A coating fixture

Abstract

This application discloses a coating fixture, including a first clamping plate and a second clamping plate. The first clamping plate is provided with a plurality of mounting slots and a plurality of first coating positions, which are arranged in a one-to-one correspondence. The mounting slots communicate with their corresponding first coating positions and are used to accommodate a quartz crystal wafer. The second clamping plate is connected to the first clamping plate and covers the mounting slots. The second clamping plate is provided with a plurality of second coating positions, which correspond one-to-one with the first coating positions. In the orthographic projection direction, the second coating positions and their corresponding first coating positions are symmetrically arranged about the center line of the mounting slot. The coating fixture of this application can ensure that the coating on the two surfaces of the quartz crystal wafer maintains concentric symmetry, which is beneficial for maintaining the key indicators such as the electrical performance and vibration characteristics of the quartz crystal wafer and improving the product qualification rate.

Description

Technical Field

[0001] This application relates to the field of crystal element manufacturing technology, and in particular to a coating fixture. Background Technology

[0002] In the production and processing of quartz crystal wafers, coating is a key process, and its quality directly affects the performance indicators of the quartz crystal wafers. In actual operation, the quartz crystal wafers are usually placed in a special fixture for fixation to carry out physical or chemical coating operations, thereby forming the electrodes of the quartz crystal wafers.

[0003] According to process requirements, both surfaces of the quartz crystal wafer need to be coated separately. Existing coating fixtures often require removing the quartz crystal wafer and re-clamping it, or flipping it within the original fixture, before coating the other surface. However, during the flipping process, the relative position between the quartz crystal wafer and the fixture can easily shift slightly. Improper control of the flipping force or angle can also lead to differences in positioning accuracy between the second and first coating operations, resulting in asymmetrical coatings on the two surfaces. This affects key indicators such as the electrical properties and vibration characteristics of the quartz crystal wafer, reducing the product yield. Utility Model Content

[0004] This application aims to at least solve one of the aforementioned technical problems existing in the prior art. Therefore, the purpose of this application is to provide a coating fixture that ensures the coating on both surfaces of a quartz crystal wafer maintains concentric symmetry, which is beneficial for maintaining key indicators such as the electrical properties and vibration characteristics of the quartz crystal wafer, and improving the product yield.

[0005] The coating fixture according to a first aspect embodiment of this application includes: A first clamping plate is provided with a plurality of mounting slots and a plurality of first coating positions, wherein the plurality of mounting slots and the plurality of first coating positions are provided in a one-to-one correspondence, and the mounting slots are connected to the corresponding first coating positions. The mounting slots are used to accommodate quartz crystal sheets. The second clamping plate is connected to the first clamping plate and covers the mounting groove. The second clamping plate is provided with a plurality of second coating positions that correspond one-to-one with the first coating positions. In the orthographic projection direction, the second coating positions and the corresponding first coating positions are symmetrically arranged about the center line of the mounting groove.

[0006] The coating fixture according to the embodiments of this application has at least the following beneficial effects: By providing a mounting groove on the first clamping plate for accommodating quartz crystal wafers and providing a first coating position communicating with the mounting groove, and simultaneously providing a second coating position corresponding one-to-one with the first coating position on the second clamping plate, and the second coating position and the first coating position being symmetrically arranged about the center line of the mounting groove in the orthographic projection direction, the quartz crystal wafers can be coated on both sides sequentially after being clamped once, without needing to remove or flip the quartz crystal wafers during the coating process. This avoids positioning errors and slight offsets caused by flipping operations, ensuring that the coatings on the two surfaces of the quartz crystal wafers maintain concentric symmetry, which is beneficial for maintaining key indicators such as the electrical performance and vibration characteristics of the quartz crystal wafers and improving the product qualification rate. In addition, the coating fixture of this application can coat multiple quartz crystal wafers simultaneously, improving coating efficiency.

[0007] According to some embodiments of this application, the first coating position includes a first head position and a first tail position communicating with the first head position. In the orthographic projection direction, the center line of the first head position is collinear with the center line of the mounting groove, and the end of the first tail position away from the first head position extends to the edge of the mounting groove.

