Rotary movement device for thin film thickness measurement

Abstract

The utility model discloses a kind of rotary moving devices for film thickness measurement, including bottom plate, moving plate, rotating bearing, carousel, negative pressure air extraction component and measuring instrument fixed bracket;Strip assembly hole is opened in bottom plate;Moving plate is slidably connected on bottom plate, and the center place is opened with the through hole that strip assembly hole intercommunication;Rotating bearing is rotatably installed on the upper plate surface of moving plate;Carousel is detachably connected at rotating bearing top, and the center place of carousel is opened with the air extraction hole that bearing hole corresponds through and through;Negative pressure air extraction component is assembled in strip assembly hole, and its suction end is communicated air extraction hole by penetrating through hole and bearing hole to be measured piece suction on the upper surface of carousel by negative pressure;Measuring instrument fixed bracket is fixed in the side of bottom plate along strip assembly hole length direction, and its top end is equipped with film thickness detector.The utility model discloses a kind of rotary moving devices for film thickness measurement, and it is more convenient to use with small floor space.

Description

Technical Field

[0001] This utility model relates to the field of thin film thickness measurement equipment technology, and more specifically to a rotary moving device for measuring thin film thickness. Background Technology

[0002] Thin film thickness gauges are mainly used to measure the thickness of transparent films. They utilize the principle of light wave interference to infer the optical path difference of the film and thus determine its thickness by observing changes in interference fringes. The principle involves irradiating the film with a probe beam, part of which is reflected on the surface of the film, and part of which passes through the film layer and is reflected back from the bottom surface. When these two beams meet, they will produce an interference phenomenon. By analyzing the interference pattern, the accurate thickness of the film can be obtained. By measuring the thickness of the film at different points, it can be determined whether the film meets the specifications.

[0003] When measuring the thickness of a thin film at multiple points on the surface of a sample, it is usually placed on an XY manual moving platform equipped with a thin film thickness measuring instrument. The X-axis and Y-axis moving mechanisms are manually operated to move the sample so that different points on its surface are aligned with the thin film thickness measuring instrument to complete the thickness measurement. In order to meet the travel requirements of the X-axis and Y-axis moving mechanisms, the commonly used XY manual moving platforms are large in size and occupy a large area, which is inconvenient in actual use.

[0004] Therefore, when measuring the thickness of a thin film deposited on the surface of a sample, it is an urgent problem for those skilled in the art to solve the problem of how to provide a device that is reasonably designed, easy to operate, occupies a small area, and can move and rotate the sample to align different points of the thin film on its surface with the film thickness measuring instrument. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a rotary moving device for film thickness measurement, which solves the technical problem that the current XY manual moving platform for film thickness measurement occupies a large area and is inconvenient to use.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A rotary moving device for measuring film thickness includes a base plate, a moving plate, a rotating bearing, a turntable, a negative pressure suction assembly, and a measuring instrument mounting frame. The base plate has a strip-shaped mounting hole. The moving plate is slidably connected to the base plate along the length of the strip-shaped mounting hole, and has a through hole at its center communicating with the strip-shaped mounting hole. The rotating bearing is rotatably mounted on the upper surface of the moving plate, and its bearing hole is vertically connected to the through hole. The turntable is detachably connected to the top of the rotating bearing, and has a suction hole at its center corresponding to and communicating with the bearing hole. The negative pressure suction assembly is assembled in the strip-shaped mounting hole, and its suction end passes through the through hole and the bearing hole, communicating with the suction hole to negatively adsorb the workpiece to be measured onto the upper surface of the turntable. The measuring instrument mounting frame is fixed to one side of the base plate along the length of the strip-shaped mounting hole, and a film thickness measuring instrument for measuring the thickness of the film on the surface of the workpiece is mounted on its top.

