An apparatus for regulating laser-assisted heating in a hot zone in connection with single crystal pulling

Abstract

The utility model relates to single crystal drawing heat field regulation and control laser auxiliary heating technical field, especially relate to a kind of about single crystal drawing heat field regulation and control laser auxiliary heating's device. Including single crystal furnace body, heat preservation bucket, support rod and auxiliary device, the upper end of single crystal furnace body is provided with top cover, heat preservation bucket is located inside the single crystal furnace body, the inside of heat preservation bucket is provided with crucible, water cooling screen is provided on the inner wall upper end of heat preservation bucket, the inner wall side of water cooling screen is equipped with support rod, the upper end of support rod and the side surface of top cover fixed communication, the upper surface of heat preservation cylinder is uniformly provided with several adjusting devices, adjusting device includes moving frame, support frame, moving frame is fixedly connected with the upper surface of heat preservation bucket by means of auxiliary device. The device provided by the utility model has the advantages of high energy density and straight propagation characteristics of laser beam, focusing energy directly on the target area, achieving rapid and accurate heating.

Description

Technical Field

[0001] This utility model relates to the field of laser-assisted heating technology for single crystal pulling with thermal field control, and in particular to a device for laser-assisted heating for single crystal pulling with thermal field control. Background Technology

[0002] A single crystal furnace is a device that melts various silicon materials in an inert gas environment using a heater to produce dislocation-free single crystals using the Czochralski method. The heater is the heating component that supplies heat to the single crystal furnace. By controlling the temperature of each part, flawless single crystals can be pulled. Laser heating, with its high energy density and precise focusing characteristics, can improve the thermal field distribution during the single crystal pulling process through precise temperature control, thereby effectively improving the quality of the single crystal material. The application of this technology can significantly improve the stability and controllability of single crystal pulling and is commonly used in semiconductor material processing and production.

[0003] Existing technologies, such as the utility model patent with publication number CN217351618U, disclose a heater device and a hot zone structure for pulling single crystals. This patent includes a heater body with at least one groove and at least one protrusion. The groove is located in the high-temperature heating zone, and the protrusion is located elsewhere, radiating higher temperatures to the single crystal rod, allowing the single crystal rod to receive more heat. The advantages of this utility model are: by modifying the heater, the hot zone temperature can be designed; the heater's temperature can be freely adjusted by designing different heater thicknesses; and by controlling the resistance, heat can be concentrated, shortening the silicon heating time and creating higher efficiency.

[0004] In the semiconductor material processing and production process, it has been found that the traditional heating method of Czochralski single crystal silicon growth furnaces mainly uses high-purity graphite resistance heating. By adjusting the power of the main heater and the bottom heater, a power difference is formed in the entire thermal field, which in turn forms a temperature difference. In this process, the electrothermal conversion efficiency of the resistance heating system is only 40% to 50%, and the heat loss at the edge of the thermal field accounts for 30% to 35% of the total energy consumption. This results in problems such as difficulty in temperature gradient control, energy efficiency bottleneck, low thermal efficiency, high heater maintenance costs, limited service life, and high oxygen content in the single crystal head. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies in the operation of single crystal furnaces using the Czochralski method for single crystal silicon growth. Traditional heating methods primarily rely on high-purity graphite resistance heating, utilizing the power adjustment of the main heater and the bottom heater to create a power difference and thus a temperature difference throughout the thermal field. In this process, the electrothermal conversion efficiency of the resistance heating system is only 40%–50%, and heat loss at the edge of the thermal field accounts for 30%–35% of the total energy consumption. These problems include difficulty in temperature gradient control, energy efficiency bottlenecks, low thermal efficiency, high heater maintenance costs, limited service life, and high oxygen content in the single crystal head.

