Magnetron sputtering target capable of coating in different areas and coating machine thereof

Abstract

The utility model discloses a kind of magnetron sputtering target and its film coating machine that can be divided into area coating, the magnetron sputtering target includes magnetic field assembly, linear moving mechanism, rotating mechanism, bearing seat, water pipe, cathode target back tube and cathode target material, cathode target back tube is rotatably connected on bearing seat, water pipe is arranged inside cathode target back tube, one end of water pipe is worn to the outside of cathode target back tube, and is fixedly connected with bearing seat, magnetic field assembly is arranged inside water pipe, magnetic field assembly can be driven by linear moving mechanism and moves along the length direction of cathode target material, cooling water flow space is formed between water pipe and cathode target back tube, the end of water pipe worn to the outside of cathode target back tube is equipped with water inlet and water outlet with cooling water flow space intercommunication.The film coating machine is installed on the side wall of film coating cabin and / or hatch with the magnetron sputtering target.The utility model can realize the film of different thickness in different area, and the film thickness of all film-coated surfaces can be realized for special-shaped workpiece.

Description

Technical Field

[0001] This utility model belongs to the field of magnetron sputtering coating technology, specifically relating to a magnetron sputtering target capable of regional coating and its coating machine. Background Technology

[0002] Magnetron sputtering has become an important coating technology for various functional thin films. Traditional magnetron sputtering targets include circular targets, rectangular planar targets, and cylindrical targets, all of which sputter along a sputtering raceway controlled by a magnetic field across the entire target surface. Among them, cylindrical targets, which use strip-shaped magnetic blocks arranged in a long elliptical magnetic field, have structures with rotating magnetic cores or rotating target tubes, both of which can achieve uniform sputtering of tubular target materials and improve target utilization.

[0003] As coating technology becomes increasingly widespread and coated products are constantly emerging and being innovated, coating technologies, including sputtering targets, are required to continuously improve to meet the needs of new products. Recently, some workpieces require different coating thicknesses at different heights, or coatings at different heights to exhibit different interference colors, or coatings at different heights to have different functions, while simultaneously demanding sufficiently high coating production efficiency. If existing types of sputtering targets and coating machines are used for coating operations, the coating process is either extremely cumbersome (e.g., using workpiece segmentation and masking) or time-consuming and inefficient (e.g., using rotating chamber coating).

[0004] Therefore, this utility model addresses the coating technology requirements of these new products by proposing a magnetron sputtering target capable of regional coating and its coating machine. Utility Model Content

[0005] The first objective of this invention is to provide a magnetron sputtering target capable of regional coating.

[0006] The second objective of this invention is to provide a coating machine that employs the aforementioned magnetron sputtering target.

[0007] The first objective of this utility model is achieved through the following technical solution:

[0008] A magnetron sputtering target capable of regional coating is characterized by comprising a magnetic field assembly, a linear motion mechanism, a rotation mechanism, a bearing housing, a water-shielding tube, a cathode target back tube, and a cathode target material disposed on the outer side of the cathode target back tube. The cathode target back tube is rotatably connected to the bearing housing and can be driven to rotate by the rotation mechanism. The water-shielding tube is disposed inside the cathode target back tube, with one end extending to the outer side of the cathode target back tube and fixedly connected to the bearing housing. The magnetic field assembly is disposed inside the water-shielding tube and can be driven to move along the length direction of the cathode target material by the linear motion mechanism. There is a gap between the water-shielding tube and the cathode target back tube, thereby forming a cooling water flow space. The end of the water-shielding tube extending to the outer side of the cathode target back tube is provided with an inlet and an outlet, which are connected to the cooling water flow space.

[0009] A further technical solution of this utility model is as follows: the magnetic field component is a component whose length is much shorter than that of the target. It includes three columns of vertical magnetic blocks and two rows of horizontal magnetic blocks. The two rows of horizontal magnetic blocks are located at the upper and lower ends of the vertical magnetic blocks. The front end of the middle column of vertical magnetic blocks is the N pole, and the front end of the other two columns of vertical magnetic blocks and the two rows of horizontal magnetic blocks is the S pole.

