Support structure and crystal production apparatus

Abstract

The application provides a support structure and a crystal production device. The support structure comprises: a first column for bearing a sub-chamber lifting and rotating component; a second column spaced apart from the first column for bearing a feeder lifting and rotating component; and at least one connecting piece rigidly connected between the first column and the second column. The structure rigidly connects the two columns through the first connecting piece, and the moment generated by the sub-chamber load borne by the first column and the feeder load borne by the second column forms an internal force balance at the first connecting piece, coupling the deformation displacement of the two columns into a cooperative motion, so that the small deformation directions of the two columns are restricted, the deformation of the traditional single-column structure caused by concentrated load is solved, the positioning accuracy is improved, and the stability of the device operation is improved.

Description

Technical Field

[0001] This application relates to the field of crystal growth equipment technology, specifically to a support structure and crystal production equipment. Background Technology

[0002] During the operation of a single crystal furnace, the lifting and rotation of the auxiliary chamber, furnace cover, furnace chamber, and their connecting accessories, as well as the precise positioning of the external feeder, are crucial to ensuring the normal operation of the equipment. Traditional single-column structures integrate the auxiliary chamber lifting system (load range 1-6 tons) and the feeder lifting system (load range 1-4 tons) onto the same column. This causes the column to bear complex composite loads, and during dynamic operation, uncontrollable deformation and displacement can occur due to load changes, reaching a maximum of 10-20 millimeters.

[0003] This deformation can lead to a series of serious problems. On the one hand, it can significantly reduce the positioning accuracy of the auxiliary chamber and the feeder, resulting in process failures such as the breakage of the feeding glass tube, thus affecting production quality. On the other hand, due to spatial interference between the lifting mechanisms, the pipelines are forced to be externally arranged. This arrangement not only damages the overall aesthetics of the equipment but also greatly increases the difficulty of maintenance.

[0004] Although existing technologies attempt to use multiple pin mechanisms to coordinate the movement of the auxiliary chamber and the feeder, the single-column structure itself has inherent limitations and cannot simultaneously meet the three core requirements of high load distribution, deformation suppression, and space optimization. This limitation severely restricts the improvement of production efficiency and the assurance of operational reliability of CCz (Continuous Czochralski) single crystal furnace equipment. Summary of the Invention

[0005] One of the purposes of this application is to provide a support structure to solve the technical problem in the prior art where a single column structure, when integrating a secondary chamber and a feeding and lifting component, experiences uncontrollable deformation and displacement due to the combined load, resulting in decreased positioning accuracy and damage to some equipment.

[0006] To achieve one of the above-mentioned objectives, this application provides a support structure, comprising: a first column for supporting a sub-chamber lifting and rotating component; a second column spaced apart from the first column for supporting a feeder lifting and rotating component; and at least one connector rigidly connected between the first column and the second column.

[0007] As a further improvement of one embodiment of this application, the first column and the second column are arranged in parallel, and the heights of the first column and the second column are equal.

[0008] As a further improvement of one embodiment of this application, the number of the connectors is at least two, and they are distributed at intervals along the height direction of the first column and the second column.

[0009] As a further improvement of one embodiment of this application, the support structure includes: a first cantilever, one end of which is slidably connected to the first column and the other end of which is connected to the auxiliary chamber; and / or, a second cantilever, one end of which is slidably connected to the second column and the other end of which is connected to the feeder.

[0010] As a further improvement of one embodiment of this application, the first cantilever has a first end and a second end along its length direction, the first end being slidably connected to one side of the first column, and the first cantilever being able to move from one end to the other relative to the first column along its axial direction; the second cantilever has a third end and a fourth end along its length direction, the third end being slidably connected to the second column, and the second cantilever being able to move from one end to the other relative to the second column along its axial direction.

[0011] As a further improvement of one embodiment of this application, when the height of the first cantilever on the first column is greater than the height of the second cantilever on the second column, the length direction of the first cantilever is perpendicular to the axis of the first column, the length direction of the second cantilever is perpendicular to the axis of the second column, and the walls of both cantilever are square.

[0012] As a further improvement of one embodiment of this application, when the height of the first cantilever on the first column is equal to the height of the second cantilever on the second column, the length direction of the first cantilever forms an acute angle with the axis of the first column, and the length direction of the second cantilever is perpendicular to the axis of the second column; wherein, the height of the plane where the first cantilever is located is higher than the height of the plane where the second cantilever is located.

