Combined small-sized magnetron sputtering coating machine

Abstract

The utility model discloses a combined small -size magnetron sputtering plating machine relates to plating machine technical field, including base, spacing structure, rotation structure and fixed structure, first, the first connecting frame of spacing structure is embedded in first recess, and it is fixed with mounting block screw thread through the first screw on the mounting plate, makes spacing board fixed in the one side of connecting seat, and the first rubber plate on spacing board can play the buffering protection effect when the subsequent fixed coating machine body, avoids the damage caused by rigid contact, simultaneously, the second connecting frame of fixed structure is embedded in the second recess in the top of connecting seat, and the fixed structure is connected with connecting seat screw thread through the second screw in the recess of fixed block, completes the installation of both sides fixed structure, when needing to place magnetron sputtering coating machine body, place it between two fixed structures in the top of connecting seat, push coating machine body and make its one side and the first rubber plate on spacing board adhere, realize preliminary spacing to prevent coating machine body lateral deviation.

Description

Technical Field

[0001] This utility model relates to the field of plating machine technology, specifically a combined small magnetron sputtering plating machine. Background Technology

[0002] Miniature magnetron sputtering coating machines are key equipment for thin film deposition in semiconductor R&D, optical component processing, and electronic component manufacturing. With their compact size and ease of operation, they play a crucial role in small-batch preparation and precision machining in laboratory settings. Firstly, in new material R&D, they can precisely control film thickness and composition, helping researchers quickly verify material properties and accelerating the R&D process. Secondly, in electronic component production, they can perform surface coating treatments on chips, sensors, and other components, improving the conductivity, wear resistance, and corrosion resistance of the devices. In the optics field, they can prepare functional thin films such as antireflective and reflective coatings, optimizing the optical performance of optical components. In short, the stable operation of miniature magnetron sputtering coating machines directly affects R&D efficiency and product quality, making them essential for precision manufacturing. Magnetron sputtering is an indispensable piece of equipment in the field; however, traditional small-scale magnetron sputtering coating machines have significant shortcomings in terms of support, fixation, and operational adjustment. On the one hand, most machines lack dedicated limiting and fixing structures, simply placing them on the worktable. During use, they are prone to displacement due to external impacts or self-vibration, leading to misalignment between the target and substrate, affecting coating uniformity, and even causing coating failure. On the other hand, traditional machines are mostly fixed installations, unable to achieve rotational adjustment according to coating process requirements. If uniform coating of the substrate is required from all directions, the machine position must be manually adjusted, which is cumbersome and easily damages the coating environment, leading to film quality fluctuations and affecting coating accuracy. Therefore, those skilled in the art have provided a combined small-scale magnetron sputtering coating machine to solve the problems mentioned in the background art. Utility Model Content

[0003] The purpose of this invention is to provide a combined small magnetron sputtering coating machine to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A combined small magnetron sputtering coating machine includes a base, a limiting structure, a rotating structure, and a fixing structure. The rotating structure is rotatably connected to the top of the base. A connecting seat is fixedly connected to the side of the rotating structure away from the base. The fixing structures are symmetrically and detachably connected to both sides of the connecting seat. An mounting block is fixedly connected to the middle of one side of the connecting seat. A limiting structure is detachably connected to the mounting block.

[0006] As a further embodiment of this utility model: the limiting structure includes a limiting plate, a mounting plate and a first connecting frame. Two first connecting frames are fixedly connected to one side of the limiting plate, and mounting plates are fixedly connected to both sides of the first connecting frame. Each mounting plate is threadedly connected to the mounting block by two first screws. A first rubber plate is fixedly connected to the side of the limiting plate away from the first connecting frame.

[0007] As a further embodiment of this utility model: the rotating structure includes a circular plate, a connecting shaft and a motor. The power output shaft of the motor is fixedly connected to the connecting shaft. The connecting shaft passes through the top of the base on the side away from the motor and is fixedly connected to the circular plate. The connecting shaft is rotatably connected to the base, and the circular plate is fixedly connected to the connecting seat.

[0008] As a further embodiment of this utility model: the fixing structure includes a fixing block, a sliding groove, a sliding channel, a resistance spring, a second rubber plate, a slide frame, a connecting frame, a sliding frame and a second connecting frame. The connecting frame is slidably connected to the fixing block. The second rubber plate is fixedly connected to the side of the connecting frame away from the fixing block. Two resistance springs are fixedly connected to the inner wall of one side of the connecting frame, and the other side of the resistance springs is fixedly connected to the fixing block.

[0009] As a further improvement of this utility model: two slides are fixedly connected to the top wall of the connecting frame, and sliding grooves are provided on the inner walls of both sides of the connecting frame. Two sliding grooves corresponding to the slides are provided on the top of the fixing block, and the sliding grooves are slidably connected to the slides.