[0008] According to some embodiments of this application, the second coating position includes a second head position and a second tail position communicating with the second head position. In the orthographic projection direction, the second head position coincides with the first head position, and the second tail position and the first tail position are symmetrically arranged about the center line of the mounting groove.

[0009] According to some embodiments of this application, the plurality of first coating sites and the plurality of second coating sites are arranged in a matrix.

[0010] According to some embodiments of this application, the coating fixture further includes a plurality of first connectors, the first clamping plate is provided with a plurality of first connecting holes, the second clamping plate is provided with a plurality of second connecting holes, and the first connectors pass through the corresponding second connecting holes and cooperate with the corresponding first connecting holes to connect the first clamping plate and the second clamping plate.

[0011] According to some embodiments of this application, the first connector includes a head and a tail connected to the head. When the first clamping plate is connected to the second clamping plate, the head is disposed in the corresponding second connecting hole, and the tail is disposed in the corresponding first connecting hole.

[0012] According to some embodiments of this application, the height of the head is not greater than the depth of the second connecting hole, and the height of the tail is not greater than the depth of the first connecting hole.

[0013] According to some embodiments of this application, the diameter of the second connecting hole is larger than the diameter of the first connecting hole.

[0014] According to some embodiments of this application, the plurality of mounting slots and the plurality of first connecting holes are arranged in a matrix, and each row of first connecting holes is disposed between two adjacent rows of mounting slots, and each first connecting hole is disposed in the middle position of four adjacent mounting slots.

[0015] According to some embodiments of this application, the coating fixture further includes a second connector, the four corners of the first clamping plate are provided with third connecting holes, the four corners of the second clamping plate are provided with fourth connecting holes, and one end of the second connector passes through the fourth connecting hole and engages with the third connecting hole.

[0016] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0017] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is a schematic diagram of the coating fixture according to an embodiment of this application; Figure 2 This is an orthographic projection view of the coating fixture according to an embodiment of this application; Figure 3 This is an exploded view of the coating fixture according to an embodiment of this application; Figure 4 for Figure 3 The diagram shows the structure of the first clamping plate of the coating fixture. Figure 5 for Figure 3 The diagram shows the structure of the second clamping plate of the coating fixture. Figure 6 This is a cross-sectional view of the coating fixture according to an embodiment of this application; Figure 7 This is a partial cross-sectional view of the coating fixture according to an embodiment of this application; Figure 8 for Figure 3 The diagram shows the structure of the first connecting member of the coating fixture.

[0018] Reference numerals: 100, first clamping plate; 110, mounting groove; 120, first coating position; 121, first head position; 122, first tail position; 130, first connecting hole; 140, third connecting hole; 200, Second clamping plate; 210, Second coating position; 211, Second head position; 212, Second tail position; 220, Second connecting hole; 230, Fourth connecting hole; 300. Quartz crystal plate; 400, First connector; 410, Head; 420, Tail. Detailed Implementation

[0019] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0020] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0021] In the description of this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0022] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0023] In the description of this application, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0024] Reference Figure 1 , Figure 2 , Figure 3This application provides a coating fixture, including a first clamping plate 100 and a second clamping plate 200. The first clamping plate 100 is provided with a plurality of mounting grooves 110 and a plurality of first coating positions 120, which are arranged in a one-to-one correspondence. The mounting grooves 110 are connected to the corresponding first coating positions 120 and are used to accommodate quartz crystal sheets 300. The second clamping plate 200 is connected to the first clamping plate 100 and covers the mounting grooves 110. The second clamping plate 200 is provided with a plurality of second coating positions 210 that correspond one-to-one with the first coating positions 120. In the orthographic projection direction, the second coating positions 210 and the corresponding first coating positions 120 are symmetrically arranged about the center line of the mounting grooves 110.

[0025] Reference Figure 2 It should be noted that the center line of the mounting slot 110 is a dashed line AA.