[0010] A further technical solution of this utility model is as follows: one end of the cathode target back tube is closed, and the other end is provided with a rotary transmission shaft, which is rotatably connected to the bearing seat through the rotary transmission shaft. The rotary transmission shaft has a central hole. One end of the water-proof tube is closed, and the other end is provided with a sleeve assembly. The sleeve assembly has a return water channel that connects the water outlet and the cooling water flow space. The sleeve assembly passes through the central hole of the rotary transmission shaft. The linear movement mechanism includes a lead screw drive shaft and a ball screw linear module. The ball screw linear module is located inside the water-proof tube. The lead screw drive shaft passes through the middle of the sleeve assembly and is rotatably connected to the sleeve assembly. The inner end of the lead screw drive shaft is connected to the lead screw of the ball screw linear module. The magnetic field assembly is installed on the sliding seat of the ball screw linear module. A water inlet channel is provided in the middle of the lead screw drive shaft and the lead screw. The outer end of the water inlet channel is the water inlet, and the inner end is connected to the cooling water flow space.

[0011] A further technical solution of this utility model is as follows: the sleeve assembly includes an inner sleeve and an outer sleeve that are sleeved together, a water collector is provided at the upper end of the sleeve assembly, the upper ends of the inner sleeve and the outer sleeve are fixedly connected to the water collector, a return water channel is formed between the inner sleeve and the outer sleeve, and the water outlet is provided on the water collector.

[0012] A further technical solution of this utility model is as follows: a through hole is provided in the middle of the lead screw drive shaft and the lead screw, and a water inlet pipe is inserted into the through hole. The water inlet pipe is rotatably connected to the lead screw drive shaft, and the inner end of the water inlet pipe is fixedly connected to the closed end of the water-proof pipe. The water inlet pipe is a water inlet channel.

[0013] A further technical solution of this utility model is as follows: the linear motion mechanism includes a first power source, which is connected to the outer end of the lead screw drive shaft and drives the lead screw drive shaft to rotate; the rotating mechanism includes a second power source, which is connected to the rotating drive shaft and drives the rotating drive shaft to rotate.

[0014] The second objective of this utility model is achieved through the following technical solution:

[0015] A coating machine is characterized in that it includes a coating chamber, one side of which is a door, and the magnetron sputtering target is installed on the side wall of the coating chamber and / or the door.

[0016] A further technical solution of this utility model is as follows: the coating chamber is formed by eight side walls, three of which are on the door, and a pair of magnetron sputtering targets are respectively provided on the two side walls near the door and the three side walls on the door.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. The magnetic field component of this utility model can move linearly. During use, the linear moving mechanism moves the magnetic field component to different positions for coating, thereby controlling the coating thickness of different areas (for example, the longer the dwell time or the slower the moving speed at that position, the thicker the coating thickness of the corresponding area at the same coating distance).

[0019] For irregularly shaped workpieces with curved or inclined surfaces, the coating distance varies in different areas. By controlling the movement of the magnetic field component, it is possible to achieve the same coating thickness on all coating surfaces (for example, by staying at a position with a longer coating distance or by controlling the movement speed to be slower).

[0020] For workpieces that require interference colors to be generated through optical thin films (the interference color is determined by the film thickness), different film thicknesses can be obtained in different regions by moving the magnetic field component of this invention, so that the film layers deposited on the workpiece at different height positions or regions can exhibit different interference colors.

[0021] 2. By setting multiple magnetron sputtering targets with different cathode materials in the coating chamber of this invention, and moving the magnetic field components of the multiple magnetron sputtering targets to different positions, it is possible to simultaneously deposit films of different elements or compounds at different positions on the workpiece, resulting in films with different colors or functions. Alternatively, the magnetic field components of two or more magnetron sputtering targets can be moved to the same coating area simultaneously, allowing for simultaneous coating of a certain area of ​​the workpiece by two or more magnetron sputtering targets, thus achieving mixed coating of two or more target materials. Attached Figure Description

[0022] Figure 1This is a cross-sectional view of the magnetron sputtering target according to an embodiment of the present invention;

[0023] Figure 2 This is a cross-sectional structural schematic diagram of the water collector position of the magnetron sputtering target according to an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the structure of the magnetic field component according to an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the coating machine according to an embodiment of the present invention.

