A refining device for high-purity silicon
Patent Information
- Application Number
- CN202521986504.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-16
- Publication Date
- 2026-08-18
- Estimated Expiration
- 2035-09-16
AI Technical Summary
[0003]本实用新型的目的在于提供一种高纯硅的精炼装置,旨在解决现有技术中无法根据坩埚大小对输出气体范围以及高度进行调节,导致气体大量外泄至坩埚以外地方,增加了气体的浪费且降低了气体与材料完全接触的均匀性的问题
1)通过设置的通气管、第一外罩、第二外罩和第三外罩从上至下依次滑动的作用,使得通气管带动第一外罩、第二外罩和第三外罩在向下移动时可根据卡杆伸出的长度,阻止对应位置外罩向下移动,使得与坩埚口径相同大小的外罩可继续向下移动至坩埚上方,罩住坩埚再进行充气,减少气体大量外泄的同时提高了气体与材料接触的效果。
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Figure CN224650262U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of high-purity silicon refining technology, specifically relating to a high-purity silicon refining apparatus. Background Technology
[0002] The core function of high-purity silicon refining equipment is to purify industrial-grade crude silicon (typically 98%-99% purity) to electronic-grade or solar-grade high-purity silicon to meet the extremely high purity requirements of silicon materials in high-end fields such as semiconductor chips and photovoltaic cells. This requires processing through refining equipment. Currently, refining equipment mainly suffers from the following consensus-based shortcomings: In traditional equipment for refining high-purity silicon, the required gas needs to be introduced into the melting furnace. Since the amount of raw material to be purified may vary depending on the number of refining operations, crucibles of appropriate size and model are replaced according to the amount of raw material. However, when introducing gas, traditional equipment can only introduce gas into the entire melting furnace and cannot adjust the output gas range and height according to the crucible size. This results in a large amount of gas leaking out of the crucible, increasing gas waste and reducing the uniformity of complete contact between the gas and the material. Utility Model Content
[0003] The purpose of this invention is to provide a refining device for high-purity silicon, which aims to solve the problem in the prior art that the output gas range and height cannot be adjusted according to the crucible size, resulting in a large amount of gas leaking outside the crucible, increasing gas waste and reducing the uniformity of complete contact between gas and material.
[0004] To achieve the above objectives, this utility model provides the following technical solution: A high-purity silicon refining apparatus includes a melting furnace. A base plate is fixedly installed on the inner wall of the bottom end of the melting furnace, and a crucible is placed on the top of the base plate. A vent pipe is slidably connected to the inner wall of the top end of the melting furnace. A first outer cover is slidably connected to the outer side of the bottom end of the vent pipe. A second outer cover is slidably connected to the outer side of the first outer cover. A third outer cover is slidably connected to the outer side of the second outer cover. Slots are provided on both sides of the bottom of the first, second, and third outer covers. Three outer tubes are inserted and connected to the inner wall of the melting furnace, and locking rods are slidably connected to the inner side walls of the three outer tubes.
[0005] In a preferred embodiment of this invention, an adjusting screw is rotatably connected to the inner wall of the outer tube, and the outer side of the adjusting screw is threadedly connected to the inner wall of one end of the locking rod.
[0006] In a preferred embodiment of this invention, a gear is fixedly mounted on one end of the adjusting screw, an outer ring is fixedly mounted on the outer side of the smelting furnace, and a toothed ring is rotatably connected to the bottom inner wall of the outer ring, with the gear meshing with the toothed ring.
[0007] In a preferred embodiment of this utility model, a lifting plate is fixedly installed on the outer side of the top end of the vent pipe, and a lifting screw is threadedly connected to the inner wall of one end of the lifting plate. The bottom end of the lifting screw is rotatably connected to the top end of the smelting furnace.
[0008] In a preferred embodiment of this invention, a telescopic tube is fixedly installed at the top end of the vent pipe, and a connecting tube is fixedly installed at the top end of the telescopic tube.
[0009] As a preferred embodiment of this invention, a furnace door is rotatably connected to the outer side of the smelting furnace.