[0006] To solve the above-mentioned technical problems, this utility model provides a device for laser-assisted heating and thermal field control in single crystal pulling, comprising: a single crystal furnace body, a heat-insulating barrel, a support rod, and an auxiliary device. The single crystal furnace body has a top cover at its upper end. The heat-insulating barrel is located inside the single crystal furnace body and contains a crucible. A water-cooled screen is installed on the upper end of the inner wall of the heat-insulating barrel. A support rod is installed on one side of the inner wall of the water-cooled screen. The upper end of the support rod is fixedly connected to one side surface of the top cover. Several adjusting devices are evenly arranged on the upper surface of the heat-insulating barrel. Each adjusting device includes a movable frame and a support frame. The movable frame is fixedly connected to the upper surface of the heat-insulating barrel via the auxiliary device. A drive rod is rotatably connected to the inner wall of the movable frame. A servo motor is fixedly connected to one side surface of the movable frame. The output end of the servo motor is fixedly connected to one end of the drive rod. The arc surface of the drive rod has threads with opposite thread directions. Moving plates are threaded through the arc surfaces of both ends of the drive rod. The support frame is located on the moving plate. On the upper surface of the support frame, through holes are provided on both sides of the support frame. A docking plate is inserted into the inner wall of the through hole. The bottom end of the docking plate is fixedly connected to the surface of the moving plate. A connecting plate is fixedly connected to the support frame surface at the position corresponding to the docking plate. A moving rod slides through the surface of the connecting plate. A spring is sleeved on the arc surface of the moving rod. The two ends of the spring are fixedly connected to the connecting plate and the moving rod, respectively. A limit hole is provided on the side wall of the docking plate. The inner wall of the limit hole is inserted into one end of the moving rod. An adjusting frame is fixedly connected to the upper surface of the support frame. A rotating shaft is rotatably connected to the inner wall of the adjusting frame. A laser emitter is fixedly connected to the upper surface of the rotating shaft. A spatial light modulator is abutted against the surface of the moving plate at the position corresponding to the laser emitter. Four positioning plates are fixedly connected to the surface of the moving plate at the position corresponding to the spatial light modulator. The cross-section of the four positioning plates is "L" shaped. The inner wall of the positioning plate is engaged with the surface of the spatial light modulator. The laser emitter is electrically connected to the spatial light modulator.

[0007] The effects achieved by the above components are as follows: during the operation of the single crystal furnace, the laser emitter in the adjustment device can be used for auxiliary operation. The introduction of laser-assisted heating can improve the growth quality of the single crystal rod through localized and precise temperature control. At the same time, the laser emitter on the surface of the moving plate is moved by the drive rod in the moving frame, which helps to quickly heat the seed crystal end with laser, reduce dislocation defects caused by thermal stress, and compensate for melt temperature.

[0008] Preferably, the side wall of the adjusting frame is provided with a sliding groove, and a sliding rod is slidably connected to the inner wall of the sliding groove. One end of the sliding rod is fixedly connected to the side wall surface of the rotating shaft, and a fixed shaft is threadedly connected to the arc surface of the sliding rod.

[0009] The aforementioned components achieve the following effect: guided by the sliding rod on one side of the rotating shaft and the sliding groove on the surface of the adjustment frame, the initial position of the entire laser emitter can be adjusted and limited.

[0010] Preferably, the arc surface of the slide rod is fitted with a washer ring, and the surface of the washer ring abuts against one side of the fixed shaft.

[0011] The effect achieved by the above components is that the spacer can compress and protect the position of the fixed shaft, preventing it from loosening and falling off when it is fixed for a long time.

[0012] Preferably, an auxiliary ring is rotatably connected to one end surface of the movable rod, and the cross-section of the auxiliary ring is vertical.

[0013] The effect achieved by the above components is that when the position of the moving rod is stretched or moved, the auxiliary ring at one end of the moving rod can be used for auxiliary operation.

[0014] Preferably, the auxiliary device is positioned on the upper surface of the insulation bucket corresponding to the movable frame. The auxiliary device includes a mounting plate, the inner wall of which is inserted into the lower surface of the movable frame, and the lower surface of the mounting plate abuts against the upper surface of the insulation bucket. Mounting holes are provided on both ends of the mounting plate, and mounting columns are slidably connected to the inner walls of the mounting holes. The bottom ends of the mounting columns are fixedly connected to the surface of the insulation bucket. Inlay grooves are provided on both sides of the mounting plate, and several extrusion shafts are threaded through one side of the inner wall of the inlay groove. One end of the extrusion shaft abuts against the side wall surface of the movable frame. A connecting shaft is threaded to the arc surface of the mounting column, and the lower surface of the connecting shaft abuts against the surface of the mounting plate.

[0015] The effect achieved by the above components is that when the entire mobile device is installed on the upper surface of the insulated bucket, the installation operation can be carried out with the help of the auxiliary device. The mobile frame is positioned by the mounting plate, and then the mounting holes are used to dock and limit the positioning of the mounting column fixed on the upper surface of the insulated bucket.

