Vacuum coating production line

Abstract

The utility model discloses a vacuum coating production line, including the transfer room, the both sides of transfer room all are connected with a plurality of process chambers of sequential interval arrangement, be equipped with with first openable and closable door's material import and export between each process chamber and transfer room, and the transfer room is connected with the feeding and discharging device for supplying and receiving workpiece carrier, and is equipped with the transfer device for transferring workpiece carrier between the feeding and discharging device and each process chamber in the transfer room. The vacuum coating production line has simple structure, low cost of manufacturing and maintenance, low control difficulty, workpiece carrier transfer stable and reliable and so on.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and specifically to a vacuum coating production line. Background Technology

[0002] Multi-chamber vacuum coating production lines are core equipment for achieving large-scale, high-efficiency, and high-quality production in the modern coating industry. These lines typically consist of multiple sequentially connected process chambers and a supporting workpiece carrier conveyor system.

[0003] In current mainstream multi-chamber vacuum coating production line designs, the process chambers are generally arranged in series along a straight line. Each process chamber is equipped with an independently driven conveying device (such as rollers, chains, or conveyors). When the workpiece carrier needs to be transferred between process chambers, the transfer is achieved by connecting the ends of the conveying devices in adjacent process chambers.

[0004] However, this traditional layout and conveying method has significant drawbacks:

[0005] 1. Low space utilization: The linear series arrangement causes the overall length of the production line to increase linearly with the number of process chambers, occupying a huge amount of factory space. Especially when there are many process steps (large number of process chambers), the excessively long linear layout places stringent requirements on the site, and the problem of wasted space is particularly prominent.

[0006] 2. The conveying system is complex, costly, and difficult to control: Each process chamber needs to be equipped with an independent drive mechanism (motor, transmission, control system, etc.), resulting in a complex equipment structure and a large number of parts.

[0007] 3. Multiple independent drive systems significantly increase the manufacturing and maintenance costs of the equipment. Coordinating the actions of multiple independent drive units to achieve precise synchronization and relay transmission involves complex control logic, making debugging and maintenance difficult. Furthermore, the conveying system, located within the process chamber, occupies considerable space, increasing the overall structural dimensions of the process chamber and affecting the installation and layout of other functional devices within it.

[0008] 4. Poor stability and positioning accuracy of the workpiece carrier: When the workpiece carrier is transferred between adjacent chambers, it needs to be handed over multiple times between two independently driven conveying devices. Each handover carries the risk of accumulated positioning errors, making it difficult to guarantee high-precision and high-repeatability positioning of the carrier within the chamber and during the handover process. Synchronization deviations or mechanical backlashes between drive units can easily cause the carrier to shake, jam, or shift its position during transfer. Utility Model Content

[0009] The technical problem to be solved by this utility model is to overcome the shortcomings of the existing technology and provide a vacuum coating production line with simple structure, low manufacturing and maintenance costs, low control difficulty, and stable and reliable workpiece carrier transfer.

[0010] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0011] A vacuum coating production line includes a transfer chamber, on both sides of which are connected a plurality of process chambers arranged sequentially at intervals. Each process chamber is provided with a material inlet and outlet with a first openable and closable door between it and the transfer chamber. The transfer chamber is connected to an inlet and outlet device for supplying and receiving workpiece carriers. The transfer chamber is provided with a transfer device for transferring workpiece carriers between the inlet and outlet device and each process chamber.

[0012] As a further improvement to the above technical solution:

[0013] The transfer device includes a track located in the transfer chamber and one or more movable seats driven by a motion drive component to move along the track. A transfer robot is installed on the movable seat. The movement of the movable seat along the track can carry the transfer robot to the feeding and discharging device and any material inlet or outlet.

[0014] The transfer robot includes a base, a telescopic arm, and a clamp for picking up and placing workpieces. The base is mounted on a movable seat, the telescopic arm is mounted on the base in a horizontal reciprocating manner via a translation component, and the clamp is mounted on the telescopic arm in a height-adjustable manner via a lifting component.

[0015] The track is a straight track, and the base is mounted on the movable seat by rotating the base around the vertical axis via a rotating assembly.

[0016] The track is a circular track, and the base is fixedly installed on the movable seat.

[0017] The motion drive assembly includes a rack mounted on a track and a gear mounted on a moving base and driven by a motor, the gear meshing with the rack.

[0018] The feeding and discharging device includes one or more transition chambers, each transition chamber having a second inlet and outlet with a second openable and closable door, and one of the second inlets and outlets of the transition chamber is connected to a transfer chamber.

[0019] The feeding and discharging device is provided with two transition chambers, which are connected to the same end of the transfer chamber, or the two transition chambers are respectively connected to the two ends of the transfer chamber.