[0010] Compared with the prior art, the beneficial effects of this utility model are: 1) By using the vent pipe, the first outer cover, the second outer cover and the third outer cover to slide sequentially from top to bottom, the vent pipe can move the first outer cover, the second outer cover and the third outer cover downwards. According to the length of the extended rod, the corresponding outer cover can be stopped from moving downwards. This allows the outer cover with the same size as the crucible opening to continue to move downwards to the top of the crucible, cover the crucible and then fill it with gas. This reduces the large amount of gas leakage and improves the contact effect between the gas and the material.
[0011] 2) By rotating the adjusting screw inside the outer tube, the locking rod is easier to operate from the outside, allowing it to slide on the outer tube. Furthermore, by rotating the toothed ring on the outer ring, the three locking rods can slide on the outer tube simultaneously, making it easier to prevent the first outer cover, the second outer cover, or the third outer cover from moving downwards, and to lift the first outer cover, the second outer cover, or the third outer cover to improve stability. Attached Figure Description
[0012] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the internal structure of the smelting furnace of this utility model; Figure 3 This is a schematic diagram of the internal structure of the outer tube of this utility model; Figure 4 This is a schematic diagram of the internal structure of the first outer cover of this utility model.
[0013] In the diagram: 1. Smelting furnace; 2. Base plate; 3. Crucible; 4. Vent pipe; 41. First outer cover; 42. Second outer cover; 43. Third outer cover; 44. Slot; 5. Outer pipe; 51. Locking rod; 52. Adjusting screw; 53. Gear; 54. Outer ring; 55. Gear ring; 6. Lifting plate; 61. Lifting screw; 7. Telescopic pipe; 71. Connecting pipe; 8. Furnace door. Detailed Implementation
[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0015] Please see Figure 1-4 The present invention provides the following technical solution: a refining device for high-purity silicon, including a melting furnace 1, a bottom plate 2 fixedly installed on the inner wall of the bottom end of the melting furnace 1, a crucible 3 placed on the top of the bottom plate 2, a vent pipe 4 slidably connected to the inner wall of the top end of the melting furnace 1, a first outer cover 41 slidably connected to the outer side of the bottom end of the vent pipe 4, a second outer cover 42 slidably connected to the outer side of the first outer cover 41, and a third outer cover 43 slidably connected to the outer side of the second outer cover 42. The bottom sides of the first outer cover 41, the second outer cover 42 and the third outer cover 43 are provided with slots 44. Three outer tubes 5 are inserted and connected to the inner wall of the melting furnace 1, and a clamping rod 51 is slidably connected to the inner side wall of the three outer tubes 5.
[0016] In practical use, a crucible 3 of corresponding size is selected according to the amount of raw material for high-purity silicon refining. The crucible 3 and the raw material are then placed on the bottom plate 2 inside the melting furnace 1 for processing. When gas needs to be added, it can be moved downward through the vent pipe 4. The extension length of the clamping rod 51 is adjusted according to the diameter of the crucible 3 so that the clamping rod 51 can be inserted into the clamping groove 44. All outer covers larger than the diameter of the crucible 3 are blocked at the position of the clamping rod 51, preventing it from moving downward and reducing the occupation of the heating space outside the crucible 3 by the excess outer cover. The vent pipe 4 continues to drive the outer cover downward. When the outer cover of the corresponding size to the crucible 3 is in contact with the upper part of the diameter of the crucible 3, gas can be filled into the crucible 3 for further refining of high-purity silicon.
[0017] Preferably, an adjusting screw 52 is rotatably connected to the inner wall of the outer tube 5, and the outer side of the adjusting screw 52 is threadedly connected to the inner wall of one end of the locking rod 51.
[0018] In practical use, when it is necessary for the locking rod 51 to block the third outer cover 43, or to block the third outer cover 43 and the second outer cover 42 together, or to block the third outer cover 43, the second outer cover 42 and the first outer cover 41 together, the locking rod 51 can slide inside the outer tube 5 by adjusting the rotation of the screw 52 inside the outer tube 5, and can be adjusted according to the specific required length.
