Test fixture for x-ray equipment

Abstract

The utility model discloses a detection fixture for X -RAY equipment, including base, carrier plate and clamping component, the base includes two side plates of opposite setting, the carrier plate swing connection is between two side plates, the carrier plate can rotate relative to side plate, the carrier plate includes board main part and is located fixed baffle of board main part one end, the clamping component includes elastic structure and clamping plate, one end of elastic structure with clamping plate is connected, the other end of elastic structure with board main part is connected, board main part fixed baffle with clamping plate cooperation forms clamping cavity, clamping cavity is used for placing the object to be measured, the utility model discloses can flexibly adjust the position of carrier plate to get multidirectional imaging, and through clamping component can adapt to multiple sizes and the object to be measured of quantity, has promoted the detection efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a testing fixture for X-ray equipment. Background Technology

[0002] In current X-ray inspection equipment, due to internal space limitations, the robotic arm can only achieve axial imaging, which greatly inconveniences the inspection of ICs packaged on substrates. It is difficult to observe the sidewall and bottom bonding status of the IC during the inspection process, limiting the comprehensiveness of the inspection.

[0003] Existing fixtures mainly rely on vacuum fixation or rigid clamps, but given the tiny size and diverse specifications of ICs, these traditional fixtures are difficult to meet the carrying requirements of ICs of different sizes and quantities. Because X-ray inspection cannot flexibly adjust the IC angle to obtain multi-directional imaging, it leads to problems such as low fixture compatibility, poor image quality, and cumbersome operation, resulting in low inspection efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a testing fixture for X-RAY equipment to solve the imaging limitation problem, while also being able to efficiently clamp ICs of different sizes and specifications.

[0005] To achieve the above objectives, this utility model provides a testing fixture for X-ray equipment, comprising:

[0006] The base includes two side plates arranged opposite each other;

[0007] A carrier plate is movably disposed between two side plates; the carrier plate is rotatable relative to the side plates; the carrier plate includes a plate body and a fixed stop strip disposed at one end of the plate body;

[0008] A clamping assembly includes an elastic structure and a clamping plate, wherein one end of the elastic structure is connected to the clamping plate and the other end of the elastic structure is connected to the plate body;

[0009] The plate body, the fixing strip, and the clamping plate cooperate to form a clamping cavity; the clamping cavity is used to place the object to be tested.

[0010] As a further improvement of this utility model, the elastic structure includes a first connecting post fixedly connected to the side of the plate body away from the clamping cavity, a second connecting post fixedly connected to the side of the clamping plate away from the clamping cavity, and a tension spring with its two ends respectively connected to the first connecting post and the second connecting post.

[0011] As a further improvement of this utility model, the clamping plate is arranged parallel to the plate body, and the carrier plate further includes a limiting structure protruding on the plate body, the limiting structure being used to restrict the clamping plate from rotating relative to the carrier plate.

[0012] As a further improvement of this utility model, the limiting structure extends obliquely from both sides of the plate body toward the clamping cavity, and the end of the clamping plate is provided with a protrusion adapted to the limiting structure. The limiting structure cooperates with the protrusion to limit the clamping plate in the longitudinal direction.

[0013] As a further improvement of this utility model, the clamping plate has a stepped portion at one end away from the fixed stop bar. The plane of the stepped portion away from the clamping cavity is flush with the plane of the plate body away from the clamping cavity. The second connecting post is connected to the side of the stepped portion away from the clamping cavity.

[0014] As a further improvement of this utility model, the testing fixture also includes an angle adjustment mechanism, which includes a knob located on the outside of the side plate and a rotating shaft connected to the side end of the carrier plate. The knob and the rotating shaft are connected to drive the carrier plate to rotate.

[0015] As a further improvement of this utility model, an angle scale line is provided on the outer side wall of the side plate, which is used to indicate the rotation angle of the carrier plate.

[0016] As a further improvement of this utility model, the base, carrier plate and clamping plate are all made of transparent antistatic material.

[0017] As a further improvement of this utility model, the transparent antistatic material is antistatic polycarbonate.

[0018] As a further improvement of this utility model, the base includes a bottom plate that vertically connects the two side plates, and the bottom plate is partially hollowed out.

