Vacuum coating inductive evaporation source

Abstract

The utility model discloses a kind of vacuum coating induction evaporation sources, including integrated graphite crucible, flow guide groove and evaporation groove, the flow guide groove two ends are connected graphite crucible and evaporation groove, the graphite crucible bottom is provided with large coil, the evaporation groove bottom is provided with small coil, the graphite crucible upper is provided with fixed baffle, the evaporation groove upper is provided with movable movable baffle, the large coil and small coil with integrated graphite crucible, flow guide groove and evaporation groove between evaporation groove are equipped with heat insulation layer. Integrated graphite crucible, flow guide groove and evaporation groove are used, structure is simple, fault tolerance is high, two kinds of coil sectional heating mode are used, make film material morphological change process temperature change gently, effectively prevent the occurrence of splashing phenomenon, ensure coating quality, overall structure is compact, save space, can increase or decrease the number of evaporation source unit according to the width of substrate film, guarantee the film quality.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment, and in particular to a vacuum coating induction evaporation source. Background Technology

[0002] In vacuum coating equipment, commonly used evaporation sources include resistive evaporation source deposition, sputtering deposition processes, electron beam evaporation source deposition, and induction evaporation source deposition. Among them, the resistance heating evaporation source uses a resistance heater to heat and evaporate the coating machine, which is suitable for mass production where the coating quality requirements are not very high. Its evaporation rate is moderate but lower than that of induction evaporation. Its stability is poor and it is not easy to control. It has a short maintenance cycle and high consumable costs. Sputtering coating process refers to the bombardment of a solid surface (target) by charged particles, causing solid atoms (or molecules) to be ejected from the surface and deposited on the substrate to form a film. Its application fields are wide and the film quality is excellent. However, its deposition rate is much lower than that of evaporation coating. Especially in the application of composite current collector positive and negative electrode copper foil and aluminum foil, its disadvantages of low speed and high energy consumption make it completely useless. The structure of sputtering coating equipment is also more complex and the cost is high. Electron beam heating evaporation source directly uses an electron beam to heat the evaporation material, causing the evaporation material to vaporize and evaporate and then condense on the substrate surface to form a film. In large-area coating applications, high-power electron gun equipment is required. Its technical difficulty and cost are very high. At present, it can only rely on very rare imported resources, which are expensive and have a long delivery cycle. However, during high-rate film formation, due to the high density of vaporized material and its circulation around the evaporation dry pot, high-energy electrons directly cause ionization, forming a shielding area, which ultimately leads to electron scattering. This results in energy loss and damage to the coating layer and substrate.

[0003] Existing induction evaporation sources consist of multiple cylindrical induction units and utilize high-frequency induced current to heat a graphite crucible and the material to be evaporated. Their working principle involves generating eddy currents and hysteresis losses within the crucible using the high-frequency induced current, thereby heating the material to vaporize and evaporate. Induction evaporation sources typically consist of water-cooled coils and graphite or ceramic (such as alumina or magnesium oxide) crucibles. To avoid coupling interference between coils, the distance between them is increased, resulting in wasted space. Furthermore, the large diameter of the crucible generates significant heat radiation, leading to problems such as material splashing, complex wire feeding structures, low fault tolerance, easy clogging of the wire feeding tube, and long cleaning and maintenance times. Utility Model Content

[0004] To address the aforementioned problems, this invention provides a vacuum coating induction evaporation source that solves the issues of severe splashing, high heat radiation, complex wire feeding structure, low fault tolerance, easy clogging of the wire feeding tube, and long cleaning and maintenance time associated with traditional evaporation sources.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a vacuum coating induction evaporation source, including an integral graphite crucible, a guide channel, and an evaporation tank. The two ends of the guide channel are respectively connected to the graphite crucible and the evaporation tank. A large coil is provided at the bottom of the graphite crucible, and a small coil is provided at the bottom of the evaporation tank. A fixed baffle is provided above the graphite crucible, and a movable baffle is provided above the evaporation tank. A heat insulation layer is provided between the large coil and the small coil and the integral graphite crucible, guide channel, and evaporation tank.

