Three-dimensional motion measurement device with sample elevator

Abstract

The utility model relates to vacuum measurement technical field, concretely is three -dimensional motion measuring device with sample elevating platform, through setting up sample elevating mechanism, sample elevating mechanism includes bearing platform, jacking column and drive motor, jacking column is connected with bearing platform and drive motor respectively, when drive motor works, drive motor drives jacking column to remove, bearing platform and jacking column synchronous lift, sample elevating mechanism cooperates three -dimensional motion measuring mechanism, makes the measuring head in the measuring process without separately completing all three -dimensional motion, effectively solve the existing vacuum cavity to set up three -dimensional motion measuring device to drive the detection head, realize the measurement to the sample different position through the multi -freedom degree removal of detection head in space, however, due to the sample to be measured fixed on the stationary support seat, lead to in the measuring process, the detection head needs to separately complete all three -dimensional motion, not only increase three -dimensional motion measuring device's motion load, still improved its structure and control complexity problem.

Description

Technical Field

[0001] This utility model relates to the field of vacuum measurement technology, specifically a three-dimensional motion measurement device with a sample lifting platform. Background Technology

[0002] Measuring or testing various samples within a vacuum chamber is a crucial method for obtaining accurate data in scientific research, industry, and other fields. The vacuum environment effectively isolates impurities, moisture, and other interfering factors from the atmosphere, providing stable and pure conditions for measurement. This helps to more accurately reflect the inherent properties and characteristics of the sample, making it irreplaceable for materials performance research and product quality testing. It is a key element in ensuring the reliability of related research and production activities.

[0003] Currently, vacuum equipment typically houses a three-dimensional motion measurement device. This device has a probe for detecting the sample. The sample is placed on a fixed support within the vacuum chamber. The three-dimensional motion of the probe is driven by the three-dimensional motion measurement device. Measurements of different positions on the sample are achieved through the multi-degree-of-freedom movement of the probe in space. However, since the sample is fixed on a stationary support, the probe must complete all three-dimensional motion independently during the measurement process. This not only increases the motion load on the three-dimensional motion measurement device but also raises its structural and control complexity, thus affecting measurement efficiency.

[0004] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0005] Regarding the aforementioned issue of existing vacuum chambers equipped with three-dimensional motion measurement devices to drive probes, which measure different positions of samples through multi-degree-of-freedom movement of the probes in space, the problem arises because the sample is fixed on a stationary support. This requires the probes to perform all three-dimensional movements independently during measurement, increasing the motion load on the three-dimensional motion measurement device and raising its structural and control complexity. The technical solution adopted by this invention to solve this problem is as follows: A three-dimensional motion measurement device with a sample lifting platform includes a three-dimensional motion measurement mechanism and a sample lifting mechanism disposed in a vacuum cavity. The three-dimensional motion measurement mechanism is located on one side of the sample lifting mechanism. The three-dimensional motion measurement mechanism is equipped with a measuring head for measuring the sample. The sample lifting mechanism includes a support platform, a lifting column, and a drive motor. The support platform is used to support the sample to be measured. One end of the lifting column is connected to the support platform, and the other end of the lifting column is connected to the drive motor. When the drive motor is working, the drive motor drives the lifting column to rise and fall vertically. The support platform and the lifting column rise and fall synchronously to cooperate with the measuring head to measure the sample to be measured.

[0006] Furthermore, the support platform is provided with a sample fixing structure, which is used to fix the sample to be tested during the lifting and lowering of the support platform.

[0007] Furthermore, a connecting mechanism is provided between the output end of the drive motor and the lifting column, and the lifting column is detachably connected to the output end of the drive motor through the connecting mechanism.

[0008] Furthermore, the sample lifting mechanism includes a sealing mounting base disposed on the outer wall of the lifting column, and a skeleton oil seal for maintaining the airtightness of the vacuum chamber is provided between the sealing mounting base and the lifting column.

[0009] Furthermore, the sample lifting mechanism includes a pressure plate disposed on the side of the sealed mounting base away from the bearing platform. The pressure plate is sleeved on the outer periphery of the lifting column and is used to guide the lifting movement of the lifting column.

[0010] Furthermore, the sample fixing structure includes several fixing grooves, which are arranged at intervals around the circumference of the support platform.

[0011] Furthermore, the connection mechanism includes a connecting flange located at the output end of the drive motor and a mounting flange located on the side of the lifting column near the drive motor. The connecting flange and the mounting flange are threaded together so that the lifting column is detachably connected to the output end of the drive motor.

