Water circulating path in a crystal growing machine

Abstract

The utility model discloses a kind of long-crystal machine inner circulating waterways, including long-crystal furnace main body, water outlet passage and water inlet passage are communicatively equipped on long-crystal furnace main body, cooling tower is communicated at the end of water outlet passage far from long-crystal furnace main body, circulating water pump is communicated at the end of water outlet passage far from long-crystal furnace main body, water delivery pipe is communicatively equipped on circulating water pump, expansion tank is communicated at the end of water delivery pipe far from circulating water pump, cooling water pipe is communicatively equipped on expansion tank, cooling water pipe far from expansion tank one end is connected with cooling tower communication.The utility model is through the design of closed waterway, can avoid waterway to produce pollution and jam.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor crystal growth equipment technology, specifically to a circulating water circuit within a crystal growth machine. Background Technology

[0002] Crystal growth equipment (such as single crystal furnaces) is the core equipment for preparing semiconductor crystals. It achieves single crystal growth by pulling crystals from a high-temperature melt. The crystal growth process requires precise control of the temperature gradient, especially in the crystal pulling stage where rapid heat dissipation is needed to form crystal nuclei, while in the finishing stage, cooling needs to be slowed down to prevent crystal cracking.

[0003] The cooling water circuits of existing crystal growth furnaces are mostly open designs, which are prone to impurities and blockages, and the large amount of cooling water evaporation requires frequent water replenishment. Utility Model Content

[0004] The purpose of this invention is to provide an internal circulating water circuit for a crystal growth machine, which, through a closed-loop water circuit design, can avoid pollution and blockage of the water circuit.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following solution:

[0006] A circulating water system for a crystal growth machine includes a crystal growth furnace body. The furnace body has an outlet channel and an inlet channel. The outlet channel, located away from the furnace body, is connected to a cooling tower. A circulating water pump is connected to the other end of the outlet channel. A water delivery pipe is connected to the circulating water pump. An expansion tank is connected to the expansion tank. A cooling water pipe is connected to the expansion tank. The cooling water pipe, located away from the expansion tank, is connected to the cooling tower. The crystal growth furnace body, cooling tower, circulating water pump, and expansion tank utilize existing technology and will not be described in detail. Its function is to form a closed circulating water system through the interconnected design of the crystal growth furnace body, cooling tower, circulating water pump, and expansion tank, thereby preventing water contamination and blockage, and reducing cooling water evaporation.

[0007] Furthermore, a first valve is installed on the section of the water outlet channel near the main body of the crystal growth furnace, a second valve is installed on the section of the water outlet channel near the cooling tower, a third valve is installed on the section of the water inlet channel near the main body of the crystal growth furnace, a fourth valve is installed on the section of the water inlet channel near the circulating water pump, a fifth valve is installed on the water delivery pipe, and a sixth valve is installed on the cooling water pipe. Their functions are as follows: the first valve facilitates maintenance of the crystal growth furnace; the second valve controls the water flow to and from the cooling tower; the third valve regulates the flow rate of cooling water entering the crystal growth furnace; the fourth valve protects the circulating water pump; the fifth valve controls the replenishment of the expansion tank; and the sixth valve regulates the return water pressure of the cooling tower.

[0008] Furthermore, it also includes a wall and a control box mounted on the wall. The circulating water pump and expansion tank are located inside the control box, the cooling tower is located on the side of the wall facing away from the control box, and the main body of the crystal growth furnace is located on the side of the wall with the control box. Its function is to separate the clean area (furnace body) and the non-clean area (cooling tower) through the wall; to protect the circulating water pump and expansion tank through the control box; and to prevent hot air backflow from affecting the main body of the crystal growth furnace through the design of the cooling tower being external to the wall.

[0009] Furthermore, taking the side of the wall with the cooling tower as the outside of the wall and the side with the control box as the inside of the wall, the first valve is located inside the wall but outside the control box, the second valve is located outside the wall, the third valve is located inside the wall but outside the control box, the fourth valve is located inside the control box, the fifth valve is located inside the control box, and the sixth valve is located outside the wall. Its function is to facilitate rapid response to maintenance of the crystal growth furnace body through the design of the positions of the first and third valves; to prevent accidental contact and protect core components through the design of the positions of the fourth and fifth valves; and to facilitate the adjustment of cooling parameters through the design of the positions of the second and sixth valves.

[0010] Furthermore, the crystal growth furnace body includes a crucible area and a crystal pulling area. The water inlet channel includes a main cooling branch and a crystal growth branch. The main cooling branch is connected to the crucible area, and the crystal growth branch is connected to the crystal pulling area. Its function is to achieve precise temperature control of the crystal by differentiating the cooling positions through the main cooling branch and the crystal growth branch.

