An automatic high-precision leak detection device based on helium mass spectrometric analysis

Abstract

The utility model discloses a kind of automation high-precision leak detection equipment based on helium mass spectrum analysis, belong to gas leak detection technical field, including equipment body, the upper end side surface of the equipment body is fixed with rack, rack's upper end middle installation has screw rod module, the output of screw rod module is fixed with upper box body assembly, the upper end of upper box body assembly is provided with gland sizing assembly, the upper end middle of equipment body is provided with lower vacuum box body one, the upper end of lower vacuum box body one is provided with lower vacuum box body two;The equipment of the present application has high sensitivity, uses mass spectrum analysis technology with helium as tracking gas, can detect tiny leak, meet the detection needs of high requirement scene such as spacecraft, new energy battery, high degree of automation: through automatic detection module and electric control system, the automation control of detection process is realized, reduces manual intervention, improves the accuracy and consistency of detection.

Description

Technical Field

[0001] This utility model belongs to the field of gas leak detection technology, specifically relating to an automated high-precision leak detection device based on helium mass spectrometry analysis. Background Technology

[0002] With the increasing demands for product sealing performance in modern industry, helium mass spectrometry (HMS) leak detection technology has become the mainstream method in the field of precision leak detection. However, existing HMS leak detection technologies still suffer from numerous technical bottlenecks, severely restricting detection efficiency and reliability. Regarding automation, most HMS leak detection equipment on the market still relies on manual operation. Although some manufacturers have attempted to introduce robotic arms, the lack of intelligent path planning algorithms results in poor adaptability to irregularly shaped workpieces. In terms of detection accuracy, existing technologies face serious environmental interference problems. Pollutants such as oil vapor and water vapor commonly found in industrial environments can contaminate the mass spectrometer's ion source, leading to signal drift and decreased sensitivity. In multi-workpiece detection scenarios, existing systems exhibit significant efficiency bottlenecks.

[0003] To address the aforementioned technical challenges, there is an urgent need in this field to develop a novel automated high-precision helium mass spectrometry leak detection system. This system would employ an upper and lower dual-chamber (vacuum chamber) design, a capping and shaping module, and a dual lower vacuum chamber to achieve an alternating reciprocating working mode. This would enable rapid, accurate, and reliable sealing tests to meet the ever-increasing quality control requirements of the high-end manufacturing sector. Utility Model Content

[0004] To address the problems mentioned in the background section, this invention provides an automated, high-precision leak detection device based on helium mass spectrometry analysis, characterized by high efficiency, high precision, and high sensitivity.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an automated high-precision leak detection device based on helium mass spectrometry analysis, comprising a device body, a frame fixed to the upper side of the device body, a lead screw module installed in the middle of the upper end of the frame, an upper housing assembly fixed to the output end of the lead screw module, a pressure cap shaping assembly provided at the upper end of the upper housing assembly, a lower vacuum chamber one provided in the middle of the upper end of the device body, and a lower vacuum chamber two provided at the upper end of the lower vacuum chamber one.

[0006] Preferably, the upper housing assembly includes an upper vacuum housing, the upper vacuum housing is fixed to the bottom of the output end of the lead screw module, and guide shafts are fixed to both sides of the upper end of the upper vacuum housing. A vacuum inlet / outlet port is provided on one side of the guide shaft.

[0007] Preferably, the cap shaping assembly includes a second guide shaft, which is provided on one side of the vacuum inlet / outlet port. A single-axis cylinder is fixed to the upper end of the second guide shaft, and a conversion connector is connected to the output end of the single-axis cylinder. A vent valve is connected to the bottom end of the conversion connector, and a pressure plate is fixed to the surface of the vent valve.

[0008] Preferably, the lower vacuum chamber includes linear slide rails, and a plurality of linear slide rails are fixed on the upper surface of the equipment body. A moving slider is connected to the upper end of the linear slide rails, and the upper end of the moving slider is fixed to the main body of the lower vacuum chamber. A detection work platform is provided inside the main body of the lower vacuum chamber. Product fixing holes are provided at both ends of the detection work platform. A connector is installed on one end surface of the main body of the lower vacuum chamber.

[0009] Preferably, the lower vacuum chamber includes a support frame, with the support frame symmetrically fixed on both sides of the upper end of the equipment body. A linear slide rail is provided at the upper end of the support frame, and a movable slider is connected to the upper end of the linear slide rail. The main body of the lower vacuum chamber is fixed at the upper end of the movable slider. A detection work platform is installed inside the main body of the lower vacuum chamber, and product fixing holes are provided at both ends of the detection work platform.

[0010] Compared with the prior art, the beneficial effects of this utility model are: 1. High sensitivity: The leak detection device of this application uses helium as the tracking gas and utilizes mass spectrometry analysis technology to detect tiny leaks, meeting the detection needs of high-requirement scenarios such as spacecraft and new energy batteries.