[0013] As a further improvement of one embodiment of this application, a slide rail is provided on one side of both the first column and the second column, and a slider is provided at the first end of both the first cantilever and the second cantilever. The slider is disposed in the slide rail so that the cantilever can move from one end to the other end in the axial direction of the column.

[0014] As a further improvement of one embodiment of this application, pipeline arrangement channels are provided on the opposite sides of the first column and the second column.

[0015] To achieve one of the above-mentioned objectives, this application provides a crystal production device, including a single crystal furnace, a sub-chamber and a feeder; a support structure, wherein a first column is connected to the sub-chamber and a second column is connected to the feeder, and the first column and the second column are respectively located on both sides of the single crystal furnace.

[0016] As a further improvement of one embodiment of this application, the single crystal furnace is located in a plane defined by the axes of the first column and the second column, and the angle between the furnace and the line connecting the two columns is equal.

[0017] Compared with the prior art, the embodiments of this application have at least one of the following beneficial effects: This application discloses a support structure in which two columns are rigidly connected by a first connector. The torque generated by the load of the secondary chamber borne by the first column and the loading load borne by the second column will form an internal force balance at the first connector. At this time, the first connector is equivalent to a rigid constraint node, which couples the deformation displacement of the two columns into a coordinated motion, so that the small deformation directions of the two columns are mutually constrained. This solves the problem of deformation loss control caused by concentrated load in traditional single-column structures, improves positioning accuracy, and thus enhances the stability of equipment operation. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a crystal production equipment in one embodiment of this application.

[0019] Figure 2 This is a schematic diagram of a support structure with cantilevered arms of unequal heights on two columns, according to one embodiment of this application.

[0020] Figure 3 This is a schematic diagram of a cantilevered support structure with equal height on two columns in one embodiment of this application. Detailed Implementation

[0021] The present application will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present application, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the scope of protection of this application.

[0022] The terms used in this document, such as “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” indicating spatial relative positions, are used for illustrative purposes to describe the relationship of one unit or feature relative to another unit or feature as shown in the accompanying drawings. The terms “spatial relative positions” may be intended to include different orientations of the equipment in use or operation other than those shown in the figures.

[0023] For example, if the device in the figure is flipped, a unit described as being "below" or "under" other units or features will be "above" other units or features. Therefore, the exemplary term "below" can encompass both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or otherwise) and the spatially related descriptive terms used herein will be interpreted accordingly.

[0024] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0025] It should be noted that the term "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] like Figure 1 As shown, one embodiment of this application provides a crystal production apparatus 100.

[0027] Crystal production equipment 100 is a specialized device used to manufacture various types of crystals (such as silicon). Through specific process conditions, such as precise control of parameters like temperature, pressure, and atmosphere, it causes raw materials to form crystals with specific structures and properties according to certain crystal growth rules.

[0028] The crystal production equipment 100 includes a single crystal furnace 11, which is the main place for single crystal growth. The single crystal furnace 11 includes a main furnace chamber 12, a secondary chamber 13, and a feeder 14.

[0029] The main furnace chamber 12 is a sealed space used for melting raw materials and pulling single crystals. The auxiliary chamber 13 is an auxiliary space of the main single crystal furnace 12, connected to the main furnace chamber 12 but relatively independent. The auxiliary chamber 13 performs auxiliary operations during the single crystal growth process. For example, when adding raw materials, pretreatment can be carried out in the auxiliary chamber 13 to avoid directly opening the main furnace chamber 12 and causing damage to the internal environment. At the same time, the auxiliary chamber 13 can also serve as an observation window or maintenance channel, allowing operators to monitor the crystal growth in the main furnace chamber 12 or perform equipment maintenance and repair, reducing interference with the internal environment of the main furnace chamber 12 and ensuring the stability of the single crystal growth process and product quality.

[0030] The feeder 14 is a device used to precisely adjust the raw materials into the main furnace chamber 12. The feeder 14 can precisely control the amount, speed and position of the raw materials according to the preset program and parameters, ensuring that the raw materials enter the melting zone evenly and avoiding defects in crystal growth due to uneven feeding.

[0031] The crystal production equipment 100 includes a support structure. The first column 21 in the support structure is connected to the auxiliary chamber 13, and the second column 22 in the support structure is connected to the feeder 14. The first column 21 and the second column 22 are located on both sides of the single crystal furnace 11, respectively.

[0032] In one embodiment, the support structure used in the crystal production equipment 100 can be adopted as follows: Figure 2 And the support structure 200 described below, for details can be found in the embodiments and specific embodiments described below.