[0020] The transition chamber is rotatably mounted with a support frame for placing workpiece carriers. The support frame is provided with multiple placement mechanisms for placing workpiece carriers, and the multiple placement mechanisms are arranged at intervals around the rotation axis of the support frame.

[0021] Compared with the prior art, the advantages of this utility model are:

[0022] This invention relates to a vacuum coating production line with multiple process chambers arranged sequentially along a straight line on both sides of the transfer chamber. A transfer device is installed inside the transfer chamber to transfer workpiece carriers. The overall structure occupies little space and has low site requirements. Only one transfer device is needed to transfer workpiece carriers between the feeding and discharging devices and each process chamber. The structure is simple, the equipment manufacturing and maintenance costs are low, and the control difficulty is low. The workpiece carrier does not need to be handed over multiple times during the transfer process between the feeding and discharging devices and each process chamber, which can ensure high precision and high repeatability of the workpiece carrier positioning during the transfer process and improve the stability and reliability of the workpiece carrier transfer. At the same time, the transfer device is not located inside the process chamber, which can reduce the size of the process chamber and facilitate the installation and layout of other functional devices inside the process chamber. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of the vacuum coating production line in Example 1.

[0024] Figure 2 This is a top view of the vacuum coating production line in Example 1.

[0025] Figure 3 This is a top sectional view of the vacuum coating production line in Example 1.

[0026] Figure 4 This is a top sectional view of the transition chamber in Example 1.

[0027] Figure 5 This is a schematic diagram of the installation structure of the transfer robot and the linear track in Example 1.

[0028] Figure 6 This is a three-dimensional structural diagram of the transfer robot in Example 1.

[0029] Figure 7 This is a three-dimensional structural diagram of the vacuum coating production line in Example 2.

[0030] Figure 8 This is a top view of the vacuum coating production line in Example 2.

[0031] Figure 9 This is a top sectional view of the vacuum coating production line in Example 2.

[0032] Legend:

[0033] 1. Process chamber; 2. Transfer chamber; 3. Material inlet / outlet; 31. First openable / closable door; 4. Feeding / discharging device; 41. Transition chamber; 42. Second inlet / outlet; 421. Second openable / closable door; 43. Support frame; 431. Placement mechanism; 5. Transfer device; 51. Moving seat; 52. Transfer robot; 521. Base; 522. Telescopic arm; 523. Fixture; 524. Translation component; 525. Lifting component; 526. Rotation component; 53. Linear track; 54. Circular track; 100. Workpiece carrier. Detailed Implementation

[0034] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] Example 1

[0036] like Figures 1 to 3 As shown, the vacuum coating production line of this embodiment includes a transfer chamber 2. Both sides of the transfer chamber 2 are connected to multiple process chambers 1 arranged sequentially along a straight line. The process chambers 1 are not equipped with a conveying system for conveying workpiece carriers 100. Each process chamber 1 and the transfer chamber 2 are provided with a material inlet / outlet 3 with a first openable / closeable door 31. The transfer chamber 2 is connected to a feeding / discharging device 4 for supplying and receiving workpiece carriers 100. The transfer chamber 2 is provided with a transfer device 5 for transferring workpiece carriers 100 between the feeding / discharging device 4 and each process chamber 1. This vacuum coating production line has multiple process chambers 1 arranged sequentially along a straight line on both sides of the transfer chamber 2. The transfer chamber 2 is equipped with a transfer device 5 to transfer the workpiece carrier 100. It occupies little space and has low site requirements. Only one transfer device 5 is needed to transfer the workpiece carrier 100 between the feeding and discharging device 4 and each process chamber 1. It has a simple structure, low equipment manufacturing and maintenance costs, and low control difficulty. The workpiece carrier 100 does not need to be handed over multiple times during the transfer process between the feeding and discharging device 4 and each process chamber 1. This can ensure high precision and high repeatability of the workpiece carrier 100 positioning during the transfer process, improve the accuracy and stability of the workpiece carrier 100 transfer, and at the same time, there is no need to set up a conveying system in the process chamber 1, which can reduce the size of the process chamber 1 and facilitate the installation and layout of other functional devices in the process chamber 1.

[0037] The first openable and closable door 31 in this embodiment can be an isolation door that completely isolates the process chamber 1 and the transfer chamber 2 when closed, such as a gate valve, or it can be a door that does not completely isolate the process chamber 1 and the transfer chamber 2 when closed, but only blocks the material inlet and outlet 3, such as a roller shutter.

