A target assembly handler for a PVD magnetron sputtering apparatus

Abstract

The utility model belongs to semiconductor manufacturing equipment technical field discloses a target material subassembly taking and placing device for PVD magnetic control sputtering equipment, including folding body, set up on the body slidable locking mechanism and detachable double -end thread screw rod, folding body is connected left and right symmetry arm through hinge mechanism, slidable locking mechanism contains the strip -shaped recess that opens on symmetry arm, is equipped with the hexagon nut that can slide along its length direction in recess, the upper end of double -end thread screw rod is equipped with first thread, the lower extreme is equipped with second thread, the specification of first thread is matched with the internal thread of hexagon nut, the specification of second thread is matched with target material subassembly threaded hole. The utility model simple and reasonable in structure, its folding design greatly saved the storage space, and through slidable locking mechanism and the cooperation of double -end thread screw rod, realized the quick, stable and non - destructive taking and placing of target material, significantly improved the operation safety and the exchange target efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a target assembly picker / placer for PVD magnetron sputtering equipment. Background Technology

[0002] In the fields of semiconductor manufacturing, display panel production, and new energy material preparation, physical vapor deposition (PVD) magnetron sputtering technology has become a core process for preparing metal thin films, ceramic coatings, and transparent conductive films due to its advantages such as high precision and low-temperature film formation. As a key consumable in the sputtering process, the replacement efficiency and installation accuracy of the sputtering target directly affect equipment uptime and product yield.

[0003] Current mainstream pick-and-place tools mostly use rigid jaws to hold the outer edge or side of the target material. However, the target material itself is hard and brittle, and rigid clamping easily causes stress concentration at the contact point, leading to irreversible damage such as edge chipping and micro-cracks. Existing rotary target installation mechanisms require manual alignment of the target axis with the sputtering source center, with each adjustment taking 3-5 minutes. For production lines that pursue high equipment uptime, this accumulated unplanned downtime results in significant economic losses. In addition, to provide sufficient operating leverage, most existing pick-and-place tools are designed as non-foldable rigid long rod structures, typically exceeding 1.5 meters in length to accommodate the chamber height. This design results in bulky tools that are difficult to store conveniently in the already crowded surroundings of equipment or in clean areas. Utility Model Content

[0004] To overcome the above-mentioned technical problems, this utility model provides a target assembly picker / placer for PVD magnetron sputtering equipment.

[0005] The present invention adopts the following technical solution: A target assembly pick-and-place device for a PVD magnetron sputtering equipment includes a foldable body, a slidable locking mechanism disposed on the body, and a detachable double-threaded screw. The foldable body is connected to left and right symmetrical arms via a hinge mechanism. The slidable locking mechanism includes a strip-shaped groove formed on the symmetrical arms, and a hexagonal nut that can slide along its length is disposed in the groove. The upper end of the double-threaded screw is provided with a first thread, and the lower end is provided with a second thread. The specification of the first thread matches the internal thread of the hexagonal nut, and the specification of the second thread matches the threaded hole of the target assembly.

[0006] Preferably, the bottom of the strip groove is provided with a plurality of hexagonal recesses, the shape of which matches the outer contour of the hexagonal nut.

[0007] Preferably, the hinge mechanism is provided with an angle locking mechanism.

[0008] Preferably, the end of the symmetrical arm is provided with a gripping part, and the cross-section of the gripping part is oval.

[0009] Preferably, the surface of the grip portion is covered with a rubber layer, and the surface of the rubber layer is provided with anti-slip texture.

[0010] Preferably, the first thread and the second thread have opposite directions of rotation.

[0011] Preferably, the double-threaded screw is made of 42CrMo alloy steel, and after quenching and tempering, the surface hardness is HRC28-32 and the tensile strength is ≥785MPa.

[0012] Compared with the prior art, the beneficial effects of this utility model are: 1. This utility model significantly improves the space adaptability of the equipment through its unique folding body design. When not in use, the symmetrical arms of the pick-and-place device can be folded together via a hinge mechanism, significantly reducing its overall size. This greatly alleviates the problem of limited storage space for tools around PVD equipment and in clean areas, facilitating storage and management in narrow areas next to the equipment chamber.

