An injection device for facilitating injection of metal ions

Abstract

The utility model discloses a kind of injection devices of being convenient for injection metal ions, including ion sputtering instrument main body, the upper end surface of ion sputtering instrument main body is fixed with first installation base, the middle position of first installation base upper end surface is equipped with first sliding rail, the both sides in first sliding rail inside are equipped with a first sliding block, the upper end surface of first sliding block is fixed with metal shell, the inside fixed mounting of metal shell is equipped with stepper motor, the output shaft of stepper motor is connected with transmission shaft through shaft coupling, the opposite face of two transmission shafts is fixed with a strip plate, the opposite face of two strip plates is equipped with a second sliding rail. By the utility model, the upper and lower end surfaces of the sprayed part can be directly turned over and sprayed automatically, and the metal ions can be sprayed to the lower end surface of the sprayed part more conveniently, thereby improving the convenience of the equipment.

Description

Technical Field

[0001] This utility model relates to the field of metal ion technology, specifically to a spraying device that facilitates the spraying of metal ions. Background Technology

[0002] Metal ions are the ions of metallic elements in a substance after it has dissolved in water. Simply put, they are the metallic elements in the molecules that make up a substance. Most metal ions are cations, but metals of Group IVB-VIII can generate anions. Metal ions are an important component in maintaining the osmotic balance of multiphase systems and are also a necessary component in a wide range of enzyme reactions. The catalytic activity of some enzymes requires metal ions in addition to the protein part, that is, metal ions are a component of the enzyme active site. Existing metal ions are mainly used for surface coating operations. Whether it is a diffusion barrier layer for semiconductor devices, an ultra-hard coating for cutting tools, or a reflective film for optical components, the essence is to transport metal atoms or ions to the surface of the workpiece and deposit them into a film. When this surface coating is required, metal ions need to be added to the inside of devices such as ion sputtering machines, ion spraying machines, and metal ion jetting devices. These devices can directly and directionally spray accelerated metal ions onto the outer surface of the workpiece to perform the surface coating operation. Such devices that can spray metal ions, such as ion sputtering machines, ion spraying machines, and metal ion jetting devices, can be called a metal ion jetting device. However, the metal ion spraying device, such as the ion sputtering instrument, sprays the workpiece placed on the platform directly from top to bottom using the sputtering target head. This spraying process cannot spray the lower surface of the workpiece, requiring manual rotation of the workpiece to spray the lower surface. This makes the overall spraying operation of the workpiece quite cumbersome. Therefore, it does not meet the current requirements. In response, we propose a spraying device that facilitates the spraying of metal ions. Utility Model Content

[0003] The purpose of this invention is to provide a spraying device that facilitates the spraying of metal ions, in order to solve the problems mentioned in the background art, such as the ion sputtering instrument-type metal ion spraying device directly spraying the workpiece placed on the placement table from top to bottom through the sputtering target head, which cannot spray the lower end surface of the workpiece and requires subsequent manual flipping of the workpiece to spray the lower end surface, and the cumbersome operation of spraying the entire workpiece.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a sputtering device for facilitating the sputtering of metal ions, comprising an ion sputtering instrument body, a first mounting base fixed to the upper end face of the ion sputtering instrument body, a first slide rail provided at the middle position of the upper end face of the first mounting base, a first slider installed on both sides inside the first slide rail, a metal shell fixed to the upper end face of the first slider, a stepper motor fixedly installed inside the metal shell, the output shaft of the stepper motor connected to a transmission shaft via a coupling, a strip plate fixed to the opposite faces of the two transmission shafts, a second slide rail provided on the opposite faces of the two strip plates, a second slider installed on the lower side inside the second slide rail, a second mounting base fixed to the opposite faces of the two second sliders, and a placement platform fixed to the upper end face of the second mounting base.

[0005] Preferably, a discharge cylinder is fixedly installed inside the second mounting base, the piston rod of the discharge cylinder is connected to a connecting plate, and a plurality of discharge push rods are fixedly provided on the upper end surface of the connecting plate.

[0006] Preferably, the outer side of the first slide rail is provided with a transparent cover fixed to the upper end face of the mounting base, and the middle position of the upper end face of the transparent cover is provided with a target head mounting port, and a sputtering target head is mounted on the outer surface of the target head mounting port.

[0007] Preferably, a control panel is fixed to the outer surface of the ion sputtering instrument body on one side of the transparent cover, and the first slider, stepper motor, second slider, unloading cylinder and sputtering target are all electrically connected to the control panel.

[0008] Preferably, the upper surface of the placement platform is provided with multiple protective stripes, and the upper surface of the placement platform is lower than the lower surface of the transmission shaft.

[0009] Preferably, the top end of the unloading push rod is hemispherical, and the unloading push rod is movably inserted into the interior of the placement platform.

[0010] Preferably, a protective cover plate is provided above the stepper motor on the upper surface of the metal casing, and the metal casing and the protective cover plate are fixed together by screws.

