Cassette cleaning fluid release device

Abstract

The embodiment of the utility model provides a kind of wafer box cleaning fluid separation device, it is related to semiconductor container processing technical field.The wafer box cleaning fluid separation device provided by the utility model includes turntable, turntable is configured as can be loaded separate box body and wafer box cover, and under the action of external force, box body and wafer box cover are rotated along its vertical center;Rotary frame is connected on turntable by mounting bracket, rotary frame is rotatably connected to mounting bracket, and rotary frame includes frame body and arc blade arranged on frame body, and frame body has at least one accommodating space for accommodating wafer box cover;Several airflow components are distributed at turntable outside, and airflow component is configured to provide cleaning airflow to turntable while driving arc blade to rotate rotary frame.The utility model has the effect of facilitating the discharge of cleaning fluid inside and outside wafer box cover.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor container processing technology, and more specifically, to a device for removing wafer cassette cleaning fluid. Background Technology

[0002] In the semiconductor manufacturing industry, wafer storage and transportation are crucial. To simplify transportation and minimize the risk of contamination, wafers are typically stored in wafer cassettes. However, after semiconductor devices undergo various processes, various contaminants are generated on the surface of the semiconductor devices, which can contaminate the wafers while they are stored in the wafer cassettes. Therefore, the wafer cassettes need to be cleaned regularly.

[0003] Currently, cleaning is performed by fixing the cassette body and wafer cassette cover to the cleaning carrier. However, due to the irregular structure inside and outside the wafer cassette cover, the cleaning fluid is not easy to drain from inside and outside the wafer cassette cover. As a result, when the wafer is stored in the wafer cassette, the cleaning fluid from the wafer cassette cover will drip onto the wafer. Utility Model Content

[0004] The purpose of this invention is to provide a wafer cassette cleaning fluid removal device, which facilitates the discharge of cleaning fluid from inside and outside the wafer cassette cover, preventing the cleaning fluid on the wafer cassette cover from contaminating the wafers inside the cassette.

[0005] The embodiments of this utility model can be implemented as follows: In a first aspect, this utility model provides a tablet cartridge cleaning fluid removal device, wherein the tablet cartridge includes a cartridge body and a cartridge cover, comprising: A turntable configured to load separate boxes and sheet covers, and to rotate the boxes and sheet covers around its vertical center under the action of external force; A rotating frame is connected to the turntable via a mounting bracket. The rotating frame is rotatably connected to the mounting bracket. The rotating frame includes a frame body and arc-shaped blades disposed on the frame body. The frame body has at least one receiving space for accommodating the disc tray cover. An airflow assembly, a plurality of which are spaced apart on the outside of the turntable, is configured to provide clean airflow toward the turntable while driving the arc-shaped blades to rotate the rotating frame.

[0006] In an optional embodiment, a plurality of the arc-shaped blades are arranged around the rotation axis of the rotating frame.

[0007] In an optional embodiment, the width of the arc-shaped blade gradually increases in the direction away from the rotation axis of the rotating frame.

[0008] In an optional embodiment, the thickness of the arc-shaped blade gradually increases in the direction away from the rotation axis of the rotating frame.

[0009] In an optional embodiment, the width of the arc-shaped blade gradually increases in the direction away from the axis of rotation.

[0010] In an optional embodiment, the rotating frame is rotatably connected to the mounting frame via a rotating shaft, and the arc-shaped blade is disposed on the end face of the rotating frame.

[0011] In an optional embodiment, the arc-shaped blade and the end face have a preset angle, which is less than 90°.

[0012] In an optional embodiment, the rotating frame is rotatably connected to the mounting frame via a rotating shaft, and the arc-shaped blade is disposed on the rotating shaft.

[0013] In an optional embodiment, one side of the rotating frame is an open side. The rotating frame has a fixed side and an open side disposed opposite to each other. The rotating frame includes a first limiting member disposed on the fixed side and a locking member disposed on the open side. The locking member can move relative to the locking member under the action of external force to have an open state and a limited state. When the locking member is in the open state, the tablet box cover can move from the open side inside and outside the receiving space. When the locking member is in the limited state, the locking member and the first limiting member are used to limit the tablet box cover in the receiving space.

[0014] In an optional embodiment, the rotating frame further includes a second limiting member, which includes a plurality of U-shaped limiting blocks located within the accommodating space, the plurality of limiting blocks jointly holding the cassette cover. In an optional embodiment, a stop bar is movably inserted through one side of the mounting bracket, and a limiting groove is formed on the rotating bracket. When the rotating bracket rotates to the point where the limiting groove is opposite to the stop bar, the stop bar can be inserted into the limiting groove to restrict the rotation of the rotating bracket.