[0012] Furthermore, the three-dimensional motion measurement mechanism includes a first moving module arranged along a first direction and a second moving module arranged along a second direction. The first moving module includes a first driving mechanism and a first sliding mechanism. The first driving mechanism includes a first driving motor, a first lead screw connected to the output end of the first driving motor, two first bearing seats arranged opposite to each other along the first direction, and a first nut assembly mounted on the second moving module. The two sides of the first lead screw are rotatably mounted in the two first bearing seats, and the first lead screw is threadedly engaged with the first nut assembly. The first sliding mechanism includes a first guide rail and a first slider mounted on the second moving module and slidably connected to the first guide rail.

[0013] Furthermore, the three-dimensional motion measurement mechanism includes a third moving module arranged along a third direction. The second moving module includes a second driving mechanism, a second sliding mechanism, and a second moving seat connected to the first nut pair. The second driving mechanism includes a second driving motor mounted on the second moving seat, a second lead screw connected to the output end of the second driving motor, two second bearing seats arranged opposite each other along a second direction and respectively mounted on the second moving seat, and a second nut pair mounted on the third moving module. The two sides of the second lead screw are rotatably mounted in the two second bearing seats, and the second lead screw is threadedly engaged with the second nut pair. The second sliding mechanism includes a second guide rail mounted on the second moving seat and a second slider mounted on the third moving module and slidably connected to the second guide rail.

[0014] Furthermore, a measuring moving seat is provided between the measuring head and the third moving module. The measuring head is connected to the third moving module through the measuring moving seat. The third moving module includes a third driving mechanism, a third sliding mechanism, a third moving panel connected to the second nut pair, and a third mounting seat connected to the third moving panel. The third driving mechanism includes a third driving motor mounted on the third mounting seat, a third lead screw connected to the output end of the third driving motor, two third bearing seats arranged opposite each other along a third direction and respectively mounted on the third mounting seat, and a third nut pair mounted on the measuring moving seat. The two sides of the third lead screw are rotatably mounted in the two third bearing seats, and the third lead screw is threadedly engaged with the third nut pair. The third sliding mechanism includes a third guide rail mounted on the third mounting seat and a third slider mounted on the measuring moving seat and slidably connected to the third guide rail.

[0015] The beneficial effects of this utility model are as follows: This invention incorporates a sample lifting mechanism, comprising a support platform, a lifting column, and a drive motor. The two ends of the lifting column are connected to the support platform and the drive motor, respectively. When the drive motor operates, it moves the lifting column vertically, causing the support platform and the lifting column to rise and fall synchronously. The sample lifting mechanism works in conjunction with the three-dimensional motion measurement mechanism, eliminating the need for the measuring head to perform all three-dimensional motion independently during measurement. Part of the motion can be achieved by the sample lifting mechanism, reducing the motion load on the three-dimensional motion measurement mechanism. This effectively solves the problem of existing methods where a three-dimensional motion measurement device is installed inside a vacuum chamber to drive the probe head. This method uses the probe head's multi-degree-of-freedom movement in space to measure different positions of the sample. However, because the sample is fixed on a stationary support, the probe head must perform all three-dimensional motion independently during measurement, increasing the motion load on the three-dimensional motion measurement device and raising its structural and control complexity.

[0016] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0017] Figure 1 This is one of the structural schematic diagrams of the three-dimensional motion measurement device with a sample lifting platform according to this utility model; Figure 2 This is one of the structural schematic diagrams of the sample lifting mechanism of this utility model; Figure 3 This is the second schematic diagram of the sample lifting mechanism of this utility model; Figure 4 for Figure 3 Cross-sectional view along line AA; Figure 5 for Figure 4 An enlarged view of section B marked thereon; Figure 6 This is an exploded view of the sample lifting mechanism of this utility model; Figure 7 This is one of the structural schematic diagrams of the three-dimensional motion measurement mechanism of this utility model; Figure 8 This is the second schematic diagram of the three-dimensional motion measuring device with a sample lifting platform according to this utility model; Figure 9 This is the second structural schematic diagram of the three-dimensional motion measurement mechanism of this utility model. Detailed Implementation