[0011] 2. High degree of automation: Through automated detection modules and electronic control systems, the detection process is automated, reducing manual intervention and improving the accuracy and consistency of detection.

[0012] 3. High efficiency and energy saving: The equipment adopts an optimized algorithm to shorten the detection time and reduce energy consumption. It adopts a dual-station (alternating operation of the two lower vacuum chambers) and the upper and lower chambers are linked to detect 4 products at the same time, which improves work efficiency.

[0013] 4. Easy to operate: The user interface is user-friendly and the operation process is simplified, making it easy for operators to get started quickly.

[0014] 5. Easy maintenance: Modular design facilitates daily maintenance and troubleshooting, extending the service life of the equipment. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the functional areas of the device of this utility model; Figure 2 This is a schematic diagram of the upper housing assembly structure of this utility model; Figure 3 This is a schematic diagram of the capping and shaping component of this utility model; Figure 4 This is a schematic diagram of the lower vacuum chamber of this utility model; Figure 5 This is a schematic diagram of the lower vacuum chamber structure of this utility model.

[0016] In the diagram: 1. Lower vacuum chamber one; 11. Linear slide rail; 12. Motion slider; 13. Main body of lower vacuum chamber one; 14. Testing work platform one; 15. Connector; 16. Product fixing hole one; 2. Lower vacuum chamber two; 21. Linear slide rail; 22. Support frame; 23. Movable slider; 24. Testing work platform two; 25. Main body of lower vacuum chamber two; 26. Product fixing hole two; 3. Upper chamber assembly; 31. Vacuum inlet / outlet port; 32. Guide shaft one; 33. Upper vacuum chamber; 4. Frame; 5. Pressure cap shaping assembly; 51. Single-axis cylinder; 52. Adapter connector; 53. Guide shaft two; 54. Vent valve port; 55. Pressure plate; 6. Screw module; 7. Equipment body. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Please see Figure 1-5 The present invention provides the following technical solution: an automated high-precision leak detection device based on helium mass spectrometry analysis, comprising a device body 7, a frame 4 fixed on the upper side of the device body 7, a lead screw module 6 installed in the middle of the upper end of the frame 4, an upper housing assembly 3 fixed at the output end of the lead screw module 6, a pressure cap shaping assembly 5 provided at the upper end of the upper housing assembly 3, a lower vacuum chamber 1 provided in the middle of the upper end of the device body 7, and a lower vacuum chamber 2 provided at the upper end of the lower vacuum chamber 1.

[0019] Specifically, the upper housing assembly 3 includes an upper vacuum housing 33. The upper vacuum housing 33 is fixed to the bottom of the output end of the lead screw module 6. Guide shafts 32 are fixed to both sides of the upper end of the upper vacuum housing 33. A vacuum inlet / outlet port 31 is provided on one side of the guide shaft 32.

[0020] By adopting the above technical solution, the movement of the screw module 6 drives the upper vacuum chamber 33 to move along the guide shaft 32, which facilitates its assembly and sealing with the lower vacuum chamber.

[0021] Specifically, the capping and shaping assembly 5 includes a second guide shaft 53. The second guide shaft 53 is provided on one side of the vacuum inlet / outlet port 31. A single-axis cylinder 51 is fixed at the upper end of the second guide shaft 53. A conversion connector 52 is connected to the output end of the single-axis cylinder 51. A vent valve port 54 is connected to the bottom end of the conversion connector 52. A pressure plate 55 is fixed on the surface of the vent valve port 54.

[0022] By adopting the above technical solution, the pressure plate 55 is connected to the output end of the single-axis cylinder 51 through a fixed joint. The single-axis cylinder 51 drives the pressure plate 55 to move downward, pressing the workpiece to prevent it from deforming. At the same time, the air valve port 54 is connected to the workpiece interface to realize the detection of the inside of the workpiece.

[0023] Specifically, the lower vacuum chamber 1 includes linear slide rails 11. Several linear slide rails 11 are fixed on the upper surface of the equipment body 7. The upper end of the linear slide rails 11 is connected to a moving slider 12. The upper end of the moving slider 12 is fixed to the lower vacuum chamber body 13. The lower vacuum chamber body 13 is equipped with a detection work platform 14 inside. The two ends of the detection work platform 14 are provided with product fixing holes 16. A connector 15 is installed on one end surface of the lower vacuum chamber body 13.

[0024] By adopting the above technical solution, the inspection work platform 14 consists of 4 horizontally arranged fixed inspection stations, which can inspect 4 workpieces at a time. 4 product fixing holes 16 are set at each end to achieve the workpiece fixing effect. The inspection work platform 14 is connected to the interior of the lower vacuum chamber 1 main body 13. The lower vacuum chamber 1 main body 13 is connected to the linear slide rail 11 through the bottom moving slider 12. The linear slide rail 11 is fixed on the equipment body 7. The cylinder drives the lower vacuum chamber 2 to achieve reciprocating motion in the y-axis direction through the connecting joint.