[0011] Furthermore, a miniature semiconductor cooling module is provided on the outer wall of the crystal growth branch. The miniature semiconductor cooling module employs existing technology and will not be described in detail. Its function is to enable localized control of the temperature of the crystal growth branch.

[0012] Furthermore, it also includes a controller. When the crystal growth furnace is in the crystal pulling or shoulder formation stage, the controller activates the micro-semiconductor cooling module; when the crystal growth furnace is in the constant diameter or finishing stage, the controller deactivates the semiconductor cooling module. Its function is to control the switching on and off of the micro-semiconductor cooling module through the controller's settings, thereby achieving temperature control.

[0013] Furthermore, a bypass valve is provided between the main cooling branch and the crystal growth branch. Its function is to switch the connection between the crystal growth branch and the crystal growth furnace body to the connection between the main cooling branch and the crystal growth furnace body in the event of a failure of the micro-semiconductor cooling module.

[0014] Furthermore, the controller is connected to a temperature sensor, which is located near the main body of the crystal growth furnace in the water outlet channel. Its function is to monitor the water temperature discharged from the main body of the crystal growth furnace in real time.

[0015] Furthermore, the pipe diameter ratio of the main cooling branch to the crystal growth branch is 2:1.

[0016] The beneficial effects of this utility model are:

[0017] 1. The interconnected design of the crystal growth furnace body, cooling tower, circulating water pump and expansion tank can form a closed circulating water circuit, thereby avoiding water circuit pollution and blockage, and reducing cooling water evaporation;

[0018] 2. By setting up the main cooling branch and the crystal growth branch, the cooling position can be differentiated to achieve precise temperature control of the crystal. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of Example 1;

[0020] Figure 2 This is a schematic diagram of the structure of Example 2.

[0021] Reference numerals in the attached diagram: 1. Crystal growth furnace body; 2. Water outlet channel; 3. Water inlet channel; 4. Cooling tower; 5. Circulating water pump; 6. Water supply pipe; 7. Expansion tank; 8. Cooling water pipe; 9. First valve; 10. Second valve; 11. Third valve; 12. Fourth valve; 13. Fifth valve; 14. Sixth valve; 15. Wall; 16. Control box; 17. Crucible area; 18. Crystal pulling area; 19. Main cooling branch; 20. Crystal growth branch; 21. Micro-semiconductor refrigeration module; 22. Controller; 23. Bypass valve; 24. Temperature sensor. Detailed Implementation

[0022] The present invention will be further described in detail below with reference to the embodiments and accompanying drawings, but the implementation of the present invention is not limited thereto.

[0023] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "have," "install," "connect," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] Example 1

[0026] A type of internal circulating water circuit for crystal growth machines, such as Figure 1 As shown, the system includes a crystal growth furnace body 1. A water outlet channel 2 and a water inlet channel 3 are connected to the crystal growth furnace body 1. A cooling tower 4 is connected to the end of the water outlet channel 2 furthest from the crystal growth furnace body 1. A circulating water pump 5 is connected to the end of the water outlet channel 2 furthest from the crystal growth furnace body 1. A water delivery pipe 6 is connected to the circulating water pump 5. An expansion tank 7 is connected to the end of the expansion tank 7. A cooling water pipe 8 is connected to the expansion tank 7. The end of the cooling water pipe 8 furthest from the expansion tank 7 is connected to the cooling tower 4. The crystal growth furnace body 1, cooling tower 4, circulating water pump 5, and expansion tank 7 utilize existing technology and will not be described in detail. Their function is to form a closed circulating water path through the interconnected design of the crystal growth furnace body 1, cooling tower 4, circulating water pump 5, and expansion tank 7, thereby avoiding water path contamination and blockage, and reducing cooling water evaporation.

[0027] Specifically, such as Figure 1 As shown, the water outlet channel 2 is equipped with a first valve 9 in the section adjacent to the crystal growth furnace body 1, a second valve 10 in the section adjacent to the cooling tower 4, a third valve 11 in the section adjacent to the crystal growth furnace body 1 in the water inlet channel 3, a fourth valve 12 in the section adjacent to the circulating water pump 5 in the water inlet channel 3, a fifth valve 13 on the water delivery pipe 6, and a sixth valve 14 on the cooling water pipe 8. Their functions are as follows: the first valve 9 facilitates maintenance of the crystal growth furnace body 1; the second valve 10 controls the water flow to and from the cooling tower 4; the third valve 11 regulates the flow rate of cooling water entering the crystal growth furnace body 1; the fourth valve 12 protects the circulating water pump 5; the fifth valve 13 controls the water replenishment to the expansion tank 7; and the sixth valve 14 regulates the return water pressure of the cooling tower 4.