[0013] 2. The sliding locking mechanism used in this invention, in conjunction with a double-ended threaded screw, effectively reduces the assembly stress on the target material. The screw connects to the center hole of the target material through a fine thread, effectively dispersing contact stress and avoiding edge chipping or cracking problems caused by traditional edge clamping methods. Simultaneously, the sliding nut design allows for position adjustment during installation, eliminating installation eccentricity and further protecting the target material from mechanical damage, significantly improving operational safety and target material lifespan.

[0014] 3. This utility model significantly improves the efficiency of target changing operations by optimizing the overall structure and ergonomic design. The unfolded folding arm forms a stable support structure, and combined with the quick alignment of the sliding nut and direct locking of the screw, operators can safely and effortlessly complete the entire process of target lifting, centering, and installation on the ground, greatly shortening target changing time. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the structure of this utility model in its working state; Figure 3 This is a structural diagram of the present invention in its stored state; Figure 4 This is a schematic diagram of the angle locking mechanism of this utility model.

[0016] Explanation of reference numerals in the attached figures: 101. First arm body; 102. Second arm body; 2. Hinge mechanism; 201. Rotating shaft; 202. Bushing; 3. Strip groove; 301. Hexagonal countersunk groove; 4. Hexagonal nut; 5. Double-ended threaded screw; 501. First thread; 502. Second thread; 6. Target assembly; 7. Elastic buckle; 701. First slider; 702. First slide rod; 703. First slide groove; 704. Second slider; 705. Second slide rod; 706. Second slide groove; 707. Return spring; 8. Slot; 9. Grip part; 10. Rubber layer. Detailed Implementation

[0017] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings. Throughout the drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions. Unless otherwise specified, the raw materials and equipment used are commercially available or commonly used in the art. The methods in the embodiments, unless otherwise specified, are conventional methods in the art. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0018] A target assembly picker for PVD magnetron sputtering equipment includes a foldable body, a sliding locking mechanism disposed on the body, and a detachable double-ended threaded screw 5. The foldable body is connected by a hinge mechanism 2 to a symmetrically arranged first arm 101 and a second arm 102, allowing the included angle between the first arm 101 and the second arm 102 to be adjustable, switching between working and storage states at any time. The sliding locking mechanism is disposed on the first arm 101 and the second arm 102, and includes a strip-shaped groove 3 extending along the length direction of the arm, with a hexagonal nut 4 that can slide along its length direction inside the groove; the bottom of the strip-shaped groove 3 has multiple hexagonal recesses 301, the contour of which matches the external shape of the hexagonal nut 4. When the hexagonal nut 4 is placed in the hexagonal recesses 301, part of its height is embedded in the hexagonal recesses 301 to form a circumferential constraint. The upper end of the double-ended threaded screw 5 is provided with a first thread 501, and the lower end is provided with a second thread 502. The specification of the first thread 501 matches the internal thread of the hexagonal nut 4, and the specification of the second thread 502 matches the threaded hole of the target assembly 6. The first thread 501 and the second thread 502 have opposite directions of rotation. By rotating the double-ended threaded screw 5, the hexagonal nut 4 and the target assembly 6 can be driven to move in opposite directions, thereby realizing the rapid adjustment and locking of the distance between them.

[0019] The hinge mechanism 2 includes a bushing 202 and a rotating shaft 201, which are respectively fixed to the first arm body 101 and the second arm body 102, and an angle locking mechanism is provided between them. This locking mechanism mainly consists of two symmetrically arranged slots 8 inside the bushing 202 and an elastic buckle 7 inside the rotating shaft 201. The two slots 8 correspond to the fully folded storage state and the 180° working state of the arm body, respectively. The elastic buckle 7 consists of two linked sliders: the first slider 701 slides axially along the rotating shaft 201, with its top exposed for pressing and its bottom having an inclined surface; the second slider 704 can move radially along the rotating shaft 201, and its top has a matching inclined surface that cooperates with the first slider 701. When the operator presses the first slider 701, the inclined surface drives the second slider 704 to retract radially, causing its bottom protrusion to disengage from the slots 8 of the bushing 202, thereby unlocking the mechanism. The sliding of the two sliders is guided and limited by the internal first slide groove 703 and second slide groove 706, and the corresponding first slide rod 702 and second slide rod 705, respectively. A return spring 707 is provided behind the second slider 704; when the rotating shaft 201 rotates to the slot 8 position, the return spring 707 automatically pushes the second slider 704 into the slot 8 to lock it, ensuring that the mechanism remains stable and locked in the storage and working positions.

