Film thickness detection device

Abstract

The utility model discloses a film thickness detection equipment, its characterized in that, can realize automatic detection through magnetic drive and intelligent sensing, and this equipment utilizes two independent mobile carriers that double guide groove structure with magnetic field guide drives, one is responsible for obtaining and moving film, and another is responsible for detecting its thickness data, and is equipped with detection device and monitors the magnetic change of carrier and film surface feature simultaneously, and will relevant data transmission to microprocessor, makes microprocessor according to these relevant data automatic adjustment mobile carrier and the action of acquisition device, and carries out analysis operation to detection data, finally exports accurate film thickness information, realizes non - contact, high - precision automatic detection process.

Description

Technical Field

[0001] This utility model relates to a testing device, and more particularly to a thin film thickness testing device. Background Technology

[0002] Currently, in the manufacturing process of lithium battery separators, flexible circuit boards, optical films and other sheet materials, the surface flatness and bending state of the material have a significant impact on the stability of subsequent processes. For example, when the film is subjected to uneven stress or inconsistent thermal shrinkage during coating, drying or heat treatment, it is easy to produce arc deformation or warping, which can lead to problems such as uneven thickness, poor bonding or winding offset.

[0003] In existing processes, the thickness uniformity and surface condition of high-precision materials such as lithium battery separators, flexible circuit boards, and optical films directly affect the stability of subsequent processes and product yield. However, current thickness detection methods rely heavily on contact probes, which can easily cause physical damage such as scratches and indentations to the film. Furthermore, the accuracy of the detection is affected by the operator's experience and environmental factors. Especially on automated production lines, traditional methods cannot achieve continuous, rapid, and non-contact thickness detection. This results in the inability to identify films with abnormal thickness or warped surfaces in a timely manner, leading to defects such as lamination shift, localized stress concentration, or inconsistent electrical properties in subsequent coating, lamination, or winding processes.

[0004] Therefore, there is an urgent need for a non-contact, high-precision, and automated thin film thickness detection device that can quickly acquire complete thickness-related data of the thin film without damaging its physical properties, thereby improving detection efficiency, stability, and overall process consistency. Utility Model Content

[0005] The purpose of this invention is to provide a thin film thickness detection device that achieves automated detection based on magnetic drive and intelligent sensing, thereby achieving high-precision and high-consistency automated detection.

[0006] To achieve the above objectives, this utility model provides a thin film thickness detection device, characterized in that it comprises:

[0007] A guiding structure includes a first guiding groove, a second guiding groove, a first moving carrier, and a second moving carrier. The first guiding groove and the second guiding groove respectively provide driving force to the first moving carrier and the second moving carrier through their internal magnetic fields, so that they move along the corresponding guiding groove.

[0008] An acquisition device, connected to the first mobile carrier, is used to acquire a film;

[0009] A detection device, connected to the second mobile carrier and electrically connected to the first mobile carrier, the second mobile carrier, and the acquisition device, is used to acquire detection data of the thin film and magnetic change data of the first and second mobile carriers; and

[0010] A microprocessor is electrically connected to the guiding structure, the acquisition device, and the detection device, respectively, for driving the first moving carrier and the second moving carrier according to the magnetic change data, driving the acquisition device according to the detection data, and performing calculations according to the detection data to output the thickness information of the thin film.

[0011] Preferably, the first guide groove and the second guide groove are made of magnetic materials, and the first moving carrier and the second moving carrier are respectively provided with electromagnetic coils.

[0012] Preferably, a calibration module is provided between the first guide groove and the second guide groove to correct the relative positions of the first moving carrier and the second moving carrier.

[0013] Preferably, one side of the acquisition device is provided with a plurality of regions, each region is provided with a control valve, the control valve is used to control the suction force of these regions, so that these regions uniformly adsorb the film.

[0014] Preferably, the microprocessor performs calculations based on the detection data to control the control valves located in each region of the acquisition device to adjust the suction force.

