is equipped with two symmetrically arranged feeding guide rails that extend to the left and right, a feeding screw located on the axis of symmetry of the two feeding guide rails, a feeding nut fitted on the feeding screw, a feeding motor connected to the left end of the feeding screw, and a feeding frame. The feeding rack includes two symmetrically placed feeding side plates; the bottom of the two feeding side plates are respectively installed on corresponding feeding guide rails and respectively connected to feeding nuts; the feeding plate is installed on the top surface of the two feeding side plates and can move left and right along the feeding guide rails.

3. The fully automatic FOUP storage cabinet according to claim 1, characterized in that, The discharge assembly also includes a discharge base installed inside the frame, and a discharge platform installed on the top surface of the discharge base and extending to the right outside the frame; the top surface of the discharge platform is equipped with two symmetrically arranged and left-right extended discharge guide rails, a discharge screw located on the axis of symmetry of the two discharge guide rails, a discharge nut fitted on the discharge screw, a discharge motor connected to the right end of the discharge screw, and a discharge frame. The discharge rack includes two symmetrically placed discharge side plates; the bottom of the two discharge side plates are respectively installed on corresponding discharge guide rails and respectively connected to discharge nuts; the discharge plate is installed on the top surface of the two discharge side plates and can move left and right along the discharge guide rails.

4. A fully automatic FOUP storage cabinet according to any one of claims 1-3, characterized in that, The three primary positioning pins are arranged in a triangle around the U-shaped notch, with one primary positioning pin located on the outer side of the bottom end of the U-shaped notch and the other two primary positioning pins located on both sides of the opening end of the U-shaped notch; the two sensors are located next to the other two primary positioning pins.

5. A fully automatic FOUP storage cabinet according to claim 1, characterized in that, The storage component has three parts, which are evenly arranged in an arc around the transfer component; each storage component has four storage boards.

6. A fully automatic FOUP storage cabinet according to claim 1, characterized in that, The transfer assembly also includes an R-axis rotary seat that can rotate horizontally on the bottom surface of the frame, a Z-axis guide rail that is vertically mounted on the top surface of the R-axis rotary seat, a Z-axis slider that is embedded in the Z-axis guide rail and can move up and down along the Z-axis guide rail, an A-axis guide rail that is horizontally mounted on the side of the Z-axis slider, and an A-axis slider that is embedded in the A-axis guide rail and can move back and forth along the A-axis guide rail. The material handling plate is horizontally installed on the top surface of the A-axis slider and can move up and down, left and right, and forward and backward through the linkage of the R-axis, Z-axis and A-axis.

7. A fully automatic FOUP storage cabinet according to claim 6, characterized in that, The material receiving plate adopts a cross-shaped structure and is located on the central axis of the A-axis guide rail. The bottom surface of its inner branch is connected to the A-axis guide rail through the A-axis slider. A secondary positioning pin is installed on the top surface of its outer branch and both side branches. A sensor is installed next to the secondary positioning pin on the top surface of each of the two side branches.

8. A fully automatic FOUP storage cabinet according to claim 1, characterized in that, The frame has a cabinet door installed on its front side, and cabinet panels installed on its left, right, and rear sides.

9. A fully automatic FOUP storage cabinet according to claim 1 or 8, characterized in that, The bottom of the frame is equipped with casters and height-adjustable feet.

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