Compact teos heating apparatus and semiconductor processing apparatus

Abstract

The utility model discloses a compact TEOS heating equipment and semiconductor processing equipment relates to heating equipment technical field, wherein, compact TEOS heating equipment, including body and integration part, the utility model discloses a technical scheme is arranged container department and pipeline transmission department in the body in the form of stacking, so that the lateral wall of body is close to container department and pipeline transmission department, can reduce the occupied space of body in the working space while guaranteeing the stable installation of each part in the body, and moreover, the controller of control gas control part is external, the equipment amount in the body is reduced, and the volume of body is further reduced, a plurality of ports of pipeline transmission department are integrated on the top surface of body, so that the operation space needed when arranging equipment is saved, and the space utilization of equipment installation space is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of heating equipment technology, and in particular to a compact TEOS heating device and a semiconductor processing device. Background Technology

[0002] TEOS (tetraethyl orthosilicate) is a liquid at room temperature. To apply it to the wafer surface to form an oxide film, it needs to be heated and vaporized into a gaseous state. However, the wafer processing requires not only gaseous TEOS but also other auxiliary equipment. When multiple devices work together to process the wafer, all of them need to be arranged in the processing space, which greatly occupies processing space, increases the difficulty of arrangement, and also increases the difficulty of operation. Utility Model Content

[0003] The main purpose of this invention is to propose a compact TEOS heating device and semiconductor processing device, which aims to reduce the size of the device and thus reduce the space occupied by the device.

[0004] To achieve the above objectives, the present invention proposes a compact TEOS heating device, comprising:

[0005] The body 10 has a container section 50 and a pipeline transmission section 40 inside it, and the container section 50 and the pipeline transmission section 40 are stacked together.

[0006] An integration section 30 is disposed on the outer surface of the body 10, and multiple ends of the pipeline transmission section 40 are arranged on the surface of the integration section 30.

[0007] The machine body 10 is equipped with a gas control unit inside, and a controller is located outside the machine body 10. The controller is connected to the gas control unit.

[0008] In one embodiment, the body 10 is provided with a receiving cavity 12, the bottom wall of the receiving cavity 12 is provided with a support body 11, and the container part 50 is connected to the support body 11.

[0009] In one embodiment, an isolation space is formed between the support body 11 and the bottom wall of the accommodating cavity 12 to suspend the container part 50 within the body 10.

[0010] In one embodiment, the support body 11 includes a support portion and a support leg, the support leg being connected to the support portion and the bottom wall of the receiving cavity 12 to support the support portion, and the container portion 50 being connected to the support portion.

[0011] In one embodiment, the bottom wall of the body 10 is provided with a discharge hole 20 that penetrates the body 10.

[0012] In one embodiment, the bottom wall of the body 10 is provided with an inclined surface, and the inclined surface is arranged around the discharge hole 20.

[0013] In one embodiment, the sidewall of the accommodating cavity 12 is provided with a plurality of connecting ends, and the container part 50 and the pipeline transmission part 40 are both fixed to the body 10 through the connecting ends.

[0014] In one embodiment, the container section 50 and the pipeline transport section are stacked along the extension direction of the body 10.

[0015] In one embodiment, the pipeline transmission section 40 is connected to the surface of the container section 50 opposite to the support body 11.

[0016] This utility model also proposes a semiconductor processing equipment, including the aforementioned compact TEOS heating device.

[0017] The technical solution of this utility model arranges the container section and the pipeline transmission section in a stacked manner within the machine body, so that the side wall of the machine body is close to the container section and the pipeline transmission section. This ensures the stable installation of each component within the machine body while reducing the space occupied by the machine body in the working space. Furthermore, by placing the controller of the gas control section externally, the volume of the machine body is further reduced by reducing the number of devices inside the machine body. By integrating multiple ports of the pipeline transmission section on the top surface of the machine body, the operating space that needs to be reserved when arranging equipment is eliminated, thus ensuring the space utilization rate of the equipment installation space. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0019] Figure 1 A schematic diagram of a structure of an embodiment of the compact TEOS heating device provided by this utility model;

[0020] Figure 2 A schematic diagram of another embodiment of the compact TEOS heating device provided by this utility model;

[0021] Figure 3 for Figure 2 Sectional view at point AA;

[0022] Figure 4 A schematic diagram of another embodiment of the compact TEOS heating device provided by this utility model;

[0023] Figure 5 for Figure 4 Sectional view at point BB;

[0024] Figure 6 A schematic diagram of another embodiment of the compact TEOS heating device provided by this utility model;

[0025] Figure 7 A schematic diagram of the structure of an embodiment of the compact TEOS heating device provided by this utility model.

[0026] Explanation of icon numbers:

[0027] 100. Compact TEOS heating equipment; 10. Body; 11. Support body; 12. Containing cavity; 20. Discharge port; 30. Integration section; 40. Piping and transmission section; 50. Container section.

[0028] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0030] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0031] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0032] This utility model proposes a compact TEOS heating device.

