Grinding fluid dilution test device

Abstract

This utility model discloses a grinding fluid dilution testing device, comprising: a main water inlet pipe, a first valve and a first check valve, two water inlet components, each water inlet component including a water inlet pipe, a first three-way valve and a first flow meter; two sample injection components, each sample injection component including a first sample injection pipe, a peristaltic pump and a second flow meter; the water inlet pipe and the first sample injection pipe are both connected to a delivery pipe, the delivery pipe being equipped with a third three-way valve, a third flow meter and at least one detector; an empty pipe is connected to the delivery pipe; the second sample injection pipe is equipped with a fourth three-way valve, a second valve, and at least one second check valve, the second sample injection pipe being connected to the output end of the delivery pipe, and the output end of the second sample injection pipe being connected to the main water inlet pipe. This utility model enables the mixing and dilution of grinding fluid and pure water through two pipelines, with backup measures, improving testing efficiency, and allowing switching to the corresponding pipeline according to different needs to meet different testing requirements.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a slurry dilution testing device. Background Technology

[0002] In semiconductor processing, chemical mechanical polishing (CMP) is commonly used to smooth the surface of wafers. During operation, a polishing head picks up the wafer and presses it onto the polishing pad of the CMP table. The polishing head rotates the wafer, and the polishing pad also rotates. Simultaneously, a polishing slurry is supplied to the polishing pad via a supply system. The wafer surface is flattened through the mutual friction between the wafer and the polishing pad. The polishing slurry, as an auxiliary material in the polishing process, allows for faster polishing of the workpiece. Furthermore, at high speeds, the slurry prevents collisions and scratches between the workpiece and the polishing abrasive, and also removes debris from both the workpiece and abrasive surfaces.

[0003] The presence of defective particles in the polishing slurry can cause scratches on the wafer surface, significantly impacting the polishing quality and efficiency of the wafer to be processed. The particle count in the polishing slurry needs to be tested before use. However, existing testing methods are not only cumbersome but also have a narrow scope of application, failing to meet diverse testing needs. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a grinding fluid dilution testing device.

[0005] To achieve the above objectives, the technical solution provided by an embodiment of this utility model is as follows:

[0006] A grinding slurry dilution testing device, comprising:

[0007] The water inlet unit includes a main water inlet pipe, a first valve and a first check valve disposed on the main water inlet pipe, and two water inlet components connected to the main water inlet pipe. Each water inlet component includes a water inlet branch pipe and a first three-way valve and a first flow meter disposed on the water inlet branch pipe.

[0008] The sample injection unit includes two sample injection components, each of which includes a first sample injection pipe and a peristaltic pump and a second flow meter disposed in the first sample injection pipe;

[0009] The infusion pipeline has an output end of the water inlet pipeline and an output end of the first sample inlet pipeline connected to a second three-way valve via a transition pipeline. The second three-way valve is connected to the input end of the infusion pipeline. The infusion pipeline is equipped with a third three-way valve, a third flow meter, and at least one detector.

[0010] An emptying pipe, the input end of which is connected to the output end of the infusion pipe;

[0011] The second sample inlet pipe is equipped with a fourth three-way valve, a second valve, and at least one second check valve. The input end of the second sample inlet pipe is connected to the output end of the infusion pipe through the second valve, and the output end of the second sample inlet pipe is connected to the main water inlet pipe.

[0012] As a further improvement of this utility model, the main water inlet pipe is connected to a drain pipe located between the first one-way valve and the first three-way valve, and the drain pipe is equipped with a third valve.

[0013] As a further improvement of this utility model, one of the transition pipes is connected to a first waste discharge pipe, and a fourth valve is provided on the first waste discharge pipe. The connection between the second three-way valve and the infusion pipe is connected to a second waste discharge pipe, and a fifth valve is provided on the second waste discharge pipe.

[0014] As a further improvement of this utility model, the fourth valve and the fifth valve are both connected to a pressure reducing valve, which is connected to the venting pipe.

[0015] As a further improvement of this utility model, the number of detectors is three, and the three detectors are connected in series in the infusion pipeline.

[0016] As a further improvement of this invention, the detector is a liquid particle counter.

[0017] As a further improvement of this utility model, the output end of the venting pipe is connected to a circulation pipe, and a sixth valve is provided on the circulation pipe.

[0018] As a further improvement of this utility model, a pressure gauge is provided on the second injection pipe.

[0019] As a further improvement of this utility model, the second sample inlet pipe is located upstream of the second valve and is connected to a flushing pipe.