[0010] As a further embodiment of this utility model: sliding frames corresponding to the sliding grooves are fixedly connected to both sides of the fixed block, and the sliding frames are slidably connected to the sliding grooves. Two second connecting frames are fixedly connected to one side of the bottom of the fixed block, and the two grooves on one side of the fixed block are threadedly connected to the connecting seats by two second screws.

[0011] As a further improvement of this utility model: anti-slip pads are fixedly connected to the four corners of the bottom of the base, and the magnetron sputtering plating machine body is placed on the top of the connecting seat and between the two fixed structures.

[0012] As a further embodiment of this utility model: two second slots are provided on both sides of the top of the connecting seat, corresponding to the second connecting frame on the fixed structure, and the second slots are embedded in the second connecting frame; two first slots are provided on the top of the mounting block, corresponding to the first connecting frame on the limiting structure, and the first slots are embedded in the first connecting frame.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. In use, firstly, the first connecting bracket of the limiting structure is embedded into the first groove on the top of the mounting block, and then the first screw on the mounting plate is threaded to the mounting block to fix the limiting plate on one side of the connecting seat. The first rubber plate on the limiting plate can play a buffering and protective role when fixing the coating machine body later to avoid damage caused by hard contact. At the same time, the second connecting bracket of the fixing structure is embedded into the second groove on the top of the connecting seat, and the fixing structure is threaded to the connecting seat by the second screw at the groove of the fixing block to complete the installation of the fixing structures on both sides.

[0015] 2. When placing the magnetron sputtering coating machine body, position it between the two fixed structures on top of the connecting base. Push the coating machine body so that one side of it fits against the first rubber plate on the limiting plate, achieving initial positioning and preventing the coating machine body from shifting laterally. At this time, the two sides of the coating machine body will squeeze the second rubber plate of the fixed structure, driving the connecting frame to move towards the fixed block. The slide at the top of the connecting frame slides along the slide groove at the top of the fixed block. At the same time, the slide grooves on the inner walls of the connecting frame on both sides cooperate with the slide frames on both sides of the fixed block to ensure that the connecting frame moves smoothly. During the movement of the connecting frame, the internal resistance spring will be compressed. The reaction force generated by the resistance spring pushes the connecting frame to reset, so that the second rubber plate fits tightly against both sides of the coating machine body. The elastic clamping force of the fixed structures on both sides achieves reliable fixation of the coating machine body. At the same time, the double buffering effect of the first and second rubber plates can effectively disperse the clamping force and avoid scratches or deformation on the surface of the coating machine body.

[0016] 3. During the coating process, the motor of the rotating structure is started. The power output shaft of the motor drives the connecting shaft to rotate. The connecting shaft passes through the base and rotates with the base. The circular plate fixedly connected to its top rotates synchronously with the connecting shaft, which in turn drives the connecting seat fixedly connected to the top of the circular plate and the coating machine body fixed on the connecting seat to rotate together. By adjusting the speed of the motor, the rotation speed of the coating machine body can be controlled to meet the rotation speed requirements of different coating processes, so that the target particles can be uniformly deposited on the surface of the substrate during the coating process, thereby improving the coating quality. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of a combined small magnetron sputtering coating machine.

[0018] Figure 2 This is a schematic diagram of the side structure of a combined small magnetron sputtering coating machine.

[0019] Figure 3 This is a schematic diagram of a partial structure of a combined small magnetron sputtering coating machine.

[0020] Figure 4 This is a schematic diagram of the connection structure of the connecting seat in a combined small magnetron sputtering coating machine.

[0021] Figure 5 This is a schematic diagram of the rotating structure in a combined small magnetron sputtering coating machine.

[0022] Figure 6 This is a schematic diagram of the fixed structure in a combined small magnetron sputtering coating machine.

[0023] In the diagram: 1. Base; 2. Anti-slip pad; 3. Connecting seat; 4. Magnetron sputtering plating machine body; 5. Limiting structure; 51. Limiting plate; 52. Mounting plate; 53. First connecting frame; 6. Rotating structure; 61. Circular plate; 62. Connecting shaft; 63. Motor; 7. Fixing structure; 71. Fixing block; 72. Slide groove; 73. Sliding groove; 74. Resistance spring; 75. Second rubber plate; 76. Slide frame; 77. Connecting frame; 78. Sliding frame; 79. Second connecting frame; 8. Mounting block; 9. First groove; 10. Second groove. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1

