A shower plate automatic leveling device and thin film deposition equipment

Abstract

The utility model discloses a kind of automatic leveling device of showering dish and thin film deposition equipment, which is used to carry out leveling treatment to showering dish, comprising: leveling platform, with the showering dish fixed connection;Inclined part, setting on the leveling platform, for control the inclined direction of the leveling platform;Drive module, with the inclined part is connected, for driving the inclined movement of the inclined part, and drive the inclined movement of the leveling platform.The utility model drives the inclined movement of inclined part by setting inclined part and drive module, to drive the inclined movement of leveling platform, and then drive the inclined movement of showering dish, to realize the automatic leveling of showering dish in different directions in this way, to improve the leveling accuracy and efficiency of showering dish, solve the problem that showering dish adjustment is difficult in the case of limited space around heating disc.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to an automatic leveling device for a spray tray and a thin film deposition equipment. Background Technology

[0002] In the operation of plasma-enhanced chemical vapor deposition (PECVD) equipment, process stability has a significant impact on the quality, uniformity, and production efficiency of thin film deposition. The relative angle between the spray plate (SHD) and the heating plate (PED) is one of the key parameters affecting process stability. To ensure that the PECVD equipment can continuously output process results that meet production requirements, precise adjustment of the angle between the SHD and PED is usually necessary. Currently, in conventional angle adjustment devices between the SHD and PED, the distribution of adjustment functions is significantly unbalanced. For example, angle adjustment of the SHD mostly relies on manual operation, while automatic adjustment functions are more concentrated on the PED component. In scenarios where there is sufficient installation and operating space around the PED, this solution can indirectly compensate for angle deviations through automatic adjustment of the PED, thereby meeting basic process accuracy requirements. However, in actual industrial applications, some PECVD equipment is limited by overall structural layout, cavity size optimization, or integrated design requirements, and the space around the PED is often constrained, making it difficult for the automatic adjustment function of the PED, which is originally used for angle compensation, to function properly. In this situation, due to the lack of an automatic adjustment mechanism for SHD, relying solely on manual adjustment of SHD is not only difficult to operate and difficult to guarantee adjustment accuracy, but also significantly prolongs equipment debugging time, increases labor costs, and may even lead to a decrease in process stability due to angle deviations exceeding the allowable range, affecting the quality of the final product and failing to meet the needs of efficient and high-precision industrial production. Utility Model Content

[0003] This utility model provides an automatic leveling device for a spray tray and a thin film deposition equipment, which aims to improve the leveling accuracy and efficiency of the spray tray.

[0004] This utility model embodiment provides an automatic leveling device for a spray tray, used for leveling the spray tray. The device includes:

[0005] The leveling platform is fixedly connected to the spray plate;

[0006] A tilting component, disposed on the leveling platform, is used to control the tilting direction of the leveling platform;

[0007] A drive module, connected to the tilting component, is used to drive the tilting component to tilt and thus drive the leveling platform to tilt.

[0008] Furthermore, the inclined component is provided with an inclined scale.

[0009] Furthermore, the driving module includes:

[0010] Drive motor;

[0011] A coupling, one end of which is connected to the drive motor;

[0012] The worm gear is connected to the other end of the coupling;

[0013] An arc-shaped turbine meshes with the worm gear, and the arc-shaped turbine is fixed to the inclined member.

[0014] Furthermore, the driving module also includes:

[0015] Bearings are used to provide rotational support for the worm gear;

[0016] Bearing housing, used to mount the bearing.

[0017] Furthermore, it also includes a fixing bracket, which is installed on the leveling platform and is used to place the drive module.

[0018] Furthermore, multiple tilting components are provided, and each tilting component can control the leveling platform to tilt in different directions.

[0019] Furthermore, multiple drive modules are provided, each drive module corresponding to a multiple tilting component, and driving the corresponding tilting component to tilt.

[0020] Furthermore, two tilting components are provided, one of which is used to control the leveling platform to tilt in the horizontal direction, and the other is used to control the leveling platform to tilt in the vertical direction.

[0021] Furthermore, there are two drive modules, one of which is used to drive the corresponding tilting component to tilt horizontally, and the other of which is used to drive the corresponding tilting component to tilt vertically.