[0016] Preferably, the mounting hole has a vertical cross-section, and the cross-sectional dimensions of the mounting hole are adapted to the cross-sectional dimensions of the mounting column.

[0017] The effect achieved by the above components is that the vertically shaped mounting holes facilitate fine-tuning and positioning with the mounting column, which helps to further fix the position of the entire mobile frame.

[0018] Preferably, the arc surface of the connecting shaft is fixedly connected with a plurality of protrusions, and the plurality of protrusions are evenly distributed on the surface of the connecting shaft, wherein the protrusions are rubber blocks.

[0019] The effect achieved by the above components is that when the connecting shaft is rotated, the rubber protrusions on the arc surface of the connecting shaft can increase the contact stress of rotation, making it easier to rotate.

[0020] Compared with related technologies, the device for laser-assisted heating with thermal field control in single crystal pulling provided by this utility model has the following beneficial effects: This utility model provides a device for laser-assisted heating with thermal field control in single crystal pulling. By operating the adjustment device, the positions of the laser emitter and the spatial light modulator are fixed and limited. The position of the moving plate can be moved horizontally by the moving frame set on the upper surface of the heat preservation barrel. At the same time, the position of the laser emitter can be finely adjusted by the support frame and adjustment frame set on the surface of the moving plate, thereby further operating and using the entire laser emitter.

[0021] By operating the auxiliary device, the position of the entire adjustment device can be fixed. The mounting holes on one side of the mounting plate are connected and fixed to the mounting columns on the upper surface of the insulation barrel, thereby enabling quick and convenient positioning and limiting of the entire mobile frame.

[0022] In this process, the introduction of laser-assisted heating can improve the growth quality of single crystal rods through precise local temperature control. Typical applications include: melt temperature control: the laser beam directly acts on bulk silicon, efficiently melting it into a liquid, greatly saving secondary processing time; seed crystal preheating: the laser rapidly heats the seed crystal end, reducing dislocation defects caused by thermal stress; melt temperature compensation: the laser beam dynamically adjusts the surface temperature distribution of the melt, suppressing impurity segregation; crystal neck growth control: laser scanning optimizes the temperature gradient in the crystal neck region, thereby improving the crystallization rate and also reducing power consumption and saving energy. Laser heating, as a crystallization of modern technology, is renowned for its high efficiency and precise control. It utilizes the high energy density and linear propagation characteristics of the laser beam to directly focus energy on the target area, achieving rapid and accurate heating. Attached Figure Description

[0023] Figure 1 A schematic diagram of a device for controlling the thermal field of single crystal pulling with laser-assisted heating provided by this utility model; Figure 2 for Figure 1 A schematic diagram of the internal cross-sectional structure of the three-dimensional structure shown; Figure 3 for Figure 1 A schematic diagram of the upper part of the insulated bucket shown; Figure 4 for Figure 3 The enlarged structural diagram at point A is shown.

[0024] The diagram shows the following components: 1. Single crystal furnace body; 2. Top cover; 3. Crucible; 4. Adjustment device; 401. Moving frame; 402. Servo motor; 403. Drive rod; 404. Laser emitter; 405. Spatial light modulator; 406. Moving plate; 407. Positioning plate; 408. Support frame; 409. Through hole; 410. Docking plate; 411. Adjustment frame; 412. Rotating shaft; 413. Slide groove; 414. Slide rod; 415. Washer ring; 416. Fixed shaft; 417. Limiting hole; 418. Connecting plate; 419. Moving rod; 420. Spring; 421. Auxiliary ring; 5. Auxiliary device; 51. Mounting plate; 52. Inlay groove; 53. Extrusion shaft; 54. Connecting shaft; 55. Mounting hole; 56. Mounting column; 57. Protrusion; 6. Insulation tank; 7. Water-cooled screen; 8. Support rod. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0026] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0027] Please see Figures 1 to 4 This utility model provides a device for laser-assisted heating and thermal field control in single crystal pulling, comprising: a single crystal furnace body 1, a heat-insulating barrel 6, a support rod 8, and an auxiliary device 5. The upper end of the single crystal furnace body 1 is provided with a top cover 2. The heat-insulating barrel 6 is located inside the single crystal furnace body 1, and a crucible 3 is provided inside the heat-insulating barrel 6. A water-cooled screen 7 is provided on the upper end of the inner wall of the heat-insulating barrel 6. A support rod 8 is installed on one side of the inner wall of the water-cooled screen 7. The upper end of the support rod 8 is fixedly connected to one side surface of the top cover 2. A plurality of adjustment devices 4 are evenly arranged on the upper surface of the heat-insulating barrel 6. The auxiliary device 5 is located on the upper surface of the heat-insulating barrel 6 at a position corresponding to the moving frame 401.