[0026] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6This embodiment provides a combined small magnetron sputtering coating machine, including a base 1, a limiting structure 5, a rotating structure 6, and a fixing structure 7. The rotating structure 6 is rotatably connected to the top of the base 1. A connecting seat 3 is fixedly connected to the side of the rotating structure 6 away from the base 1. The fixing structures 7 are symmetrically and detachably connected to both sides of the connecting seat 3. An mounting block 8 is fixedly connected to the middle of one side of the connecting seat 3. The limiting structure 5 is detachably connected to the mounting block 8. Anti-slip pads 2 are fixedly connected to the four corners of the bottom of the base 1. The top of the connecting seat 3 and the two fixing structures 7 are fixedly connected to the base 1. A magnetron sputtering plating machine body 4 is placed between them; two second slots 10 are provided on both sides of the top of the connecting seat 3, corresponding to the second connecting frame 79 on the fixed structure 7, and the second slots 10 are embedded in the second connecting frame 79. Two first slots 9 are provided on the top of the mounting block 8, corresponding to the first connecting frame 53 on the limiting structure 5, and the first slots 9 are embedded in the first connecting frame 53. The first connecting frame 53 of the limiting structure 5 is embedded in the first slot 9 on the top of the mounting block 8, and the first screw on the mounting plate 52 is used to connect the first connecting frame 53. The pin is threaded to the mounting block 8, fixing the limiting plate 51 to one side of the connecting seat 3. The first rubber plate on the limiting plate 51 can act as a buffer and protect the coating machine body when it is fixed later, avoiding damage caused by hard contact. At the same time, the second connecting bracket 79 of the fixing structure 7 is embedded in the second groove 10 at the top of the connecting seat 3. The fixing structure 7 is threaded to the connecting seat 3 by the second screw at the groove of the fixing block 71, completing the installation of the fixing structures 7 on both sides. The limiting structure 5 includes a limiting plate 51, a mounting plate 52 and a first connecting bracket 53. Two first connecting brackets 53 are fixedly connected to one side of the positioning plate 51. Mounting plates 52 are fixedly connected to both sides of the first connecting brackets 53. Each mounting plate 52 is threadedly connected to the mounting block 8 by two first screws. A first rubber plate is fixedly connected to the side of the limiting plate 51 away from the first connecting brackets 53. When it is necessary to place the magnetron sputtering coating machine body 4, it is placed between the two fixed structures 7 on the top of the connecting seat 3. The coating machine body is pushed so that one side of it fits against the first rubber plate on the limiting plate 51 to achieve initial positioning and prevent the coating machine body from shifting laterally.

[0027] Example 2

[0028] Reference Figure 1-6This embodiment is based on the previous embodiment, but differs in that the rotating structure 6 includes a circular plate 61, a connecting shaft 62, and a motor 63. The power output shaft of the motor 63 is fixedly connected to the connecting shaft 62. The side of the connecting shaft 62 away from the motor 63 passes through the top of the base 1 and is fixedly connected to the circular plate 61. The connecting shaft 62 is rotatably connected to the base 1, and the circular plate 61 is fixedly connected to the connecting seat 3. When the motor 63 is started, the power output shaft of the motor 63 drives the connecting shaft 62 to rotate. The connecting shaft 62 passes through the base 1 and rotates with the base 1. The circular plate 61, which is fixedly connected to its top, rotates synchronously with the connecting shaft 62, thereby driving the connecting seat 3, which is fixedly connected to the top of the circular plate 61, and the fixed parts on the connecting seat 3. The magnetron sputtering coating machine body 4 rotates together with the target material. By adjusting the speed of the motor 63, the rotation speed of the coating machine body can be controlled to meet the rotation speed requirements of different coating processes, thereby ensuring that the target particles can be uniformly deposited on the substrate surface during the coating process and improving the coating quality. The fixing structure 7 includes a fixing block 71, a slide groove 72, a sliding groove 73, a resistance spring 74, a second rubber plate 75, a slide frame 76, a connecting frame 77, a sliding frame 78, and a second connecting frame 79. The connecting frame 77 is slidably connected to the fixing block 71. The second rubber plate 75 is fixedly connected to the side of the connecting frame 77 away from the fixing block 71. Two resistance springs 74 are fixedly connected to the inner wall of one side of the connecting frame 77, and the other side of the resistance springs 74... Fixedly connected to the fixing block 71, two slides 76 are fixedly connected to the top wall of the connecting frame 77, and sliding grooves 73 are provided on the inner walls of both sides of the connecting frame 77. Two sliding grooves 72 corresponding to the slides 76 are provided on the top of the fixing block 71, and the sliding grooves 72 are slidably connected to the slides 76. Sliding frames 78 corresponding to the sliding grooves 73 are fixedly connected to both sides of the fixing block 71, and the sliding frames 78 are slidably connected to the sliding grooves 73. Two second connecting frames 79 are fixedly connected to one side of the bottom of the fixing block 71. Two second screws are threaded to the connecting seat 3 at the two grooves on one side of the fixing block 71. When the magnetron sputtering plating machine body 4 is placed, its two sides will squeeze the second rubber plate 75 of the fixing structure 7, which will drive the connecting frame 71. 7 moves towards the fixed block 71. The slide 76 on the top of the connecting frame 77 slides along the slide groove 72 on the top of the fixed block 71. At the same time, the slide grooves 73 on both sides of the inner wall of the connecting frame 77 cooperate with the slide brackets 78 on both sides of the fixed block 71 to ensure that the connecting frame 77 moves smoothly. During the movement of the connecting frame 77, the internal resistance spring 74 will be compressed. The reaction force generated by the resistance spring 74 pushes the connecting frame 77 to reset, so that the second rubber plate 75 is tightly attached to both sides of the coating machine body. The elastic clamping force of the two side fixing structures 7 achieves reliable fixation of the coating machine body. At the same time, the double buffering effect of the first rubber plate and the second rubber plate 75 can effectively disperse the clamping force and avoid scratches or deformation on the surface of the coating machine body.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0030] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A combined small magnetron sputtering coating machine, comprising a base (1), a limiting structure (5), a rotating structure (6), and a fixing structure (7), characterized in that, The top of the base (1) is rotatably connected to a rotating structure (6), and a connecting seat (3) is fixedly connected to the side of the rotating structure (6) away from the base (1). The connecting seat (3) is symmetrically and detachably connected to a fixing structure (7) on both sides. An installation block (8) is fixedly connected to the middle of one side of the connecting seat (3). A limit structure (5) is detachably connected to the installation block (8).