[0018] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0019] like Figures 1 to 9The three-dimensional motion measurement device with a sample lifting platform shown includes a three-dimensional motion measurement mechanism 1 and a sample lifting mechanism 2 disposed in a vacuum chamber 9. The three-dimensional motion measurement mechanism 1 is located on one side of the sample lifting mechanism 2. The three-dimensional motion measurement mechanism 1 is provided with a measuring head 10 for measuring the sample. The sample lifting mechanism 2 includes a support platform 21, a lifting column 22 and a drive motor 23. The support platform 21 is used to support the sample to be measured. One end of the lifting column 22 is connected to the support platform 21, and the other end of the lifting column 22 is connected to the drive motor 23. When the drive motor 23 is working, the drive motor 23 drives the lifting column 22 to rise and fall in the vertical direction. The support platform 21 and the lifting column 22 rise and fall synchronously to cooperate with the measuring head 10 to measure the sample to be measured. This invention incorporates a sample lifting mechanism, comprising a support platform, a lifting column, and a drive motor. The two ends of the lifting column are connected to the support platform and the drive motor, respectively. When the drive motor operates, it moves the lifting column vertically, causing the support platform and the lifting column to rise and fall synchronously. The sample lifting mechanism works in conjunction with the three-dimensional motion measurement mechanism, eliminating the need for the measuring head to perform all three-dimensional motion independently during measurement. Part of the motion can be achieved by the sample lifting mechanism, reducing the motion load on the three-dimensional motion measurement mechanism. This effectively solves the problem of existing methods where a three-dimensional motion measurement device is installed inside a vacuum chamber to drive the probe head. This method uses the probe head's multi-degree-of-freedom movement in space to measure different positions of the sample. However, because the sample is fixed on a stationary support, the probe head must perform all three-dimensional motion independently during measurement, increasing the motion load on the three-dimensional motion measurement device and raising its structural and control complexity.

[0020] Specifically, the first direction corresponds to the X-axis direction of the coordinate axis, the second direction corresponds to the Y-axis direction of the coordinate axis, and the third direction corresponds to the Z-axis direction of the coordinate axis. When the first moving module 41 is operating normally, the first moving module 41 drives the second moving module 42 to move along the X-axis direction; when the second moving module 42 is operating normally, the second moving module 42 drives the third moving module 43 to move along the Y-axis direction; when the third moving module 43 is operating normally, the third moving module 43 drives the measuring head 10 to move along the Z-axis direction.

[0021] Furthermore, in traditional measuring devices, the measuring head 10 needs to independently complete all movements in three directions. Especially when moving in the vertical direction, the structural strength, guiding accuracy and driving capability of the three-dimensional motion measuring device are required to be high. However, this utility model realizes the active lifting and lowering of the sample in the vertical direction by setting the sample lifting mechanism 2, which is beneficial to significantly reduce the motion load of the three-dimensional motion measuring mechanism 1, simplify the structural setting of the three-dimensional motion measuring mechanism 1, and effectively reduce manufacturing costs and control difficulty.

[0022] Furthermore, the sample lifting mechanism 2 is designed to allow the measuring head 10 to adjust its measuring position more flexibly, reducing the vertical travel of the measuring head 10, thereby improving measurement efficiency and shortening measurement time.

[0023] Optionally, in some embodiments, the drive motor 23 is a stepper motor. Stepper motors have high positioning accuracy and can precisely control the rotation angle by controlling the number of pulses, thereby accurately driving the lifting column 22 to lift the support platform 21, which helps to meet the requirements of the sample lifting mechanism 2 for lifting position accuracy.

[0024] Optionally, in some embodiments, the drive motor 23 is a DC geared motor, which has a large output torque and can provide sufficient power for the lifting column 22 to rise and fall.

[0025] Furthermore, as a preferred embodiment of this utility model and not a limitation thereof, the drive motor 23 is a servo motor. The servo motor has good speed regulation performance and response speed, and can quickly respond to control signals, thereby realizing precise control of the lifting speed and position of the lifting column 22. In addition, the servo motor can make the lifting action of the support platform 21 more stable and rapid, which is conducive to efficient cooperation with the measuring head 10 of the three-dimensional motion measuring mechanism 1, and helps to improve the smoothness of the overall measurement process.

[0026] like Figures 1 to 9 The support platform 21 shown is provided with a sample fixing structure 211, which is used to fix the sample to be tested during the lifting and lowering of the support platform 21. Furthermore, when the support platform 21 is rapidly or frequently raised and lowered in the vertical direction under the drive of the drive motor 23 and the lifting column 22, it will generate acceleration, vibration or inertial force, which may easily cause the sample to be tested to loosen or even slip. By setting the sample fixing structure 211, the sample can be effectively and stably fixed on the support platform 21, avoiding displacement, tilting or falling caused by movement, and ensuring the safety and continuity of the measurement process.

[0027] Furthermore, since the sample is firmly fixed, it will not shift in position or change in posture during the lifting and lowering process, which reduces measurement errors caused by sample movement and makes the measurement data more reliable.

[0028] Furthermore, during the lifting and lowering process of the support platform 21, if the sample is not properly secured, it may collide or rub against surrounding components, causing damage to the sample surface and affecting the integrity of the sample. The sample fixing structure 211 can firmly fix the sample on the support platform 21, avoiding accidental damage to the sample during the lifting and lowering process.

[0029] Optionally, in some embodiments, the sample fixing structure 211 is a clamping structure consisting of two opposing elastic grippers. The inner side of the grippers is provided with an anti-slip pad. In use, the two grippers are brought closer together by manual or electric drive, and the clamping force of the grippers is used to fix the sample to be tested on the support stage 21.