[0006] Furthermore, the guide channel is an inclined channel, with its inlet bottom height lower than the bottom height of the graphite crucible and its outlet height higher than the bottom height of the evaporation tank, so that the molten film material flows into the evaporation tank by gravity.

[0007] Furthermore, the evaporation tank is elongated and its length direction is adapted to the width direction of the substrate to be coated.

[0008] Furthermore, the large coil and the small coil are wound in the same direction and are independently powered and controlled, and the current density of the small coil is greater than that of the large coil.

[0009] Furthermore, the fixed baffle is larger than the opening size of the graphite crucible and is made of high-temperature resistant heat-insulating material.

[0010] Furthermore, the movable baffle is connected to the driving device and can be moved along the length of the evaporation tank to completely block or fully open the opening of the evaporation tank.

[0011] Furthermore, the heat insulation layer is made of ceramic material or mica composite material, and its thickness is 2-10mm.

[0012] Furthermore, it includes at least two evaporation source units arranged in a cross-parallel manner, with the evaporation tanks of each unit arranged along the same straight line to form an evaporation area that matches the width of the substrate to be coated.

[0013] As can be seen from the above description of the structure of this utility model, compared with the prior art, this utility model has the following advantages:

[0014] 1. The evaporation source unit of this utility model adopts an integrated graphite crucible, flow guide groove and evaporation tank, which eliminates the need for a complex wire feeding structure and avoids problems such as wire feeding tube blockage. The structure is simple and has a high fault tolerance. The evaporation tank is designed to be slender, which reduces the heat radiation area, reduces the amount of heat radiation, and reduces the impact on other parts of the equipment and the coating environment.

[0015] 2. The segmented heating method using large and small coils ensures a smooth temperature change during the transformation of the film material from solid to liquid to gas, effectively preventing splashing and guaranteeing coating quality. Furthermore, the coils are isolated from the evaporation source unit, preventing contact with the coils during cleaning and maintenance, thus avoiding damage. This ensures a high safety factor, and the maintenance and cleaning operations are simple, quick, and improve production efficiency.

[0016] 3. The overall structure is compact and saves space. The number of evaporation source units can be increased or decreased according to the width of the substrate film. By arranging them in a straight line, an evaporation area matching the width of the substrate to be coated is formed, making the coating more uniform and further ensuring the film quality. Attached Figure Description

[0017] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0018] Figure 1 This is a top view of an embodiment of the present invention.

[0019] Figure 2 This is a side view of an embodiment of the present utility model. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0021] Example

[0022] refer to Figure 1 , Figure 2 A vacuum coating induction evaporation source includes multiple evaporation source units arranged in a cross-parallel manner. The evaporation tanks 3 of each unit are arranged along the same straight line to form an evaporation area that matches the width of the substrate to be coated. The evaporation source unit includes an integrally structured graphite crucible 1, a guide channel 2, and an evaporation tank 3. The two ends of the guide channel 2 are respectively connected to the graphite crucible 1 and the evaporation tank 3. A large coil 4 is provided at the bottom of the graphite crucible 1, and a small coil 5 is provided at the bottom of the evaporation tank 3. A fixed baffle 6 is provided above the graphite crucible 1, and a movable baffle 7 is provided above the evaporation tank 3. A heat insulation layer 8 is provided between the large coil 4 and the small coil 5 and the integrally structured graphite crucible 1, guide channel 2, and evaporation tank 3.

[0023] The guide channel 2 is an inclined channel with its inlet bottom height lower than the bottom height of the graphite crucible 1 and its outlet height higher than the bottom height of the evaporation tank 3, so that the molten film flows to the evaporation tank 3 by gravity.

[0024] The evaporation tank 3 is elongated and its length direction is adapted to the width direction of the substrate to be coated.

[0025] The large coil 4 and the small coil 5 have the same winding direction and are independently powered and controlled, and the current density of the small coil 5 is greater than that of the large coil 4.

[0026] The fixed baffle 6 is larger than the opening size of the graphite crucible 1 and is made of high-temperature resistant heat-insulating material.