2. The combined small magnetron sputtering plating machine according to claim 1, characterized in that, The limiting structure (5) includes a limiting plate (51), a mounting plate (52), and a first connecting frame (53). Two first connecting frames (53) are fixedly connected to one side of the limiting plate (51). Mounting plates (52) are fixedly connected to both sides of the first connecting frame (53). Each mounting plate (52) is threadedly connected to the mounting block (8) by two first screws. A first rubber plate is fixedly connected to the side of the limiting plate (51) away from the first connecting frame (53).

3. The combined small magnetron sputtering plating machine according to claim 1, characterized in that, The rotating structure (6) includes a circular plate (61), a connecting shaft (62) and a motor (63). The power output shaft of the motor (63) is fixedly connected to the connecting shaft (62). The side of the connecting shaft (62) away from the motor (63) passes through the top of the base (1) and is fixedly connected to the circular plate (61). The connecting shaft (62) is rotatably connected to the base (1), and the circular plate (61) is fixedly connected to the connecting seat (3).

4. The combined small magnetron sputtering plating machine according to claim 1, characterized in that, The fixing structure (7) includes a fixing block (71), a slide groove (72), a sliding groove (73), a resistance spring (74), a second rubber plate (75), a slide frame (76), a connecting frame (77), a sliding frame (78), and a second connecting frame (79). The connecting frame (77) is slidably connected to the fixing block (71). The second rubber plate (75) is fixedly connected to the side of the connecting frame (77) away from the fixing block (71). Two resistance springs (74) are fixedly connected to the inner wall of one side of the connecting frame (77), and the other side of the resistance springs (74) is fixedly connected to the fixing block (71).

5. A combined small magnetron sputtering plating machine according to claim 4, characterized in that, The top wall of the connecting frame (77) is fixedly connected to two slides (76). The inner walls on both sides of the connecting frame (77) are provided with sliding grooves (73). The top of the fixing block (71) is provided with two sliding grooves (72) corresponding to the slides (76). The sliding grooves (72) are slidably connected to the slides (76).

6. A combined small magnetron sputtering plating machine according to claim 4, characterized in that, The fixed block (71) has two fixedly connected sliding frames (78) corresponding to the sliding groove (73) on both sides. The sliding frames (78) are slidably connected to the sliding groove (73). Two second connecting frames (79) are fixedly connected to one side of the bottom of the fixed block (71). The two grooves on one side of the fixed block (71) are threadedly connected to the connecting seat (3) by two second screws.

7. A combined small magnetron sputtering plating machine according to claim 1, characterized in that, The base (1) has anti-slip pads (2) fixedly connected to the four corners at the bottom, and the magnetron sputtering plating machine body (4) is placed between the top of the connecting seat (3) and the two fixed structures (7).

8. A combined small magnetron sputtering plating machine according to claim 1, characterized in that, The top sides of the connecting seat (3) are provided with two second slots (10) corresponding to the second connecting frame (79) on the fixed structure (7), and the second slots (10) are embedded in the second connecting frame (79). The top of the mounting block (8) is provided with two first slots (9) corresponding to the first connecting frame (53) on the limiting structure (5), and the first slots (9) are embedded in the first connecting frame (53).

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