[0020] The symmetrical arm ends are provided with a grip portion 9, which has an oval cross-section that fits the shape of the hand and conforms to ergonomics. The surface of the grip portion 9 is covered with a rubber layer 10 and has anti-slip textures that follow the gripping direction of the fingers, thereby enhancing grip friction, improving operational stability, and effectively relieving fatigue during long-term use.

[0021] The double-ended threaded screw 5 is made of 42CrMo alloy steel. After quenching and tempering, the surface hardness is HRC28-32 and the tensile strength is ≥785MPa, which ensures the wear resistance and tensile strength of key components and extends the service life of the tool.

[0022] A target assembly picker / placer for PVD magnetron sputtering equipment, in use: The operator first presses the elastic buckle 7 of the hinge mechanism 2 to extend both arms to a 180° horizontal working state. At this time, the buckle automatically engages with the corresponding slot 8 under the action of the return spring 707, achieving reliable locking of the working angle. Subsequently, according to the actual position of the threaded hole on the target assembly 6, the hexagonal nut 4 is slid along the strip groove 3 to the appropriate hexagonal recess 301 to initially limit its position. The first thread 501 of the double-ended threaded screw 5 is screwed into the hexagonal nut 4, and the second thread 502 is screwed into the threaded hole of the target assembly 6. Continuing to rotate the screw adjusts the relative distance between the pick-and-place device and the target assembly 6, achieving pre-tightening or release. Two operators hold the gripping parts 9 at the ends of the two arms respectively and work together to lift the entire device, thus safely and stably completing the target pick-and-place operation. After the operation is completed, the elastic buckle 7 is pressed again to fold the two arms together to a fully closed state. The elastic buckle 7 will automatically engage with the other slot 8, ensuring that the pick-and-place device is compact and stable when stored in its folded state.

[0023] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and variations can be made to the above embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A target assembly picker / placer for a PVD magnetron sputtering equipment, characterized in that, The device includes a foldable body, a sliding locking mechanism mounted on the body, and a detachable double-threaded screw. The foldable body is connected to left and right symmetrical arms via a hinge mechanism. The sliding locking mechanism includes a strip-shaped groove on the symmetrical arm, in which a hexagonal nut that can slide along its length is provided. The upper end of the double-threaded screw is provided with a first thread, and the lower end is provided with a second thread. The specification of the first thread matches the internal thread of the hexagonal nut, and the specification of the second thread matches the threaded hole of the target assembly.

2. A target assembly pick-and-place device for a PVD magnetron sputtering equipment according to claim 1, characterized in that, The bottom of the strip groove is provided with multiple hexagonal recesses, the shape of which matches the outer contour of the hexagonal nut.

3. A target assembly pick-and-place device for a PVD magnetron sputtering equipment according to claim 1, characterized in that, The hinge mechanism is equipped with an angle locking mechanism.

4. A target assembly pick-and-place device for a PVD magnetron sputtering equipment according to claim 1, characterized in that, The symmetrical arm has a gripping part at its end, and the gripping part has an oval cross-section.

5. A target assembly picker / placer for a PVD magnetron sputtering equipment according to claim 4, characterized in that, The grip portion is covered with a rubber layer, and the surface of the rubber layer has anti-slip textures.

6. A target assembly picker / placer for a PVD magnetron sputtering equipment according to claim 1, characterized in that, The first thread and the second thread have opposite directions of rotation.

7. A target assembly pick-and-place device for a PVD magnetron sputtering equipment according to claim 1, characterized in that, The double-threaded screw is made of 42CrMo alloy steel, and after quenching and tempering, its surface hardness is HRC28-32 and its tensile strength is ≥785MPa.

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