[0019] The beneficial effects of this utility model are as follows: This application comprises a plate body, a fixed stop bar, and a clamping plate to form a clamping cavity; the clamping cavity is used to place the object to be tested; by setting an elastic structure, which is connected to the plate body and the clamping plate respectively, after the elastic structure undergoes elastic deformation, the elastic compression force can drive the clamping plate to move closer to the fixed stop bar, thereby changing the size of the space in the clamping cavity for placing the object to be tested, and simultaneously achieving clamping of the object to be tested placed in the clamping cavity. The clamping cavity can be flexibly adjusted according to the size and shape of the object to be tested, and can adapt to ICs of various sizes or quantities, improving the versatility and adaptability of the testing fixture. On the other hand, the carrier plate is movably connected between two side plates, and the carrier plate can rotate relative to the side plates, allowing for flexible adjustment of the angle of the carrier plate, thereby achieving angle adjustment of the object to be tested placed in the clamping cavity, thus enabling the acquisition of clear images from multiple directions, overcoming the imaging limitations in the prior art, and improving testing efficiency. Attached Figure Description

[0020] Figure 1 This is a three-dimensional schematic diagram of a testing fixture for X-ray equipment provided in an embodiment of the present invention;

[0021] Figure 2 yes Figure 1 Another structural diagram of the testing fixture from another angle;

[0022] Figure 3 yes Figure 1 Exploded view of the testing fixture

[0023] Figure 4 yes Figure 1 A partially enlarged schematic diagram of the testing fixture;

[0024] Figure 5 yes Figure 1 Side view of the testing fixture. Detailed Implementation

[0025] The present invention will now be described in detail with reference to the accompanying drawings and embodiments. Please refer to them. Figures 1 to 5 The figure shown is a preferred embodiment of the present invention.

[0026] It should be understood that, unless otherwise expressly specified and limited, in this application, the terms "upper," "lower," "front," "rear," "left," "right," etc., indicate the orientation or positional relationship based on the illustrations and are only for the convenience of description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed or operated in a specific orientation.

[0027] In this utility model, unless otherwise explicitly specified and limited, the terms "set", "connect", "connect", "fixed" and other such terms should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part.

[0028] It should be noted that in the following embodiments and accompanying drawings, components unrelated to the present invention have been omitted and not shown; and for ease of understanding, the size ratios between the components are exaggerated and differ from the actual product.

[0029] Reference Figure 1 and Figure 2 The present invention provides a testing fixture 100 for an X-ray device, comprising a base 1 and a carrier plate 2. The base 1 includes two side plates 11 disposed opposite to each other. The carrier plate 2 is movably disposed between the two side plates 11 for placing the object to be tested, such as a packaged IC to be tested.

[0030] The carrier plate 2 is movably connected between the two side plates 11, and the carrier plate 2 can rotate relative to the side plates 11; so as to adjust the position or angle of the object to be tested, thereby obtaining clear images from multiple angles, meeting the detection requirements of X-RAY equipment for different angles or positions of the object to be tested, overcoming the imaging limitations in the prior art, and improving detection efficiency.

[0031] The carrier plate 2 includes a plate body 21 and a fixing strip 22 disposed at one end of the plate body 21. The fixing strip 22 can restrict the position of the test object on the plate body 21 and prevent the test object from detaching from the plate body 21 during the detection process.

[0032] The testing fixture 100 also includes a clamping assembly 3, which includes an elastic structure 32 and a clamping plate 31. One end of the elastic structure 32 is connected to the clamping plate 31, and the other end of the elastic structure 32 is connected to the plate body 21. The plate body 21, the fixing strip 22 and the clamping plate 31 cooperate to form a clamping cavity 4. The clamping cavity 4 is used to place the object to be tested.

[0033] When the object to be tested is placed on the plate body 21, the elastic structure 32 will deform accordingly by adjusting the position of the clamping plate 31. The elastic compression force can drive the clamping plate 31 to move towards the fixed stop bar 22, thereby changing the size of the space in the clamping cavity 4 for placing the object to be tested, so that the clamping plate 31 fits tightly against the object to be tested, thus achieving the clamping of the object to be tested placed in the clamping cavity 4.

[0034] The clamping assembly 3 allows the clamping plate 31 to be flexibly adjusted according to the size and shape of the object to be tested, enabling the fixture to adapt to various sizes or quantities of ICs, thereby improving the versatility and adaptability of the testing fixture 100.

[0035] In addition, the clamping component 3 ensures that the object under test remains stable during the detection process, avoiding displacement caused by vibration or improper operation, thereby ensuring that the X-RAY equipment can perform accurate and efficient detection of the object under test.

[0036] Specifically, such as Figure 3 As shown, the fixing strip 22 protrudes from the bearing plane of the plate body 21 and can be fixed to the plate body 21 by welding, screw connection or other fastening methods, or it can be integrated with the plate body 21.

[0037] The elastic structure 32 can be selected according to specific application scenarios and requirements. It can be a spring, elastic sheet or any other element that can provide elastic force, as long as it can ensure that the clamping assembly 3 can provide stable, uniform and sufficient clamping force when clamping the object to be measured.