[0038] In this embodiment, the transfer device 5 includes a track located in the transfer chamber 2 and a movable seat 51 driven by a moving drive assembly to move along the track. A transfer robot 52 is mounted on the movable seat 51. The movement of the movable seat 51 along the track can carry the transfer robot 52 to the feeding / discharging device 4 and any material inlet / outlet 3. When the transfer robot 52 moves to the feeding / discharging device 4 and any material inlet / outlet 3, it can pick up and put in the workpiece carrier 100 in the feeding / discharging device 4 and each process chamber 1. This transfer device 5 only requires a track, a movable seat 51, a rotating drive assembly, and a transfer robot 52 to realize the transfer of the workpiece carrier 100 between the feeding / discharging device 4 and each process chamber 1. It has the advantages of simple and compact structure, low cost, and easy control.

[0039] In this embodiment, as Figure 6 As shown, the transfer robot 52 includes a base 521, a telescopic arm 522, and a clamp 523 for picking up and placing the workpiece carrier 100. The base 521 is mounted on a movable seat 51. The telescopic arm 522 is mounted on the base 521 via a translation component 524, enabling horizontal reciprocating motion. The clamp 523 is mounted on the telescopic arm 522 via a lifting component 525, allowing adjustable height. The translation component 524 drives the telescopic arm 522 to reciprocate horizontally, carrying the workpiece carrier 100 into and out of the process chamber 1. The lifting component 525 drives the clamp 523 to different heights, lowering and raising the workpiece carrier 100, thus enabling the picking up and placing of the workpiece carrier 100 and driving it into the process chamber 1 without the need for a separate conveying system for transporting the workpiece carrier 100 within the process chamber 1. This transfer robot 52 has the advantages of simple structure, easy control, and stable and reliable operation. The clamp 523 uses a conventional mechanism for picking up and placing the workpiece carrier 100.

[0040] Preferably, the translation assembly 524 includes two first guide mechanisms disposed on both sides of the telescopic arm 522 and a first drive mechanism for driving the telescopic arm 522 to reciprocate horizontally. The first guide mechanism includes a first guide rail mounted on the telescopic arm 522 and a first slider mounted on the base 521, with the first guide rail and the first slider providing a guiding fit. The first drive mechanism includes a first rack mounted on the telescopic arm 522 and a first gear mounted on the base 521 and driven to rotate by a first motor, with the first gear meshing with the first rack. The first motor drives the first gear to rotate, which in turn forces the telescopic arm 522 to reciprocate horizontally via the first rack. This translation assembly 524 has a simple structure, is easy to control, and operates stably and reliably.

[0041] Preferably, the lifting assembly 525 includes two second guide mechanisms and a second drive mechanism for driving the lifting movement of the clamp 523. The second guide mechanism includes a second guide rail mounted on the clamp 523 and a second slider mounted on the telescopic arm 522, with the second guide rail and second slider providing a guiding engagement. The second drive mechanism includes a second rack mounted on the clamp 523 and a second gear mounted on the telescopic arm 522 and driven to rotate by a second motor, with the second gear meshing with the second rack. The second motor drives the second gear to rotate, which in turn forces the clamp 523 to move up and down via the second rack. This lifting assembly 525 has a simple structure, is easy to control, and operates stably and reliably.

[0042] In this embodiment, as Figure 3 and Figure 5 As shown, the track is a linear track 53, and the base 521 is rotatably mounted on the movable seat 51 around a vertical axis via a rotating assembly 526. The rotating assembly 526 drives the base 521 to rotate, allowing the transfer robot 52 to face the process chambers 1 on each side of the transfer chamber 2 to pick up and place the workpiece carrier 100. This eliminates the need for additional degrees of freedom for the transfer robot 52, resulting in a simpler structure and lower cost. The rotating assembly 526 includes a base and a drive motor. The base 521 is mounted on the base via a bearing mechanism, and the drive motor drives the base 521 to rotate via a reducer and gear mechanism.

[0043] In this embodiment, the motion drive assembly includes a rack mounted on the track and a gear mounted on the movable seat 51 and driven by a motor, with the gear meshing with the rack. This motion drive assembly has a simple structure and low cost. In other embodiments, the motion drive assembly may also employ other existing technologies, as long as it can drive the movable seat 51 to move along the track.

[0044] In this embodiment, the feeding / discharging device 4 includes two transition chambers 41, which are respectively connected to the two ends of the transfer chamber 2. Each transition chamber 41 has a second inlet / outlet 42 with a second openable / closable door 421. One of the second inlet / outlet 42 of the transition chamber 41 communicates with the transfer chamber 2, while the other second inlet / outlet 42 loads and unloads the workpiece carrier 100 from the transition chamber 41. The aforementioned transition chamber 41 functions as a vacuum transition chamber, ensuring that the vacuum level and atmosphere concentration within the transfer chamber 2 are not disrupted during the supply and removal of the workpiece carrier 100 from the transfer chamber 2, thus allowing for continuous vacuum coating production.