[0033] In one embodiment, the single crystal furnace 11 is located in the plane defined by the axes of the first column 21 and the second column 22, and the angle between the furnace and the line connecting the two columns is equal.

[0034] In this way, by setting the single crystal furnace 11 in the plane defined by the axes of the first column 21 and the second column 22, its own weight can be evenly distributed to the two columns, avoiding excessive load on one column due to positional offset, thereby enhancing the stability and reliability of the entire crystal production equipment 100 and reducing the risk of deformation or damage caused by vibration or external force during operation.

[0035] In this embodiment, the angle between the lines connecting the single crystal furnace 11 and the two columns is equal, which means that the position of the single crystal furnace 11 in the plane is relatively symmetrical. When the single crystal furnace 11 is in a symmetrical position, the tensile or compressive forces from the single crystal furnace 11 on the two columns are more balanced in magnitude and direction, avoiding the problem of column tilting or structural instability caused by excessive force on one side.

[0036] like Figure 2 As shown, one embodiment of this application provides a support structure 200.

[0037] The support structure 200 refers to the frame system used to support and fix key functional modules (such as sub-chambers and feeders) in crystal growth equipment.

[0038] In one embodiment, the support structure 200 is applied to a single crystal furnace and serves as a support system to ensure the stable operation of the single crystal furnace.

[0039] The support structure 200 includes a first column 21, which is an upright column that supports the lifting and rotating components of the auxiliary chamber and is a key stress point of the support structure 200.

[0040] The support structure 200 includes a second column 22, which is an upright column that supports the lifting and rotating components of the feeder and is spaced apart from the first column 21. Its function is similar to that of the first column 21, but its size or material selection may be adjusted due to differences in the weight or movement trajectory of the feeder.

[0041] In one embodiment, the first column 21 and the second column 22 are made of metal (such as seamless steel pipe or high-strength steel profile).

[0042] In one embodiment, the auxiliary chamber lifting and rotating component is an integrated structure, specifically including an integrated drive module, which realizes the combined motion of lifting and rotating of the auxiliary chamber 13 through a single power unit.

[0043] In one embodiment, the auxiliary chamber lifting and rotating component includes a lifting drive module and a rotating drive module. The output end of the lifting drive module is fixedly connected to the rotating drive module, and the combined lifting and rotating motion of the auxiliary chamber 13 is realized through multiple power units.

[0044] In one embodiment, the auxiliary chamber lifting and rotating component includes a lifting component and a rotating component, which are slidably connected to the first column 21 at a first position and a second position, respectively.

[0045] Similarly, in one embodiment, the feeder lifting and rotating component is an integrated structure, specifically including an integrated drive module, which realizes the combined lifting and rotating motion of the feeder 14 through a single power unit.

[0046] In one embodiment, the feeder lifting and rotating component includes a lifting drive module and a rotating drive module. The output end of the lifting drive module is fixedly connected to the rotating drive module, and the combined lifting and rotating motion of the feeder 14 is realized through multiple power units.

[0047] In one embodiment, the feeder lifting and rotating component includes a lifting component and a rotating component, which are slidably connected to the second column 22 at a first position and a second position, respectively.

[0048] In one embodiment, the first column 21 and the second column 22 are arranged in parallel.

[0049] In one embodiment, the first column 21 and the second column 22 are at the same height.

[0050] In this way, by limiting the parallel and equal height arrangement of the two columns, a symmetrical mechanical load-bearing frame is constructed, which can evenly distribute the pressure and force generated by the single crystal furnace 11 and related components, and avoid structural tilting and swaying caused by uneven force distribution.

[0051] The support structure 200 includes at least one connector 23, which is rigidly connected between the first column 21 and the second column 22. The rigid connection refers to a fixed connection without relative displacement between the connector 23 and the two columns, formed by welding, bolting, or other methods. This ensures that the first column 21 and the second column 22 form a non-movable and non-rotatable connection, guaranteeing coordinated deformation of the two columns when the load changes.

[0052] In one embodiment, the number of connectors 23 is at least two, and they are distributed at intervals along the height direction of the first column 21 and the second column 22.

[0053] Thus, by employing at least two connectors 23 spaced apart along the height direction, the relevant components can be connected and fixed from multiple locations, enhancing the stability of the connectors 23 in connecting the components and improving the overall strength of the support structure 200.