[0011] Compared with the prior art, the beneficial effects of this utility model are: This invention, when using equipment to spray metal ions onto the outer surface of a workpiece to form a coating, first places the workpiece directly on the upper surface of the first placement platform from left to right. Then, the upper surface of the workpiece is sprayed using a sputtering target. After the upper surface of the workpiece is sprayed, the workpiece can be flipped and placed on the upper surface of the second placement platform from left to right using a first slider, a stepper motor, and a second slider. After the workpiece is flipped, its previously unsprayed lower surface becomes the upper surface, and the sputtering target can then directly spray the previously unsprayed lower surface. This technical solution makes it easier to spray metal ions onto the lower surface of the workpiece, thereby improving the convenience of the equipment. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a front view of the entire utility model; Figure 3 This utility model Figure 2 Enlarged view of the structure at point A in the middle; Figure 4 This utility model Figure 3 Enlarged view of the structure at point B in the middle.

[0013] In the figure: 1. Ion sputtering instrument body; 2. Transparent cover; 3. Target head mounting port; 4. Sputtering target head; 5. First mounting base; 6. First slide rail; 7. First slider; 8. Metal shell; 9. Stepper motor; 10. Transmission shaft; 11. Strip plate; 12. Second slide rail; 13. Second slider; 14. Mounting base; 15. Placement stage; 16. Unloading cylinder; 17. Connecting plate; 18. Unloading push rod. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0015] The ion sputtering instrument body 1 (model SBC-12), stepper motor 9 (model DM542), and unloading cylinder 16 (model SC-32) mentioned in this utility model can be obtained from the market or through private customization.

[0016] Please see Figures 1 to 4An embodiment of this utility model provides a sputtering device for facilitating the sputtering of metal ions, comprising an ion sputtering instrument body 1, a first mounting base 5 fixed to the upper end face of the ion sputtering instrument body 1, a first slide rail 6 provided at the middle position of the upper end face of the first mounting base 5, a first slider 7 installed on both sides inside the first slide rail 6, a metal shell 8 fixed to the upper end face of the first slider 7, a stepper motor 9 fixedly installed inside the metal shell 8, the output shaft of the stepper motor 9 connected to a transmission shaft 10 via a coupling, a strip plate 11 fixed to the opposite faces of the two transmission shafts 10, a second slide rail 12 provided to the opposite faces of the two strip plates 11, a second slider 13 installed on the lower side inside the second slide rail 12, a second mounting base 14 fixed to the opposite faces of the two second sliders 13, and a placement platform 15 fixed to the upper end face of the second mounting base 14.

[0017] A transparent cover 2 is fixed to the upper surface of the first mounting base 5 on the outer side of the first slide rail 6. A target head mounting port 3 is located in the middle of the upper surface of the transparent cover 2. A sputtering target head 4 is mounted on the outer surface of the target head mounting port 3. A control panel is fixed to the outer surface of the ion sputtering instrument body 1 on one side of the transparent cover 2. The first slider 7, stepper motor 9, second slider 13, unloading cylinder 16 and sputtering target head 4 are all electrically connected to the control panel. The first slider 7, stepper motor 9, second slider 13, unloading cylinder 16 and sputtering target head 4 can be fully automatically controlled through the control panel. When it is necessary to use equipment to spray metal ions onto the outer surface of the part to be coated to form a coating, the part to be coated is first placed directly on the upper surface of the first placement platform 15 from left to right, and then the transparent cover 2 is installed. After the transparent cover 2 is installed, the sputtering target 4 is installed on the outside of the target mounting port 3 located on the upper surface of the transparent cover 2. After the sputtering target 4 is installed, the placement platform 15 with the part to be coated on the upper surface is moved to below the sputtering target 4 by the first slider 7 from left to right. Then the upper surface of the part to be coated is sprayed by the sputtering target 4. After the spraying operation on the upper surface of the part to be sprayed is completed, the second stepper motor 9 from the left is started. This stepper motor 9 drives the strip plate 11 connected to it via the transmission shaft 10 to rotate. At this time, the strip plate 11 rotates 180 degrees. After the strip plate 11 rotates 180 degrees, the second slider 13, which was originally slidably mounted on the lower side of the front face of the strip plate 11, and the placement platform 15 connected to the second slider 13 via the second mounting base 14 will move to the upper side of the front face of the strip plate 11 and flip over. After the second placement platform 15 from the left flips over, the second first slider 7 from the left moves the flipped placement platform 15 to the top of the placement platform 15 on which the part to be sprayed is placed. Then, the two second sliders 13 are started simultaneously to move the two The placement platform 15 is pushed synchronously towards the center point of the strip plate 11 until the two placement platforms 15 are respectively in contact with the upper and lower end faces of the part to be sprayed, thereby clamping and fixing the part to be sprayed. After the part to be sprayed is fixed, the two stepper motors 9 drive the two strip plates 11 to rotate 180 degrees synchronously. During the rotation of the two strip plates 11, the clamped and fixed part to be sprayed will rotate together. After the two strip plates 11 have rotated 180 degrees, the upper and lower end faces of the part to be sprayed will be swapped. Then, the first slider 7 from left to right moves the first placement platform 15 from left to right above the part to be sprayed away from the top of the part to be sprayed. Finally, the sputtering target head 4 sprays the lower end face of the part that was not originally sprayed. The above technical solution makes it easier to spray metal ions onto the lower end surface of the part being coated, thereby improving the convenience of the equipment.