[0028] Specifically, such as Figure 1As shown, it also includes a wall 15 and a control box 16 mounted on the wall 15. The circulating water pump 5 and the expansion tank 7 are located inside the control box 16. The cooling tower 4 is located on the side of the wall 15 facing away from the control box 16, and the crystal growth furnace body 1 is located on the side of the wall 15 where the control box 16 is located. Its function is to separate the clean area (furnace body) and the non-clean area (cooling tower 4) through the setting of the wall 15; to protect the circulating water pump 5 and the expansion tank 7 through the setting of the control box 16; and to prevent the backflow of hot air from affecting the crystal growth furnace body 1 through the design of the cooling tower 4 being external to the wall 15.

[0029] Specifically, such as Figure 1 As shown, the side of the wall 15 with the cooling tower 4 is considered the outside of the wall 15, and the side with the control box 16 is considered the inside of the wall 15. The first valve 9 is located inside the wall 15 and outside the control box 16; the second valve 10 is located outside the wall 15; the third valve 11 is located inside the wall 15 and outside the control box 16; the fourth valve 12 is located inside the control box 16; the fifth valve 13 is located inside the control box 16; and the sixth valve 14 is located outside the wall 15. Their functions are as follows: the positions of the first valve 9 and the third valve 11 facilitate rapid response to maintenance of the crystal growth furnace body 1; the positions of the fourth valve 12 and the fifth valve 13 prevent accidental contact and protect core components; and the positions of the second valve 10 and the sixth valve 14 facilitate adjustment of cooling parameters.

[0030] The working principle of this embodiment is explained as follows: The circulating water pump 5 drives the cooling water from the crystal growth furnace body 1 through the water outlet channel 2 into the cooling tower 4 for heat dissipation. After cooling, the water flows through the cooling water pipe 8 into the expansion tank 7 for pressure stabilization, and then returns to the circulating water pump 5 through the water supply pipe 6. Finally, it is injected back into the crystal growth furnace through the water inlet channel 3, forming a closed loop. The valves control the water flow in sections: the first valve 9 and the third valve 11 quickly isolate the furnace body for maintenance, the fourth valve 12 and the fifth valve 13 protect the circulating water pump 5 and the expansion tank 7 in the control box 16, and the second valve 10 and the sixth valve 14 regulate the flow rate of the cooling tower 4 outside the wall. The equipment is laid out in sections through the wall 15 - the cooling tower 4 is externally placed for heat dissipation, and the crystal growth furnace body 1 and the control box 16 are on the same side to shorten the pipeline, achieving zero pollution and efficient thermal management.

[0031] Example 2

[0032] like Figure 2As shown, based on Embodiment 1, the crystal growth furnace body 1 includes a crucible area 17 and a crystal pulling area 18. The water inlet channel 3 includes a main cooling branch 19 and a crystal growth branch 20. The main cooling branch 19 is connected to the crucible area 17, and the crystal growth branch 20 is connected to the crystal pulling area 18. The cooling water flowing out of the main cooling branch 19 flows past the crucible area 17 and is discharged from the water outlet channel 2, and the cooling water flowing out of the crystal growth branch 20 flows past the crystal pulling area 18 and is discharged from the water outlet channel 2. Its function is to achieve precise temperature control of the crystal by differentiating the cooling positions through the main cooling branch 19 and the crystal growth branch 20.

[0033] Specifically, such as Figure 2 As shown, a miniature semiconductor cooling module 21 is provided on the outer wall of the crystal growth branch 20. The miniature semiconductor cooling module 21 adopts existing technology and will not be described in detail. Its function is to locally control the temperature of the crystal growth branch 20 by setting up the miniature semiconductor cooling module 21.

[0034] Specifically, such as Figure 2 As shown, it also includes a controller 22. When the crystal growth furnace body 1 is in the crystal pulling or shoulder forming stage, the controller 22 starts the micro-semiconductor cooling module 21. When the crystal growth furnace body 1 is in the constant diameter or finishing stage, the controller 22 shuts down the semiconductor cooling module. Its function is to control the switching on and off of the micro-semiconductor cooling module 21 through the settings of the controller 22, thereby achieving the temperature control effect.

[0035] Specifically, such as Figure 2 As shown, a bypass valve 23 is provided between the main cooling branch 19 and the crystal growth branch 20. Its function is to switch the connection between the crystal growth branch 20 and the crystal growth furnace body 1 to the connection between the main cooling branch 19 and the crystal growth furnace body 1 when the micro semiconductor cooling module 21 fails.

[0036] Specifically, such as Figure 2 As shown, the controller 22 is connected to a temperature sensor 24, which is located in the water outlet channel 2 near the crystal growth furnace body 1. Its function is to monitor the water temperature discharged from the crystal growth furnace body 1 in real time through the temperature sensor 24.

[0037] Specifically, the pipe diameter ratio of the main cooling branch 19 to the crystal growth branch 20 is 2:1.