[0054] In this embodiment, the spaced connectors 23 can disperse connection stress, preventing loosening or failure of the connection due to localized stress concentration. Simultaneously, multiple connectors 23 provide support at different heights, better adapting to the forces and deformations generated at different locations by the single crystal furnace 11 and related components, thus enhancing the stability and load-bearing capacity of the entire support structure 200.

[0055] In one specific embodiment, one end of the connector 23 is fixedly connected to the first column 21 by a bolt, and the other end of the connector 23 is fixedly connected to the second column 22 by a bolt. Of course, bolts are not necessarily used; other fixing methods can also be used, such as welding, clamps, or pins, etc., and there is no specific limitation on this.

[0056] In one specific embodiment, the first column 21 bears a maximum load of 6 tons for the auxiliary chamber, and the second column 22 bears a maximum load of 4 tons for the feeder 14. The first column 21 and the second column 22 can each bear their own maximum load without interfering with each other, and the connecting piece 23 can also balance the forces in different directions on both sides.

[0057] In one specific embodiment, the first column 21 and the second column 22 are configured such that when the second column 22 bears a load of 4 tons, its displacement is less than 5 millimeters.

[0058] To facilitate understanding, consider this example: when feeder 14 adds material to auxiliary chamber 13, a typical dynamic load change occurs. Assume the load on auxiliary chamber 13 increases from 4 tons to 6 tons (an increase of 2 tons), while the load on feeder 14 decreases from 3 tons to 1 ton (a decrease of 2 tons). In a traditional single-column structure, this asymmetrical load change causes the column to bend like a rubber band stretched in opposite directions, resulting in a bending deformation of 10-20 mm. The dual-column structure of this application creates a self-balancing system: the increased 2-ton auxiliary chamber load acts downwards through the first column 21, while the decreased 2-ton feeder load is equivalent to the second column 22 receiving an upward reaction force. These two opposing forces form a force couple through the intermediate rigid connector 23, which acts as a "force converter," canceling out the downward bending moment on the first column 21 and the upward rebounding moment on the second column 22.

[0059] Since the two columns have opposite deformation trends (one tends to bend downwards, and the other tends to tilt upwards), the stress inside the connector 23 is actually "self-digesting" this deformation energy. In addition, the rigidity of the connector 23 ensures the instantaneous transmission of force, allowing the small deformations of the two columns to compensate for each other in real time, ultimately achieving the effect of "stability in motion".

[0060] In one specific embodiment, both the first pillar 21 and the second pillar 22 are configured in the shape of a triangular prism.

[0061] Thus, by setting it in the shape of a triangular prism, its three corresponding sides can distribute the force, effectively resist pressure and impact from different directions, and enhance the overall support capacity; at the same time, its edge structure can reduce the amount of material used, achieving lightweighting and reducing costs while ensuring strength.

[0062] Continue to refer to Figure 2 As shown, in one embodiment, the support structure 200 includes a first cantilever 24, one end of which is slidably connected to the first column 21, and the other end of which is connected to the sub-chamber 13.

[0063] In one embodiment, the support structure 200 includes a second cantilever 25, one end of which is slidably connected to the second column 22, and the other end of which is connected to the feeder 14.

[0064] In this embodiment, the sliding connection allows the cantilever to move the sub-chamber 13 or the feeder 14 along the column axis, thereby adjusting the positions of the sub-chamber 13 and the feeder 14 according to the needs of the crystal production process.

[0065] In one specific embodiment, the first cantilever 24 has a first end and a second end along the length direction of its cantilever, the first end is slidably connected to one side surface of the first column 21, and the first cantilever 24 can move relative to the first column 21 from one end to the other along its axial direction.

[0066] In one specific embodiment, the second cantilever 25 has a third end and a fourth end along the length direction of its cantilever, the third end being slidably connected to one side surface of the second column 22, and the second cantilever 25 being able to move relative to the second column 22 from one end to the other along its axial direction.

[0067] Thus, when the cantilever slides along one side of the column, the column section will be subjected to eccentric load, which will induce reverse elastic deformation. This deformation will just offset the deflection caused by the cantilever extension.

[0068] In this embodiment, the first end of the first cantilever 24 is connected to one side of the first column 21 via a first slide rail slider assembly. Specifically, a first slide rail 26 is provided on one side of the first column 21, and the first end of the first cantilever 24 is configured as a first slider, which is slidably connected to the first slide rail 26 on the first column 21.

