Capacitive pressure sensing membrane

Abstract

The utility model discloses a kind of capacitive pressure sensing films, its pressure-sensitive sensing layer is above electrode pattern area, electrode pattern area includes left-hand electrode sub-area and right-hand electrode sub-area arranged at intervals, left-hand electrode sub-area further includes left busbar and is connected to left busbar and is arranged at intervals several left finger strips, right-hand electrode sub-area further includes right busbar and is connected to right busbar and is arranged at intervals several right finger strips, the left finger strip of left-hand electrode sub-area is located between adjacent right finger strip of right-hand electrode sub-area and is arranged at intervals, and the right finger strip of right-hand electrode sub-area is located between adjacent left finger strip of left-hand electrode sub-area and is arranged at intervals;Several parallel distribution left pin strips and right pin strips are provided on the epitaxial film connected with lower substrate layer.This capacitive pressure sensing film is conducive to separating electrode pattern area and pressure-sensitive sensing layer, also increases sensing effective area, improves capacitive pressure sensing film sensitivity.

Description

Technical Field

[0001] This utility model relates to the technical field of sensors, and in particular to a capacitive pressure sensing film. Background Technology

[0002] Pressure sensing thin-film devices are sensors that detect pressure and convert the pressure signal into an electrical signal output according to a certain rule. Pressure sensing thin-film devices are usually composed of a pressure-sensitive element and a signal processing unit, and can be used to monitor and test various devices. Pressure sensing thin-film devices have a wide range of applications, such as medical devices, environmental monitoring, aerospace, industrial automation, consumer electronics, and the automotive industry.

[0003] Pressure sensing thin-film devices can be classified into piezoresistive, capacitive, piezoelectric, and other types according to their working principle. Piezoresistive pressure sensing thin-film devices utilize the piezoresistive effect and generally employ upper and lower electrodes or a single-sided electrode configuration. Capacitive pressure sensing thin-film devices utilize capacitance changes. Piezoelectric sensors detect pressure changes through the piezoresistive effect of semiconductor materials. Piezoresistive pressure sensing thin-film devices are the most widely used due to their lower cost, higher accuracy, and better linearity. Existing capacitive pressure sensing thin-film devices require further improvement in pressure detection sensitivity. Summary of the Invention

[0004] The technical problem to be solved by this utility model is to provide a capacitive pressure sensing film, which not only facilitates the separation of the electrode pattern area and the pressure-sensitive sensing layer, but also increases the effective sensing area and improves the sensitivity of the capacitive pressure sensing film.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: a capacitive pressure sensing film, comprising: an upper substrate layer and a lower substrate layer, wherein the lower substrate layer has a plurality of spaced electrode pattern areas disposed on the surface of the upper substrate layer, and a pressure-sensitive sensing layer is disposed on the surface of the upper substrate layer and the pressure-sensitive sensing layer is located above the electrode pattern areas. The electrode pattern area includes a left-hand electrode sub-area and a right-hand electrode sub-area spaced apart. The left-hand electrode sub-area further includes a left bus bar and a plurality of left finger strips connected to the left bus bar and spaced apart. The right-hand electrode sub-area further includes a right bus bar and a plurality of right finger strips connected to the right bus bar and spaced apart. The left finger strips of the left-hand electrode sub-area are located between adjacent right finger strips of the right-hand electrode sub-area and are spaced apart. The right finger strips of the right-hand electrode sub-area are located between adjacent left finger strips of the left-hand electrode sub-area and are spaced apart. An epitaxial film connected to a lower substrate layer has several parallel left lead strips and right lead strips. The left lead strips are electrically connected to the corresponding left busbars, and the right lead strips are electrically connected to the corresponding right busbars. The region in the lower substrate layer located between the left-handed electrode sub-region and the right-handed electrode sub-region is bonded to the upper substrate layer through an adhesive layer.

[0006] The following is a further improvement to the above technical solution: 1. In the above scheme, the width of the left busbar is 3 to 6 times the width of the left finger bar, and the width of the right busbar is 3 to 6 times the width of the right finger bar.

[0007] 2. In the above scheme, the left busbar and left finger bar are copper bars or aluminum bars, and the right busbar and right finger bar are copper bars or aluminum bars.

[0008] 3. In the above scheme, the thickness of the upper substrate layer and the lower substrate layer is 30~50μm.

[0009] 4. In the above scheme, the thickness of the electrode pattern area is 1~20μm.

[0010] 5. In the above scheme, both the upper substrate layer and the lower substrate layer are PET film layers.

[0011] 6. In the above scheme, the width of the left lead strip and the right lead strip at the end closer to the lower substrate layer is greater than the width at the end farther away from the lower substrate layer.