[0028] In the embodiments of this utility model, please refer to Figure 2 , Figure 3 and Figure 4 The adjusting device 4 includes a movable frame 401 and a support frame 408. The movable frame 401 is fixedly connected to the upper surface of the insulation barrel 6 via an auxiliary device 5. A drive rod 403 is rotatably connected to the inner wall of the movable frame 401. A servo motor 402 is fixedly connected to one side surface of the movable frame 401. The output end of the servo motor 402 is fixedly connected to one end of the drive rod 403. The arc surface of the drive rod 403 is provided with threads in opposite directions. Both ends of the arc surface of the drive rod 403 are threaded through the movable plate 406. The support frame 408 is located on the upper surface of the movable plate 406. Both sides of the support frame 408 have through holes 409. A mating plate 410 is inserted into the inner wall of the through hole 409. The bottom end of the mating plate 410 is fixedly connected to the surface of the movable plate 406. A connecting plate 418 is fixedly connected to the surface of the support frame 408 at the position corresponding to the mating plate 410. A movable rod 419 slides through the surface of the connecting plate 418. A spring 420 is sleeved on the arc surface of the movable rod 419. The two ends of the spring 420 are fixedly connected to the connecting plate 418 and the movable rod 419, respectively. A limiting hole 417 is provided on the side wall of the mating plate 410. The inner wall of the support frame 408 is inserted into one end of the moving rod 419. An adjusting frame 411 is fixedly connected to the upper surface of the support frame 408. A rotating shaft 412 is rotatably connected to the inner wall of the adjusting frame 411. A laser emitter 404 is fixedly connected to the upper surface of the rotating shaft 412. A spatial light modulator 405 is abutted against the surface of the moving plate 406 at the position corresponding to the laser emitter 404. Four positioning plates 407 are fixedly connected to the surface of the moving plate 406 at the position corresponding to the spatial light modulator 405. The cross-section of the four positioning plates 407 is "L" shaped. The inner wall of the positioning plate 407 is connected to the spatial light modulator 405. 5. The surface of the laser emitter 404 is electrically connected to the spatial light modulator 405. The side wall of the adjustment frame 411 is provided with a sliding groove 413. The inner wall of the sliding groove 413 is slidably connected to a sliding rod 414. One end of the sliding rod 414 is fixedly connected to the side wall surface of the rotating shaft 412. The arc surface of the sliding rod 414 is threadedly connected to a fixed shaft 416. The arc surface of the sliding rod 414 is fitted with a washer 415. The surface of the washer 415 abuts against one side of the fixed shaft 416. One end of the moving rod 419 is rotatably connected to an auxiliary ring 421. The cross section of the auxiliary ring 421 is vertical. In the embodiments of this utility model, please refer to Figure 3The auxiliary device 5 includes a mounting plate 51. The inner wall of the mounting plate 51 is inserted into the lower surface of the movable frame 401, and the lower surface of the mounting plate 51 abuts against the upper surface of the insulation barrel 6. Mounting holes 55 are provided on both ends of the mounting plate 51. Mounting posts 56 are slidably connected to the inner walls of the mounting holes 55. The bottom ends of the mounting posts 56 are fixedly connected to the surface of the insulation barrel 6. Embedding grooves 52 are provided on both sides of the mounting plate 51. Several extrusion threads are threaded through one side of the inner wall of the embedding groove 52. Shaft 53, one end of the extrusion shaft 53 abuts against the side wall surface of the movable frame 401, the arc surface of the mounting column 56 is threaded with a connecting shaft 54, the lower surface of the connecting shaft 54 ​​abuts against the surface of the mounting plate 51, the cross-section of the mounting hole 55 is vertical, the cross-sectional dimensions of the mounting hole 55 are adapted to the cross-sectional dimensions of the mounting column 56, and the arc surface of the connecting shaft 54 ​​is fixedly connected with several protrusions 57, which are evenly distributed on the surface of the connecting shaft 54, and the protrusions 57 are rubber blocks; The working principle of the laser-assisted heating device for controlling the thermal field of single crystal pulling provided by this utility model is as follows: During the operation of the single crystal furnace body 1, the laser emitter 404 and the spatial light modulator 405 are first installed on the upper surface of the heat-insulating barrel 6 inside the single crystal furnace body 1. At this time, the entire movable frame 401 is first installed with the aid of the auxiliary device 5. The mounting holes 55 on both sides of the mounting plate 51 are inserted into the mounting posts 56 fixed on the upper surface of the heat-insulating barrel 6. Then, the connecting shaft 54 ​​is rotated to press and fix it. Finally, the movable frame 401 is placed on the mounting plate 51. On the inner wall surface, rotate the pressing shaft 53 in the inlaid groove 52 on the surface of the mounting plate 51, so that one end of the pressing shaft 53 presses and fixes the side wall surface of the movable frame 401. Then, adjust the adjusting device 4. First, insert the support frame 408 into the docking plate 410 fixed on the surface of the movable plate 406 through the through holes 409 on both sides. Then, pull the moving rod 419 so that one end of the moving rod 419 overcomes the pressing force generated by the spring 420 and inserts and fixes into the limiting hole 417 on the side wall of the docking plate 410. At this time, the position of the entire support frame 408 will be fixed. Next, the laser emitter 404 is fixed to the rotating shaft 412 inside the adjusting frame 411. Simultaneously, the rotating shaft 412 is pulled, allowing it to slide along the groove 413 on the side wall of the adjusting frame 411 using a sliding rod 414 on one side, until the entire laser emitter 404 is adjusted to the appropriate position. Then, the fixed shaft 416 on the arc surface of the sliding rod 414 is rotated. At this point, the position of the entire laser emitter 404 will be fixed and cannot be deflected. Simultaneously, the spatial light controller is inserted and limited by the positioning plate 407 fixed to the surface of the moving plate 406, thereby allowing the laser emitter 404 and the spatial light controller to communicate. When used in conjunction with other equipment, the heat changes of laser heating are controlled by giving a power value. The dynamic adjustment range of the laser spot diameter for each group is 20-25mm, and the incident wavelength is 450-550mm. With the help of the spatial light modulator 405, the laser incident angle is adjusted in real time with an accuracy of ±0.5° and the spot diameter dynamic range is 1-3mm. The spatial light modulator 405 realizes the ring spot conversion: the spot diameter can be dynamically adjusted by phase modulation. The water-cooled screen 7 is usually made of graphite-based composite material. In the laser-assisted heating scenario, surface anti-reflection treatment is required, such as coating with an aluminum nitride reflective layer with a reflectivity >98%. The secondary reflection optical path design improves the energy utilization rate to 85% and reduces laser energy loss.