[0015] Preferably, each region in the acquisition device is provided with a plurality of micropores, and the distribution density of the micropores at the center of these regions is greater than that at the edge regions.

[0016] Preferably, the detection device is selected from Hall sensors, thickness sensors, pressure sensors, or any combination thereof.

[0017] Preferably, the detection data is selected from optical change information, acoustic signal change information, pressure change information, or any combination thereof.

[0018] Preferably, it includes a display module electrically connected to the microprocessor for displaying the thickness information and displaying a warning message when the thickness information does not reach a default threshold.

[0019] Preferably, the thin film is selected from diaphragms, optical thin films, protective films, conductive films, substrate films, barrier films, or thin film electrodes.

[0020] The beneficial effects of this utility model lie in the integrated design of magnetic drive guidance, sensing feedback and intelligent control, which can realize integrated automatic control of acquisition, movement and detection, reduce manual intervention and improve the detection efficiency of the production line. At the same time, this equipment can collect magnetic change data of the moving carrier and the surface morphology of the film in real time through the detection device, and perform calculation and analysis by the microprocessor. It can automatically correct the detection path and position deviation, greatly improve the accuracy of thickness measurement, realize continuous thickness detection of the entire film, and achieve high-precision, non-contact and automated detection effect. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of a device according to an embodiment of the present invention; and

[0022] Figure 2 This is a schematic diagram illustrating an embodiment of the present invention. Detailed Implementation

[0023] To make the above and / or other objectives, effects, and features of this utility model more apparent and understandable, preferred embodiments are described in detail below:

[0024] Please see Figures 1 to 2 The figure shows a schematic diagram of a device and an implementation diagram of one embodiment of the present invention. As shown in the figure, in one embodiment, the thin film thickness detection device E includes a guide structure 1, an acquisition device 2, a detection device 3, and a microprocessor 4. Their connection relationship and operation mode are described below:

[0025] The guiding structure 1 includes a first guiding groove 11, a second guiding groove 12, a first moving carrier 13, and a second moving carrier 14. The first guiding groove 11 and the second guiding groove 12 can respectively provide driving force to the first moving carrier 13 and the second moving carrier 14 through their internal magnetic fields, so that they move along the corresponding guiding grooves, thereby realizing magnetic levitation guidance, reducing friction and micro-vibration, and improving detection stability.

[0026] In one embodiment, the first guide groove 11 and the second guide groove 12 are made of magnetic materials, and the first moving carrier 13 and the second moving carrier 14 are respectively provided with electromagnetic coils, but this is not a limitation.

[0027] In one embodiment, a calibration module (not shown) may be further provided between the first guide groove 11 and the second guide groove 12 to correct the relative position of the first moving carrier 13 and the second moving carrier 14. Specifically, the calibration module (not shown) may use positioning sensing to determine the relative position of the first moving carrier 13 and the second moving carrier 14 to ensure detection accuracy, but this is not the limitation.

[0028] The acquisition device 2 is connected to the first moving carrier 13 and is used to acquire the film. In one embodiment, a plurality of regions 21 are provided on one side of the acquisition device 2, and each region 21 is provided with a control valve 22. The control valve 22 is used to control the suction force of the regions 21 so that the regions 21 uniformly adsorb the film. In other words, when the acquisition device 2 adsorbs the film by adsorption, the suction force is controlled by dividing the surface of the acquisition device into multiple regions 21 to adapt to films of different widths or edge deformations, but this is not the only limitation.

[0029] Preferably, each region 21 in the acquisition device 2 is provided with a plurality of micropores 211. The distribution density of the micropores 211 at the center of these regions 21 is greater than that at the edge, that is, a non-uniform distribution design is adopted, with denser micropores at the center and sparser micropores at the edge, so as to achieve the purpose of balancing the suction field.

[0030] Specifically, one side surface of the acquisition device 2 can be divided into multiple regions 21. The area of ​​each region 21 can be, for example, 20mm × 20mm, but is not limited to this. The area size of each region 21 can be set according to the requirements, so that the suction force of each region 21 can be controlled by the control valve 22 of each region.