[0026] Specifically, by providing a mounting groove 110 on the first clamping plate 100 to accommodate the quartz crystal wafer 300, and providing a first coating position 120 communicating with the mounting groove 110, and simultaneously providing a second coating position 210 on the second clamping plate 200 corresponding to the first coating position 120, with the second coating position 210 and the first coating position 120 symmetrically arranged about the center line of the mounting groove 110 in the orthographic projection direction, the quartz crystal wafer 300 can be coated on both sides sequentially after a single clamping, without needing to remove or flip the quartz crystal wafer 300 during the coating process. This avoids positioning errors and slight offsets caused by flipping operations, ensuring that the coatings on both surfaces of the quartz crystal wafer 300 maintain concentric symmetry. This is beneficial for maintaining key indicators such as the electrical performance and vibration characteristics of the quartz crystal wafer 300, and improving the product qualification rate. In addition, the coating fixture of this application can coat multiple quartz crystal wafers 300 simultaneously, improving coating efficiency.

[0027] It should be noted that when using the coating fixture of this application for coating, after the side of the quartz crystal wafer 300 closest to the first coating position 120 is coated, the coating fixture is rotated 180° to coat the side of the quartz crystal wafer 300 closest to the second coating position 210. Of course, if the coating equipment has a dual-sided simultaneous coating function and the coating fixture structure is compatible, the coating fixture can also be set without rotating, simultaneously coating both sides of the quartz crystal wafer 300. In actual design, the usage method of the coating fixture can be designed according to needs.

[0028] Reference Figure 1 , Figure 2 , Figure 4In some embodiments, the first coating position 120 includes a first head position 121 and a first tail position 122 communicating with the first head position 121. In the orthographic projection direction, the center line of the first head position 121 is collinear with the center line of the mounting groove 110, so that the first head position 121 is aligned with the central region of the quartz crystal wafer 300 placed in the mounting groove 110, providing a positioning reference for coating in this region, ensuring the positional accuracy of the coating in the central region of the quartz crystal wafer 300, and avoiding the impact of subsequent electrical performance caused by positioning deviation in the central region coating. In addition, the end of the first tail position 122 away from the first head position 121 extends to the edge of the mounting groove 110, which allows the coating range to extend from the central region of the quartz crystal wafer 300 to the edge region, meeting the production requirements of the quartz crystal wafer 300.

[0029] Reference Figure 2 , Figure 4 , Figure 5 In some embodiments, the second coating position 210 includes a second head position 211 and a second tail position 212 communicating with the second head position 211. In the orthographic projection direction, the second head position 211 coincides with the first head position 121, ensuring that the central coating areas of the two surfaces of the quartz crystal wafer 300 correspond in position, avoiding positioning deviations caused by misalignment of the central coating areas on the two surfaces. In addition, the second tail position 212 and the first tail position 122 are symmetrically arranged about the center line of the mounting groove 110, which can make the coating areas of the two surfaces of the quartz crystal wafer 300 symmetrically distributed, further maintaining the stability of key indicators such as electrical performance and vibration characteristics of the quartz crystal wafer 300, reducing product defects caused by coating asymmetry, and improving the product qualification rate of the quartz crystal wafer 300.

[0030] Reference Figure 4 , Figure 5 In some embodiments, the plurality of first coating positions 120 and the plurality of second coating positions 210 are arranged in a matrix, so that the plurality of mounting slots 110 on the first clamping plate 100 and the first coating positions 120 form a regular corresponding layout, while the second coating positions 210 on the second clamping plate 200 and the first coating positions 120 maintain a matrix alignment relationship. This enables the synchronous clamping and batch coating of multiple quartz crystal wafers 300 in the fixture, increases the coating processing quantity per unit time, improves the production efficiency of quartz crystal wafers 300, and meets the needs of industrial mass production.

[0031] Reference Figure 3 , Figure 6 , Figure 7In some embodiments, the coating fixture further includes a plurality of first connectors 400. The first clamping plate 100 is provided with a plurality of first connecting holes 130, and the second clamping plate 200 is provided with a plurality of second connecting holes 220. The first connectors 400 pass through the corresponding second connecting holes 220 and cooperate with the corresponding first connecting holes 130 to connect the first clamping plate 100 and the second clamping plate 200, thereby realizing the detachable connection between the first clamping plate 100 and the second clamping plate 200. This allows for convenient separation of the first clamping plate 100 and the second clamping plate 200 when the quartz crystal sheet 300 is clamped, reducing the difficulty of placing the quartz crystal sheet 300 into the mounting slot 110. It also facilitates the quick disassembly of the coating fixture to remove the product after coating is completed, improving the overall convenience of production operations.