[0026] Meaning of the labels in the attached diagram:

[0027] 1. Bearing housing; 2. Insulating pad; 3. Rotary drive shaft; 4. Cathode target; 4-1. Cathode target back tube; 4-2. Lower end cap of back tube; 5. Water-proof pipe; 5-1. Inner sleeve; 5-2. Outer sleeve; 5-3. Limiting ring; 6. Second synchronous belt; 7. Second motor; 8. First motor; 9. Water inlet pipe; 10. Water collector; 10-1. Water collection body; 10-2. Lower pressure plate; 10-3. Water collection cavity; 10-4. Limiting hole; 11. Magnetic field assembly; 11-1. Longitudinal magnetic block; 11-2. Transverse magnetic block; 12. Fixing frame; 13. Fixing plate; 14. Lead screw; 15. Ball screw linear module; 16. Sealing ring; 17. 18. First skeleton oil seal; 19. Second bearing; 20. First bearing; 21. Shaft snap ring; 22. First synchronous belt; 23. Third bearing; 24. Fourth bearing; 25. Coating chamber; 26. Magnetron sputtering target; 27. Chamber door; 28. Cathode arc source; 29. ​​Water sealing plug; 30. Air extraction port; 31. Plug nut; 32. Planar magnetron sputtering target; 33. Side wall; 34. Lead screw drive shaft; 35. Second synchronous pulley; 36. First synchronous pulley; 37. Return water channel; 38. Cooling water flow space; 39. Water outlet; 40. Water inlet; 41. Flange ring; 42. First spacer; 43. Second spacer. Detailed Implementation

[0028] The present invention will be further described below with reference to embodiments.

[0029] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" or "second" is used in the description, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0031] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0032] Example:

[0033] like Figure 1 and Figure 2 The image shows a magnetron sputtering target capable of regional coating in this embodiment, which includes a magnetic field assembly 11, a linear movement mechanism, a rotation mechanism, a bearing housing 1, a water-proof tube 5, a cathode target back tube 4-1, and a cathode target material 4. The cathode target material 4 is sprayed onto the cathode target back tube 4-1 using a vacuum spraying method.

[0034] The bearing housing 1 is used for the longitudinal fixation of the entire magnetron sputtering target, and the bearing housing 1 has a shaft hole in the middle. The upper end of the bearing housing 1 is provided with a flange, and an insulating rubber pad 2 is provided under the flange of the bearing housing 1. During installation, the bearing housing is supported on the top plate of the coating chamber of the coating machine by the insulating rubber pad 2 under the flange, and is fixed by bolts. After installation, the magnetron sputtering target is inserted longitudinally into the coating chamber. Of course, a sealing ring is also provided at the top plate of the coating chamber to form a sealed connection between the bearing housing 1 and the top plate of the coating chamber.

[0035] In this embodiment, the lower end of the cathode target back tube 4-1 is closed by the lower end cover 4-2, and the upper end is provided with a rotary drive shaft 3. The specific connection structure is as follows: the upper and lower ends of the cathode target back tube 4-1 are respectively connected to flange rings 41 by shaft retaining rings 21. The flange ring 41 at the lower end is directly fixed to the edge of the lower end cover 4-2 by bolts, and a sealing ring 16 is provided between the cathode target back tube 4-1 and the lower end cover 4-2 to achieve a sealed connection. The flange ring 41 at the upper end is fixed to the flange at the lower end of the rotary drive shaft 3 by bolts, and a sealing ring 16 is provided between the lower end face of the cathode target back tube 4-1 and the rotary drive shaft 3 to achieve a sealed connection.