[0029] The circuits and controls involved in this utility model are all existing technologies and will not be described in detail here. The above description is only an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. An apparatus for regulating laser-assisted heating in connection with single-crystal pulling thermal field, characterized by include: The single crystal furnace body (1), the heat preservation barrel (6), the support rod (8), and the auxiliary device (5) are provided. The upper end of the single crystal furnace body (1) is provided with a top cover (2). The heat preservation barrel (6) is located inside the single crystal furnace body (1). The inside of the heat preservation barrel (6) is provided with a crucible (3). The upper end of the inner wall of the heat preservation barrel (6) is provided with a water-cooled screen (7). The inner wall of the water-cooled screen (7) is installed with a support rod (8). The upper end of the support rod (8) is fixedly connected to one side surface of the top cover (2). Several adjustment devices (4) are evenly provided on the upper surface of the heat preservation barrel (6). The adjustment device (4) includes a moving frame (401) and a support frame (408). The moving frame (401) is connected by means of... The auxiliary device (5) is fixedly connected to the upper surface of the heat preservation barrel (6). The inner wall of the movable frame (401) is rotatably connected to the drive rod (403). A servo motor (402) is fixedly connected to one side surface of the movable frame (401). The output end of the servo motor (402) is fixedly connected to one end of the drive rod (403). The arc surface of the drive rod (403) is provided with threads in opposite directions. The arc surfaces at both ends of the drive rod (403) are threaded through the movable plate (406). The support frame (408) is located on the upper surface of the movable plate (406). Both sides of the support frame (408) are provided with through holes (409). The inner wall of the through hole (409) is inserted into the... A docking plate (410) is attached, the bottom end of which is fixedly connected to the surface of a movable plate (406). A connecting plate (418) is fixedly connected to the surface of the support frame (408) at a position corresponding to the docking plate (410). A movable rod (419) slides through the surface of the connecting plate (418). A spring (420) is fitted on the arc surface of the movable rod (419). The two ends of the spring (420) are fixedly connected to the connecting plate (418) and the movable rod (419) respectively. A limiting hole (417) is opened on the side wall of the docking plate (410). The inner wall of the limiting hole (417) is inserted into one end of the movable rod (419). The upper surface of the support frame (408) is fixedly connected to the connecting plate (418). An adjustment frame (411) is fixedly connected to the inner wall of the adjustment frame (411), and a rotating shaft (412) is rotatably connected to the inner wall of the rotating shaft (412). A laser emitter (404) is fixedly connected to the upper surface of the rotating shaft (412). A spatial light modulator (405) is abutted against the surface of the moving plate (406) at the position corresponding to the laser emitter (404). Four positioning plates (407) are fixedly connected to the surface of the moving plate (406) at the position corresponding to the spatial light modulator (405). The cross-section of the four positioning plates (407) is "L" shaped. The inner wall of the positioning plate (407) is engaged with the surface of the spatial light modulator (405). The laser emitter (404) is electrically connected to the spatial light modulator (405).