[0008] Through the above technical solution, this utility model discloses a rotary moving device for film thickness measurement. A moving plate is slidably connected to a base plate, and a turntable is rotatably connected to the moving plate via a rotating bearing. Moving the moving plate and rotating the turntable can drive the workpiece under test to rotate and move, thereby aligning different measurement points of the film on the surface of the workpiece with the film thickness detector for thickness measurement. This utility model's rotary moving device for film thickness measurement improves the X-axis and Y-axis moving mechanisms in the XY manual moving platform into a unidirectional moving mechanism and a rotating mechanism. While meeting the requirements for measuring the thickness of the film at different points on the surface of the workpiece, it has a smaller footprint and is more convenient to use.

[0009] Preferably, a pusher is mounted on the movable plate; a turner is mounted on the circumferential end of the turntable.

[0010] The beneficial effect of adopting the above technical solution is that the movable plate can be pushed to slide on the base plate by the pusher, and the turntable can be rotated more conveniently by the turntable by the rotary tool.

[0011] Preferably, the base plate has two parallel sliding grooves, which are arranged at intervals on both sides of the strip-shaped assembly hole and are parallel to it. Each of the two sliding grooves has a slide rail arranged parallel to the strip-shaped assembly hole. The lower surface of the moving plate is slidably connected to the slide rail by a slider.

[0012] The beneficial effect of adopting the above technical solution is that the moving plate is slidably connected in the slide groove by the slider and the slide rail, making its sliding on the base plate more stable.

[0013] Preferably, the rotating bearing includes a fixed inner ring and a rotating outer ring; the fixed inner ring is fixed to the upper surface of the movable plate corresponding to the through hole, and its bearing hole is vertically connected to the through hole; the rotating outer ring is rotatably connected to the outer periphery of the fixed inner ring, and the turntable is detachably connected to the top of the rotating outer ring.

[0014] The beneficial effect of adopting the above technical solution is that the turntable is rotatably connected to the moving plate through a rotating bearing, making its rotation more stable and its rotational accuracy higher.

[0015] Preferably, the negative pressure suction assembly includes an air nozzle, an air inlet hose, a connecting hose, and a control switch; the air nozzle is fixed in the through hole, and its suction end extends upward through the bearing hole and communicates with the suction port; the air inlet hose is assembled in the strip-shaped assembly hole, and its first end is connected to and communicates with the air outlet end of the air nozzle; one end of the connecting hose is connected to and communicates with the second end of the air inlet hose, and the other end can be connected to a negative pressure device; the control switch is installed on the connecting hose to control the flow of air in the connecting hose.

[0016] The beneficial effect of adopting the above technical solution is that opening the control switch puts the inner cavity of the connecting hose in a passable state, which allows the air nozzle to suction the test piece on the turntable with negative pressure to the upper surface of the turntable, preventing the test piece from sliding and misaligning during the measurement of the surface film thickness, improving measurement accuracy, and ensuring the accuracy of the measurement results.

[0017] Preferably, the air intake hose is a spiral hose.

[0018] The beneficial effect of adopting the above technical solution is that the spirally arranged air intake hose can extend or retract as the air nozzle moves.

[0019] Preferably, the edge of the base plate is machined with scale lines arranged along the length direction of the strip-shaped assembly hole.

[0020] The beneficial effect of adopting the above technical solution is that the moving distance of the moving plate can be known through the scale lines.

[0021] Preferably, the upper surface of the turntable is machined with multiple positioning grooves for positioning the test piece, and the multiple positioning grooves are all annular and arranged with the same center.

[0022] Preferably, the bottom of the base plate is equipped with multiple support columns.

[0023] Preferably, the air extraction holes are arranged in a cross-shaped array. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the overall structure of a rotating moving device for measuring film thickness according to the present invention.

[0026] Figure 2 This is a schematic diagram showing the turntable and rotating bearing after disassembly in this utility model;

[0027] Figure 3 This is a top view of the movable plate in this utility model;

[0028] Figure 4 for Figure 3 Cross-sectional view of the moving plate along direction AA;

[0029] Figure 5 This is a schematic diagram of the base plate after it has been inverted in this utility model.

