A three-in-one metallographic confocal detection measurement system

Abstract

The application relates to a three-in-one metallographic confocal detection measurement system, which comprises a first light source, a first scanning component, a first light beam collecting piece, a first photoelectric detection piece, a second light source, a second scanning component and a second photoelectric detection piece. The first scanning component is used for guiding a light beam of the first light source to a sample. The first light beam collecting piece is used for collecting a light beam irradiated by the first light source and reflected by the sample and conveying the light beam to the first photoelectric detection piece. The first photoelectric detection piece is used for receiving the light beam and converting an optical signal into an electrical signal. The second scanning component is used for receiving the second light source and guiding the second light source to be conveyed to the sample. The second photoelectric detection piece is used for receiving a light beam of the second light source reflected by the sample and converting an optical signal into an electrical signal. The application has the effects of simplifying a detection process and improving detection efficiency.

Description

Technical Field

[0001] This application relates to the field of optical scanning imaging, and in particular to a three-in-one metallographic confocal detection and measurement system. Background Technology

[0002] A confocal microscope is a high-resolution optical imaging instrument that utilizes the principles of beam scanning and conjugate focusing. Confocal microscopes are important instruments in fields such as industrial inspection, industrial measurement, direct beam writing, and product quality inspection.

[0003] Due to the increasing precision and quality of industrial production, and the inefficiency and instability of manual measurement, an industrial testing and measurement system that is fast, accurate, and convenient is particularly important.

[0004] When faced with differences in size and precision requirements of different products, different testing equipment needs to be replaced to meet the needs, resulting in high equipment switching costs, interruption of the testing process, and inability to efficiently adapt to diverse testing scenarios. Utility Model Content

[0005] To simplify the testing process and improve testing efficiency without the need to switch equipment, this application provides a three-in-one metallographic confocal inspection and measurement system.

[0006] This application provides a three-in-one metallographic confocal imaging and measurement system, which adopts the following technical solution: A three-in-one metallographic confocal imaging measurement system includes a first light source, a first scanning component, a first beam collector, a first photodetector, a second light source, a second scanning component, and a second photodetector. The first scanning component includes a resonant mirror, a galvanometer mirror, a scanning lens, a field lens, and an objective lens. These components are sequentially arranged along the optical path of the first light source. The resonant mirror receives the light beam from the first light source and transmits it to the galvanometer mirror. The galvanometer mirror transmits the light beam so that it passes sequentially through the scanning lens, field lens, objective lens, and sample. The objective lens is positioned above the sample. The first beam collector collects the light beam reflected from the sample and transmits it to the first photodetector. The first photodetector receives the light beam and converts the optical signal into an electrical signal. The second scanning component receives the second light source and guides it onto the sample. The second photodetector receives the light beam reflected from the sample and converts the optical signal into an electrical signal. By adopting the above technical solution, and integrating the first light source, first scanning component, first beam collector, and first photoelectric detector related to confocal imaging with the second light source, second scanning component, and second photoelectric detector related to another detection mode, multiple detection needs can be met simultaneously or switched without frequent equipment replacement. This significantly expands the application scenarios to adapt to metallographic detection and measurement tasks of different precision and types. Among them, the resonant galvanometer of the first scanning component improves the beam scanning speed with its high vibration frequency, and the galvanometer galvanometer precisely controls the beam transmission path. The two work together to achieve rapid and accurate scanning of the sample. At the same time, the first and second photoelectric detectors collect the reflected beams after the sample is irradiated by the two light sources and convert the optical signals into electrical signals, providing a reliable signal source for subsequent image generation and data processing, and ensuring the accuracy and validity of the detection data.

[0007] Optionally, the first scanning component further includes a polarizing beam splitter and a quarter-wave plate. The polarizing beam splitter and the quarter-wave plate are both located between the first light source and the resonant mirror. The polarizing beam splitter is positioned close to the first light source, and the quarter-wave plate is positioned close to the resonant mirror. The light beam output from the first light source passes through the polarizing beam splitter and the quarter-wave plate in sequence before reaching the resonant mirror.

[0008] By adopting the above technical solution, a polarizing beam splitter and a quarter-wave plate are set between the first light source and the resonant mirror. The polarizing beam splitter can convert the output beam of the first light source into linearly polarized light with a specific polarization direction. The quarter-wave plate further converts the linearly polarized light into circularly polarized light. This not only reduces the polarization loss during beam transmission to ensure beam energy stability, but also allows the circularly polarized light to be converted back into linearly polarized light perpendicular to the incident polarization direction when the beam returns through the original path after being reflected by the sample. This linearly polarized light is reflected by the polarizing beam splitter to a specific direction, achieving effective separation of the incident light and the reflected light, avoiding mutual interference between the two, significantly improving the purity and efficiency of optical signal collection, and thus improving detection accuracy.