[0015] The beneficial effects of the tablet cartridge cleaning fluid removal device provided in this embodiment of the invention include: By providing a rotatably connected rotating frame on the loading frame, the rotating frame having at least one receiving space for accommodating the tablet cassette cover, the airflow generated by the airflow assembly drives the rotating frame to rotate along the vertical center while simultaneously rotating along the horizontal center of the rotating frame. This allows the cleaning airflow to be blown onto the tablet cassette cover for drying, while the centrifugal force generated by the rotation of the rotating frame can also throw off the cleaning liquid on the tablet cassette cover, further drying the cover. On the other hand, by providing arc-shaped blades on the rotating frame, when the rotating frame rotates between two adjacent airflow assemblies, the arc-shaped blades, due to their low resistance, can better utilize inertia to maintain rotation, reducing the decrease in rotational speed. Furthermore, the streamlined design of the arc-shaped blades can reduce eddies and frictional losses, improving energy conversion efficiency, thereby effectively maintaining the continuous and stable rotation of the rotating frame. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the surface structure of the tablet box lid; Figure 2 This is a schematic diagram of the internal structure of the tablet box lid; Figure 3 This is a schematic diagram of the tablet cartridge cleaning fluid removal device provided in this embodiment from a first-view perspective; Figure 4 This is a schematic diagram of the turntable provided in this embodiment; Figure 5 This is a schematic diagram of the rotating frame provided in this embodiment.

[0018] Icons: 100-Turntable; 110-Installation station; 200-Tablet cartridge cleaning fluid removal device; 210-Loading rack; 220-Mounting rack; 221-End face; 222-Rotating shaft; 223-Stop bar; 230-Rotating frame; 231-Accommodation space; 232-Locking component; 233-Limiting groove; 234-First limiting component; 235-Second limiting component; 240-Arc-shaped blade; 250-Airflow assembly; 300-Tablet cartridge cover. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0024] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0025] In the semiconductor manufacturing industry, wafer storage and transportation are crucial steps, typically carried out using wafer cassettes (such as FOUP and FOSB). However, after undergoing different processes, semiconductor devices accumulate various contaminants on their surfaces, such as solid particles and organic matter. Wafers stored in wafer cassettes become contaminated, thus requiring regular cleaning of the cassettes.

[0026] Please refer to Figure 1 and Figure 2Currently, the wafer cassette cover 300 has irregular shapes both inside and out. After the cleaning solution enters the cover 300, these irregular shapes hinder its drainage from the side windows. Consequently, when wafers are subsequently stored in the cassette, residual cleaning solution from the cover 300 drips onto the wafers, causing wafer contamination.

[0027] For the above issues, please refer to Figures 3-5 This utility model provides a tablet box cleaning fluid removal device 200, which is applied to the tablet box cleaning and drying process for cleaning and drying tablet boxes. It includes a turntable 100, a rotating frame 230 connected to the turntable 100 via a mounting bracket 220, and an airflow assembly 250. The circumferential edge of the turntable 100 has multiple equally spaced mounting stations 110, and a loading rack 210 is detachably installed on the mounting station 110 for loading separate box bodies and tablet box covers 300. The turntable 100 can rotate under the drive of a motor to drive the loading rack 210 and the inner box of the loading rack 210 and the tablet cover 300 to rotate; the rotating frame 230 is rotatably connected to the mounting frame 220. The rotating frame 230 includes a frame body and an arc-shaped blade 240 disposed on the frame body. The frame body has at least one receiving space 231 for accommodating the tablet cover 300. The rotating frame 230 can rotate along the vertical center of the turntable 100 and also rotate along its horizontal center. Several airflow components 250 are spaced apart on the outside of the turntable 100. The airflow components 250 are configured to provide clean airflow toward the turntable 100 while driving the arc-shaped blade 240 to rotate the rotating frame 230.

[0028] With the above configuration, the airflow generated by the airflow assembly 250 drives the rotating frame 230 to rotate via the arc-shaped blades 240 on the rotating frame 230. This, in turn, causes the tablet cassette cover 300 inside the rotating frame 230 to rotate. The tablet cassette cover 300 provides centrifugal force, causing the cleaning fluid to separate from it. Specifically, when the loading frame 210 rotates around its vertical central axis under the drive of the turntable 100, the resulting centrifugal force causes the cleaning fluid inside the tablet cassette cover 300 to gather at the edge of the cavity inside the cover, and some of the cleaning fluid is thrown out through the windows on both sides of the cover. Combined with the rotation of the tablet cassette cover 300 on the rotating frame 230, this increases the opportunity for the cleaning fluid to move in different directions within the cover, making it easier for the cleaning fluid inside the cover to be thrown out through the windows, thus achieving the effect of detaching the cleaning fluid from the cover.