[0036] In this embodiment, the rotary drive shaft 3 is a hollow shaft with a central hole. The rotary drive shaft 3 passes through the shaft hole of the bearing seat 1 and is rotatably connected to the bearing seat 1. The specific structure is as follows: both the inner and outer walls of the rotary drive shaft 3 are stepped. A first skeleton oil seal 18 and two upper and lower first bearings 20 are provided between the rotary drive shaft 3 and the bearing seat 1. The first skeleton oil seal 18 and the two upper and lower first bearings 20 are all sleeved on the rotary drive shaft 3. The two first bearings 20 are separated and positioned by a first spacer 42. The lower end of the first skeleton oil seal 18 abuts against the inwardly protruding edge of the lower end of the bearing seat 1 and a step on the rotary drive shaft 3. The lower end of the lower first bearing 20 abuts against a step on the rotary drive shaft 3 and a washer on the first skeleton oil seal 18.

[0037] A water-sealing pipe 5 is located inside the cathode target back tube 4-1, with a gap between the water-sealing pipe 5 and the cathode target back tube 4-1, thus forming a cooling water flow space 38. Cooling of the cathode target is achieved through the flow of cooling water. A water-sealing plug 29 and a plug nut 31 for fixing the water-sealing plug 29 are provided at the lower end of the water-sealing pipe 5. The water-sealing plug 29 is inserted into the lower end of the water-sealing pipe 5, and a sealing ring 16 is provided between the water-sealing plug 29 and the water-sealing pipe 5 for sealing connection, achieving closure of the lower end of the water-sealing pipe 5. The plug nut 31, similar to a cap, is tightened at the lower end of the water-sealing pipe 5 to restrict the water-sealing plug 29. Both the plug nut 31 and the water-sealing plug 29 have through holes in the middle.

[0038] The upper end of the baffle pipe 5 is provided with a sleeve assembly, the upper part of which extends above the rotary drive shaft 3. A water collector 10 is provided at the upper end of the sleeve assembly. The sleeve assembly includes an inner sleeve 5-1 and an outer sleeve 5-2 nested together. The lower end of the inner sleeve 5-1 is fixedly connected to the upper end of the baffle pipe 5. The upper ends of the inner sleeve 5-1 and the outer sleeve 5-2 are fixedly connected to the water collector 10. A return water channel 37 is formed between the inner sleeve 5-1 and the outer sleeve 5-2. The water collector 10 is provided with a water outlet 39. The upper end of the return water channel 37 is connected to the water outlet 39, and the lower end is connected to the upper end of the cooling water flow space 38.

[0039] The specific connection structure between the water collector 10 and the inner sleeve 5-1 and the outer sleeve 5-2 is as follows: Figure 2As shown, the water collector 10 includes a water collecting body 10-1 and an annular lower pressure plate 10-2. The inside of the water collecting body 10-1 is a water collecting cavity 10-3, with a limiting hole 10-4 on the top. The upper end of the inner sleeve 5-1 is provided with a limiting ring 5-3. The upper end of the inner sleeve 5-1 passes through the water collecting cavity 10-3 and is inserted into the limiting hole 10-4. The limiting ring 5-3 abuts against the inner side of the water collecting body 10-1. A sealing ring 16 is provided between the inner side of the water collecting body 10-1 and the limiting ring 5-3. The lower pressure plate 10-2 is connected to the upper end of the outer sleeve 5-2 by a shaft retainer 21. The upper end face of the outer sleeve 5-2 abuts against the bottom of the water collecting body 10-1. A sealing ring 16 is provided between the upper end face of the outer sleeve 5-2 and the bottom of the water collecting body 10-1. The lower pressure plate 10-2 covers the bottom of the water collecting body 10-1 and is fixedly connected by bolts.

[0040] In this embodiment, both the riser pipe 5 and the sleeve assembly are made of stainless steel.

[0041] The sleeve assembly passes through the central hole of the rotary drive shaft 3 and is rotatably connected to the rotary drive shaft 3. The specific structure is as follows: a second skeleton oil seal 17 and two upper and lower second bearings 19 are provided between the outer sleeve 5-2 and the rotary drive shaft 3. The second skeleton oil seal 17 and the two upper and lower second bearings 19 are all sleeved on the outer sleeve 5-2. The two second bearings 19 are separated and positioned by a second spacer 43. The lower end of the second skeleton oil seal 17 abuts against the step of the rotary drive shaft 3, and the lower end of the lower second bearing 19 abuts against a step on the outer sleeve 5-2 and a washer on the second skeleton oil seal 17.