[0033] Please see Figure 3 In one embodiment of this utility model, the compact TEOS heating device includes:

[0034] The body 10 has a container section 50 and a pipeline transmission section 40 inside it, and the container section 50 and the pipeline transmission section 40 are stacked together.

[0035] An integration section 30 is disposed on the outer surface of the body 10, and multiple ends of the pipeline transmission section 40 are arranged on the surface of the integration section 30.

[0036] The machine body 10 is equipped with a gas control unit inside, and a controller is located outside the machine body 10. The controller is connected to the gas control unit.

[0037] like Figure 1 and Figure 2 As shown, the body 10 is the housing of the device.

[0038] It is understood that the body 10 is cuboid and extends in the height direction, thereby increasing the internal space of the body 10 in the height direction and reducing the working space occupied by the body 10.

[0039] like Figure 6 As shown, the integration part 30 is disposed on the upper surface of the body 10, and the multiple ends of the pipeline transmission part 40 are distributed on the surface of the integration part 30.

[0040] It should be noted that the ports of the pipeline transmission section 40 include an air outlet connection port, an inlet liquid connection port, a line connection port, a cooling air blowing port, and a cooling exhaust port, etc.

[0041] It is understandable that, such as Figure 4 All ports are located on the same side of the body 10, so that operators can concentrate on one side of the body 10 to complete the operation and debugging of the equipment.

[0042] Furthermore, multiple ports are integrated on the top surface of the body 10, so that when the device is placed in the workspace, it can be arranged at the optimal distance from other devices, eliminating the need for reserved space for personnel operation and improving the compactness of the device layout.

[0043] It should be noted that the heated TEOS outputs gaseous TEOS. In order to output the gas in an orderly manner, a gas control unit needs to be set up inside the equipment to regulate the gas output.

[0044] It is understood that the gas control unit is connected to the gas outlet pipe to facilitate the control of gas output. At the same time, the controller of the gas control unit is external to avoid increasing the size of the body 10 and affecting the layout of the equipment by placing the controller inside the body 10.

[0045] The technical solution of this utility model arranges the container section 50 and the pipeline transmission section 40 in a stacked manner within the body 10, so that the side wall of the body 10 is close to the container section 50 and the pipeline transmission section 40. This ensures the stable installation of each component within the body 10 while reducing the space occupied by the body 10 in the working space. Furthermore, by externalizing the controller of the gas control section, the volume of the body 10 is further reduced by decreasing the number of devices within the body 10. By integrating multiple ports of the pipeline transmission section 40 onto the top surface of the body 10, the operating space that needs to be reserved when arranging the equipment is eliminated, thus ensuring the space utilization rate of the equipment placement space.

[0046] In one embodiment, the body 10 is provided with a receiving cavity 12, the bottom wall of the receiving cavity 12 is provided with a support body 11, and the container part 50 is connected to the support body 11.

[0047] like Figure 5 and Figure 7 As shown, the accommodating cavity 12 is used to accommodate the pipeline transmission section 40 and the container section 50.

[0048] In order to reduce the space occupied by the equipment in the workspace, the pipeline transmission section 40 and the container section 50 are stacked and arranged so that the accommodating cavity 12 extends along the height direction of the body 10, thereby accommodating the pipeline transmission section 40 and the container section 50 while allowing the side walls of the body 10 to be close to the pipeline transmission section 40 and the container section 50.

[0049] It should be noted that if the container part 50 is placed directly on the bottom wall of the accommodating cavity 12, the container part 50 is easily affected by external factors.

[0050] Therefore, a support body 11 is provided on the bottom wall of the accommodating cavity 12 to support the container part 50, thereby keeping the container part 50 away from the bottom wall of the accommodating cavity 12 and avoiding direct impact due to direct contact with the bottom wall of the body 10.

[0051] In one embodiment, an isolation space is formed between the support body 11 and the bottom wall of the accommodating cavity 12 to suspend the container part 50 within the body 10.

[0052] like Figure 3 As shown, the isolation space serves as a space to isolate the container section 50, so that the container section 50 is suspended within the body 10.

[0053] It is understandable that the reserved isolation space, i.e. the container part 50 is suspended in the air, means that when the container part 50 leaks, the leaked liquid flows into the isolation space and does not surround the container part 50, thus ensuring the safety of the container part 50.

[0054] In one embodiment, the support body 11 includes a support portion and a support leg, the support leg being connected to the support portion and the bottom wall of the receiving cavity 12 to support the support portion, and the container portion 50 being connected to the support portion.

[0055] Furthermore, such as Figure 3 As shown, the legs and the support portion together form the isolation space, and the container portion 50 is supported by the support portion, thereby achieving support for the container portion 50.

[0056] In one embodiment, there are multiple support legs, which are spaced apart on the support portion and connected to the bottom wall of the body 10. The stability of the support is ensured by the joint support of the multiple support legs.