[0029] In this embodiment, since the airflow components 250 are spaced apart on the outside of the turntable 100, the airflow used by the airflow components 250 to drive the rotation of the rotating frame 230 is intermittent. When the rotating frame 230 moves with the loading frame 210 between two adjacent airflow components 250, the airflow decreases, causing the rotation speed of the rotating frame 230 to drop, affecting the removal effect of the cleaning fluid on the cassette cover 300. Therefore, in this embodiment, by providing arc-shaped blades 240 on the frame, the airflow blown by the airflow components 250 drives the arc-shaped blades 240 to rotate the rotating frame 230. When the rotating frame 230 moves between two adjacent airflow components 250, the arc-shaped blades 240 have low resistance, can better utilize inertia to maintain rotation, reduce the decrease in rotation speed, and the streamlined design of the arc-shaped blades 240 can reduce the loss of eddies and friction, thereby effectively maintaining the continuous and stable rotation of the rotating frame 230 under intermittent airflow conditions.

[0030] It should be noted that in this embodiment, the airflow assembly 250 blows out clean dry air (CDA).

[0031] Please refer to Figure 5 In some optional embodiments, to facilitate the rotatable mounting of the rotating frame 230 onto the mounting bracket 220, a rotating shaft 222 is connected to each of the two end faces 221 of the rotating frame 230, and the rotating shafts 222 at both ends of the rotating frame 230 are rotatably connected to the mounting bracket 220. To reduce the frictional resistance experienced by the rotating frame 230, bearings may also be installed between the rotating shafts 222 and the mounting bracket 220.

[0032] Please refer to Figure 5 In some optional embodiments, the arc-shaped blades 240 are disposed on the end faces 221 of the rotating frame 230, and multiple arc-shaped blades 240 are arranged around the rotation axis of the rotating frame 230, that is, multiple arc-shaped blades 240 are arranged around the rotating shaft 222. When the airflow drives the arc-shaped blades 240 to rotate, it directly drives the rotating frame 230 to rotate. In other optional embodiments, the arc-shaped blades 240 may also be arranged around the rotating shaft 222, and when the airflow drives the arc-shaped blades 240 to rotate, it drives the rotating frame 230 to rotate through the rotating shaft 222.

[0033] In this embodiment, the arc blade 240 is set to be arc-shaped, and there is a preset angle between the blade surface and the end face 221 of the arc blade 240. The preset angle is less than 90°, so that the arc blade 240 has an inclined angle relative to the end face 221, thereby optimizing the smoothness of the arc blade 240, reducing eddies and energy flow, and improving the efficiency of component and wind pressure.

[0034] In this embodiment, the width of the arc-shaped blade 240 gradually increases in the direction away from the rotating shaft 222, that is, the end of the arc-shaped blade 240 closer to the rotating shaft 222 is narrower, and the end of the arc-shaped blade 240 further away from the rotating shaft 222 is wider. As a result, when the airflow assembly 250 outputs airflow toward the loading frame 210, the end of the arc-shaped blade 240 has a larger frontal area, which can more effectively capture and utilize the airflow.

[0035] Furthermore, the thickness of the curved blade 240 gradually increases in the direction away from the rotating shaft 222, that is, the end of the curved blade 240 closer to the rotating shaft 222 is thinner, and the end of the curved blade 240 farther from the rotating shaft 222 is thicker. This makes the center of gravity of the curved blade 240 farther away from the rotating shaft 222. When the airflow to the rotating frame 230 decreases, the inertia of the curved blade 240 can keep the rotating frame 230 rotating, delaying the decrease in the rotation speed of the rotating frame 230 until the turntable 100 rotates the loading frame 210 to the vicinity of the next airflow assembly 250. At this time, the airflow assembly 250 once again increases the rotation speed of the curved blade 240, preventing the rotation speed of the rotating frame 230 from being too low. Please refer to Figure 5 In some optional embodiments, to facilitate placing the tablet cassette cover 300 into the receiving space 231 and removing the tablet cassette from the receiving space 231, the rotating frame 230 is configured with a fixed side and an open side arranged opposite to each other. The rotating frame 230 also includes a first limiting member 234 disposed on the fixed side and a locking member 232 disposed on the open side. The locking member 232 can move relative to the first limiting member 234 under external force to have an open state and a limited state. When the locking member 232 is in the open state, the tablet cassette cover 300 can move inside and outside the receiving space 231 from the open side. When the locking member 232 is in the limited state, the locking member 232 and the first limiting member 234 are used to limit the tablet cassette cover 300 within the receiving space 231, preventing the tablet cassette cover 300 from falling out of the receiving space 231. The locking member 232 can be a baffle, limiting rod, grid, or other structure movably disposed on the open side of the rotating frame 230.