[0032] Reference Figure 3 , Figure 8 In some embodiments, the first connector 400 includes a head 410 and a tail 420 connected to the head 410. When the first clamping plate 100 is connected to the second clamping plate 200, the head 410 is disposed in the corresponding second connecting hole 220 and the tail 420 is disposed in the corresponding first connecting hole 130. This prevents the first connector 400 from protruding from the first clamping plate 100 and the second clamping plate 200, and prevents the protruding part of the first connector 400 from blocking the area of ​​the first coating position 120 or the second coating position 210. This ensures that the coating material can smoothly cover the surface of the quartz crystal sheet 300 to be coated, and avoids the coating area being missing or the thickness being uneven due to the first connector 400 blocking the coating area. Meanwhile, the head 410 and the tail 420 are respectively adapted to the second connecting hole 220 and the first connecting hole 130, which can enhance the tightness of the connection between the first connector 400 and the first clamping plate 100 and the second clamping plate 200, prevent the first connector 400 from loosening or shifting due to vibration and other factors during the coating process, further ensure the relative position stability of the first clamping plate 100 and the second clamping plate 200, and ensure the concentric symmetry of the double-sided coating of the quartz crystal sheet 300.

[0033] Reference Figure 6 , Figure 8In some embodiments, the height of the head 410 is not greater than the depth of the second connecting hole 220, and the height of the tail 420 is not greater than the depth of the first connecting hole 130. This ensures that when the first connector 400 is assembled with the first clamping plate 100 and the second clamping plate 200, the head 410 can be completely accommodated inside the second connecting hole 220, and the tail 420 can be completely accommodated inside the first connecting hole 130. This prevents the head 410 from protruding from the surface of the second clamping plate 200 or the tail 420 from protruding from the surface of the first clamping plate 100. It also prevents the head 410 from protruding and obscuring the area of ​​the second coating position 210, or the tail 420 from protruding and interfering with the quartz crystal sheet 300 placed in the mounting groove 110. This ensures that the coating material can cover the surface of the quartz crystal sheet 300 to be coated, avoiding problems such as coating defects and uneven thickness caused by the protrusion of the first connector 400, and ensuring the integrity and consistency of the coating quality.

[0034] In some embodiments, the diameter of the second connecting hole 220 is larger than the diameter of the first connecting hole 130, that is, the diameter of the head 410 is larger than the diameter of the first connecting hole 130. When the first clamping plate 100 is connected to the second clamping plate 200, the head 410 is disposed in the corresponding second connecting hole 220, the head 410 abuts against the first clamping plate 100, and the tail 420 is threadedly connected to the first connecting hole 130 to prevent the first clamping plate 100 and the second clamping plate 200 from relative displacement due to vibration, pressure and other factors during the coating process, and to ensure the clamping stability of the quartz crystal sheet 300 in the mounting groove 110.

[0035] Reference Figure 4 In some embodiments, the plurality of mounting slots 110 and the plurality of first connecting holes 130 are arranged in a matrix, with each row of first connecting holes 130 positioned between two adjacent rows of mounting slots 110, and each first connecting hole 130 positioned in the middle of four adjacent mounting slots 110. This matrix arrangement increases the effective usable area of ​​the first clamping plate 100, allowing for the placement of more mounting slots 110 to achieve batch clamping and coating of the quartz crystal wafers 300, thereby improving production efficiency. Furthermore, placing the first connecting holes 130 between two adjacent rows of mounting slots 110 and in the middle of four adjacent mounting slots 110 avoids spatial overlap or interference between the first connecting holes 130 and the mounting slots 110, ensuring that the mounting slots 110 can completely accommodate the quartz crystal wafers 300. It also provides sufficient space for the assembly of the first connector 400, preventing improper positioning of the connector from affecting the placement or coating operation of the quartz crystal wafers 300.