[0022] This invention provides an automatic leveling device for a spray tray and a thin film deposition equipment. The device, used for leveling a spray tray, includes: a leveling platform fixedly connected to the spray tray; a tilting member disposed on the leveling platform for controlling the tilting direction of the leveling platform; and a drive module connected to the tilting member for driving the tilting movement of the tilting member, which in turn drives the leveling platform to tilt. This invention, by setting up the tilting member and the drive module, allows the drive module to drive the tilting member to tilt, thereby driving the leveling platform to tilt, and ultimately driving the spray tray to tilt. This achieves automated leveling of the spray tray in different directions, improving the leveling accuracy and efficiency of the spray tray and solving the problem of difficult spray tray adjustment when the space around the heating plate is limited. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 A schematic diagram of the structure of an automatic leveling device for a spray tray provided in an embodiment of this utility model;

[0025] Figure 2 A schematic diagram of the leveling platform in an automatic leveling device for a spray tray provided in an embodiment of this utility model;

[0026] Figure 3 A cross-sectional schematic diagram of the leveling platform in an automatic leveling device for a spray tray provided in an embodiment of this utility model;

[0027] Figure 4 A leveling example diagram of an automatic leveling device for a spray tray provided for an embodiment of this utility model;

[0028] Figure 5 Another leveling example diagram of an automatic leveling device for a spray tray provided in an embodiment of this utility model.

[0029] Markings in the image:

[0030] 1. Sprayer tray; 2. Leveling platform; 3. Inclined component; 31. Inclined scale; 4. Drive module; 41. Drive motor; 42. Coupling; 43. Worm gear; 44. Arc turbine; 45. Bearing; 46. Bearing housing; 5. Fixed bracket. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0032] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0033] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0034] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0035] Please see below. Figure 1 and Figure 2 This utility model embodiment provides an automatic leveling device for a spray tray 1, used for leveling the spray tray 1. The device includes:

[0036] The leveling platform 2 is fixedly connected to the spray plate 1;

[0037] Inclination component 3 is disposed on the leveling platform 2 and is used to control the tilting direction of the leveling platform 2;

[0038] The drive module 4 is connected to the tilting component 3 and is used to drive the tilting component 3 to tilt, thereby driving the leveling platform 2 to tilt.

[0039] In this embodiment, the automatic leveling device for the spray tray includes a leveling platform 2, a tilting component 3, and a drive module 4. The leveling platform 2 serves as the basic support structure of the entire device and is fixedly connected to the spray tray 1 to ensure that the spray tray 1 moves synchronously with the leveling platform 2 during leveling, avoiding leveling errors caused by loose connections. The tilting component 3 drives the leveling platform 2 to tilt, achieving precise tilting of the leveling platform 2 in the desired direction. The drive module 4 drives the tilting component 3 to tilt, thereby driving the leveling platform 2 to tilt, and consequently, the spray tray 1 to tilt, thus achieving automatic leveling of the spray tray 1.

[0040] This embodiment sets up an inclined component 3 and a driving module 4, so that the driving module 4 drives the inclined component 3 to tilt, thereby driving the leveling platform 2 to tilt, and then driving the spray plate 1 to tilt. This achieves automatic leveling of the spray plate 1 in different directions, thereby improving the leveling accuracy and efficiency of the spray plate 1 and solving the problem of difficulty in adjusting the spray plate 1 when the space around the heating plate is limited.

[0041] In practical applications, the leveling platform 2 can be set above the spray plate 1 and fixedly connected to the spray plate 1 by bolts and other fasteners. This connection method is not only stable and reliable, but also easy to disassemble and maintain, thus providing convenience for subsequent debugging and maintenance work.

[0042] In one embodiment, the tilting member 3 is provided with a tilting scale 31.

[0043] This embodiment, by setting an inclined scale 31 on the inclined component 3, allows the operator to intuitively read the inclination angle of the leveling platform 2, thereby controlling the leveling process of the spray tray 1 more precisely. This not only improves the accuracy of leveling but also simplifies the operation process and reduces reliance on the operator's skill level.

[0044] In one embodiment, combined with Figure 3 The driving module 4 includes:

[0045] Drive motor 41;

[0046] Coupling 42, one end of which is connected to the drive motor 41;

[0047] The worm gear 43 is connected to the other end of the coupling 42;

[0048] The arc-shaped turbine 44 meshes with the worm gear 43, and the arc-shaped turbine 44 is fixed to the inclined member 3.

[0049] Furthermore, the driving module 4 also includes:

[0050] Bearing 45 is used to provide rotational support for the worm gear 43;

[0051] Bearing housing 46 is used to mount the bearing 45.