[0012] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: This utility model relates to a capacitive pressure sensing film, wherein a pressure-sensitive sensing layer is disposed on the surface of the upper substrate layer and the lower substrate layer. The left-hand electrode sub-region further includes a left busbar and several left finger strips connected to the left busbar and spaced apart. The right-hand electrode sub-region further includes a right busbar and several right finger strips connected to the right busbar and spaced apart. The edge regions of the upper substrate layer and the lower substrate layer are connected together. By placing the left-hand electrode sub-region and the right-hand electrode sub-region on the same layer, it is beneficial to separate the electrode pattern area and the pressure-sensitive sensing layer, avoid mutual process interference, save processes and improve efficiency. Since the left finger strips of the left-hand electrode sub-region are located between adjacent right finger strips of the right-hand electrode sub-region and are spaced apart, and the right finger strips of the right-hand electrode sub-region are located between adjacent left finger strips of the left-hand electrode sub-region and are spaced apart, the effective sensing area is increased and the sensitivity of the capacitive pressure sensing film is improved. Attached Figure Description

[0013] Appendix Figure 1 This is a schematic diagram of the structure of the capacitive pressure sensing film of this utility model; Appendix Figure 2This is a cross-sectional structural diagram of the capacitive pressure sensing film of this utility model.

[0014] In the above figures: 1. Upper substrate layer; 2. Lower substrate layer; 3. Electrode pattern area; 4. Pressure-sensitive sensing layer; 5. Left hand electrode sub-area; 51. Left busbar; 52. Left finger bar; 6. Right hand electrode sub-area; 61. Right busbar; 62. Right finger bar; 7. Adhesive layer; 8. Epitaxial film; 9. Left lead bar; 10. Right lead bar. Detailed Implementation

[0015] The present patent can be further understood through the specific embodiments given below, but they are not intended to limit the present patent.

[0016] The present invention will be further described below with reference to embodiments: Example 1: A capacitive pressure sensing film includes: an upper substrate layer 1 and a lower substrate layer 2. The surface of the lower substrate layer 2 facing the upper substrate layer 1 is provided with a plurality of spaced electrode pattern areas 3. The surface of the upper substrate layer 1 facing the lower substrate layer 2 is provided with a pressure-sensitive sensing layer 4, which is located above the electrode pattern areas 3. The electrode pattern area 3 includes a left-hand electrode sub-area 5 and a right-hand electrode sub-area 6 spaced apart. The left-hand electrode sub-area 5 further includes a left busbar 51 and a plurality of left finger strips 52 connected to the left busbar 51 and spaced apart. The right-hand electrode sub-area 6 further includes a right busbar 61 and a plurality of right finger strips 62 connected to the right busbar 61 and spaced apart. The left finger strips 52 of the left-hand electrode sub-area 5 are located between adjacent right finger strips 62 of the right-hand electrode sub-area 6 and are spaced apart. The right finger strips 62 of the right-hand electrode sub-area 6 are located between adjacent left finger strips 52 of the left-hand electrode sub-area 5 and are spaced apart. An epitaxial film 8 connected to the lower substrate layer 2 is provided with a plurality of parallel left lead strips 9 and right lead strips 10. The left lead strip 9 is electrically connected to the corresponding left bus bar 51, and the right lead strip 10 is electrically connected to the corresponding right bus bar 61. The area in the lower substrate layer 2 located between the left hand electrode sub-region 5 and the right hand electrode sub-region 6 is bonded to the upper substrate layer 1 by an adhesive layer 7.

[0017] The width of the left busbar 51 is 3.5 times the width of the left finger bar 52, and the width of the right busbar 61 is 3.5 times the width of the right finger bar 62.

[0018] The aforementioned left busbar 51 and left finger bar 52 are made of copper or aluminum, and the right busbar 61 and right finger bar 62 are made of copper or aluminum.

[0019] The thickness of both the upper substrate layer 1 and the lower substrate layer 2 is 35 μm.

[0020] Both the left-handed electrode sub-region 5 and the right-handed electrode sub-region 6 were formed by physical vapor deposition.

[0021] The thickness of the electrode pattern region 3 is 3 μm.

[0022] Example 2: A capacitive pressure sensing film includes: an upper substrate layer 1 and a lower substrate layer 2. The surface of the lower substrate layer 2 facing the upper substrate layer 1 is provided with a plurality of spaced electrode pattern areas 3. The surface of the upper substrate layer 1 facing the lower substrate layer 2 is provided with a pressure-sensitive sensing layer 4, which is located above the electrode pattern areas 3. The electrode pattern area 3 includes a left-hand electrode sub-area 5 and a right-hand electrode sub-area 6 spaced apart. The left-hand electrode sub-area 5 further includes a left busbar 51 and a plurality of left finger strips 52 connected to the left busbar 51 and spaced apart. The right-hand electrode sub-area 6 further includes a right busbar 61 and a plurality of right finger strips 62 connected to the right busbar 61 and spaced apart. The left finger strips 52 of the left-hand electrode sub-area 5 are located between adjacent right finger strips 62 of the right-hand electrode sub-area 6 and are spaced apart. The right finger strips 62 of the right-hand electrode sub-area 6 are located between adjacent left finger strips 52 of the left-hand electrode sub-area 5 and are spaced apart. An epitaxial film 8 connected to the lower substrate layer 2 is provided with a plurality of parallel left lead strips 9 and right lead strips 10. The left lead strip 9 is electrically connected to the corresponding left bus bar 51, and the right lead strip 10 is electrically connected to the corresponding right bus bar 61. The area in the lower substrate layer 2 located between the left hand electrode sub-region 5 and the right hand electrode sub-region 6 is bonded to the upper substrate layer 1 by an adhesive layer 7.