[0030] Optionally, in some embodiments, the sample fixing structure 211 includes a plurality of adsorption holes disposed on the upper surface of the support stage 21. The adsorption holes are connected to an external vacuum pump through pipes. When the vacuum pump is working, a negative pressure is generated in the adsorption holes, thereby adsorbing and fixing the sample to be tested on the support stage 21.

[0031] Furthermore, as a preferred embodiment of the present invention and not a limitation thereof, the sample fixing structure 211 includes a fixing groove 2111 that is adapted to the shape of the sample to be tested.

[0032] like Figures 1 to 9 A connecting mechanism 24 is provided between the output end of the drive motor 23 and the lifting column 22, and the lifting column 22 is detachably connected to the output end of the drive motor 23 through the connecting mechanism 24; Furthermore, when the device needs to be assembled or repaired, the detachable connection mechanism 24 can simplify the installation process of the drive motor 23 and the lifting column 22, reduce the difficulty of operation, and if a certain component fails, the user can quickly separate the two and repair or replace the faulty component separately without disassembling the whole, which is conducive to improving maintenance efficiency.

[0033] Furthermore, during equipment transportation, the drive motor 23 and the lifting column 22 can be separated through the detachable connection mechanism 24, which can reduce the overall size and weight of the equipment, thus reducing transportation difficulty and cost. At the same time, the separated parts are easier to fix and protect during transportation, reducing the risk of damage caused by factors such as collision and vibration.

[0034] Optionally, in some embodiments, the connecting mechanism 24 includes an external threaded connector disposed at the output end of the drive motor 23 and an internal threaded hole disposed at the end of the lifting column 22. The external threaded connector is adapted to the internal threaded hole. By screwing the external threaded connector into the internal threaded hole, the connection between the lifting column 22 and the drive motor 23 can be completed. Reverse rotation can achieve separation.

[0035] Optionally, in some embodiments, the connecting mechanism 24 includes a flexible coupling. The two ends of the flexible coupling are respectively provided with connecting holes adapted to the output shaft of the drive motor 23 and the end of the lifting column 22. The connecting holes are provided with keyways. During installation, the output shaft of the drive motor 23 and the end of the lifting column 22 are respectively inserted into the connecting holes at both ends of the coupling. The circumferential fixation is achieved by the cooperation of the key and the keyway. Then, the shaft is tightened with a set screw to prevent axial sliding. During disassembly, the shaft can be separated by loosening the set screw and pulling out the shaft.

[0036] Furthermore, as a preferred embodiment of the present invention and not a limitation thereof, the connecting mechanism 24 includes two flanges respectively fixed to the output end of the drive motor 23 and the end of the lifting column 22. The flanges are provided with corresponding bolt holes. The bolts pass through the bolt holes of the two flanges and are tightened with nuts to achieve a detachable connection between the two.

[0037] like Figures 1 to 9 The sample lifting mechanism 2 shown includes a sealing mounting base 25 disposed on the outer wall of the lifting column 22, and a skeleton oil seal 251 for maintaining the airtightness of the vacuum chamber 9 is provided between the sealing mounting base 25 and the lifting column 22. Furthermore, the skeleton oil seal 251 can tightly fit the gap between the outer wall of the lifting column 22 and the sealing mounting seat 25, preventing gas leakage inside the vacuum chamber 9 and preventing external air from entering the chamber, ensuring that the chamber always maintains the required vacuum environment and providing stable vacuum conditions for sample measurement.

[0038] Furthermore, a stable vacuum environment can avoid measurement interference caused by gas leakage or intrusion of external air, reduce the impact of environmental factors on sample properties and the detection accuracy of the measuring head 10, and make the measurement data more accurate.

[0039] Furthermore, the skeleton oil seal 251 can reduce the friction and wear between the lifting column 22 and the sealing mounting seat 25 during the lifting process, and at the same time prevent dust, impurities and other contaminants from entering the mating gap between the two, thus playing a protective role, which helps to reduce component wear and effectively extend the overall service life of the sample lifting mechanism 2.

[0040] Specifically, a connecting seat is provided inside the vacuum chamber 9, and the connecting seat is fixedly installed inside the vacuum chamber 9. The sealing mounting seat 25 is connected to the connecting seat by a threaded connection, and a sealing ring is provided on the connection surface of the sealing mounting seat 25 and the connecting seat.

[0041] like Figures 1 to 9 The sample lifting mechanism 2 shown includes a pressure plate 26 disposed on the side of the sealed mounting base 25 away from the support platform 21. The pressure plate 26 is sleeved on the outer periphery of the lifting column 22 and is used to guide the lifting movement of the lifting column 22. Furthermore, the lifting column 22 reciprocates vertically under the drive of the drive motor 23. If there is a lack of effective guidance, it is easy to sway, wobble or tilt, affecting the stability of the support platform 21. By setting the pressure plate 26 and sleeved on the outer periphery of the lifting column 22, a radial constraint structure is formed, which can effectively guide the lifting column 22 to move in a straight line along the axial direction. This is beneficial to significantly improve its linearity and trajectory stability, and avoid jamming or wear caused by uneven load.