[0042] A fixing plate 13 is fixedly installed at the upper end of the outer sleeve 5-2, and a fixing frame 12 is fixedly installed on the upper part of the bearing seat 1. The fixing plate 13 is fixedly supported on the upper part of the fixing frame 12, and the fixing plate 13 forms support for the water-proof pipe 5, the linear movement mechanism and the magnetic field assembly 11.

[0043] The linear motion mechanism in this embodiment includes a first power source, a lead screw drive shaft 34, and a ball screw linear module 15. The first power source includes a first motor 8, which is a servo motor. The ball screw linear module 15 is a commercially available linear module that achieves transmission through a lead screw and nut mating structure (since the ball screw linear module 15 is an outsourced component, therefore...). Figure 1(The internal structure is omitted here). The ball screw linear module 15 is located inside the water-tight pipe 5. The sliding direction of the sliding seat of the ball screw linear module 15 is longitudinal. The screw drive shaft 34 passes through the middle of the inner sleeve 5-1. Third bearings 23 are respectively provided at the upper and lower ends between the screw drive shaft 34 and the inner sleeve 5-1 to realize the rotational connection between the screw drive shaft 34 and the inner sleeve 5-1, so that the screw drive shaft 34 can rotate within the sleeve assembly. The inner end of the screw drive shaft 34 is fixedly connected to the screw 14 of the ball screw linear module 15, so that the ball screw linear module 15 can be driven by the screw drive shaft 34. The magnetic field assembly 11 is installed on the sliding seat of the ball screw linear module 15. During use, the magnetic field assembly 11 is driven to move longitudinally by the ball screw linear module 15.

[0044] The upper end of the lead screw drive shaft 34 extends to the top of the sleeve assembly. The first motor 8 is mounted on the fixed frame 12. The upper end of the lead screw drive shaft 34 and the output shaft of the first motor 8 are respectively provided with the first synchronous pulley 36. The two first synchronous pulleys 36 are connected by the first synchronous belt 22, so that the lead screw drive shaft 34 can be driven to rotate by the first motor 8.

[0045] The rotating mechanism of this embodiment includes a second power source, a second synchronous belt 6, and two second synchronous pulleys 35. The second power source includes a second motor 7, which is a geared motor. The second motor 7 is mounted on a fixed frame 12. The two second synchronous pulleys 35 are respectively located on the upper end of the rotating transmission shaft 3 and on the output shaft of the second motor 7. The two second synchronous pulleys 35 are connected by the second synchronous belt 6, so that the rotating transmission shaft 3 can be driven to rotate by the second motor 7.

[0046] In this embodiment, a through hole is provided in the middle of both the lead screw drive shaft 34 and the lead screw 14. A water inlet pipe 9 is inserted through the through hole, and the upper end of the water inlet pipe 9 extends to the outside of the lead screw drive shaft 34 for connection with an external cooling water circulation system. A fourth bearing 24 is provided between the water inlet pipe 9 and the upper end of the lead screw drive shaft 34 to achieve a rotatable connection between the water inlet pipe 9 and the lead screw drive shaft 34, allowing the lead screw drive shaft 34 to rotate relative to the water inlet pipe 9. The inner end of the water inlet pipe 9 extends downward and passes through the through hole of the water sealing plug 29, and is fixedly connected to the water sealing plug 29 of the water-blocking pipe 5. The water inlet pipe 9 serves as the water inlet channel for cooling water, with the outer end of the water inlet pipe 9 being the water inlet 40 and the inner end communicating with the lower end of the cooling water flow space 38.