[0023] The width of the left busbar 51 is 4.2 times the width of the left finger bar 52, and the width of the right busbar 61 is 4.2 times the width of the right finger bar 62.

[0024] The aforementioned left busbar 51 and left finger bar 52 are made of copper or aluminum, and the right busbar 61 and right finger bar 62 are made of copper or aluminum.

[0025] The thickness of both the upper substrate layer 1 and the lower substrate layer 2 is 48 μm.

[0026] Both the left-handed electrode sub-region 5 and the right-handed electrode sub-region 6 were formed by physical vapor deposition.

[0027] The thickness of the electrode pattern region 3 is 8 μm.

[0028] Both the upper substrate layer 1 and the lower substrate layer 2 mentioned above are PET film layers.

[0029] The width of the left lead bar 9 and the right lead bar 10 near the lower substrate layer 2 is greater than the width of the end away from the lower substrate layer 2.

[0030] When using the above-mentioned capacitive pressure sensing film, a pressure-sensitive sensing layer 4 is disposed on the surface of the upper substrate layer 1 facing the lower substrate layer 2. The left-hand electrode sub-region 5 further includes a left busbar 51 and several left finger strips 52 connected to the left busbar 51 and spaced apart. The right-hand electrode sub-region 6 further includes a right busbar 61 and several right finger strips 62 connected to the right busbar 61 and spaced apart. The edge regions around the upper substrate layer 1 and the lower substrate layer 2 are connected together. By disposing the left-hand electrode sub-region 5 and the right-hand electrode sub-region 6 on the same layer, it is beneficial to separate the electrode pattern area and the pressure-sensitive sensing layer, avoid mutual process interference, save processes and improve efficiency. Since the left finger strips 52 of the left-hand electrode sub-region 5 are located between adjacent right finger strips 62 of the right-hand electrode sub-region 6 and are spaced apart, and the right finger strips 62 of the right-hand electrode sub-region 6 are located between adjacent left finger strips 52 of the left-hand electrode sub-region 5 and are spaced apart, the effective sensing area is increased and the sensitivity of the capacitive pressure sensing film is improved.

[0031] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A capacitive pressure sensing film, characterized in that: include: The upper substrate layer (1) and the lower substrate layer (2) are provided with a plurality of spaced electrode pattern areas (3) on the surface of the lower substrate layer (2) facing the upper substrate layer (1), and a pressure-sensitive sensing layer (4) is provided on the surface of the upper substrate layer (1) facing the lower substrate layer (2), and the pressure-sensitive sensing layer (4) is located above the electrode pattern areas (3). The electrode pattern area (3) includes a left-hand electrode sub-area (5) and a right-hand electrode sub-area (6) spaced apart. The left-hand electrode sub-area (5) further includes a left busbar (51) and a plurality of left finger strips (52) connected to the left busbar (51) and spaced apart. The right-hand electrode sub-area (6) further includes a right busbar (61) and a plurality of right finger strips (62) connected to the right busbar (61) and spaced apart. The left finger strips (52) of the left-hand electrode sub-area (5) are located between adjacent right finger strips (62) of the right-hand electrode sub-area (6) and are spaced apart. The right finger strips (62) of the right-hand electrode sub-area (6) are located between adjacent left finger strips (52) of the left-hand electrode sub-area (5) and are spaced apart. An epitaxial film (8) connected to the lower substrate layer (2) is provided with a plurality of parallel left lead strips (9) and right lead strips (10). The left lead strip (9) is electrically connected to the corresponding left bus bar (51), and the right lead strip (10) is electrically connected to the corresponding right bus bar (61). The area in the lower substrate layer (2) between the left hand electrode sub-region (5) and the right hand electrode sub-region (6) is bonded to the upper substrate layer (1) through an adhesive layer (7).

2. The capacitive pressure sensing film according to claim 1, characterized in that: The width of the left busbar (51) is 3 to 6 times the width of the left finger bar (52), and the width of the right busbar (61) is 3 to 6 times the width of the right finger bar (62).

3. The capacitive pressure sensing film according to claim 1, characterized in that: The left busbar (51) and left finger bar (52) are made of copper or aluminum, and the right busbar (61) and right finger bar (62) are made of copper or aluminum.

4. The capacitive pressure sensing film according to claim 1, characterized in that: The thickness of both the upper substrate layer (1) and the lower substrate layer (2) is 30~50μm.

5. The capacitive pressure sensing film according to claim 1, characterized in that: The thickness of the electrode pattern area (3) is 1~20μm.

6. The capacitive pressure sensing film according to claim 1, characterized in that: Both the upper substrate layer (1) and the lower substrate layer (2) are PET film layers.

7. The capacitive pressure sensing film according to claim 1, characterized in that: The width of the left lead bar (9) and the right lead bar (10) near the lower substrate layer (2) is greater than the width away from the lower substrate layer (2).

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