2. A device for controlling the laser-assisted heating in a hot zone in relation to the pulling of a single crystal according to claim 1, characterized in that The side wall of the adjustment frame (411) is provided with a sliding groove (413), and a sliding rod (414) is slidably connected to the inner wall of the sliding groove (413). One end of the sliding rod (414) is fixedly connected to the side wall surface of the rotating shaft (412), and a fixed shaft (416) is threadedly connected to the arc surface of the sliding rod (414).

3. A device for controlling the laser-assisted heating of a hot zone in connection with the pulling of a single crystal as claimed in claim 2, characterized in that The arc surface of the slide rod (414) is fitted with a washer (415), and the surface of the washer (415) abuts against one side of the fixed shaft (416).

4. The apparatus for controlling the laser-assisted heating in connection with the single crystal pulling heat zone according to claim 1, characterized in that, An auxiliary ring (421) is rotatably connected to one end surface of the movable rod (419), and the cross section of the auxiliary ring (421) is vertical.

5. The apparatus for controlling the laser-assisted heating in connection with the single crystal pulling heat zone according to claim 1, characterized in that, The auxiliary device (5) is positioned on the upper surface of the insulated bucket (6) corresponding to the movable frame (401). The auxiliary device (5) includes a mounting plate (51). The inner wall of the mounting plate (51) is inserted into the lower surface of the movable frame (401), and the lower surface of the mounting plate (51) abuts against the upper surface of the insulated bucket (6). Mounting holes (55) are provided on both ends of the mounting plate (51), and mounting posts (56) are slidably connected to the inner walls of the mounting holes (55). The bottom end of the mounting column (56) is fixedly connected to the surface of the heat preservation bucket (6). Both sides of the mounting plate (51) are provided with inlay grooves (52). Several extrusion shafts (53) are threaded through one side of the inner wall of the inlay groove (52). One end of the extrusion shaft (53) abuts against the side wall surface of the moving frame (401). The arc surface of the mounting column (56) is threaded with a connecting shaft (54). The lower surface of the connecting shaft (54) abuts against the surface of the mounting plate (51).

6. A device for controlling the laser-assisted heating of a hot zone in connection with the pulling of a single crystal as claimed in claim 5, characterized in that The mounting hole (55) has a vertical cross-section, and the cross-sectional dimensions of the mounting hole (55) are adapted to the cross-sectional dimensions of the mounting column (56).

7. The device for laser-assisted heating with thermal field modulation in single crystal pulling according to claim 5, characterized in that, The arc surface of the connecting shaft (54) is fixedly connected with several protrusions (57), and the several protrusions (57) are evenly distributed on the surface of the connecting shaft (54). The protrusions (57) are rubber blocks.

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