[0045] In this embodiment, as Figure 4As shown, a support frame 43 for placing workpiece carriers 100 is rotatably installed in the transition chamber 41. The support frame 43 is provided with multiple placement mechanisms 431 for placing workpiece carriers 100, which are arranged at intervals around the rotation axis of the support frame 43. With multiple placement mechanisms 431, multiple workpiece carriers 100 can be placed or removed at once in the transition chamber 41 with a single vacuum breaking, reducing the number of vacuum breaking operations and improving production efficiency. By opening the second inlet / outlet 42 connecting the transition chamber 41 and the transfer chamber 2, the transfer robot 52 can enter the transition chamber 41 to remove workpiece carriers 100 from the first carrier support assembly or place workpiece carriers 100 onto the first carrier support assembly. One of the two transition chambers 41 is used to supply workpiece carriers 100 loaded with workpieces to be coated into the transfer chamber 2, and the other is used to remove workpiece carriers 100 loaded with coated workpieces and transfer them to the transfer chamber 2. This separate entry and exit of workpiece carriers 100 into the transfer chamber 2 improves production efficiency.

[0046] Example 2

[0047] The vacuum coating production line in this embodiment is basically the same as that in Embodiment 1, with the main difference being that, Figures 5 to 7 As shown, in this embodiment, the track is a circular track 54, and the base 521 is fixedly installed on the movable seat 51. The two transition chambers 41 of the feeding and discharging device 4 are connected to the same end of the transfer chamber 2. This embodiment also includes two transfer manipulators 52. The use of a circular track 54 eliminates the need for a rotating mechanism for the transfer manipulators 52, reducing control complexity. Furthermore, the inclusion of two transfer manipulators 52 improves transfer efficiency.

[0048] The above description is merely a preferred embodiment of this utility model, and the protection scope of this utility model is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the technical concept of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A vacuum coating line, characterized in that: The system includes a transfer chamber (2), on both sides of which are connected multiple process chambers (1) arranged sequentially at intervals. Each process chamber (1) and the transfer chamber (2) are provided with a material inlet and outlet (3) with a first openable and closable door (31). The transfer chamber (2) is connected to an inlet and outlet device (4) for supplying and receiving workpiece carriers (100). The transfer chamber (2) is provided with a transfer device (5) for transferring workpiece carriers (100) between the inlet and outlet device (4) and each process chamber (1).

2. The vacuum coating line according to claim 1, characterized in that The transfer device (5) includes a track located in the transfer chamber (2) and one or more movable seats (51) driven by a mobile drive assembly to move along the track. A transfer manipulator (52) is installed on the movable seat (51). The movable seat (51) can move along the track to carry the transfer manipulator (52) to the feeding and discharging device (4) and any material inlet / outlet (3).

3. The vacuum coating line according to claim 2, characterized in that: The transfer robot (52) includes a base (521), a telescopic arm (522), and a clamp (523) for picking up and placing workpieces (100). The base (521) is mounted on a movable seat (51). The telescopic arm (522) is mounted on the base (521) in a horizontally reciprocating manner via a translation component (524). The clamp (523) is mounted on the telescopic arm (522) in a height-adjustable manner via a lifting component (525).

4. The vacuum coating production line according to claim 3, characterized in that: The track is a straight track (53), and the base (521) is mounted on the movable seat (51) by rotating the rotating component (526) around the vertical axis.

5. The vacuum coating production line according to claim 3, characterized in that: The track is a circular track (54), and the base (521) is fixedly installed on the movable seat (51).

6. The vacuum coating production line according to claim 2, characterized in that: The motion drive assembly includes a rack mounted on a track and a gear mounted on a moving base (51) and driven by a motor, the gear meshing with the rack.

7. The vacuum coating production line according to any one of claims 1 to 6, characterized in that: The feeding and discharging device (4) includes one or more transition chambers (41), the transition chambers (41) are provided with a second inlet and outlet (42) with a second openable and closable door (421), and one of the second inlet and outlet (42) of the transition chambers (41) is connected to the transfer chamber (2).

8. The vacuum coating production line according to claim 7, characterized in that: The feeding and discharging device (4) is provided with two transition chambers (41), which are connected to the same end of the transfer chamber (2), or the two transition chambers (41) are respectively connected to the two ends of the transfer chamber (2).

9. The vacuum coating production line according to claim 7, characterized in that: The transition chamber (41) is rotatably installed with a support frame (43) for placing the workpiece carrier (100). The support frame (43) is provided with a plurality of placement mechanisms (431) for placing the workpiece carrier (100). The plurality of placement mechanisms (431) are arranged at intervals around the rotation axis of the support frame (43).

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