[0025] Specifically, the lower vacuum chamber 2 includes a support frame 22. The support frame 22 is symmetrically fixed on both sides of the upper end of the equipment body 7. A linear slide rail 21 is provided on the upper end of the support frame 22. A movable slider 23 is connected to the upper end of the linear slide rail 21. The lower vacuum chamber 2 body 25 is fixed on the upper end of the movable slider 23. A detection work platform 24 is installed inside the lower vacuum chamber 2 body 25. Product fixing holes 26 are provided at both ends of the detection work platform 24.

[0026] By adopting the above technical solution, the lower vacuum chamber 2 and the lower vacuum chamber 2 operate alternately to achieve a dual-station working mode.

[0027] The working principle and usage process of this utility model are as follows: When using this utility model, the operator places the workpiece on the first testing platform 14 or the second testing platform 24. The workpiece is positioned and fixed using the first product fixing hole 16 or the second product fixing hole 26 to ensure its stable position during subsequent testing. Then, relying on the linear slide rail 11 or the linear guide rail 21, the lower vacuum chamber body 13 or the lower vacuum chamber body 25 is precisely moved to directly below the upper vacuum chamber 33. Next, the lead screw module 6 pushes the upper vacuum chamber 33 downwards so that it aligns tightly with the lower vacuum chamber body 13 or the lower vacuum chamber body 25, forming a sealed testing space. Subsequently, this... The system performs related operations in the space to detect the airtightness of the workpiece. For example, it creates a specific environment through components such as a vacuum pumping system to determine whether there is a gas leak. During the detection process, the feedback system monitors various detection conditions in real time, such as pressure changes and whether there are leak signals, and promptly feeds back these monitored data to the control system. After the lower vacuum chamber 13 completes the detection, the linear slide rail 11 drives the lower vacuum chamber 13 to separate from the upper vacuum chamber 33, and the linear slide rail 21 drives the lower vacuum chamber 25 to be assembled with the upper vacuum chamber 33 for detection. This allows the lower vacuum chamber 13 and the lower vacuum chamber 25 to operate alternately, improving the detection efficiency of the equipment.

[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An automated high-precision leak detection device based on helium mass spectrometry analysis, comprising a device body (7), characterized in that: The upper side of the equipment body (7) is fixed with a frame (4), and a screw module (6) is installed in the middle of the upper end of the frame (4). The output end of the screw module (6) is fixed with an upper housing assembly (3). A pressure cap shaping assembly (5) is provided at the upper end of the upper housing assembly (3). A lower vacuum chamber one (1) is provided in the middle of the upper end of the equipment body (7), and a lower vacuum chamber two (2) is provided at the upper end of the lower vacuum chamber one (1).

2. The automated high-precision leak detection device based on helium mass spectrometry analysis according to claim 1, characterized in that: The upper housing assembly (3) includes an upper vacuum housing (33), the bottom of the output end of the screw module (6) is fixed with the upper vacuum housing (33), and guide shafts (32) are fixed on both sides of the upper end of the upper vacuum housing (33). A vacuum inlet / outlet port (31) is provided on one side of the guide shaft (32).

3. The automated high-precision leak detection device based on helium mass spectrometry analysis according to claim 2, characterized in that: The pressure cap shaping assembly (5) includes a second guide shaft (53). The second guide shaft (53) is provided on one side of the vacuum inlet / outlet port (31). A single-axis cylinder (51) is fixed at the upper end of the second guide shaft (53). A conversion connector (52) is connected to the output end of the single-axis cylinder (51). A vent valve (54) is connected to the bottom end of the conversion connector (52). A pressure plate (55) is fixed on the surface of the vent valve (54).

4. The automated high-precision leak detection device based on helium mass spectrometry analysis according to claim 1, characterized in that: The lower vacuum chamber (1) includes a linear slide rail (11). Several linear slide rails (11) are fixed on the upper surface of the equipment body (7). A moving slider (12) is connected to the upper end of the linear slide rail (11). The upper end of the moving slider (12) is fixed with the main body of the lower vacuum chamber (13). A detection work platform (14) is set inside the main body of the lower vacuum chamber (13). Product fixing holes (16) are set at both ends of the detection work platform (14). A connector (15) is installed on one end surface of the main body of the lower vacuum chamber (13).

5. The automated high-precision leak detection device based on helium mass spectrometry analysis according to claim 1, characterized in that: The lower vacuum chamber 2 (2) includes a support frame (22). The support frame (22) is symmetrically fixed on both sides of the upper end of the equipment body (7). A linear slide rail (21) is provided on the upper end of the support frame (22). A movable slider (23) is connected to the upper end of the linear slide rail (21). The lower vacuum chamber 2 body (25) is fixed on the upper end of the movable slider (23). A detection work platform 2 (24) is installed inside the lower vacuum chamber 2 body (25). Product fixing holes 2 (26) are provided at both ends of the detection work platform 2 (24).

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