[0042] Furthermore, if the guide is only achieved by the skeleton oil seal 251 at the sealing mounting seat 25, it will lead to uneven force on the oil seal lip, accelerated wear, and shortened seal life. By introducing an independent pressure plate 26 for mechanical guidance, the motion guiding function and sealing function can be separated, so that the skeleton oil seal 251 mainly undertakes the sealing function, reducing the lateral force it bears, thereby extending the service life of the seal and improving the long-term reliability of the vacuum system.

[0043] Furthermore, since the lifting column 22 is more stable in its lifting and lowering, the positional accuracy of the bearing platform 21 is improved, which can more accurately cooperate with the measuring head 10 of the three-dimensional motion measuring mechanism 1 to complete the detection action, reduce the measurement deviation caused by sample shaking, and further ensure the accuracy of the measurement results.

[0044] Specifically, the pressure plate 26 is installed on the side of the sealing mounting base 25 away from the support platform 21 by means of a threaded connection.

[0045] like Figures 1 to 9 The sample fixing structure 211 shown includes several fixing grooves 2111, which are arranged at intervals around the circumference of the support platform 21. Furthermore, by setting multiple fixed slots 2111, multiple samples to be tested can be placed simultaneously during a single sample loading process. In conjunction with the three-dimensional motion measurement mechanism 1 and the sample lifting mechanism 2, continuous, automatic, and in-situ multi-point detection of all samples can be achieved, which is beneficial to significantly improve the utilization rate of the equipment.

[0046] Furthermore, by arranging the fixing grooves 2111 at intervals around the circumference of the support stage 21 to form a symmetrical or uniformly distributed array structure, the effective space of the circular support stage 21 can be maximized, the central area can be avoided from being idle, the sample arrangement density can be increased, and good structural balance can be maintained.

[0047] Optionally, each fixed slot 2111 can serve as a standardized sample mounting position. With the help of preset coordinate parameters, the measuring head 10 can perform programmed automatic positioning and scanning based on the position of the fixed slot 2111 without repeated positioning. This simplifies the control logic and helps improve the automation level and repeatability of the detection process.

[0048] like Figures 1 to 9The connecting mechanism 24 shown includes a connecting flange 241 located at the output end of the drive motor 23 and a mounting flange 242 located on the side of the lifting column 22 near the drive motor 23. The connecting flange 241 and the mounting flange 242 are threaded together so that the lifting column 22 is detachably connected to the output end of the drive motor 23. Furthermore, the connecting flange 241 and the mounting flange 242 are connected by threads. The self-locking characteristic of the threads can form a stable connection structure, which can effectively transmit the torque of the drive motor 23 to the lifting column, ensuring that the lifting column 22 will not loosen or slip during the lifting process, and ensuring the stable operation of the sample lifting mechanism 2.

[0049] Furthermore, through the threaded connection between the connecting flange 241 and the mounting flange 242, the connection and separation of the lifting column 22 and the drive motor 23 can be completed without the use of complicated tools. The disassembly and assembly operations are simple and efficient. When it is necessary to replace the motor, repair the lifting components or clean the cavity, there is no need for the overall disassembly device, which helps to significantly improve the maintainability and efficiency of the equipment.

[0050] Furthermore, the connecting flange 241 and the mounting flange 242 can be machined to ensure high flatness and hole accuracy. During assembly, the bolts are tightened evenly in the circumferential direction, which helps to achieve good alignment between the motor output shaft and the lifting column 22, reducing vibration, wear or movement jamming caused by eccentricity, and improving the stability of equipment operation.

[0051] like Figures 1 to 9 The three-dimensional motion measurement mechanism 1 shown includes a first moving module 41 arranged along a first direction and a second moving module 42 arranged along a second direction. The first moving module 41 includes a first driving mechanism and a first sliding mechanism 81. The first driving mechanism includes a first driving motor 411, a first lead screw 412 connected to the output end of the first driving motor 411, two first bearing seats 414 arranged opposite to each other along the first direction, and a first nut pair 71 mounted on the second moving module 42. The two sides of the first lead screw 412 are rotatably mounted in the two first bearing seats 414 respectively, and the first lead screw 412 is threadedly engaged with the first nut pair 71. The first sliding mechanism 81 includes a first guide rail 811 and a first slider 812 mounted on the second moving module 42 and slidably connected to the first guide rail 811. Specifically, when the first drive motor 411 starts, the output end of the first drive motor 411 drives the first lead screw 412 to rotate within two opposing first bearing seats 414. Since the first lead screw 412 is threadedly engaged with the first nut pair 71 mounted on the second moving module 42, the rotational motion of the first lead screw 412 is converted into the linear motion of the first nut pair 71, thereby driving the second moving module 42 to move along the first direction. At the same time, the first slider 812 mounted on the second moving module 42 slides synchronously on the first guide rail 811 on the mounting base plate 21, providing guidance and support for the movement of the second moving module 42, and realizing the stable movement of the second moving module 42 along the first direction.