[0047] The magnetic field formed by magnetic field component 11 is a closed magnetic field, such as Figure 3As shown, the magnetic field assembly 11 includes three rows of vertical magnetic blocks 11-1 and two rows of horizontal magnetic blocks 11-2. The two rows of horizontal magnetic blocks 11-2 are located at the top and bottom ends. The front end of the middle row of vertical magnetic blocks 11-1 is the N pole, while the front ends of the other two rows of vertical magnetic blocks 11-1 and the two rows of horizontal magnetic blocks 11-2 are the S poles. The N pole of the middle row of vertical magnetic blocks 11-1 forms two sets of arch-shaped magnetic lines of force with the S poles of the left and right rows of vertical magnetic blocks 11-1, and the N pole of the middle row of vertical magnetic blocks 11-1 forms a closed arch-shaped magnetic line of force with the S poles of the top and bottom rows of horizontal magnetic blocks 11-2. A soft iron plate is provided on the back of the magnetic field assembly 11, and the vertical magnetic blocks 11-1 and horizontal magnetic blocks 11-2 are fixed to the soft iron plate, thus connecting them together. The magnetic field assembly 11 no longer covers the entire height of the cathode target, but is made in a small size, with a length less than the height of the cathode target back tube 4-1.

[0048] When the magnetron sputtering target is in use, the inlet 40 and outlet 39 are connected to an external cooling water circulation system. Cooling water enters through the central inlet pipe 9, then flows through the cooling water flow space 38 between the cathode target back tube 4-1 and the baffle pipe 5, absorbing heat, and then flows upward through the return water channel 37 to the collector 10, finally exiting from the outlet 39 on the collector 10. During the coating process, according to the required coating thickness in different areas, the magnetic field component 11 is moved to different positions by a linear movement mechanism to control the coating thickness in different areas (the longer the magnetic field component 11 stays at the corresponding position or the slower its movement speed at the corresponding position, the thicker the coating thickness in the corresponding area at the same coating distance). The cathode target back tube 4-1 and the cathode target material 4 on it are rotated by a rotating mechanism.

[0049] This embodiment also provides a coating machine using the above-described magnetron sputtering target, which includes a coating chamber 25, as shown below. Figure 4 As shown, one side of the coating chamber 25 is a door 27. The coating chamber 25 is formed by eight side walls 33, three of which are on the door 27. A pair of magnetron sputtering targets 26 are respectively installed on the two side walls 33 near the door 27 and the three side walls 33 on the door 27. Each pair of magnetron sputtering targets 26 serves as a twin target, resulting in five pairs of twin targets. Among the remaining three side walls 33 of the coating chamber 25 that are far from the door 27: the left rear side wall 33 is equipped with a cathode arc source 28 (depending on the height of the coating chamber, it can be a single planar arc source or multiple small circular arc sources evenly distributed along the height), the rear middle side wall 33 is equipped with an exhaust port 30 (the exhaust port 30 is traditionally located directly behind), and the right rear side wall 33 is equipped with a planar magnetron sputtering target 32. The cathode arc source 28 is used for ion bombardment cleaning and undercoating. The planar magnetron sputtering target 32 ​​is a spare target position. For example, if a noble metal coating is sometimes required, this spare target position can be equipped with a noble metal planar target for noble metal sputtering deposition.

[0050] When the coating machine is in use, all five pairs of magnetron sputtering targets 26 can be used to perform workpiece coating operations. The vertical movement speed of the corresponding magnetic field components 11 can be controlled according to the film thickness requirements of different heights and areas of the workpiece to achieve different film thicknesses at corresponding positions or areas. For irregularly shaped workpieces, such as those with inclined surfaces at different angles to the target, or workpieces with different diameters and curvatures, the vertical movement speed of the magnetic field components can also be controlled to maintain a consistent film thickness at corresponding positions or areas. Different target materials can also be selected and installed on the five pairs of twin targets, and different target materials can be activated at different heights to obtain films with different functions. All five pairs of twin magnetron sputtering targets are controlled by programmed servo motors to regulate the movement speed of the sputtering target's magnetic field, achieving the required film thickness, composition, and function for each area of ​​the product. Furthermore, by arranging multiple pairs of twin targets for simultaneous deposition, the problem of long deposition times in segmented coating can be compensated for, thereby improving coating efficiency. In addition, while controlling the vertical movement of the magnetic field components, the target power can also be increased or decreased to more effectively achieve the required film thickness.