[0038] The working principle of this embodiment is explained as follows: Cooling water is injected into the crystal growth furnace through the inlet channel 3 in two paths: the main cooling branch 19 maintains a constant temperature in the crucible area 17, and the crystal growth branch 20 flows to the pulling area and is externally connected to the semiconductor cooling module; the controller 22 dynamically adjusts according to the growth stage: cooling is started during the crystal pulling / shoulder forming stage, the water temperature decreases to accelerate crystal nucleation, cooling is turned off during the constant diameter / tailing stage, and the water temperature rises to prevent cracking; the temperature sensor 24 monitors the outlet water temperature in real time and links with the controller 22 to accurately adjust the temperature; if the cooling is abnormal, the bypass valve 23 automatically switches the crystal growth branch 20 to the main cooling branch 19 for cooling; the main cooling branch 19 and the crystal growth branch 20 are allocated flow rates in a 2:1 ratio to optimize energy consumption; the entire system operates in a closed loop, and the valves are segmented for protection to ensure continuous stability.

[0039] The remaining structure and principle are the same as in Example 1.

[0040] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments based on the technical essence of the present utility model and within the spirit and principles of the present utility model shall still fall within the protection scope of the present utility model.

Claims

1. A circulating water circuit within a crystal growth machine, characterized in that: The system includes a crystal growth furnace body (1), on which a water outlet channel (2) and a water inlet channel (3) are connected. A cooling tower (4) is connected to one end of the water outlet channel (2) away from the crystal growth furnace body (1). A circulating water pump (5) is connected to one end of the water outlet channel (2) away from the crystal growth furnace body (1). A water delivery pipe (6) is connected to the circulating water pump (5). An expansion tank (7) is connected to one end of the water delivery pipe (6) away from the circulating water pump (5). A cooling water pipe (8) is connected to the expansion tank (7). The cooling water pipe (8) is connected to the cooling tower (4) at one end away from the expansion tank (7).

2. The internal circulating water circuit of a crystal growth machine according to claim 1, characterized in that: The water outlet channel (2) is equipped with a first valve (9) in the section near the crystal growth furnace body (1), a second valve (10) in the section near the cooling tower (4), a third valve (11) in the section near the crystal growth furnace body (1) in the water inlet channel (3), a fourth valve (12) in the section near the circulating water pump (5) in the water inlet channel (3), a fifth valve (13) in the water supply pipe (6), and a sixth valve (14) in the cooling water pipe (8).

3. The internal circulating water circuit of a crystal growth machine according to claim 2, characterized in that: It also includes a wall (15) and a control box (16) on the wall (15), a circulating water pump (5) and an expansion tank (7) inside the control box (16), a cooling tower (4) on the side of the wall (15) facing away from the control box (16), and a crystal growth furnace body (1) on the side of the wall (15) where the control box (16) is located.

4. The internal circulating water circuit of a crystal growth machine according to claim 3, characterized in that: The side of the wall (15) with the cooling tower (4) is considered the outside of the wall (15), and the side of the wall (15) with the control box (16) is considered the inside of the wall (15). The first valve (9) is located inside the wall (15) and outside the control box (16), the second valve (10) is located outside the wall (15), the third valve (11) is located inside the wall (15) and outside the control box (16), the fourth valve (12) is located inside the control box (16), the fifth valve (13) is located inside the control box (16), and the sixth valve (14) is located outside the wall (15).

5. The internal circulating water circuit of a crystal growth machine according to claim 1, characterized in that: The main body (1) of the crystal growth furnace includes a crucible area (17) and a crystal pulling area (18). The water inlet channel (3) includes a main cooling branch (19) and a crystal growth branch (20). The main cooling branch (19) is connected to the crucible area (17), and the crystal growth branch (20) is connected to the crystal pulling area (18).

6. The internal circulating water circuit of a crystal growth machine according to claim 5, characterized in that: A micro-semiconductor cooling module (21) is provided on the outer wall of the crystal growth branch (20).

7. The internal circulating water circuit of a crystal growth machine according to claim 6, characterized in that: It also includes a controller (22). When the crystal growth furnace body (1) is in the crystal pulling or shoulder forming stage, the controller (22) starts the micro semiconductor cooling module (21). When the crystal growth furnace body (1) is in the equal diameter or finishing stage, the controller (22) shuts down the semiconductor cooling module.

8. The internal circulating water circuit of a crystal growth machine according to claim 5, characterized in that: A bypass valve (23) is provided between the main cooling branch (19) and the crystal growth branch (20).

9. The internal circulating water circuit of a crystal growth machine according to claim 7, characterized in that: The controller (22) is connected to a temperature sensor (24), which is located in the water outlet channel (2) near the crystal growth furnace body (1).

10. The internal circulating water circuit of the crystal growth machine according to claim 5, characterized in that: The pipe diameter ratio of the main cooling branch (19) to the crystal growth branch (20) is 2:1.

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