[0069] Similarly, one end of the second cantilever 25 is connected to one side of the second column 22 via a second slide rail slider assembly. Specifically, a second slide rail 27 is provided on one side of the second column 22, and the first end of the second cantilever 25 is configured as a second slider, which is slidably connected to the second slide rail 27 on the second column 22.

[0070] Continue to refer to Figure 2 As shown, in one embodiment, when the height of the first cantilever 24 on the first column 21 is greater than the height of the second cantilever 25 on the second column 22, the length direction of the first cantilever 24 is perpendicular to the axis of the first column 21, the length direction of the second cantilever 25 is perpendicular to the axis of the second column 22, and the walls of both cantilever arms are square.

[0071] Thus, when the two cantilever arms are installed at different heights, a square-section cantilever arm with a vertical column is used to ensure that the force flow is transmitted collinearly and that the wall surface has additional torque.

[0072] like Figure 3 As shown, in one embodiment, when the height of the first cantilever 24 on the first column 21 is equal to the height of the second cantilever 25 on the second column 22, the length direction of the first cantilever 24 forms an acute angle with the axis of the first column 21, and the length direction of the second cantilever 25 is perpendicular to the axis of the second column 22; wherein, the height of the plane where the first cantilever 24 is located is higher than the height of the plane where the second cantilever 25 is located.

[0073] Thus, when the two cantilever arms are installed at different heights, using a first cantilever arm with an inclined cross-section and a second cantilever arm with a square cross-section of a vertical column can stagger the movement trajectories within a limited space, avoiding interference between the two cantilever arms.

[0074] In one embodiment, pipeline routing channels are provided on the opposite sides of the first column 21 and the second column 22.

[0075] Thus, by setting channels on the opposite sides of the first column 21 and the second column 22, it is convenient to arrange pipelines, making the internal layout of the equipment neater, more orderly and beautiful, and easier to maintain and manage.

[0076] The following will combine Figure 2 and Figure 3 The content shown describes the installation and operation process of the support structure 200.

[0077] The support structure 200 of the single crystal furnace 11 uses the first column 21 and the second column 22 as the core support components. The two columns are placed on a horizontal surface in parallel and at the same height. They are mechanically connected by connectors 23 (such as connecting blocks) and fixed by bolts to achieve the overall structure and initial stability.

[0078] One end of the first cantilever 24 is slidably connected to the first column 21 via a slide rail slider, and the other end is connected to the auxiliary chamber 13; one end of the second cantilever 25 is slidably connected to the second column 22 via a slide rail slider, and the other end is connected to the feeder 14.

[0079] During operation, the first column 21 and the second column 22 bear loads without interference. The connecting piece 23 between the columns effectively balances the forces in different directions on both sides, ensuring the stability of the support structure 100. When the load on the second column 22 changes during the feeding process, the reasonable design of the overall structure can significantly reduce the deformation of the load-bearing components and control the displacement change within a preset range (for example, reducing the 10-20 mm displacement of a traditional single column to within 5 mm), thus avoiding damage to components due to excessive displacement (such as the breakage of the feeding glass tube).

[0080] When using the support structure 200 of the single crystal furnace, the user controls the sliding of the first cantilever 24 on the first column 21 through the control system to adjust the auxiliary chamber 13 to a suitable position to meet the needs of different process stages, such as observation and maintenance. Simultaneously, the user controls the sliding of the second cantilever 25 on the second column 22 to ensure the feeder 14 accurately reaches the feeding position for precise feeding. During the feeding process, due to the stability of the structure, even if the load on the second column 22 changes, the displacement change remains within a small range, preventing the feeding glass tube from breaking and ensuring the accuracy and stability of the feeding.

[0081] The following will continue to combine Figure 1 , Figure 2 and Figure 3 The content shown illustrates the mechanical balance principle of the double-column support structure 200.

[0082] When the crystal production equipment 100 is in operation, the loads on the auxiliary chamber 13 and the feeder 14 are not constant, but change dynamically as the production process progresses. This load change creates a mutually restrictive mechanical coupling relationship between the first column 21 and the second column 22.

[0083] Specifically, under ideal operating conditions, the increment of the load in auxiliary chamber 13 is denoted as... The reduction in load on feeder 14 is recorded as The two approximately satisfy This is because the auxiliary chamber 13 and the feeder 14 are interconnected during equipment operation. When the load on the auxiliary chamber 13 increases due to material accumulation, the load on the feeder 14 often decreases due to material reduction, and these changes are roughly equal under ideal conditions. These two opposing load changes form an internal force balance loop through the rigid connector 23. The rigid connector 23 acts as a "bridge for force transmission and balance," transmitting and coordinating the forces generated by load changes in the auxiliary chamber 13 and the feeder 14, achieving a force balance within the entire system and preventing excessive tilting or shaking of the equipment due to load changes.