[0031] The detection device 3 is connected to the second mobile carrier 14 and is electrically connected to the first mobile carrier 13, the second mobile carrier 14 and the acquisition device 2, respectively, to acquire the detection data of the thin film and the magnetic change data of the first mobile carrier 13 and the second mobile carrier 14. The detection device 3 includes, but is not limited to, optical detection, capacitance detection or acoustic detection or combinations thereof.

[0032] In one embodiment, the detection device is selected from a Hall sensor, a thickness sensor, a pressure sensor, or any combination thereof.

[0033] In one embodiment, the magnetic change data is obtained by detecting changes in magnetic flux density or magnetic field via a Hall sensor to obtain information related to the distance and displacement between the guide slot and the moving carrier. In other words, the magnetic change data is used for positioning and motion control.

[0034] In one embodiment, the detection data is selected from optical change information, acoustic signal change information, pressure change information, or any combination thereof. For example, when optical change information is detected by an interferometer, information related to light source change will be obtained. For example, when acoustic signal change information is detected by an ultrasonic device, information related to sound wave change can be obtained. In this way, data such as the surface characteristics and thickness of the thin film can be obtained. The pressure change information can be information related to the adsorption pressure change in each region of the device 2.

[0035] The microprocessor 4 is electrically connected to the guide structure 1, the acquisition device 2 and the detection device 3 respectively. It is used to drive the first moving carrier 13 and the second moving carrier 14 according to the magnetic change data, drive the acquisition device 2 according to the detection data, and perform calculations according to the detection data to output the thickness information of the thin film, thereby improving the accuracy of the detection results and achieving the purpose of accurate measurement.

[0036] In one embodiment, the microprocessor performs calculations based on optical change information, acoustic signal change information, and pressure change information in the detection data to control the control valves 22 located in each region 21 of the acquisition device 2 to adjust the suction force. In other words, the microprocessor obtains the state of the film surface characteristics through optical change information or acoustic signal change, such as whether it is warped, not attached, or over-attached to the acquisition device 2, resulting in unevenness of the film, and adjusts the suction force of each region 21 accordingly to make the film as flat as possible, which is beneficial to improving the overall thickness detection accuracy of the film.

[0037] In one embodiment, the thin film thickness detection device E further includes a display module 5 electrically connected to the microprocessor 4 for displaying thickness information and displaying a warning message when the thickness information does not reach a default threshold, thereby achieving real-time feedback.

[0038] Preferably, the thin film is selected from diaphragms, optical thin films, protective films, conductive films, substrate films, barrier films, or thin film electrodes, but is not limited thereto.

[0039] To clearly illustrate the embodiments of this utility model, the following description is provided:

[0040] After the detection device E is started, the microprocessor 4 will first drive the calibration module to measure the relative position of the first moving carrier 13 and the second moving carrier 14. The microprocessor 4 will adjust the guiding magnetic field according to the calibration data to make the two carriers accurately aligned and ensure subsequent synchronous movement. Then, according to the start command, it will simultaneously drive the electromagnetic coils in the first moving carrier 13 and the second moving carrier 14. Due to the interaction between the magnetic field generated by the magnetic material in the first guide groove 11 and the second guide groove 12 and the magnetic field of the carrier coil, a magnetic levitation driving force is formed, which makes the two moving carriers move smoothly along the guide groove, so as to drive the acquisition device 2 to approach the film to be tested and maintain accurate alignment with the film surface. It will also control the control valves 22 of each area 21 in the acquisition device 2 to open and perform negative pressure adsorption of the film to be tested.

[0041] At this time, based on the surface change information of the thin film returned by the detection device 3, the microprocessor 4 adjusts the suction force of each region 21 so that the thin film is evenly attached to the entire adsorption surface, flat and wrinkle-free. When the thin film is stably adsorbed and enters the measurement area, the detection device 3 starts to work, and at the same time collects the thickness change information of the thin film, the magnetic field change of the guide groove, the pressure and surface change information of the adsorption surface, and sends these detection data back to the microprocessor 4.