[0009] Optionally, the first scanning component further includes a first lens group, a second lens group, a reflective mirror, and a one-dimensional position detector. The first lens group, the second lens group, and the reflective mirror are all located between the resonant mirror and the galvanometer mirror. The first lens group is positioned close to the resonant mirror, the second lens group is positioned close to the galvanometer mirror, and the reflective mirror is positioned between the first lens group and the second lens group. The one-dimensional position detector is used to receive a portion of the light beam passing through the reflective mirror and convert the optical signal into an electrical signal.

[0010] By adopting the above technical solution, a first lens group, a second lens group, a reflective mirror, and a one-dimensional position detector are set between the resonant mirror and the galvanometer mirror. The first and second lens groups form a 4F system (an optical system composed of two lenses with a focal length of f), which images the light beam from the resonant mirror's reflective surface onto the galvanometer mirror's reflective surface, ensuring accurate light beam transmission. The reflective mirror allows part of the light beam to pass through and be received by the one-dimensional position detector. The detector converts the optical signal into an electrical signal to detect the deflection position of the light beam after passing through the resonant mirror in real time. Based on this position information, precise position correction can be performed for subsequent image reconstruction, effectively solving the image distortion problem caused by the nonlinear oscillation of the resonant mirror, greatly improving the clarity and realism of the generated image, and ensuring the reliability of the detection results.

[0011] Optionally, the first scanning component further includes a reflector, with the scanning lens and the field lens located on the same side of the reflector, and the light beam output by the scanning lens being reflected by the reflector to the field lens.

[0012] By adopting the above technical solution, the reflector in the first scanning component can flexibly change the transmission direction of the output beam of the scanning lens according to the actual optical path layout requirements, so that the beam is accurately reflected to the field lens. Without the need to make significant adjustments to the positions of core components such as the scanning lens and field lens, it can adapt to different equipment installation spaces and sample placement scenarios, significantly improving the flexibility and adaptability of the system optical path design and reducing the difficulty of equipment assembly and debugging.

[0013] Optionally, the first beam collector is located between the polarizing beam splitter and the first photodetector. The first beam collector includes a collecting lens, a variable pinhole, and an attenuator. The collecting lens is used to collect the beam reflected by the sample and focus it onto the variable pinhole. The beam passing through the variable pinhole passes through the attenuator, and the attenuator then delivers the beam to the first photodetector.

[0014] By adopting the above technical solution, the collecting lens in the first beam collector can efficiently collect the beam reflected by the sample and accurately focus it onto the variable pinhole. The variable pinhole filters stray light signals from the non-focal surface, allowing only the effective beam at the focal surface to pass through, which greatly improves the signal-to-noise ratio of the light signal. The beam passing through the pinhole then passes through an attenuator. The attenuator adjusts the beam attenuation according to the actual light signal intensity to prevent excessively strong or weak beams from entering the first photoelectric detector, ensuring that the light intensity incident on the detector is within a reasonable range, ensuring that the detector can stably and accurately convert the light signal into an electrical signal, and improving the quality of the detection data.

[0015] Optionally, the attenuator is rotated by a motor to change the degree of beam attenuation.

[0016] By adopting the above technical solution, the attenuator is rotated by a motor to change the degree of beam attenuation. It can be adjusted according to the reflectivity differences of different samples. When detecting high reflectivity samples, the motor controls the attenuator to rotate to a large attenuation angle to reduce the beam intensity. When detecting low reflectivity samples, it rotates to a small attenuation angle to increase the beam intensity. This ensures that the light intensity incident on the first photoelectric detector is always within the optimal detection range when detecting different samples. This avoids damage to the detector from strong light and prevents weak light from causing weak signals and inaccurate detection. It also improves the system's adaptability to different types of samples and the detection stability.

[0017] Optionally, the second scanning component includes a first illumination lens, a second illumination lens, a first beam splitter, a second beam splitter, and a third lens group. The first illumination lens, the second illumination lens, the second beam splitter, and the first beam splitter are sequentially distributed along the optical path of the second light source. The first illumination lens is used to receive the light from the second light source and guide the light from the second light source onto the second illumination lens. The second illumination lens is used to transmit the light through the second beam splitter, the first beam splitter, and the objective lens in sequence. The third lens group is used to collect the light beam from the second light source reflected by the sample and transmit the light beam to the second photodetector.