[0052] The drive module 4 described in this embodiment specifically includes a drive motor 41, a coupling 42, a worm gear 43, an arc-shaped turbine 44, a bearing 45, and a bearing housing 46. The drive motor 41 serves as the power source, providing stable rotational power to the entire drive module 4. The coupling 42 transmits torque, transferring the rotational force generated by the drive motor 41 to the worm gear 43. Based on the meshing design of the worm gear 43 and the arc-shaped turbine 44, the meshing transmission drives the arc-shaped turbine 44 to rotate (along the arc), thus converting rotational motion into tilting motion. This allows the tilting component 3 to tilt at a predetermined angle, thereby driving the leveling platform 2 and the spray plate to rotate. The cooperation between the bearing 45 and the bearing housing 46 ensures the stability and accuracy of the worm gear 43 during rotation, reducing errors caused by friction and vibration. This design not only improves the transmission efficiency of the drive module 4 but also enhances the reliability and durability of the entire automatic spray plate leveling device.

[0053] Specifically, the drive motor 41 can be a stepper motor, coupled with a high-resolution encoder to achieve precise position control. The coupling 42 can be a flexible coupling design to effectively compensate for the coaxiality error between the motor and the worm 43. The meshing transmission ratio between the worm 43 and the arc-shaped turbine 44 can be pre-optimized to ensure smooth tilting of the leveling platform 2 with minimal driving torque. The bearing 45 can be a double-row angular contact ball bearing 45, fixed inside the leveling platform 2 by the bearing seat 46, bearing the axial load of the worm 43 and limiting its radial displacement to ensure the rotational accuracy of the transmission system. In addition, the tilting member 3 is an arc-shaped tilting plate, whose arc structure can be adapted to the rotation trajectory of the arc-shaped turbine 44. When the arc-shaped turbine 44 rotates under the drive of the worm 43, the arc-shaped tilting plate tilts accordingly, and the tilt angle can be accurately read by the tilting scale 31. During actual installation, the curved inclined plate is fixed to the leveling platform 2 using bolts or clips to ensure a stable connection and prevent loosening due to vibration or impact. Furthermore, the curved inclined plate can be made of high-strength aluminum alloy or stainless steel to balance structural strength and corrosion resistance, meeting the stringent material performance requirements of semiconductor equipment. This design enables the automatic leveling device for the spray tray to achieve high-precision automated leveling within a limited space, significantly improving the process stability and production efficiency of the PECVD equipment.

[0054] In one embodiment, a fixing bracket 5 is also included, which is mounted on the leveling platform 2 and is used to place the drive module 4.

[0055] In this embodiment, the drive module 4 is securely mounted on the leveling platform 2 by setting a fixed bracket 5. This not only optimizes the spatial layout of the leveling device, making the connections between components more compact and reasonable, but also improves the overall stability of the leveling device. The fixed bracket 5 fully considers the vibrations and impacts that the drive module 4 may generate during operation. In practical applications, through reasonable structural design and material selection, it can be ensured that the drive module 4 maintains a stable operating state even when operating at high speeds or under heavy loads, thereby avoiding problems such as decreased leveling accuracy or device damage caused by vibration. Furthermore, the installation of the fixed bracket 5 facilitates subsequent maintenance and repair work, thereby reducing the operation and maintenance costs of the leveling device.

[0056] In a specific embodiment, the fixed bracket 5 can adopt a modular design and be installed on the leveling platform 2 by bolts. An installation interface for the drive module 4 can be reserved on it, and the installation position of the drive module 4 can be adjusted according to actual needs.

[0057] In one embodiment, multiple tilting members 3 are provided, and the multiple tilting members 3 can control the leveling platform 2 to tilt in different directions respectively.

[0058] Furthermore, multiple drive modules 4 are provided, and each drive module 4 corresponds to a multiple tilting member 3 and drives the corresponding tilting member 3 to tilt.

[0059] In this embodiment, by setting multiple tilting components 3 and their corresponding drive modules 4, independent control of the leveling platform 2 in multiple dimensions can be achieved. This allows the spray plate 1 to be tilted in any direction in the horizontal plane or finely adjusted in the vertical direction according to actual process requirements, thereby greatly improving the flexibility and accuracy of leveling. Specifically, each tilting component 3 can be precisely controlled by its corresponding drive module 4, ensuring the independence and accuracy of movement in each direction during leveling and avoiding motion coupling problems caused by a single drive source. At the same time, the parallel working mode of multiple drive modules 4 can also significantly improve leveling efficiency and shorten equipment debugging time.

[0060] In a specific embodiment, two tilting components 3 are provided. One tilting component 3 is used to control the leveling platform 2 to tilt in the horizontal direction, and the other tilting component 3 is used to control the leveling platform 2 to tilt in the vertical direction.