[0036] Reference Figures 3 to 5In some embodiments, the coating fixture further includes a second connector (not shown in the figure). The four corners of the first clamping plate 100 are provided with third connecting holes 140, and the four corners of the second clamping plate 200 are provided with fourth connecting holes 230. One end of the second connector passes through the fourth connecting hole 230 and engages with the third connecting hole 140. The second connector can limit the relative displacement of the first clamping plate 100 and the second clamping plate 200 in the edge region, preventing corner warping or misalignment caused by the large clamping plate area or uneven force during the coating process. This ensures that the first clamping plate 100 and the second clamping plate 200 maintain a tight fit from the center to the edge, thereby ensuring the consistent clamping of the quartz crystal sheets 300 in all mounting slots 110 and preventing positioning deviations of the quartz crystal sheets 300 in the edge region due to insufficient clamping fit. Furthermore, the symmetrically distributed second connectors at the four corners ensure more even stress distribution on the first clamping plate 100 and the second clamping plate 200, reducing clamping plate deformation caused by localized stress concentration and preventing asymmetry in the double-sided coating of the quartz crystal sheet 300 due to deformation of either the first clamping plate 100 or the second clamping plate 200. Additionally, the second connectors provide auxiliary positioning for the assembly of the first clamping plate 100 and the second clamping plate 200. During installation, initial alignment can be achieved first through the second connectors at the four corners, followed by precise fixing through the first connectors 400 in the main body area, simplifying the assembly process and improving operational convenience.

[0037] In some embodiments, the second connector can be a screw. Of course, in actual design, the structure of the second connector can be designed according to actual needs.

[0038] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application. Furthermore, unless otherwise specified, the embodiments and features described in the embodiments of this application can be combined with each other.

Claims

1. A coating fixture, characterized in that, include: A first clamping plate is provided with a plurality of mounting slots and a plurality of first coating positions, wherein the plurality of mounting slots and the plurality of first coating positions are provided in a one-to-one correspondence, and the mounting slots are connected to the corresponding first coating positions. The mounting slots are used to accommodate quartz crystal sheets. The second clamping plate is connected to the first clamping plate and covers the mounting groove. The second clamping plate is provided with a plurality of second coating positions that correspond one-to-one with the first coating positions. In the orthographic projection direction, the second coating positions and the corresponding first coating positions are symmetrically arranged about the center line of the mounting groove.

2. The coating fixture according to claim 1, characterized in that, The first coating position includes a first head position and a first tail position communicating with the first head position. In the orthographic projection direction, the center line of the first head position is collinear with the center line of the mounting groove, and the end of the first tail position away from the first head position extends to the edge of the mounting groove.

3. The coating fixture according to claim 2, characterized in that, The second coating position includes a second head position and a second tail position communicating with the second head position. In the orthographic projection direction, the second head position coincides with the first head position, and the second tail position and the first tail position are symmetrically arranged about the center line of the mounting groove.

4. The coating fixture according to claim 1, characterized in that, The plurality of first coating sites and the plurality of second coating sites are arranged in a matrix.

5. The coating fixture according to claim 1, characterized in that, The coating fixture further includes a plurality of first connectors. The first clamping plate is provided with a plurality of first connecting holes, and the second clamping plate is provided with a plurality of second connecting holes. The first connectors pass through the corresponding second connecting holes and cooperate with the corresponding first connecting holes to connect the first clamping plate and the second clamping plate.

6. The coating fixture according to claim 5, characterized in that, The first connector includes a head and a tail connected to the head. When the first clamping plate is connected to the second clamping plate, the head is disposed in the corresponding second connecting hole and the tail is disposed in the corresponding first connecting hole.

7. The coating fixture according to claim 6, characterized in that, The height of the head is not greater than the depth of the second connecting hole, and the height of the tail is not greater than the depth of the first connecting hole.

8. The coating fixture according to claim 5, characterized in that, The diameter of the second connecting hole is larger than the diameter of the first connecting hole.

9. The coating fixture according to claim 5, characterized in that, The plurality of mounting slots and the plurality of first connecting holes are arranged in a matrix, and each row of first connecting holes is disposed between two adjacent rows of mounting slots, and each first connecting hole is disposed in the middle position of four adjacent mounting slots.

10. The coating fixture according to claim 1, characterized in that, The coating fixture also includes a second connector. The first clamping plate has a third connecting hole at each of its four corners, and the second clamping plate has a fourth connecting hole at each of its four corners. One end of the second connector passes through the fourth connecting hole and engages with the third connecting hole.

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