[0018] By adopting the above technical solution, the first and second illumination lenses of the second scanning component optimize the transmission of light from the second light source twice, reducing light divergence and making the intensity uniform. Then, through the synergistic effect of the second and first beam splitters, the light is precisely guided to the objective lens and illuminates the sample. At the same time, the third lens group efficiently collects the second light beam reflected from the sample and stably delivers it to the second photoelectric detection device. The entire optical path design reduces the energy loss of the second light source during transmission and collection, ensures the intensity and integrity of the optical signal, provides high-quality optical signal support for the second detection mode, and ensures the accuracy and efficiency of detection in this mode.

[0019] Optionally, the objective lens is mounted on a rotating stage, and an interference objective lens may also be mounted on the rotating stage. The rotating stage can be fitted with different objective lenses and can move vertically. A placement stage is provided directly below the rotating stage, and the sample is placed on the placement stage. The placement stage is used to move the sample vertically.

[0020] By adopting the above technical solution, the objective lens is set on the rotary stage, which is also equipped with an interference objective lens. By rotating the rotary stage, different types of objective lenses can be quickly changed, realizing the switching of different detection modes such as confocal and white light interference, without the need to disassemble and install the objective lens, saving mode switching time and improving detection efficiency. At the same time, the rotary stage can move vertically, and the placement stage moves the sample vertically. The two work together to precisely adjust the relative distance between the objective lens and the sample, ensuring that the sample is always in the optimal detection position. Especially when performing three-dimensional detection, such as white light interference three-dimensional topography measurement, it can achieve precise vertical positioning of the sample, improve detection accuracy, and meet the needs of different sample thicknesses and detection depths.

[0021] In summary, this application includes at least one of the following beneficial technical effects: 1. By switching components, it can meet the needs of different scenarios, from conventional metallographic testing to precision three-dimensional morphology measurement, and is adaptable to the testing of samples of different sizes and reflectivities, significantly improving equipment utilization and helping enterprises improve product quality inspection efficiency and quality control capabilities. 2. A polarization beam splitter and a quarter-wave plate work together to control the polarization state, effectively separating incident and reflected light and reducing interference; a 4F system and a one-dimensional position detector correct image distortion caused by the nonlinear oscillation of the resonant mirror; a variable pinhole filters stray light, an attenuator adjusts the light intensity, and a motor controls the attenuator to achieve adaptive intensity adjustment, ensuring stable and pure signals received by the photoelectric detector; the synergistic effect of multiple components reduces beam transmission loss and signal interference, significantly improving image clarity and data accuracy, meeting the high-precision detection requirements of industrial production; 3. The reflector can flexibly adjust the beam transmission direction to adapt to different installation spaces and sample placement scenarios, reducing the difficulty of assembly and debugging; the rotary stage can quickly change the objective lens, and with the vertical movement function of the placement stage and the rotary stage, the detection mode can be switched and the sample can be accurately positioned without disassembling parts, saving equipment adjustment time. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a three-in-one metallographic confocal detection and measurement system.

[0023] Reference numerals: 1. First light source; 2. First scanning assembly; 201. Resonant galvanometer mirror; 202. Galvanometer mirror; 203. Scanning lens; 204. Field lens; 205. Objective lens; 206. Polarizing beam splitter; 207. Quarter-wave plate; 208. First lens group; 209. Second lens group; 210. Transmitting mirror; 211. One-dimensional position detector; 212. Reflecting mirror; 3. First beam collector; 301. Collecting lens; 302. Variable pinhole; 303. Attenuator; 4. First photoelectric detector; 5. Second light source; 6. Second scanning assembly; 601. First illumination lens; 602. Second illumination lens; 603. First beam splitter; 604. Second beam splitter; 605. Third lens group; 7. Second photoelectric detector; 8. Placement stage; 81. Rotary stage; 9. Sample. Detailed Implementation

[0024] The following is in conjunction with the appendix Figure 1 This application will be described in further detail.