[0051] The above embodiments of this utility model are not intended to limit the scope of protection of this utility model. The implementation of this utility model is not limited thereto. All other modifications, substitutions or alterations made to the above structure of this utility model based on the above content of this utility model and in accordance with the common technical knowledge and conventional means in the field, without departing from the basic technical idea of ​​this utility model, shall fall within the scope of protection of this utility model.

Claims

1. A magnetron sputtering target capable of being coated in zones, characterized in that: The device includes a magnetic field assembly, a linear motion mechanism, a rotating mechanism, a bearing housing, a water-cooling pipe, a cathode target back tube, and a cathode target material disposed on the outer side of the cathode target back tube. The cathode target back tube is rotatably connected to the bearing housing and can be driven to rotate by the rotating mechanism. The water-cooling pipe is disposed inside the cathode target back tube, with one end extending to the outer side of the cathode target back tube and fixedly connected to the bearing housing. The magnetic field assembly is disposed inside the water-cooling pipe and can be driven to move along the length direction of the cathode target material by the linear motion mechanism. There is a gap between the water-cooling pipe and the cathode target back tube, thereby forming a cooling water flow space. The end of the water-cooling pipe extending to the outer side of the cathode target back tube is provided with an inlet and an outlet, which are connected to the cooling water flow space.

2. The zoned coatable magnetron sputter target of claim 1, wherein: The magnetic field assembly includes three columns of vertical magnetic blocks and two rows of horizontal magnetic blocks. The two rows of horizontal magnetic blocks are located at the top and bottom ends of the vertical magnetic blocks. The front end of the middle column of vertical magnetic blocks is the N pole, and the front ends of the other two columns of vertical magnetic blocks and the two rows of horizontal magnetic blocks are the S pole.

3. The zoned coatable magnetron sputter target of claim 1, wherein: One end of the cathode target back tube is closed, and the other end is provided with a rotary drive shaft, which is rotatably connected to the bearing seat. The rotary drive shaft has a central hole. One end of the water-proof tube is closed, and the other end is provided with a sleeve assembly. The sleeve assembly has a return water channel connecting the water outlet and the cooling water flow space. The sleeve assembly passes through the central hole of the rotary drive shaft. The linear movement mechanism includes a lead screw drive shaft and a ball screw linear module. The ball screw linear module is located inside the water-proof tube. The lead screw drive shaft passes through the middle of the sleeve assembly and is rotatably connected to the sleeve assembly. The inner end of the lead screw drive shaft is connected to the lead screw of the ball screw linear module. The magnetic field assembly is installed on the sliding seat of the ball screw linear module. A water inlet channel is provided between the lead screw drive shaft and the lead screw. The outer end of the water inlet channel is the water inlet, and the inner end is connected to the cooling water flow space.

4. The zoned coatable magnetron sputter target of claim 3, wherein: The sleeve assembly includes an inner sleeve and an outer sleeve nested together. A water collector is provided at the upper end of the sleeve assembly. The upper ends of the inner sleeve and the outer sleeve are fixedly connected to the water collector. The return water channel is formed between the inner sleeve and the outer sleeve. The water outlet is provided on the water collector.

5. The magnetron sputtering target capable of regional coating according to claim 3, characterized in that: A through hole is provided between the lead screw drive shaft and the lead screw, and a water inlet pipe is inserted through the through hole. The water inlet pipe is rotatably connected to the lead screw drive shaft, and the inner end of the water inlet pipe is fixedly connected to the closed end of the water-blocking pipe. The water inlet pipe is the water inlet channel.

6. The magnetron sputtering target capable of regional coating according to claim 3, characterized in that: The linear motion mechanism includes a first power source connected to the outer end of the lead screw drive shaft, which drives the lead screw drive shaft to rotate. The rotation mechanism includes a second power source connected to the rotation drive shaft, which drives the rotation drive shaft to rotate.

7. A coating machine, characterized in that: The device includes a coating chamber, one side of which is a door, and a magnetron sputtering target according to any one of claims 1 to 6 is installed on the side wall of the coating chamber and / or the door.

8. The coating machine according to claim 7, characterized in that: The coating chamber is formed by eight side walls, three of which are on the door. A pair of magnetron sputtering targets are respectively provided on the two side walls near the door and the three side walls on the door.

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