[0019] Preferably, a gear 53 is fixedly installed at one end of the adjusting screw 52, an outer ring 54 is fixedly installed on the outside of the smelting furnace 1, and a toothed ring 55 is rotatably connected to the bottom inner wall of the outer ring 54, with the gear 53 meshing with the toothed ring 55.
[0020] In practical use, when one of the adjusting screws 52 is rotated, the adjusting screw 52 drives the gear 53 to rotate. Then, through the action of the gear 53 on the gear ring 55, the gear ring 55 can rotate on the outer ring 54 to adjust the rotation of the other two adjusting screws 52. Thus, all three adjusting screws 52 can rotate at the same time, causing the three locking rods 51 to move into the melting furnace 1 at the same time.
[0021] Preferably, a lifting plate 6 is fixedly installed on the outer side of the top end of the vent pipe 4, and a lifting screw 61 is threadedly connected to the inner wall of one end of the lifting plate 6. The bottom end of the lifting screw 61 is rotatably connected to the top end of the smelting furnace 1.
[0022] In practical use, the lifting plate 6 can be adjusted in height by rotating the lifting screw 61 at the top of the smelting furnace 1, thereby driving the ventilation pipe 4 to slide in height adjustment.
[0023] Preferably, a telescopic tube 7 is fixedly installed at the top end of the vent pipe 4, and a connecting tube 71 is fixedly installed at the top end of the telescopic tube 7.
[0024] In practical use, the vent pipe 4 can slide up and down inside the melting furnace 1 according to the height of the crucible 3, while the connecting pipe 71 can be installed on the equipment used to store the required gas. When the vent pipe 4 slides, it can be extended and connected between the vent pipe 4 and the connecting pipe 71 through the telescopic pipe 7.
[0025] Preferably, a furnace door 8 is rotatably connected to the outside of the smelting furnace 1.
[0026] In practical use, the furnace door 8 is used to open or close the smelting furnace 1 and to place or remove the crucible 3.
[0027] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A refining apparatus for high-purity silicon, comprising a melting furnace (1), characterized in that, A base plate (2) is fixedly installed on the inner wall of the bottom end of the smelting furnace (1). A crucible (3) is placed on the top of the base plate (2). A vent pipe (4) is slidably connected to the inner wall of the top end of the smelting furnace (1). A first outer cover (41) is slidably connected to the outer side of the bottom end of the vent pipe (4). A second outer cover (42) is slidably connected to the outer side of the first outer cover (41). A third outer cover (43) is slidably connected to the outer side of the second outer cover (42). A slot (44) is provided on both sides of the bottom of the first outer cover (41), the second outer cover (42) and the third outer cover (43). Three outer tubes (5) are inserted and connected to the inner wall of the smelting furnace (1). A clamping rod (51) is slidably connected to the inner side wall of the three outer tubes (5).
2. The refining apparatus for high-purity silicon according to claim 1, characterized in that: An adjusting screw (52) is rotatably connected to the inner wall of the outer tube (5), and the outer side of the adjusting screw (52) is threadedly connected to the inner wall of one end of the clamp (51).
3. The refining apparatus for high-purity silicon according to claim 2, characterized in that: A gear (53) is fixedly installed at one end of the adjusting screw (52), and an outer ring (54) is fixedly installed on the outside of the smelting furnace (1). A toothed ring (55) is rotatably connected to the bottom inner wall of the outer ring (54), and the gear (53) meshes with the toothed ring (55).
4. The refining apparatus for high-purity silicon according to claim 1, characterized in that: A lifting plate (6) is fixedly installed on the outer side of the top end of the ventilation pipe (4). A lifting screw (61) is threadedly connected to the inner wall of one end of the lifting plate (6). The bottom end of the lifting screw (61) is rotatably connected to the top end of the smelting furnace (1).
5. The refining apparatus for high-purity silicon according to claim 1, characterized in that: A telescopic tube (7) is fixedly installed at the top end of the vent pipe (4), and a connecting tube (71) is fixedly installed at the top end of the telescopic tube (7).
6. The refining apparatus for high-purity silicon according to claim 1, characterized in that: The furnace door (8) is rotatably connected to the outside of the smelting furnace (1).