[0027] The movable baffle 7 is connected to the driving device and can be moved along the length of the evaporation tank 3 to completely block or fully open the opening of the evaporation tank 3.

[0028] The heat insulation layer 8 is made of ceramic material or mica composite material, and its thickness is 5mm.

[0029] The working process is as follows: The film material is placed in the graphite crucible 1. After the large coil 4 is energized, the graphite crucible 1 is heated by induction, causing the film material to melt into a liquid. The liquid film material flows into the evaporation tank 3 through the guide channel 2. After the small coil 5 is energized, the liquid film material is further heated, so that it reaches a gaseous state and evaporates. When coating, the movable baffle 7 moves to one side and opens to facilitate the deposition of the gaseous film material onto the surface of the substrate to be coated. The fixed baffle 6 always covers the graphite crucible 1 to block the heat radiation generated by it.

[0030] This utility model's evaporation source unit adopts an integrated structure of graphite crucible, guide channel, and evaporation tank, eliminating the need for a complex wire feeding structure and avoiding problems such as wire feeding tube blockage. The structure is simple and has a high fault tolerance. The evaporation tank is designed in a slender shape, reducing the heat radiation area and the amount of heat radiation, thus minimizing the impact on other components of the equipment and the coating environment.

[0031] The segmented heating method using large and small coils ensures a smooth temperature change during the transformation of the film material from solid to liquid and then to gas, effectively preventing splashing and guaranteeing coating quality. Furthermore, the coils are isolated from the evaporation source unit, preventing contact with the coils during cleaning and maintenance, thus avoiding damage. This method offers a high safety factor, and the maintenance and cleaning operations are simple, quick, and improve production efficiency.

[0032] The overall structure is compact and saves space. The number of evaporation source units can be increased or decreased according to the width of the substrate film. By arranging them in a straight line, an evaporation area matching the width of the substrate to be coated is formed, making the coating more uniform and further ensuring the film quality.

[0033] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum coating induction evaporation source, characterized in that, The device includes an integral graphite crucible (1), a flow guide (2), and an evaporation tank (3). The two ends of the flow guide (2) are connected to the graphite crucible (1) and the evaporation tank (3), respectively. A large coil (4) is provided at the bottom of the graphite crucible (1), and a small coil (5) is provided at the bottom of the evaporation tank (3). A fixed baffle (6) is provided above the graphite crucible (1), and a movable baffle (7) is provided above the evaporation tank (3). A heat insulation layer (8) is provided between the large coil (4) and the small coil (5) and the integral graphite crucible (1), the flow guide (2), and the evaporation tank (3).

2. The vacuum coating induction evaporation source according to claim 1, characterized in that, The guide channel (2) is an inclined channel with its inlet bottom height lower than the bottom height of the graphite crucible (1) and its outlet height higher than the bottom height of the evaporation tank (3).

3. The vacuum coating induction evaporation source according to claim 1, characterized in that, The evaporation tank (3) is long and narrow, and its length direction is adapted to the width direction of the substrate to be coated.

4. The vacuum coating induction evaporation source according to claim 1, characterized in that, The large coil (4) and the small coil (5) are wound in the same direction and are independently powered and controlled, and the current density of the small coil (5) is greater than that of the large coil (4).

5. The vacuum coating induction evaporation source according to claim 1, characterized in that, The fixed baffle (6) is larger than the opening size of the graphite crucible (1) and is made of high-temperature resistant heat insulation material.

6. The vacuum coating induction evaporation source according to claim 1, characterized in that, The movable baffle (7) is connected to the driving device and can be moved along the length of the evaporation tank (3) to completely block or open the opening of the evaporation tank (3).

7. The vacuum coating induction evaporation source according to claim 1, characterized in that, The heat insulation layer (8) is a ceramic material or a mica composite material with a thickness of 2-10 mm.

8. The vacuum coating induction evaporation source according to any one of claims 1-7, characterized in that, It includes at least two evaporation source units arranged in a cross-parallel manner, with the evaporation tanks (3) of each unit arranged along the same straight line to form an evaporation area that matches the width of the substrate to be coated.

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