[0052] Furthermore, the first drive motor 411 drives the first lead screw 412 to rotate. The rotational motion is converted into linear motion through the threaded engagement between the first lead screw 412 and the first nut pair 71. The transmission accuracy is high, which can realize the precise displacement control of the second moving module 42 and help meet the equipment's requirements for movement accuracy.

[0053] Furthermore, in the first sliding mechanism 81, the first slider 812 is slidably connected to the first guide rail 811, providing stable guidance for the movement of the second moving module 42, while distributing the force, reducing swaying and offset during the movement, and helping to ensure the smoothness of the movement.

[0054] Preferably, there are two first guide rails 811, which are arranged parallel to each other along a first direction. The first slider 812 is arranged corresponding to the first guide rails 811 and is located at the bottom of the second moving seat 420 in the second moving module 42. By setting two parallel first guide rails 811, more stable guidance can be provided, which helps to reduce the offset and shaking during the movement process and ensure the precise movement of the moving module and the measuring head 10. Secondly, the two parallel first guide rails 811 can provide stronger structural rigidity, reduce deformation caused by load or movement, and ensure the stability of the equipment under high load conditions.

[0055] like Figures 1 to 9The three-dimensional motion measurement mechanism 1 shown includes a third moving module 43 arranged along a third direction. The second moving module 42 includes a second driving mechanism, a second sliding mechanism 82, and a second moving seat 420 connected to the first nut pair 71. The second driving mechanism includes a second driving motor 421 mounted on the second moving seat 420, a second lead screw 422 connected to the output end of the second driving motor 421, two second bearing seats 424 arranged opposite to each other along a second direction and respectively mounted on the second moving seat 420, and a second nut pair 72 mounted on the third moving module 43. The two sides of the second lead screw 422 are rotatably mounted in the two second bearing seats 424, and the second lead screw 422 is threadedly engaged with the second nut pair 72. The second sliding mechanism 82 includes a second guide rail 821 mounted on the second moving seat 420, and a second slider 822 mounted on the third moving module 43 and slidably connected to the second guide rail 821. Specifically, when the second drive motor 421 starts, the output end of the second drive motor 421 drives the second lead screw 422 to rotate within the two second bearing seats 424 arranged opposite each other in the second direction on the second moving seat 420. Since the second lead screw 422 is threadedly engaged with the second nut pair 72 installed on the third moving module 43, the rotational motion of the second lead screw 422 is converted into the linear motion of the second nut pair 72, thereby driving the third moving module 43 to move in the second direction. At the same time, the second slider 822 installed on the third moving module 43 slides synchronously on the second guide rail 821 on the second moving seat 420, providing guidance and support for the movement of the third moving module 43, realizing the stable movement of the third moving module 43 in the second direction. The entire second moving module 42 is connected to the first moving module 41 through the second moving seat 420 and can move synchronously with the first moving module 41.

[0056] Specifically, the first nut assembly 71 is mounted on the second movable seat 420, and the second movable seat 420 is connected to the first lead screw 412 through the first nut assembly 71, so that the second movable seat 420 can move relative to the first lead screw 412 along the X-axis.

[0057] Furthermore, the second moving module 42 drives the third moving module 43 to move along the second direction through the second driving mechanism, and the whole is connected to the first moving module 41 through the second moving seat 420. It can move along the first direction with the first moving module 41, thereby realizing the precise displacement adjustment of the third moving module in two different directions, which is beneficial to meeting the equipment's need for multi-dimensional movement.

[0058] Furthermore, in the second sliding mechanism 82, the sliding cooperation between the second slider 822 and the second guide rail 821 provides precise guidance for the movement of the third moving module 43, effectively restricts its movement trajectory, avoids deviation, and helps ensure that the third moving module 43 moves smoothly along the second direction, which helps reduce vibration and noise during the movement process.

[0059] Preferably, there are two second guide rails 821, which are arranged parallel to each other along the second direction. The second slider 822 is arranged corresponding to the second guide rails 821 and is located at the bottom of the third moving panel 433 in the third moving module 43. By setting two parallel second guide rails 821, more stable guidance can be provided, which helps to reduce the offset and shaking during the movement process and ensure the accurate movement of the moving module and the measuring head 10. Secondly, the two parallel second guide rails 821 can provide stronger structural rigidity, reduce the deformation caused by load or movement, and ensure the stability of the equipment under high load conditions.