[0036] Furthermore, the rotating frame 230 also includes a second limiting member 235, which includes multiple U-shaped limiting blocks located within the receiving space, and the multiple limiting blocks together hold the disc box cover 300.

[0037] During the use of the loading rack 210, the rotating rack 230 is in a free-rotating state, making it inconvenient for operators to insert or remove the tablet cassette cover 300 from the receiving space 231. Therefore, please refer to... Figure 5In this embodiment, a stop bar 223 is movably inserted through one of the mounting brackets 220, and a limiting groove 233 is formed on the rotating bracket 230. When the rotating bracket 230 rotates to the point where the limiting groove 233 is opposite to the stop bar 223, the stop bar 223 can be inserted into the limiting groove 233, thereby fixing the rotating bracket 230 and restricting its rotation, which facilitates the removal and placement of the disc tray cover 300 inside the rotating bracket 230.

[0038] In summary, the implementation principle of the tablet cartridge cleaning fluid separation device provided by this utility model is as follows: the airflow generated by the airflow assembly 250 drives the rotating frame 230 to rotate through the arc-shaped blades 240 on the rotating frame 230, thereby causing the tablet cartridge cover 300 inside the rotating frame 230 to rotate. The tablet cartridge cover 300 provides centrifugal force, causing the cleaning fluid to separate from the tablet cartridge cover 300. The arc-shaped blades 240 ensure that the rotating frame 230 can effectively maintain continuous and stable rotation under intermittent airflow conditions, thereby ensuring the separation effect of cleaning fluid inside and outside the tablet cartridge cover 300.

[0039] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A cassette cleaning solution release device, said cassette comprising a cassette body and a cassette cover, characterized by, include: A turntable, on which multiple loading racks are detachably mounted, the loading racks being configured to load separate boxes and tablet lids, the turntable being able to rotate the boxes and tablet lids around its vertical center under the action of external force; A rotating frame is connected to the turntable via a mounting bracket. The rotating frame is rotatably connected to the mounting bracket. The rotating frame includes a frame body and arc-shaped blades disposed on the frame body. The frame body has at least one receiving space for accommodating the disc tray cover. An airflow assembly, a plurality of which are spaced apart on the outside of the turntable, is configured to provide clean airflow toward the turntable while driving the arc-shaped blades to rotate the rotating frame.

2. The tablet cartridge cleaning fluid removal device according to claim 1, characterized in that, Several of the aforementioned arc-shaped blades are arranged around the rotation axis of the rotating frame.

3. The tablet cartridge cleaning fluid removal device according to claim 2, characterized in that, The width of the arc-shaped blade gradually increases in the direction away from the rotation axis of the rotating frame.

4. The tablet cartridge cleaning fluid removal device according to claim 2, characterized in that, The thickness of the arc-shaped blade gradually increases in the direction away from the rotation axis of the rotating frame.

5. The tablet cartridge cleaning fluid removal device according to claim 1, characterized in that, The rotating frame is rotatably connected to the mounting frame via a rotating shaft, and the arc-shaped blade is disposed on the end face of the rotating frame.

6. The tablet cartridge cleaning fluid removal device according to claim 5, characterized in that, The arc-shaped blade and the end face have a preset angle, which is less than 90°.

7. The tablet cartridge cleaning fluid removal device according to claim 1, characterized in that, The rotating frame is rotatably connected to the mounting frame via a rotating shaft, and the arc-shaped blade is disposed on the rotating shaft.

8. The tablet cartridge cleaning fluid removal device according to claim 1, characterized in that, The rotating frame has a fixed side and an open side arranged opposite to each other. The rotating frame includes a first limiting member disposed on the fixed side and a locking member disposed on the open side. The locking member can move relative to the locking member under the action of external force to have an open state and a limited state. When the locking member is in the open state, the tablet box cover can move from the open side inside and outside the receiving space. When the locking member is in the limited state, the locking member and the first limiting member are used to limit the tablet box cover in the receiving space.

9. The tablet cartridge cleaning fluid removal device according to claim 8, characterized in that, The rotating frame also includes a second limiting member, which includes a plurality of U-shaped limiting blocks located within the accommodating space, and the plurality of limiting blocks together hold the cassette cover.

10. The tablet cartridge cleaning fluid removal device according to claim 1, characterized in that, A stop bar is movably inserted through one side of the mounting bracket, and a limiting groove is provided on the rotating bracket. When the rotating bracket rotates to the point where the limiting groove is opposite to the stop bar, the stop bar can be inserted into the limiting groove to restrict the rotation of the rotating bracket.

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