[0025] This application discloses a three-in-one metallographic confocal microscopy detection and measurement system. (Refer to...) Figure 1 A three-in-one metallographic confocal detection and measurement system includes a first light source 1, a first scanning component 2, a first beam collector 3, a first photoelectric detector 4, a second light source 5, a second scanning component 6, a second photoelectric detector 7, and a placement stage 8. The placement stage 8 is a Z-axis piezoelectric placement stage 8 that can move vertically. The sample 9 to be measured is placed on the upper surface of the placement stage 8. The first light source 1 can transmit the beam of the first light source 1 to the sample 9 to be tested through the first scanning component 2. The beam reflected by the sample 9 to be tested is collected by the first beam collector 3. The returned light signal is converted into an electrical signal by the first photoelectric detector 4. The second light source 5 can transmit the beam of the second light source 5 to the sample 9 to be tested through the second scanning component 6. The beam reflected by the sample 9 to be tested is collected by the second photoelectric detector 7. The returned light signal is converted into an electrical signal by the second photoelectric detector 7.

[0026] Reference Figure 1The first light source 1 is a laser, which can output laser light. The first scanning assembly 2 includes a resonant mirror 201, a galvanometer mirror 202, a scanning lens 203, a field lens 204, an objective lens 205, a polarizing beam splitter 206, a quarter-wave plate 207, a first lens group 208, a second lens group 209, a transflector 210, a one-dimensional position detector 211, and a reflector 212. The scanning lens 203, field lens 204, and objective lens 205 are sequentially distributed along the optical path. A rotating stage 81 is set above the placement stage 8. The objective lens 205 is mounted on the rotating stage 81. When the objective lens 205 is activated, it is positioned directly above the sample 9 to be measured. At this time, the laser output from the first light source 1 passes sequentially through the polarizing beam splitter 206, the quarter-pivot, the resonant galvanometer 201, the first lens group 208, the transmission mirror 210, the second lens group 209, the galvanometer galvanometer 202, the scanning lens 203, the reflecting lens, the field lens 204, and the objective lens 205 before irradiating the sample 9 to be measured.

[0027] Reference Figure 1 In this system, the wavelength of the first light source 1 can be 405nm or 640nm, and the model of the resonant mirror 201 can be 4K, 8K, 12K, or 16K. The polarizing beam splitter 206 and the quarter-wave plate 207 are both located between the first light source 1 and the resonant mirror 201. The polarizing beam splitter 206 is located closer to the first light source 1, and the quarter-wave plate 207 is located closer to the resonant mirror 201. After the laser emitted by the laser shines on the polarizing beam splitter 206, the outgoing light is horizontally polarized linear light. After passing through the quarter-wave plate 207, the horizontally polarized linear light becomes circularly polarized light, which then shines on the resonant mirror 201. The scanning speed can be increased through the vibration of the resonant mirror 201 itself. The first lens group 20... 8 and the second lens group 209 are located on the same side of the reflective mirror 210, and the one-dimensional position detector 211 is located on the other side of the reflective mirror 210. Part of the light beam passing through the reflective mirror 210 will illuminate the one-dimensional position detector 211. The one-dimensional detector can detect the light beam and perform position correction for subsequent image reconstruction. The one-dimensional position detector 211 can be a PSD (non-discrete photodetector) or a linear CCD (linear array camera). The laser reflected from the resonant mirror 201 reaches the galvanometer mirror 202. The laser reflected from the galvanometer mirror 202 passes through the scanning lens 203 and is reflected by the reflector 212 to the field mirror 204. The laser then passes through the field mirror 204 and the objective lens 205. The light beam after passing through the objective lens 205 illuminates the surface of the sample 9.

[0028] Reference Figure 1When the laser beam irradiates the surface of sample 9, the beam reflected from the surface of sample 9 passes sequentially through objective lens 205, field lens 204, reflector 212, scanning lens 203, galvanometer galvanometer 202, second lens group 209, transmission mirror 210, first lens group 208, and resonant galvanometer 201 back to quarter-wave plate 207. The circularly polarized light is converted into horizontally polarized light after passing through quarter-wave plate 207 again. The horizontally polarized light is reflected to a 90-degree direction after irradiating polarizing beam splitter 206, thus separating it from the laser output from the first light source 1 to polarizing beam splitter 206.

[0029] Reference Figure 1 The first beam collector 3 is located between the polarizing beam splitter 206 and the first photoelectric detector. The first beam collector 3 includes a collecting lens 301, a variable pinhole 302, and an attenuator 303. The collecting lens 301, the variable pinhole 302, and the attenuator 303 are distributed sequentially along the direction in which the beam illuminates the first photoelectric detector. The collecting lens 301 focuses the beam reflected by the polarizing beam splitter 206. The variable pinhole 302 is located at the focal point of the beam and is used to filter stray light signals from outside the beam. The beam passing through the variable pinhole 302 illuminates the attenuator 303. The attenuator 303 is rotated by a motor to change the attenuation of the beam. The attenuator 303 adjusts the intensity of the signal light so that the light intensity illuminating the first photoelectric detector is within a reasonable range. The first photoelectric detector converts the light signal into an electrical signal. The electrical signal then undergoes signal processing, image reconstruction algorithms, and other steps to generate an image and restore the surface structure of the sample 9.