[0057] In one embodiment, the bottom wall of the body 10 is provided with a discharge hole 20 that penetrates the body 10.

[0058] It should be noted that when the container section 50 leaks, it is necessary to drain the liquid in a timely manner to prevent liquid from remaining in the container section 50 within the accommodating cavity 12.

[0059] Therefore, such as Figure 1As shown, the discharge hole 20 is provided on the bottom wall of the body 10. When the liquid leaked from the container 50 enters the isolation space, the liquid is discharged by the discharge hole 20 to prevent the liquid from remaining in the accommodating cavity 12.

[0060] In one embodiment, the bottom wall of the body 10 is provided with an inclined surface, and the inclined surface is arranged around the discharge hole 20.

[0061] To facilitate the rapid discharge of leaked liquid from the accommodating cavity 12, the bottom wall of the machine body is designed as an inclined surface. That is, the bottom wall of the accommodating cavity 12 is inclined, and the inclined surface is arranged around the discharge hole 20. After the liquid flows into the inclined surface, the liquid flows along the inclined surface to the discharge hole 20, thereby flowing rapidly under its own weight and being discharged from the machine body 10.

[0062] In one embodiment, the sidewall of the accommodating cavity 12 is provided with a plurality of connecting ends, and the container part 50 and the pipeline transmission part 40 are both fixed to the body 10 through the connecting ends.

[0063] The pipeline transmission section 40 is stacked with the container section 50, and the pipeline transmission section 40 is connected to the container section 50 and extends in a direction away from the container section 50. Therefore, in order to facilitate the stable installation of the pipeline transmission section 40 in the body 10, a plurality of connection ends are provided on the side wall of the accommodating cavity 12.

[0064] It is understood that by setting a connector, the connector part is connected to the pipeline transmission part 40, and the connector part is connected to the connection end, thereby achieving a stable connection of the pipeline transmission part 40 to the body 10.

[0065] In one embodiment, connection holes are provided on both the connecting end and the connecting member. When the connection holes on the connecting end and the connection holes on the connecting member are aligned, they are connected by bolts and nuts, thereby improving the stability of the pipeline transmission section installation.

[0066] In one embodiment, when the container part 50 is mounted on the support part, mounting holes can be provided on both the container part 50 and the support part to facilitate the fixing of the container part 50 and the support part with bolts and nuts.

[0067] In one embodiment, the container section 50 and the pipeline transport section are stacked along the extension direction of the body 10.

[0068] In one embodiment, the pipeline transmission section 40 is connected to the surface of the container section 50 opposite to the support body 11.

[0069] It is understood that by placing the pipeline transmission section 40 on the surface of the container section 50 away from the support body 11, and stacking the pipeline transmission section 40 and the container section 50, the internal equipment of the machine body 10 is arranged compactly, and the body shape of the machine body 10 extends along the height direction of the machine body 10, thereby reducing the volume of the machine body 10 and reducing the space occupied by the machine body 10.

[0070] This utility model also proposes a semiconductor processing equipment, which includes the compact TEOS heating device. The specific structure of the compact TEOS heating device is as described in the above embodiments. Since this semiconductor processing equipment adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0071] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A compact TEOS heating device, characterized in that, include: The machine body includes a container section and a pipeline transmission section, which are stacked together. An integration section is disposed on the outer surface of the body, and multiple ends of the pipeline transmission section are arranged on the surface of the integration section; The machine body is equipped with a gas control unit, and the machine body is equipped with a controller, which is connected to the gas control unit.

2. The compact TEOS heating device as described in claim 1, characterized in that, The machine body is provided with a receiving cavity, and the bottom wall of the receiving cavity is provided with a support body, on which the container part is connected.

3. The compact TEOS heating device as described in claim 2, characterized in that, An isolation space is formed between the support body and the bottom wall of the accommodating cavity to suspend the container portion within the machine body.

4. The compact TEOS heating device as described in claim 3, characterized in that, The support body includes a support portion and a support leg. The support leg is connected to the support portion and to the bottom wall of the accommodating cavity to support the support portion. The container portion is connected to the support portion.

5. The compact TEOS heating device as described in claim 2, characterized in that, The bottom wall of the machine body is provided with a discharge hole that penetrates the machine body.

6. The compact TEOS heating device as described in claim 5, characterized in that, The bottom wall of the machine body is provided with an inclined surface, and the inclined surface is arranged around the discharge hole.

7. The compact TEOS heating device as described in claim 2, characterized in that, The side wall of the accommodating cavity is provided with multiple connecting ends, and both the container part and the pipeline transmission part are fixed to the body through the connecting ends.

8. The compact TEOS heating device as described in claim 2, characterized in that, The container section and the pipeline transmission section are stacked along the extension direction of the body.

9. The compact TEOS heating device as described in claim 4, characterized in that, The pipeline transmission section is connected to the surface of the container section opposite to the support body.

10. A semiconductor processing apparatus, characterized in that, Includes the compact TEOS heating device as described in any one of claims 1 to 9.

Images