[0030] Among them: 100-slide rail, 200-slider, 1-base plate, 2-moving plate, 3-hand push part, 4-rotating bearing, 5-turntable, 6-hand rotating part, 7-negative pressure suction assembly, 8-measuring instrument fixing frame, 9-film thickness detector, 10-elastic limit part, 11-strip assembly hole, 12-slide groove, 13-scale line, 14-support column, 21-through hole, 22-clamping hole, 41-fixed inner ring, 42-rotating outer ring, 51-suction hole, 52-positioning line, 53-connecting ring, 71-air nozzle, 72-air inlet hose, 73-connecting hose, 74-control switch, 531-clamping groove. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0033] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] See appendix Figure 1 To be continued Figure 5 According to this utility model, a rotary moving device for measuring film thickness includes a base plate 1, a moving plate 2, a rotating bearing 4, a turntable 5, a negative pressure suction assembly 7, and a measuring instrument mounting frame 8. The base plate 1 has a strip-shaped assembly hole 11. The moving plate 2 is slidably connected to the base plate 1 along the length of the strip-shaped assembly hole 11, and has a through hole 21 at its center communicating with the strip-shaped assembly hole 11. The rotating bearing 4 is rotatably mounted on the upper surface of the moving plate 2, and its bearing hole is vertically connected to the through hole 21. The turntable 5 is detachably connected to the top of the rotating bearing 4, and the center of the turntable 5 has an air extraction hole 51 that corresponds to and passes through the bearing hole; the negative pressure air extraction component 7 is assembled in the strip-shaped assembly hole 11, and its air extraction end passes through the through hole 21 and the bearing hole to connect the air extraction hole 51 so as to negatively adsorb the test piece onto the upper surface of the turntable 5; the measuring instrument fixing frame 8 is fixed on one side of the base plate 1 along the length direction of the strip-shaped assembly hole 11, and a film thickness measuring instrument 9 for measuring the thickness of the film on the surface of the test piece is installed at its top.

[0035] Specifically, the edge of the upper surface of the base plate 1 is machined with scale lines 13 arranged along the length of the strip-shaped assembly hole 11.

[0036] Specifically, the upper surface of the turntable 5 is machined with multiple positioning grooves 52 for positioning the workpiece to be tested. All positioning grooves 52 are annular and arranged with the same center.

[0037] Specifically, the air extraction holes 51 are arranged in a cross-shaped array.

[0038] In some specific examples, a pusher 3 is mounted on the movable plate 2; a rotary knob 6 is mounted on the circumferential end of the turntable 5.

[0039] Pushing the pusher 3 allows the movable plate 2 to slide along the length of the strip-shaped assembly hole 11 on the base plate 1, and rotating the turntable 6 allows the turntable 5 to rotate on the movable plate 2.

[0040] In some other specific examples, the base plate 1 has two parallel sliding grooves 12, which are arranged at intervals on both sides of the strip-shaped assembly hole 11 and are parallel to it. Each of the two sliding grooves 12 has a slide rail 100 arranged parallel to the strip-shaped assembly hole 11. The lower plate surface of the movable plate 2 is slidably connected to the slide rail 100 through the slider 200.

[0041] The movable plate 2 is slidably connected to the slide rail 100 in the slide groove 12 via the slider 200, making the movable plate 2 slide more smoothly and steadily.

[0042] In some specific examples, the rotating bearing 4 includes a fixed inner ring 41 and a rotating outer ring 42; the fixed inner ring 41 is fixed to the upper surface of the movable plate 2 corresponding to the through hole 21, and its bearing hole is vertically connected to the through hole 21; the rotating outer ring 42 is rotatably connected to the outer periphery of the fixed inner ring 41, and the turntable 5 is detachably connected to the top of the rotating outer ring 42.

[0043] The turntable 5 is detachably connected to the rotating outer ring 42, so that the turntable 5 can rotate along with the rotation of the rotating outer ring 42.