[0061] The drive module 4 is provided in two parts. One drive module 4 is used to drive the corresponding tilting component 3 to tilt horizontally, and the other drive module 4 is used to drive the corresponding tilting component 3 to tilt vertically.

[0062] Specifically, in combination Figure 4 and Figure 5 Two tilting components 3 and two driving modules 4 are provided to achieve angle adjustment in the horizontal and vertical directions. For example, Figure 4 As shown, the horizontally tilting component 3 can control and adjust various possible tilt angles of the spray disc 1 in the horizontal plane, and precise adjustment can be achieved through the matching drive module 4. Figure 5 As shown, the tilting component 3, which is tilted vertically, can control and adjust the height of the spray plate 1 in the vertical direction. Similarly, through the matching drive module 4, the optimal distance between the spray plate 1 and the heating plate can be ensured, thereby optimizing the process conditions for thin film deposition.

[0063] In practical applications, when two tilting components 3 and two drive modules 4 are provided, two corresponding fixed supports 5 are provided, and the two fixed supports 5 can be distributed vertically. The upper fixed support 5 is used to install the drive module 4 that tilts horizontally, and the lower fixed support 5 is used to install the drive module 4 that tilts vertically. This layout not only makes the entire leveling device compact but also facilitates independent operation and maintenance of the drive modules 4 in both directions. At the same time, this vertically distributed fixed support 5 design also helps to rationally arrange the components in a limited space, improve space utilization, and meet the installation requirements of the thin film deposition equipment for the automatic leveling device of the spray plate.

[0064] This utility model embodiment also provides a thin film deposition equipment, which uses the spray plate automatic leveling device as described above to perform spray plate 1 leveling treatment.

[0065] The thin film deposition equipment, through the automatic leveling device of the spray plate, can precisely control the position and angle of the spray plate 1, ensuring that the optimal distance and angle relationship between the spray plate 1 and the heating plate is maintained during the thin film deposition process. This not only improves the quality and uniformity of thin film deposition but also reduces material waste and process defects caused by improper positioning of the spray plate 1. In practical applications, the thin film deposition equipment can achieve fully automated control from the installation and leveling of the spray plate 1 to the thin film deposition process by integrating the automatic leveling device. This not only greatly improves production efficiency but also reduces reliance on the skill level of operators, making the thin film deposition process more stable and reliable.

[0066] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple; relevant parts can be referred to in the method section. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

[0067] It should also be noted that, in this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. An automatic leveling device for a spray tray, used for leveling a spray tray, characterized in that, The device includes: The leveling platform is fixedly connected to the spray plate; A tilting component, disposed on the leveling platform, is used to control the tilting direction of the leveling platform; A drive module, connected to the tilting component, is used to drive the tilting component to tilt and thus drive the leveling platform to tilt.

2. The automatic leveling device for the spray tray according to claim 1, characterized in that, The tilting component is equipped with a tilting scale.

3. The automatic leveling device for the spray tray according to claim 1, characterized in that, The driving module includes: Drive motor; A coupling, one end of which is connected to the drive motor; The worm gear is connected to the other end of the coupling; An arc-shaped turbine meshes with the worm gear, and the arc-shaped turbine is fixed to the inclined member.

4. The automatic leveling device for the spray tray according to claim 3, characterized in that, The driver module also includes: Bearings are used to provide rotational support for the worm gear; Bearing housing, used to mount the bearing.

5. The automatic leveling device for the spray tray according to claim 1, characterized in that, It also includes a fixing bracket, which is installed on the leveling platform and is used to place the drive module.

6. The automatic leveling device for the spray tray according to claim 1, characterized in that, Multiple tilting components are provided, and each tilting component can control the leveling platform to tilt in different directions.

7. The automatic leveling device for the spray tray according to claim 6, characterized in that, The driving module is provided in multiple ways, and each driving module corresponds to a different tilting component, and drives the corresponding tilting component to tilt.

8. The automatic leveling device for the spray tray according to claim 7, characterized in that, Two tilting components are provided, one of which is used to control the leveling platform to tilt in the horizontal direction, and the other is used to control the leveling platform to tilt in the vertical direction.

9. The automatic leveling device for the spray tray according to claim 8, characterized in that, The drive module is provided in two parts. One drive module is used to drive the corresponding tilting component to tilt horizontally, and the other drive module is used to drive the corresponding tilting component to tilt vertically.

10. A thin film deposition apparatus, characterized in that, The spray tray is leveled using the automatic leveling device for the spray tray as described in any one of claims 1-9.

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