[0060] like Figures 1 to 9 A measuring moving base 401 is provided between the measuring head 10 and the third moving module 43. The measuring head 10 is connected to the third moving module 43 through the measuring moving base 401. The third moving module 43 includes a third driving mechanism, a third sliding mechanism 83, a third moving panel 433 connected to the second nut pair 72, and a third mounting base 430 connected to the third moving panel 433. The third driving mechanism includes a third driving motor 431 mounted on the third mounting base 430 and a third lead screw connected to the output end of the third driving motor 431. 432. Two third bearing seats 434 are arranged opposite to each other along a third direction and are respectively disposed on the third mounting base 430, and a third nut assembly 73 is installed on the measuring moving base 401. The two sides of the third lead screw 432 are respectively rotatably installed in the two third bearing seats 434, and the third lead screw 432 is threadedly engaged with the third nut assembly 73. The third sliding mechanism 83 includes a third guide rail 831 installed on the third mounting base 430 and a third slider 832 installed on the measuring moving base 401 and slidably connected to the third guide rail 831. Specifically, when the third drive motor 431 starts, the output end of the third drive motor 431 drives the third lead screw 432 to rotate within two third bearing seats 434 arranged opposite each other along the third third direction on the third mounting base 430. Since the third lead screw 432 is threadedly engaged with the third nut pair 73 installed on the measuring moving base 401, the rotational motion of the third lead screw 432 is converted into the linear motion of the third nut pair 73, thereby driving the measuring moving base 401 and the measuring head 10 connected to it to move along the third third direction. At the same time, the third slider 832 installed on the measuring moving base 401 slides synchronously on the third guide rail 831 on the third mounting base 430, providing guidance and support for the movement of the measuring head 10, realizing the stable movement of the measuring head 10 along the third third direction. The entire third moving module 43 is connected to the second moving module 42 through the third moving panel 433 and can move synchronously with the second moving module 420.

[0061] Specifically, the second nut assembly 72 is mounted on the third movable panel 433, and the third movable panel 433 is connected to the second lead screw 422 through the second nut assembly 72, so that the third movable panel 433 can move relative to the Y-axis; similarly, the third nut assembly 73 is mounted on the measuring movable seat 401, and the measuring movable seat 401 is connected to the third lead screw 432 through the third nut assembly 73, so that the measuring movable seat 401 can move relative to the Z-axis, thereby driving the measuring head 10 to move in the Z-axis direction.

[0062] Furthermore, the third moving module 43 drives the measuring head 10 to move along a third direction through the third driving mechanism, and the whole is connected to the second moving module 42 through the third moving panel 433. It can move along the second direction with the second moving module 42, and at the same time move along the first direction with the first moving module 41, so as to realize the precise displacement adjustment of the measuring head 10 in three-dimensional space, which is beneficial to meet the needs of multi-directional movement in complex measurement scenarios.

[0063] Furthermore, in the third sliding mechanism 83, the sliding cooperation between the third slider 832 and the third guide rail 831 provides precise guidance for the movement of the measuring moving seat 401 and the measuring head 10, effectively constrains the movement trajectory, avoids deviation or shaking, helps ensure that the measuring head 10 remains stable during movement, and helps reduce measurement errors caused by vibration.

[0064] Preferably, there are two third guide rails 831, which are arranged parallel to each other along a third direction. The third slider 832 is arranged corresponding to the third guide rails 831 and is located at the bottom of the measuring moving seat 401 in the third moving module 43. By setting two parallel third guide rails 831, more stable guidance can be provided, which helps to reduce the offset and shaking during the movement process and ensure the accurate movement of the moving module and the measuring head 10. Secondly, the two parallel third guide rails 831 can provide stronger structural rigidity, reduce deformation caused by load or movement, and ensure the stability of the equipment under high load conditions.

[0065] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A three-dimensional motion measurement device with a sample lifting platform, comprising a three-dimensional motion measurement mechanism (1) and a sample lifting mechanism (2) disposed in a vacuum cavity (9), characterized in that: The three-dimensional motion measurement mechanism (1) is located on one side of the sample lifting mechanism (2). The three-dimensional motion measurement mechanism (1) is equipped with a measuring head (10) for measuring the sample. The sample lifting mechanism (2) includes a support platform (21), a lifting column (22), and a drive motor (23). The support platform (21) is used to support the sample to be tested. One end of the lifting column (22) is connected to the support platform (21), and the other end of the lifting column (22) is connected to the drive motor (23). When the drive motor (23) is working, the drive motor (23) drives the lifting column (22) to rise and fall in the vertical direction. The support platform (21) and the lifting column (22) rise and fall synchronously to cooperate with the measuring head (10) to measure the sample to be tested.