[0044] In some specific examples, a rotary moving device for film thickness measurement also includes an elastic limiting member 10, which includes an elastic limiting member one and an elastic limiting member two. The elastic limiting member one and the elastic limiting member two have the same structure and both include a spring sleeve, a spring and a ball. The two ends of the spring sleeve are closed and one end is provided with a ball hole. The diameter of the ball hole is smaller than the diameter of the ball. The spring and the ball are both placed inside the spring sleeve. The spring is in a compressed state and one end abuts against the inner bottom wall of the spring sleeve, while the other end abuts against the ball so that a part of the ball protrudes out of the ball hole.

[0045] Among them, the first elastic limiting member is installed on the base plate 1 and arranged near the slide groove 12. The moving plate 2 has multiple evenly arranged snap-fit ​​holes 22 on both sides along the length direction. The snap-fit ​​holes 22 are elastically snapped with the part of the ball protruding from the spring sleeve in the first elastic limiting member. The second elastic limiting member is installed on the moving plate 2 and arranged near the turntable 5. The bottom of the turntable 5 is fixed with a connecting ring 53. The connecting ring 53 is sleeved on the outer circumference of the rotating outer ring 42, and multiple evenly arranged snap-fit ​​grooves 531 are opened on its outer side wall. The snap-fit ​​grooves 531 are elastically snapped with the part of the ball protruding from the spring sleeve in the second elastic limiting member.

[0046] Elastic limiting component one is used to temporarily position the moving plate 2, and elastic limiting component two is used to temporarily position the turntable 5. Through the temporary positioning of the moving plate 2 and the turntable 5, the film thickness measuring instrument 9 completes the thickness measurement of a certain point on the surface of the workpiece.

[0047] In some embodiments, the negative pressure suction assembly 7 includes a nozzle 71, an inlet hose 72, a connecting hose 73, and a control switch 74; the nozzle 71 is fixed in the through hole 21, and its suction end passes through the bearing hole and communicates with the suction hole 51; the inlet hose 72 is assembled in the strip-shaped assembly hole 11, and its first end is connected to and communicates with the outlet end of the nozzle 71; one end of the connecting hose 73 is connected to and communicates with the second end of the inlet hose 72, and the other end can be connected to a negative pressure device; the control switch 74 is installed on the connecting hose 73 to control the flow of air in the connecting hose 73.

[0048] Without affecting the rotation of the outer ring 42, the suction end of the nozzle 71 passes upward through the bearing hole of the fixed inner ring 41 and connects to the suction hole 51. The outlet end of the nozzle 71 is connected to the external negative pressure device through the air inlet hose 72 and the connecting hose 73. Turning on the control switch 74 installed on the connecting hose 73 can stably adsorb the test piece onto the upper surface of the turntable 5.

[0049] Specifically, the intake hose 72 is a spiral hose.

[0050] Specifically, multiple support columns 14 are installed at the bottom of the base plate 1.

[0051] In use, the device works as follows: First, the negative pressure suction assembly 7 uses negative pressure to adsorb the test piece onto the upper surface of the turntable 5, keeping it stable. Then, the hand-operated component 6 is turned to rotate the turntable 5. When the first locking groove 531 on the bottom connecting ring 53 of the turntable 5 elastically engages with the second elastic limiter, the hand-operated component 6 is no longer turned. The pusher 3 is pushed to make the moving plate 2 slide on the base plate 1, and the locking holes 22 are sequentially elastically engaged with the first elastic limiter. The film thickness detector 9 is used to perform a series of linear thickness measurements on the surface of the test piece. Next, the hand-operated component 6 is rotated to make the other locking grooves 531 on the bottom connecting ring 53 of the turntable 5 elastically engage with the second elastic limiter. The pusher 3 is pushed repeatedly, and the film thickness detector 9 is used to perform multiple sets of other linear thickness measurements on the surface of the test piece. Finally, after the thickness measurement of the film on the surface of the test piece is completed, the control switch 74 of the negative pressure suction assembly 7 is turned off, the test piece is removed and stored.