[0030] Reference Figure 1 The second scanning component 6 includes a first illumination lens 601, a second illumination lens 602, a first beam splitter 603, a second beam splitter 604, and a third lens group 605. The first illumination lens 601, the second illumination lens 602, the second beam splitter 604, and the first beam splitter 603 are sequentially distributed along the optical path of the second light source 5, which is a white LED lamp. The first beam splitter 603 is located between the field lens 204 and the rotary table 81. The first illumination lens 601 is used to receive the light from the second light source 5 and guide the light from the second light source 5 to... The second illumination lens 602 is used to transmit light through the second beam splitter 604, the first beam splitter 603 and the objective lens 205 in sequence. The optical fiber of the second light source 5 passes through the first illumination lens 601, the second illumination lens 602, the second beam splitter 604 and the first beam splitter 603, and finally illuminates the objective lens 205 and focuses on the surface of the sample 9 to be measured. The rotary table 81 can move vertically with a minimum movement of 10 nanometers. The light source reflected from the sample 9 illuminated by the second light source 5 returns along the original path.

[0031] Reference Figure 1The second illumination lens 602 and the first beam splitter 603 are located on the same side of the second beam splitter 604, and the third lens group 605 is located on the other side of the second beam splitter 604. The second photodetector 7 is located on the side of the third lens group 605 away from the second beam splitter 604. When the second light source 5 illuminates the light source of the sample 9 to be tested and returns along the original path, the third lens group 605 is used to collect the light beam of the second light source 5 reflected by the sample 9 and transmit the light beam to the second photodetector 7. The second detector is a CCD.

[0032] An interference objective lens can also be installed on the rotary stage 81. When the interference objective lens is used, an image with interference fringes can be captured on the CCD.

[0033] The implementation principle of the three-in-one metallographic confocal detection and measurement system in this application embodiment is as follows: When using the confocal mode, the beam output by the first light source 1 is converted into linearly polarized light by the polarizing beam splitter 206, and then into circularly polarized light by the quarter-wave plate 207. After entering the scanning structure composed of the resonant mirror 201 and the galvanometer mirror 202, the resonant mirror 201 increases the scanning speed, and the galvanometer mirror 202 controls the optical path. The beam illuminates the sample 9 through the lens group, the scanning lens 203, the field lens 204 and the objective lens 205. The beam reflected by the sample 9 returns along the original path, is converted into vertically polarized light by the quarter-wave plate 207, is separated by the polarizing beam splitter 206, and is focused by the collecting lens 301 to the variable pinhole 302 to filter stray light. The light intensity is then adjusted by the attenuator 303 controlled by the motor. Finally, the first photoelectric detector 4 converts the optical signal into an electrical signal for image generation and sample 9 structure reconstruction.

[0034] When using the super depth-of-field mode, the light emitted by the second light source 5 is optimized by the first illumination lens 601 and the second illumination lens 602, and then guided to the objective lens 205 and focused on the sample 9 by the second beam splitter 604 and the first beam splitter 603. The objective lens 205 is moved vertically by the Z-axis displacement stage, and multiple Z-axis images are captured by the camera. The clear areas of each layer are then extracted by the software algorithm and stitched together to form a clear image of the sample 9 in the whole area.

[0035] When using white light interferometry mode, the illumination and CCD imaging components of the super depth-of-field mode are used, the interferometer objective lens 205 on the rotary stage 81 is switched, and the sample 9 is moved by the Z-axis piezoelectric displacement stage to capture multiple sets of images with interference fringes. Through vertical scanning and data analysis, the three-dimensional morphology information of the sample 9 surface is extracted from the two-dimensional interferogram to achieve precise three-dimensional measurement.