2. The three-dimensional motion measurement device with a sample lifting platform according to claim 1, characterized in that: The support platform (21) is provided with a sample fixing structure (211), which is used to fix the sample to be tested during the lifting and lowering of the support platform (21).

3. The three-dimensional motion measurement device with a sample lifting platform according to claim 1, characterized in that: A connecting mechanism (24) is provided between the output end of the drive motor (23) and the lifting column (22), and the lifting column (22) is detachably connected to the output end of the drive motor (23) through the connecting mechanism (24).

4. The three-dimensional motion measuring device with a sample lifting platform according to claim 1, characterized in that: The sample lifting mechanism (2) includes a sealing mounting seat (25) disposed on the outer wall of the lifting column (22), and a skeleton oil seal (251) for maintaining the sealing of the vacuum chamber (9) is provided between the sealing mounting seat (25) and the lifting column (22).

5. The three-dimensional motion measuring device with a sample lifting platform according to claim 4, characterized in that: The sample lifting mechanism (2) includes a pressure plate (26) disposed on the side of the sealed mounting base (25) away from the bearing platform (21). The pressure plate (26) is sleeved on the outer periphery of the lifting column (22) and is used to guide the lifting movement of the lifting column (22).

6. The three-dimensional motion measuring device with a sample lifting platform according to claim 2, characterized in that: The sample fixing structure (211) includes several fixing grooves (2111), and several fixing grooves (2111) are arranged at intervals around the circumference of the support platform (21).

7. The three-dimensional motion measurement device with a sample lifting platform according to claim 3, characterized in that: The connecting mechanism (24) includes a connecting flange (241) located at the output end of the drive motor (23) and a mounting flange (242) located on the side of the lifting column (22) near the drive motor (23). The connecting flange (241) and the mounting flange (242) are threaded together so that the lifting column (22) is detachably connected to the output end of the drive motor (23).

8. The three-dimensional motion measuring device with a sample lifting platform according to claim 1, characterized in that: The three-dimensional motion measurement mechanism (1) includes a first moving module (41) arranged along a first direction and a second moving module (42) arranged along a second direction. The first moving module (41) includes a first driving mechanism and a first sliding mechanism (81). The first driving mechanism includes a first driving motor (411), a first lead screw (412) connected to the output end of the first driving motor (411), two first bearing seats (414) arranged opposite to each other along the first direction, and a first nut pair (71) installed on the second moving module (42). The two sides of the first lead screw (412) are rotatably installed in the two first bearing seats (414), and the first lead screw (412) is threadedly engaged with the first nut pair (71). The first sliding mechanism (81) includes a first guide rail (811) and a first slider (812) installed on the second moving module (42) and slidably connected to the first guide rail (811).

9. The three-dimensional motion measuring device with a sample lifting platform according to claim 8, characterized in that: The three-dimensional motion measurement mechanism (1) includes a third moving module (43) arranged along a third direction. The second moving module (42) includes a second driving mechanism, a second sliding mechanism (82), and a second moving seat (420) connected to the first nut pair (71). The second driving mechanism includes a second driving motor (421) mounted on the second moving seat (420), a second lead screw (422) connected to the output end of the second driving motor (421), two second bearing seats (424) arranged opposite to each other along a second direction and respectively mounted on the second moving seat (420), and a second nut pair (72) mounted on the third moving module (43). The two sides of the second lead screw (422) are rotatably mounted in the two second bearing seats (424), and the second lead screw (422) is threadedly engaged with the second nut pair (72). The second sliding mechanism (82) includes a second guide rail (821) mounted on the second moving seat (420) and a second slider (822) mounted on the third moving module (43) and slidably connected to the second guide rail (821).

10. The three-dimensional motion measuring device with a sample lifting platform according to claim 9, characterized in that: A measuring moving base (401) is provided between the measuring head (10) and the third moving module (43). The measuring head (10) is connected to the third moving module (43) through the measuring moving base (401). The third moving module (43) includes a third driving mechanism, a third sliding mechanism (83), a third moving panel (433) connected to the second nut pair (72), and a third mounting base (430) connected to the third moving panel (433). The third driving mechanism includes a third driving motor (431) mounted on the third mounting base (430) and a third lead screw connected to the output end of the third driving motor (431). 432) Two third bearing seats (434) are arranged opposite to each other along a third direction and are respectively arranged on the third mounting base (430), and a third nut pair (73) is installed on the measuring moving base (401). The two sides of the third lead screw (432) are rotatably installed in the two third bearing seats (434), and the third lead screw (432) is threadedly engaged with the third nut pair (73). The third sliding mechanism (83) includes a third guide rail (831) installed on the third mounting base (430) and a third slider (832) installed on the measuring moving base (401) and slidably connected to the third guide rail (831).

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