[0052] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A rotary moving device for measuring film thickness, characterized in that, include: The base plate (1) has a strip-shaped assembly hole (11) on it; The movable plate (2) is slidably connected to the base plate (1) along the length direction of the strip assembly hole (11), and a through hole (21) communicating with the strip assembly hole (11) is provided at its center. Rotary bearing (4), the rotary bearing (4) is rotatably mounted on the upper surface of the movable plate (2), and its bearing hole is vertically connected to the through hole (21); Turntable (5), the turntable (5) is detachably connected to the top of the rotating bearing (4), and an air extraction hole (51) corresponding to and communicating with the bearing hole is provided at the center of the turntable (5); The negative pressure suction assembly (7) is assembled in the strip-shaped assembly hole (11), and its suction end passes through the through hole (21) and the bearing hole to connect with the suction hole (51) so as to negatively adsorb the test piece onto the upper surface of the turntable (5). Measuring instrument mounting bracket (8) is fixed to one side of the base plate (1) along the length direction of the strip assembly hole (11), and a film thickness measuring instrument (9) for measuring the thickness of the film on the surface of the workpiece is mounted on its top.

2. The rotary moving device for measuring film thickness according to claim 1, characterized in that, A pusher (3) is installed on the movable plate (2); a turner (6) is installed on the circumferential end of the turntable (5).

3. The rotary moving device for measuring film thickness according to claim 1, characterized in that, The base plate (1) has two parallel sliding grooves (12) arranged at intervals on both sides of the strip-shaped assembly hole (11) and parallel to it. Each of the two sliding grooves (12) has a slide rail (100) arranged parallel to the strip-shaped assembly hole (11) fixed in it. The lower surface of the moving plate (2) is slidably connected to the slide rail (100) through a slider (200).

4. The rotary moving device for measuring film thickness according to claim 1, characterized in that, The rotating bearing (4) includes: A fixed inner ring (41) is fixed to the upper surface of the movable plate (2) corresponding to the through hole (21), and its bearing hole is vertically connected to the through hole (21). The outer ring (42) is rotated and is rotatably connected to the outer periphery of the fixed inner ring (41). The turntable (5) is detachably connected to the top of the outer ring (42).

5. A rotary moving device for measuring film thickness according to claim 4, characterized in that, The negative pressure extraction assembly (7) includes: Air nozzle (71), the air nozzle (71) is fixed in the through hole (21), and its air extraction end passes through the bearing hole and is connected to the air extraction hole (51) respectively. An air intake hose (72) is fitted into the strip-shaped mounting hole (11), and its first end is connected to and communicates with the air outlet of the air nozzle (71). A connecting hose (73) is provided, one end of which is connected to and communicates with the second end of the air intake hose (72), and the other end can be connected to a negative pressure device. A control switch (74) is mounted on the connecting hose (73) to control the flow of air within the connecting hose (73).

6. The rotary moving device for measuring film thickness according to claim 5, characterized in that, The intake hose (72) is a spiral hose.

7. A rotary moving device for measuring film thickness according to any one of claims 1-6, characterized in that, The edge of the upper surface of the base plate (1) is machined with scale lines (13) arranged along the length direction of the strip assembly hole (11).

8. A rotary moving device for measuring film thickness according to any one of claims 1-6, characterized in that, The upper surface of the turntable (5) is machined with multiple positioning grooves (52) for positioning the test piece. All of the positioning grooves (52) are annular and arranged with the same center.

9. A rotary moving device for measuring film thickness according to any one of claims 1-6, characterized in that, The bottom of the base plate (1) is equipped with multiple support columns (14).

10. A rotary moving device for measuring film thickness according to any one of claims 1-6, characterized in that, The air extraction holes (51) are arranged in a cross-shaped array.

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