[0018] The upper surface of the placement table 15 is provided with multiple protective stripes, and the upper surface of the placement table 15 is lower than the lower surface of the transmission shaft 10. The protective stripes on the upper surface of the placement table 15 can increase the friction between the placement table 15 and the workpiece to be sprayed, thereby preventing the workpiece from moving due to the metal ions ejected from the sputtering target head 4. By placing the platform 15, whose upper end face is lower than the lower end face of the drive shaft 10, it is possible to ensure that the lower end face of the platform 15, which has just moved to the upper side of the front end face of the second strip plate 11 from the left after the first rotation, is kept at a distance from the upper end face of the first platform 15 from the left, thereby ensuring that the second platform 15 can move above the first platform 15.

[0019] An unloading cylinder 16 is fixedly installed inside the second mounting base 14. The piston rod of the unloading cylinder 16 is connected to a connecting plate 17. Multiple unloading push rods 18 are fixedly provided on the upper end surface of the connecting plate 17. The top end of the unloading push rod 18 is hemispherical, and the unloading push rod 18 is movably inserted into the interior of the placement platform 15. When the first sliding block 7 moves the first placement platform 15 away from the top of the workpiece to be sprayed, the unloading cylinder 16 corresponding to the first placement platform 15 is activated, thereby pushing the unloading push rod 18 connected to it through the connecting plate 17 downward. As the unloading push rod 18 descends, the hemispherical top end of the unloading push rod 18 will contact the workpiece to be sprayed, thereby applying a downward pushing force to it. This downward pushing force can ensure that the workpiece to be sprayed can fall off the outer surface of the first placement platform 15 completely, thereby preventing some placement platforms 15 from sticking to the outer surface of the first placement platform 15 due to metal ions and not being able to fall off.

[0020] A protective cover plate is provided on the upper surface of the metal housing 8 above the stepper motor 9, and the metal housing 8 and the protective cover plate are fixed together by screws; the protective cover plate can protect the stepper motor 9, and when the stepper motor 9 fails, the protective cover plate can be removed to repair the stepper motor 9.

[0021] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A spraying device for facilitating the spraying of metal ions comprising an ion sputterer body (1) characterised in that: The upper end face of the ion sputtering instrument body (1) is fixed with a first mounting base (5). The middle position of the upper end face of the first mounting base (5) is provided with a first slide rail (6). A first slider (7) is installed on both sides inside the first slide rail (6). A metal shell (8) is fixed on the upper end face of the first slider (7). A stepper motor (9) is fixedly installed inside the metal shell (8). The output shaft of the stepper motor (9) is connected to a transmission shaft (10) through a coupling. A strip plate (11) is fixed on the opposite face of the two transmission shafts (10). A second slide rail (12) is provided on the opposite face of the two strip plates (11). A second slider (13) is installed on the lower side inside the second slide rail (12). A second mounting base (14) is fixed on the opposite face of the two second sliders (13). A placement platform (15) is fixed on the upper end face of the second mounting base (14).

2. The spray device of claim 1, wherein: The second mounting base (14) has a discharge cylinder (16) fixedly installed inside. The piston rod of the discharge cylinder (16) is connected to a connecting plate (17). The upper end face of the connecting plate (17) is fixedly provided with multiple discharge push rods (18).

3. The spray device of claim 1, wherein: The outer side of the first slide rail (6) is provided with a transparent cover (2) fixed to the upper end face of the first mounting base (5). The middle position of the upper end face of the transparent cover (2) is provided with a target head mounting port (3). The outer surface of the target head mounting port (3) is equipped with a sputtering target head (4).

4. The spraying device for easily spraying metal ions according to claim 3, characterized in that: The transparent cover (2) has a control panel fixed to the outer surface of the ion sputtering instrument body (1) on one side, and the first slider (7), stepper motor (9), second slider (13), unloading cylinder (16) and sputtering target (4) are all electrically connected to the control panel.

5. The spraying device for easily spraying metal ions according to claim 1, characterized in that: The upper surface of the placement platform (15) is provided with multiple protective stripes, and the upper surface of the placement platform (15) is lower than the lower surface of the transmission shaft (10).

6. The spraying device for easily spraying metal ions according to claim 2, characterized in that: The top end of the unloading push rod (18) is hemispherical, and the unloading push rod (18) is movably inserted into the interior of the placement platform (15).

7. The spraying device for easily spraying metal ions according to claim 1, characterized in that: The stepper motor (9) is provided with a protective cover plate located on the upper surface of the metal shell (8), and the metal shell (8) and the protective cover plate are fixed together by screws.

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