[0020] The beneficial effects of this utility model are:

[0021] This invention enables the mixing and dilution of grinding fluid and pure water through two pipelines. If one pipeline malfunctions, the grinding fluid and pure water can be mixed and diluted through the backup pipeline, which is quick and convenient, improving detection efficiency. The device has a simple circuit and can realize both online and offline injection of grinding fluid. It can switch to the corresponding pipeline according to different needs, which is convenient and fast, meets different testing requirements, and has a wide range of applications. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of a preferred embodiment of the present invention;

[0024] In the diagram: 11. Infusion pipeline; 111. Third three-way valve; 112. Third flow meter; 12. Drainage pipeline; 2. Second sample inlet pipeline; 21. Fourth three-way valve; 22. Second valve; 23. Third check valve; 24. Pressure gauge; 25. Flushing pipeline; 3. Main inlet pipeline; 31. First valve; 32. First check valve; 33. Inlet assembly; 331. Inlet water pipeline; 332. First three-way valve; 333. First flow meter; 34. Drainage pipeline; 35. Third valve; 4. Sample inlet assembly; 41. First sample inlet pipeline; 42. Peristaltic pump; 43. Second flow meter; 51. Transition pipeline; 52. Second three-way valve; 53. Fourth valve; 54. Fifth valve; 55. Pressure reducing valve; 6. Detector; 7. Circulation pipeline; 71. Sixth valve; 8. Grinding fluid storage bottle. Detailed Implementation

[0025] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0026] Please see Figure 1This application discloses a grinding fluid dilution testing device, including a water inlet unit, a sample injection unit, a liquid inlet pipe 11, a drain pipe 12, and a second sample injection pipe 2. The water inlet unit includes a main water inlet pipe 3, a first valve 31 and a first check valve 32 disposed on the main water inlet pipe 3, and two water inlet components 33 connected to the main water inlet pipe 3. Each water inlet component 33 includes a water inlet pipe 331, a first three-way valve 332 disposed on the water inlet pipe 331, and a first flow meter 333. The sample injection unit includes two sample injection components 4, each sample injection component 4 including a first sample injection pipe 41, a peristaltic pump 42 disposed on the first sample injection pipe 41, and a second flow meter 43. The output end of the water inlet pipe 331 and the output end of the first sample injection pipe 41 are both connected to a second three-way valve 52 via a transition pipe 51. The second three-way valve 52 is connected to the input end of the liquid inlet pipe 11. The liquid inlet pipe 11 is equipped with a third three-way valve 111, a third flow meter 112, and at least one detector 6. The inlet of the drain pipe 12 is connected to the outlet of the infusion pipe 1. The second sample inlet pipe 2 is equipped with a fourth three-way valve 21, a second valve 22, and at least one second check valve 23. The inlet of the second sample inlet pipe 2 is connected to the outlet of the infusion pipe 11 through the second valve 22, and the outlet of the second sample inlet pipe 2 is connected to the main water inlet pipe 3.

[0027] This embodiment features two water inlet components 33 and two sample inlet components 4, enabling the mixing and dilution of the grinding slurry with pure water via two pipelines. If one pipeline malfunctions, the grinding slurry can be mixed and diluted using the backup pipeline, providing speed, convenience, and improved detection efficiency. Furthermore, the sample inlet components 4 allow for offline sample introduction of the grinding slurry, facilitating control and reducing sample volume and cost. Simultaneously, the second sample inlet pipe 2 and its components enable online sample introduction and dilution detection of the grinding slurry, achieving real-time online monitoring of grinding slurry particles. The system can be switched to the appropriate pipeline according to different needs, offering convenience, speed, and broad applicability to various testing requirements.

[0028] The present invention preferably connects the main water inlet pipe 3 to the drain pipe 34 located between the first one-way valve 32 and the first three-way valve 332. The drain pipe 34 is equipped with a third valve 35. In this way, the pure water in the main water inlet pipe 3 can be discharged by opening the third valve 35 to rinse the sample bottles and other supporting equipment, without having to move the sample bottles and other supporting equipment to another location for cleaning, which is convenient and quick.

[0029] To facilitate the rapid discharge of excess waste liquid, preferably, one of the transition pipes 51 is connected to a first waste discharge pipe 53, and a fourth valve 54 is installed on the first waste discharge pipe 53. The connection between the second three-way valve 52 and the infusion pipe 11 is connected to a second waste discharge pipe 55, and a fifth valve 56 is installed on the second waste discharge pipe 55. Thus, after the test, depending on the selected sample dilution pipeline, the fourth valve 54 is opened to discharge the excess waste liquid through the first waste discharge pipe 53 along the drain pipe 12, or the fifth valve 56 is opened to discharge the excess waste liquid through the second waste discharge pipe 55 along the drain pipe 12.

[0030] To ensure safety, it is preferable that the fourth valve 54 and the fifth valve 56 are both connected to a pressure reducing valve 57, which is connected to the venting pipe 12. Specifically, the pressure reducing valve 57 is installed on the confluence of the first waste venting pipe 53 and the second waste venting pipe 55.

[0031] To improve detection efficiency and accuracy, it is preferable to have three detectors 6 connected in series in the infusion pipeline 11.

[0032] The preferred detector 6 of this invention is a liquid particle counter, which provides accurate and reliable particle detection.

[0033] To ensure the grinding slurry meets testing requirements before testing, it undergoes pretreatment to improve testing accuracy. Preferably, the output end of the drain pipe 12 is connected to a circulation pipe 7, which is equipped with a sixth valve 71. Opening the sixth valve 71 allows the grinding slurry from the storage bottle to flow into the circulation pipe 7. The grinding slurry then flows back into the storage bottle through the output end of the drain pipe 12, achieving self-circulation of the grinding slurry. This ensures uniform particle suspension and distribution within the grinding slurry, facilitating subsequent testing.