[0084] From a structural mechanics perspective, the first column 21 generates a bending moment M1 under the aforementioned mechanical forces, and the second column 22 also generates a bending moment M2, with M1 and M2 having opposite vector directions. The connector 23, acting as a rigid constraint node, couples the bending deformations of the first column 21 and the second column 22 together, causing them to move in tandem. While a single column might normally deform independently due to load changes, under the action of the connector 23, this independent deformation is converted into overall displacement, thus ensuring the stability and reliability of the entire double-column support structure 200, allowing the equipment 100 to operate smoothly even under varying load conditions.

[0085] In summary, this application provides a support structure 200 and a crystal production device 100. After the two columns are rigidly connected by the first connector 23, the torque generated by the sub-chamber load borne by the first column 21 and the feeding load borne by the second column 22 will form an internal force balance at the first connector 23. At this time, the first connector 23 is equivalent to a rigid constraint node, which couples the deformation displacement of the two columns into cooperative motion, so that the small deformation directions of the two columns mutually restrict each other, solving the deformation loss control caused by concentrated load in the traditional single column structure, improving positioning accuracy, and thus improving the stability of equipment operation.

[0086] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0087] The detailed descriptions listed above are merely specific descriptions of feasible implementation methods of this application and are not intended to limit the scope of protection of this application. All equivalent implementation methods or modifications made without departing from the spirit of the art of this application should be included within the scope of protection of this application.

Claims

1. A support structure, characterized in that, include: The first column is used to support the lifting and rotating components of the auxiliary chamber; The second column, spaced apart from the first column, is used to support the lifting and rotating components of the feeder; At least one connector is rigidly connected between the first column and the second column.

2. The support structure according to claim 1, characterized in that, The first column and the second column are arranged parallel to each other, and the first column and the second column are at the same height.

3. The support structure according to claim 1, characterized in that, The number of connectors is at least two, and they are distributed at intervals along the height direction of the first column and the second column.

4. The support structure according to claim 1, characterized in that, The supporting structure includes: The first cantilever has one end slidably connected to the first column and the other end connected to the auxiliary chamber; and / or, The second cantilever has one end slidably connected to the second column and the other end connected to the feeder.

5. The support structure according to claim 4, characterized in that, The first cantilever has a first end and a second end along its length direction. The first end is slidably connected to one side of the first column. The first cantilever can move from one end to the other relative to the first column along its axial direction. The second cantilever has a third end and a fourth end along its length direction, the third end being slidably connected to the second column, and the second cantilever being able to move relative to the second column from one end to the other along its axial direction.

6. The support structure according to claim 4, characterized in that, When the height of the first cantilever on the first column is greater than the height of the second cantilever on the second column, the length direction of the first cantilever is perpendicular to the axis of the first column, the length direction of the second cantilever is perpendicular to the axis of the second column, and the walls of both cantilever arms are square.

7. The support structure according to claim 4, characterized in that, When the height of the first cantilever on the first column is equal to the height of the second cantilever on the second column, the length direction of the first cantilever forms an acute angle with the axis of the first column, and the length direction of the second cantilever is perpendicular to the axis of the second column; wherein, the height of the plane on which the first cantilever is located is higher than the height of the plane on which the second cantilever is located.

8. The support structure according to claim 4, characterized in that, The first column and the second column are each provided with a slide rail on one side, and the first end of the first cantilever and the second cantilever are each provided with a slider. The slider is disposed in the slide rail so that the cantilever can move from one end to the other end in the axial direction of the column.

9. The support structure according to claim 1, characterized in that, Pipeline routing channels are provided on the opposite sides of the first column and the second column.

10. A crystal production device, characterized in that, include: The single crystal furnace is equipped with a secondary chamber and a feeder; The support structure as described in any one of claims 1-9 has a first column connected to the sub-chamber and a second column connected to the feeder, with the first column and the second column located on opposite sides of the single crystal furnace.

11. The crystal production equipment according to claim 10, characterized in that, The single crystal furnace is located in the plane defined by the axes of the first column and the second column, and the angle between the furnace and the line connecting the two columns is equal.

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