[0042] After receiving the detection data, the microprocessor 4 analyzes the detection data to obtain film thickness information and thickness distribution curves, and displays them on the display module 5. The thickness information obtained from the analysis and the detection data can be automatically stored in the database or exported. The results are displayed on the screen in the form of text, numbers or graphics for the operator to interpret. If the thickness information does not reach the default threshold or a local abnormality occurs, the microprocessor 4 immediately sends a signal to the display module 5 to display a warning message.

[0043] In summary, this utility model provides a thin film thickness detection device that facilitates the operation of the detection process. The entire detection process can be fully automated, and the addition of magnetic levitation guidance reduces friction and micro-vibrations, improving detection stability. Furthermore, the combination of automated multi-regional adjustable suction ensures that the film adheres evenly to the entire adsorption surface, thereby obtaining high-precision film thickness data, which meets the purpose of this utility model.

[0044] However, the above description is only a preferred embodiment of the present utility model, but it cannot be used to limit the scope of patent protection of the present utility model; therefore, any simple equivalent changes and modifications made in accordance with the scope of patent protection and the contents of the specification of the present utility model shall still fall within the scope of patent protection of the present utility model.

Claims

1. A film thickness detecting apparatus characterized by comprising: Include: A guiding structure includes a first guiding groove, a second guiding groove, a first moving carrier, and a second moving carrier. The first guiding groove and the second guiding groove respectively provide driving force to the first moving carrier and the second moving carrier through their internal magnetic fields, so that they move along the corresponding guiding groove. An acquisition device, connected to the first mobile carrier, is used to acquire a film; A detection device, connected to the second mobile carrier and electrically connected to the first mobile carrier, the second mobile carrier, and the acquisition device, is used to acquire detection data of the thin film and magnetic change data of the first and second mobile carriers; and A microprocessor is electrically connected to the guiding structure, the acquisition device, and the detection device, respectively, for driving the first moving carrier and the second moving carrier according to the magnetic change data, driving the acquisition device according to the detection data, and performing calculations according to the detection data to output the thickness information of the thin film.

2. The thin film thickness detection device as described in claim 1, characterized in that, The first guide groove and the second guide groove are made of magnetic materials, and the first moving carrier and the second moving carrier are respectively provided with electromagnetic coils.

3. The thin film thickness detection device as described in claim 1, characterized in that, A calibration module is provided between the first guide groove and the second guide groove to correct the relative positions of the first moving carrier and the second moving carrier.

4. The thin film thickness detection device as described in claim 1, characterized in that, The acquisition device has a plurality of regions on one side, and each region is equipped with a control valve. The control valve is used to control the suction force of these regions so that the thin film is uniformly adsorbed in these regions.

5. The thin film thickness detection device as described in claim 4, characterized in that, The microprocessor performs calculations based on the detection data to control the control valves located in various areas of the acquisition device, thereby adjusting the suction force.

6. The thin film thickness detection device as described in claim 4, characterized in that, Each region in the acquisition device is provided with a plurality of micropores, and the distribution density of the micropores at the center of these regions is greater than that at the edge regions.

7. The thin film thickness detection device as described in claim 1, characterized in that, The detection device is selected from Hall sensors, thickness sensors, pressure sensors, or any combination thereof.

8. The thin film thickness detection device as described in claim 1, characterized in that, The detection data is selected from optical change information, acoustic signal change information, pressure change information, or any combination thereof.

9. The thin film thickness detection device as described in claim 1, characterized in that, It includes a display module electrically connected to the microprocessor, used to display the thickness information, and to display a warning message when the thickness information does not reach a default threshold.

10. The thin film thickness detection device as described in claim 1, characterized in that, The thin film is selected from diaphragms, optical thin films, protective films, conductive films, substrate films, barrier films, or thin film electrodes.

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