[0036] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A three-in-one metallographic confocal microscopy detection and measurement system, characterized in that: The device includes a first light source (1), a first scanning component (2), a first beam collector (3), a first photoelectric detector (4), a second light source (5), a second scanning component (6), and a second photoelectric detector (7). The first scanning component (2) includes a resonant mirror (201), a galvanometer mirror (202), a scanning lens (203), a field lens (204), and an objective lens (205). The resonant mirror (201), the galvanometer mirror (202), the scanning lens (203), the field lens (204), and the objective lens (205) are arranged sequentially along the optical path of the first light source (1). The resonant mirror (201) is used to receive the beam of light from the first light source (1) and transmit the beam to the galvanometer mirror (202). The galvanometer galvanometer mirror (202) is used to deliver the light beam so that the light beam passes sequentially through the scanning lens (203), the field lens (204), the objective lens (205), and the sample (9). The objective lens (205) is located above the sample (9). The first beam collector (3) is used to collect the light beam reflected by the first light source (1) and deliver the light beam to the first photodetector (4). The first photodetector (4) is used to receive the light beam and convert the light signal into an electrical signal. The second scanning component (6) is used to receive the second light source (5) and guide the second light source (5) to be delivered to the sample (9). The second photodetector (7) is used to receive the light beam reflected by the second light source (5) from the sample (9) and convert the light signal into an electrical signal.

2. The three-in-one metallographic confocal microscopy detection and measurement system according to claim 1, characterized in that: The first scanning component (2) further includes a polarizing beam splitter (206) and a quarter-wave plate (207). The polarizing beam splitter (206) and the quarter-wave plate (207) are both located between the first light source (1) and the resonant mirror (201). The polarizing beam splitter (206) is positioned close to the first light source (1), and the quarter-wave plate (207) is positioned close to the resonant mirror (201). The light beam output by the first light source (1) passes through the polarizing beam splitter (206) and the quarter-wave plate (207) in sequence before reaching the resonant mirror (201).

3. The three-in-one metallographic confocal microscopy detection and measurement system according to claim 2, characterized in that: The first scanning component (2) also includes a first lens group (208), a second lens group (209), a reflective mirror (210), and a one-dimensional position detector (211). The first lens group (208), the second lens group (209), and the reflective mirror (210) are all located between the resonant mirror (201) and the galvanometer mirror (202). The first lens group (208) is located close to the resonant mirror (201), the second lens group (209) is located close to the galvanometer mirror (202), and the reflective mirror (210) is located between the first lens group (208) and the second lens group (209). The one-dimensional position detector (211) is used to receive part of the light beam passing through the reflective mirror (210) and convert the optical signal into an electrical signal.

4. The three-in-one metallographic confocal microscopy detection and measurement system according to claim 3, characterized in that: The first scanning component (2) further includes a reflector (212), a scanning lens (203) and a field lens (204) located on the same side of the reflector (212), and the light beam output by the scanning lens (203) is reflected to the field lens (204) through the reflector (212).

5. The three-in-one metallographic confocal microscopy detection and measurement system according to claim 2, characterized in that: The first beam collector (3) is located between the polarizing beam splitter (206) and the first photodetector (4). The first beam collector (3) includes a collecting lens (301), a variable pinhole (302), and an attenuator (303). The collecting lens (301) is used to collect the beam reflected by the sample (9) and focus it onto the variable pinhole (302). The beam after passing through the variable pinhole (302) passes through the attenuator (303), and the attenuator (303) then transmits the beam to the first photodetector (4).

6. The three-in-one metallographic confocal microscopy detection and measurement system according to claim 5, characterized in that: The attenuator (303) is rotated by a motor to change the degree of beam attenuation.

7. The three-in-one metallographic confocal microscopy detection and measurement system according to claim 1, characterized in that: The second scanning component (6) includes a first illumination lens (601), a second illumination lens (602), a first beam splitter (603), a second beam splitter (604), and a third lens group (605). The first illumination lens (601), the second illumination lens (602), the second beam splitter (604), and the first beam splitter (603) are sequentially distributed along the optical path of the second light source (5). The first illumination lens (601) is used to receive the light from the second light source (5) and guide the light from the second light source (5) to the second illumination lens (602). The second illumination lens (602) is used to transmit the light through the second beam splitter (604), the first beam splitter (603), and the objective lens (205) in sequence. The third lens group (605) is used to collect the light beam from the second light source (5) reflected by the sample (9) and transmit the light beam to the second photodetector (7).

8. The three-in-one metallographic confocal microscopy detection and measurement system according to claim 7, characterized in that: The objective lens (205) is mounted on a rotating stage (81). An interference objective lens may also be mounted on the rotating stage (81). Different objective lenses can be replaced on the rotating stage (81). The rotating stage (81) can move vertically. A placement stage (8) is located directly below the rotating stage (81). The sample (9) is placed on the placement stage (8). The placement stage (8) is used to move the sample (9) vertically.

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