[0038] In one embodiment of this utility model, the elastic structure 32 includes a first connecting post 321 fixedly connected to the side of the plate body 21 away from the clamping cavity 4, a second connecting post 322 fixedly connected to the side of the clamping plate 31 away from the clamping cavity 4, and a tension spring 323 with the first connecting post 321 and the second connecting post 322 respectively connected at both ends.

[0039] When the clamping plate 31 is subjected to external force, the tension spring 323 will deform. For example, by pulling the clamping plate 31, the object to be tested can be placed on the plate body 21. At this time, a clamping cavity 4 that can accommodate the object to be tested is formed between the clamping plate 31 and the fixed stop 22. When the clamping plate 31 is released, the elastic restoring force of the tension spring 323 will push the clamping plate 31 to move towards the fixed stop 22, ensuring that the clamping plate 31 fits tightly against the object to be tested, so that the object to be tested remains stable during the testing process.

[0040] The arrangement of the first connecting post 321 and the second connecting post 322 not only provides a stable connection point for the tension spring 323, but also makes the structure of the clamping assembly 3 more compact and stable.

[0041] In this embodiment, an elastic structure 32 is connected to both sides of the plate body 21 and the clamping plate 31 in the lateral direction. The elastic structure 32 is located close to the side plate 11. The two elastic structures 32 can work simultaneously to ensure that the clamping plate 31 provides uniform and sufficient clamping force in the lateral direction, so as to avoid the object to be tested from shaking or shifting during the detection process, and further enhance the stability and clamping force of the clamping assembly 3.

[0042] The clamping plate 31 is arranged parallel to the plate body 21, and part of its bottom plane slides in contact with the bearing plane of the plate body 21. The plate body 21 provides a sliding guide for the clamping plate 31 so that the clamping plate 31 can move smoothly on the plate body 21.

[0043] The carrier plate 2 also includes a limiting structure 23 protruding from the plate body 21. The limiting structure 23 is used to restrict the clamping plate 31 from flipping relative to the carrier plate 2, so as to avoid the possible flipping problem of the clamping plate 31 when subjected to force, and to ensure the stability and reliability of the clamping plate 31 during the detection process.

[0044] The limiting structure 23 extends obliquely from both sides of the plate body 21 toward the clamping cavity 4. The end of the clamping plate 31 is provided with a protrusion 311 adapted to the limiting structure 23. The limiting structure 23 cooperates with the protrusion 311 to limit the clamping plate 31 in the longitudinal direction. This effectively prevents the clamping plate 31 from flipping over without hindering the sliding of the clamping plate 31.

[0045] The clamping plate 31 has a stepped portion 312 at the end away from the fixed stop bar 22. The plane of the stepped portion 312 away from the clamping cavity 4 is flush with the plane of the plate body 21 away from the clamping cavity 4. The second connecting post 322 is set on the stepped portion 312 away from the clamping cavity 4 to ensure that the extension direction of the tension spring 323 connecting the first connecting post 321 and the second connecting post 322 is parallel to the plate body 21, so that its force direction is always consistent with the clamping direction, and avoids clamping instability due to force line deviation.

[0046] Furthermore, the testing fixture 100 also includes an angle adjustment mechanism 5, which includes a knob 51 located on the outside of the side plate 11 and a rotating shaft 52 connected to the side end of the carrier plate 2. The knob 51 and the rotating shaft 52 are connected to drive the carrier plate 2 to rotate.

[0047] With the angle adjustment mechanism 5, the user can easily adjust the angle of the carrier plate 2 to achieve multi-angle detection of the object to be detected, thereby obtaining multi-directional imaging to improve the flexibility and accuracy of the detection.

[0048] The surface of the knob 51 is provided with anti-slip texture 511 to increase friction during rotation and facilitate user operation.

[0049] The knob 51 has a rotation range of 0-180° to meet the needs of different detection angles. Users can flexibly adjust the angle of the carrier plate 2 according to actual detection requirements to obtain more comprehensive and accurate detection results. At the same time, the 0-180° rotation range setting avoids damage or instability caused by excessive rotation.

[0050] An angle scale line 111 is provided on the outer side wall of the side plate 11. The angle scale line 111 is used to indicate the rotation angle of the carrier plate 2.

[0051] By observing the angle scale line 111, users can intuitively understand the current rotation angle of the carrier plate 2, ensuring that it is adjusted to the required detection angle and improving the accuracy of operation. In addition, the setting of the angle scale line 111 also provides users with a reference benchmark, enabling consistent angle adjustment during multiple tests, thus ensuring the consistency and repeatability of the test.