[0034] To facilitate knowing the pressure status inside the second injection pipe 2 and ensure safety, it is preferable to install a pressure gauge 24 on the second injection pipe 2.

[0035] To facilitate rinsing of online samples and prevent mixing of different samples, it is preferable that the second sample inlet pipe 2 is located upstream of the second valve 22 and connected to a rinsing pipe 25. The rinsing pipe 25 washes away any residual sample in the second sample inlet pipe 25.

[0036] In use, this invention allows for online or offline delivery of the grinding slurry, depending on the application requirements. When testing is needed in the laboratory, the first valve 31, the first one-way valve 32, and the first three-way valve 332 are opened. The first flow meter 333 is adjusted to control the flow rate of pure water at 0.8 L / min. The pure water enters the inlet water pipe 331 through the main inlet pipe 3. Simultaneously, the peristaltic pump 42 is turned on, and the flow rate of the second flow meter 43 is adjusted to 70 ml / min. The grinding slurry in the storage bottle 8 is pumped into the first sample inlet pipe 41 and mixed with pure water at a constant flow rate for online dilution, avoiding particle aggregation and interference between particles, and optimizing the detection conditions. The mixed liquid enters the infusion pipe 11 through the transition pipe 51 and the second three-way valve 52. The third flow meter 112 is adjusted to a flow rate of 40 ml / min. The diluted grinding slurry passes through three detectors 6 in sequence for particle testing. After the test, excess waste liquid is discharged through the first waste discharge pipe 53 or the second waste discharge pipe 55 along the drain pipe 12.

[0037] When online sample injection testing is required, the second sample injection pipe 2 is connected to the grinding slurry production circulating liquid system. The fourth three-way valve 21, the second valve 22, and the second one-way valve 23 are opened, and the grinding slurry enters the second sample injection pipe 2. The first valve 31, the first one-way valve 32, and the first three-way valve 332 are opened, and the first flow meter 333 is adjusted to control the flow rate of pure water to 0.8 L / min. The pure water enters the inlet water pipe 331 through the main inlet water pipe 3. The grinding slurry and pure water are mixed to dilute the grinding slurry. After the diluted liquid is detected by three detectors 6, it returns to the second sample injection pipe 2 to monitor the grinding slurry particles in real time.

[0038] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0039] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A polishing liquid dilution test device characterized by comprising: include: The water inlet unit includes a main water inlet pipe, a first valve and a first check valve disposed on the main water inlet pipe, and two water inlet components connected to the main water inlet pipe. Each water inlet component includes a water inlet branch pipe and a first three-way valve and a first flow meter disposed on the water inlet branch pipe. The sample injection unit includes two sample injection components, each of which includes a first sample injection pipe and a peristaltic pump and a second flow meter disposed in the first sample injection pipe; The infusion pipeline has an output end of the water inlet pipeline and an output end of the first sample inlet pipeline connected to a second three-way valve via a transition pipeline. The second three-way valve is connected to the input end of the infusion pipeline. The infusion pipeline is equipped with a third three-way valve, a third flow meter, and at least one detector. An emptying pipe, the input end of which is connected to the output end of the infusion pipe; The second sample inlet pipe is equipped with a fourth three-way valve, a second valve, and at least one second check valve. The input end of the second sample inlet pipe is connected to the output end of the infusion pipe through the second valve, and the output end of the second sample inlet pipe is connected to the main water inlet pipe.

2. The abrasive slurry dilution test apparatus of claim 1, wherein, The main inlet pipe is connected to a drain pipe located between the first one-way valve and the first three-way valve, and the drain pipe is equipped with a third valve.

3. The grinding slurry dilution testing device according to claim 1, characterized in that, One of the transition pipes is connected to a first waste discharge pipe, which is equipped with a fourth valve. The connection between the second three-way valve and the infusion pipe is connected to a second waste discharge pipe, which is equipped with a fifth valve.

4. The grinding slurry dilution testing apparatus according to claim 3, characterized in that, The fourth and fifth valves are both connected to a pressure reducing valve, which is connected to the venting pipe.

5. The grinding slurry dilution testing apparatus according to claim 1, characterized in that, The number of detectors is three, and the three detectors are connected in series in the infusion pipeline.

6. The grinding slurry dilution testing apparatus according to claim 5, characterized in that, The detector is a liquid particle counter.

7. The grinding slurry dilution testing apparatus according to claim 1, characterized in that, The output end of the venting pipe is connected to a circulation pipe, and a sixth valve is installed on the circulation pipe.

8. The grinding slurry dilution testing apparatus according to claim 1, characterized in that, A pressure gauge is installed on the second injection pipe.

9. The grinding slurry dilution testing apparatus according to claim 1, characterized in that, The second injection pipe is located upstream of the second valve and is connected to a flushing pipe.

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