[0052] In addition, the base 1, carrier plate 2, and clamping plate 31 can all be made of transparent antistatic material. Transparent antistatic material can reduce the generation of X-ray shadows, effectively solve the problem of fixture interference with X-ray imaging, and the antistatic properties can effectively prevent static electricity accumulation, reducing the risk of damage to ICs caused by dust adsorption and electrostatic discharge.

[0053] In this embodiment, the transparent antistatic material is antistatic polycarbonate.

[0054] The base 1 includes a bottom plate 12 that vertically connects the two side plates 11. The bottom plate 12 has a partially hollowed-out design, which can avoid material overlap shadows and improve imaging quality.

[0055] In summary, this application comprises a plate body, a fixed stop bar, and a clamping plate to form a clamping cavity. The clamping cavity is used to place the object to be tested. An elastic structure is incorporated, connected to both the plate body and the clamping plate. When the elastic structure undergoes elastic deformation, the elastic compressive force drives the clamping plate towards the fixed stop bar, thereby changing the size of the space within the clamping cavity for placing the object to be tested. This simultaneously clamps the object placed in the clamping cavity. The clamping cavity can be flexibly adjusted according to the size and shape of the object to be tested, accommodating various sizes or quantities of ICs and improving the versatility and adaptability of the testing fixture. Furthermore, a carrier plate is movably connected between two side plates, allowing the carrier plate to rotate relative to the side plates. This allows for flexible adjustment of the carrier plate's angle, thereby adjusting the angle of the object placed in the clamping cavity. This enables the acquisition of clear images from multiple angles, overcoming imaging limitations in existing technologies and improving testing efficiency.

[0056] In the embodiments provided by this utility model, it should be understood that the above-described implementation of the structure is merely illustrative. For example, the division of the modules is merely a logical functional division. In actual implementation, there may be other division methods. For example, multiple modules or components may be combined or integrated into another device, or some features may be ignored or not executed.

[0057] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A testing fixture for X-ray equipment, characterized in that, include: The base includes two side plates arranged opposite each other; A carrier plate is movably connected between two side plates; the carrier plate is rotatable relative to the side plates; the carrier plate includes a plate body and a fixed stop bar disposed at one end of the plate body; A clamping assembly includes an elastic structure and a clamping plate, wherein one end of the elastic structure is connected to the clamping plate and the other end of the elastic structure is connected to the plate body; The plate body, the fixing strip, and the clamping plate cooperate to form a clamping cavity; the clamping cavity is used to place the object to be tested.

2. The inspection fixture for X-ray equipment according to claim 1, characterized in that, The elastic structure includes a first connecting post fixedly connected to the side of the plate body away from the clamping cavity, a second connecting post fixedly connected to the side of the clamping plate away from the clamping cavity, and a tension spring with its two ends connected to the first connecting post and the second connecting post respectively.

3. The inspection fixture for X-ray equipment according to claim 1 or 2, characterized in that, The clamping plate is arranged parallel to the plate body, and the carrier plate further includes a limiting structure protruding from the plate body, the limiting structure being used to restrict the clamping plate from rotating relative to the carrier plate.

4. The inspection fixture for X-ray equipment according to claim 3, characterized in that, The limiting structure extends obliquely from both sides of the plate body toward the clamping cavity. The end of the clamping plate is provided with a protrusion adapted to the limiting structure. The limiting structure cooperates with the protrusion to limit the clamping plate in the longitudinal direction.

5. The inspection fixture for X-ray equipment according to claim 2, characterized in that, The clamping plate has a stepped portion at one end away from the fixed stop bar. The plane of the stepped portion facing away from the clamping cavity is flush with the plane of the plate body facing away from the clamping cavity. The second connecting post is connected to the side of the stepped portion facing away from the clamping cavity.

6. The inspection fixture for X-ray equipment according to any one of claims 1-5, characterized in that, The testing fixture also includes an angle adjustment mechanism, which includes a knob located on the outside of the side plate and a rotating shaft connected to the side end of the carrier plate. The knob and the rotating shaft are connected to drive the carrier plate to rotate.

7. The inspection fixture for X-ray equipment according to claim 6, characterized in that, An angle scale line is provided on the outer wall of the side plate, and the angle scale line is used to indicate the rotation angle of the carrier plate.

8. The inspection fixture for X-ray equipment according to claim 1, characterized in that, The base, carrier plate, and clamping plate are all made of transparent, antistatic material.

9. The inspection fixture for X-ray equipment according to claim 8, characterized in that, The transparent antistatic material is antistatic polycarbonate.

10. The inspection fixture for X-ray equipment according to claim 1, characterized in that, The base includes a bottom plate that is vertically connected to the two side plates, and the bottom plate is partially hollowed out.

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