Optical element adjusting device, optical system, and semiconductor device

Abstract

The application discloses an optical element adjusting device, an optical system and a semiconductor device, and belongs to the technical field of optical precision machinery. The device comprises a lens barrel, an optical element is accommodated in the lens barrel, and a first locking hole is formed in the lens barrel; a rotating barrel is sleeved on the outer periphery of the lens barrel, a threaded section is arranged on the outer barrel wall of the rotating barrel, and a guide groove extending in the circumferential direction is formed in the rotating barrel; a flexible assembly is sleeved on the outer periphery of the rotating barrel, the flexible assembly comprises a protruding piece and a flexible piece connected with the protruding piece, a thread is arranged on the inner wall of the protruding piece and matched with the threaded section, and the flexible piece comprises a rigid part and an elastic part, and a slot is arranged on the elastic part. The optical element adjusting device is compact in structure, simple in debugging method, can realize precise adjustment of the optical element in six degrees of freedom and full attitude, and guarantees the imaging quality and assembly precision of the optical system.

Description

Technical Field

[0001] This application relates to the field of optical precision machinery technology, and in particular to an optical element adjustment device, an optical system, and a semiconductor device. Background Technology

[0002] With the development of precision optics technology, the assembly and adjustment accuracy of optical components directly determines the final performance of high-end optical systems. Most existing adjustable flexible mechanisms are based on two-degree-of-freedom crossbeam structures. These not only offer limited adjustable degrees of freedom, making it difficult to meet the precision attitude adjustment requirements of complex optical systems with multiple degrees of freedom (such as six degrees of freedom), but also often require a large radial installation space to ensure stroke and stiffness, which contradicts the trend towards miniaturization and integration of optical equipment. Especially for components with strict aperture requirements, such as mirror groups, traditional crossbeam structures easily obstruct the optical path or fail to provide effective fixation, limiting their application in compact optical systems. On the other hand, existing flexible mechanisms often employ integrated structures manufactured by wire cutting or electrical discharge machining. While this design eliminates assembly gaps, during multi-degree-of-freedom coordinated adjustment, due to the inherent symmetry and coupling characteristics of the structure, strong coupling effects often exist between different degrees of freedom. That is, adjustment in one direction easily triggers parasitic displacements (crosstalk) in other directions. This coupling error greatly increases the difficulty of adjustment and severely reduces the accuracy and efficiency of adjustment. Therefore, there is an urgent need for an optical element adjustment device that is compact in structure, can meet the requirements of large aperture, and can effectively reduce the coupling error of multi-degree-of-freedom adjustment. Utility Model Content

[0003] This application provides an optical element adjustment device, an optical system, and a semiconductor device. The optical element adjustment device has a compact structure and a simple debugging method, and can achieve precise adjustment of the six degrees of freedom of the optical element in all attitudes, ensuring the imaging quality and assembly accuracy of the optical system.

[0004] To achieve the above objectives, according to a first aspect of this application, an optical element adjustment device is provided, comprising: The lens barrel contains optical elements and has a first locking hole. A rotating cylinder is fitted around the outer periphery of the lens tube. The outer wall of the rotating cylinder is provided with a threaded section, and a guide groove extending circumferentially is provided on the rotating cylinder. A flexible component is fitted around the outer periphery of a rotating cylinder. The flexible component includes a protrusion and a flexible component connected to the protrusion. The inner wall of the protrusion is provided with a thread that mates with a threaded section. The flexible component includes a rigid part and an elastic part, and the elastic part is provided with a slot.

[0005] In some embodiments of this application, the protrusion is a hollow annular structure, and a second locking hole is provided on the protrusion; The protruding part and the flexible part are integrally molded structures.

[0006] In some embodiments of this application, in the flexible element: The rigid section includes a first rigid beam and a second rigid beam; The elastic part includes a first elastic beam, a second elastic beam, a third elastic beam, and a fourth elastic beam; The two ends of the first rigid beam are connected to the first elastic beam and the second elastic beam, respectively; The two ends of the second rigid beam are connected to the third and fourth elastic beams, respectively.

[0007] In some embodiments of this application, the first elastic beam and the second elastic beam are centrally symmetrical about the central axis of the protrusion; The third and fourth elastic beams are centrally symmetrical about the central axis of the protrusion. The extension direction of the first rigid beam is perpendicular to the extension direction of the second rigid beam.

[0008] In some embodiments of this application, a drive component is also included, which includes a first drive mechanism and a second drive mechanism; The first drive mechanism is configured to drive the first elastic beam and the second elastic beam to move synchronously along a first direction; The second drive mechanism is configured to drive the third elastic beam and the fourth elastic beam to move synchronously along the second direction.

[0009] In some embodiments of this application, each elastic beam of the elastic part has two slots at its end; The two slots are symmetrically distributed vertically.

[0010] In some embodiments of this application, the slots on the first elastic beam and the second elastic beam are centrally symmetrical about the central axis of the protrusion; The slots on the third and fourth elastic beams are centrally symmetrical about the central axis of the protrusion.

[0011] In some embodiments of this application, the slots on the first elastic beam and the second elastic beam are configured to undergo rotational deformation about an axis parallel to a first direction; The slots on the third and fourth elastic beams are configured to undergo rotational deformation about an axis parallel to the second direction.

[0012] In some embodiments of this application, the flexible member includes a first opening formed on a first sidewall and a second opening formed on a second sidewall; The first opening allows the first adjusting plate to be inserted, and one end of the first adjusting plate acts on the slots on the first elastic beam and the second elastic beam to undergo rotational deformation. The second opening allows the second adjusting plate to be inserted, and one end of the second adjusting plate rotates and deforms due to the slots on the third and fourth elastic beams.

[0013] In some embodiments of this application, a second locking hole is also provided on the rotating cylinder; The threaded section engages with the inner wall's thread, and is locked by fasteners passing through the second locking hole to adjust and fix the rotating cylinder in a third-direction upward position.

[0014] In some embodiments of this application, screws pass through a first locking hole and a guide groove to fix the lens barrel and the rotating barrel in a third-party upward position; The screw rotates along the guide groove and is locked by a fastener passing through the third locking hole to adjust and fix the rotation angle of the lens barrel about an axis parallel to the third direction.

[0015] In some embodiments of this application, a sealing ring is also provided between the lens barrel and the flexible component.

[0016] In some embodiments of this application, a displacement detection component is also included, which includes a first displacement detection mechanism and a second displacement detection mechanism; The first displacement detection mechanism is configured to detect the displacement of the flexible member along a first direction; The second displacement detection mechanism is configured to detect the displacement of the flexible member along the second direction.

[0017] According to a second aspect of this application, an optical system is also provided, the optical system comprising: Optical element adjustment device as described in any of the above technical solutions.

[0018] According to a third aspect of this application, a semiconductor device is also provided, the semiconductor device comprising: The optical element adjustment device described in any of the above technical solutions, or the optical system described in the above technical solutions.

[0019] In the optical element adjustment device, optical system, and semiconductor device of this application embodiment, the above technical solution has at least the following beneficial effects: The outer wall of the rotating cylinder is provided with a threaded section, and the inner wall of the protrusion of the flexible component is provided with a mating internal threaded section. Through the threaded engagement between the rotating cylinder and the flexible component, the rotating cylinder can be driven to generate axial displacement relative to the flexible component along a third direction, thereby driving the first lens barrel to synchronously adjust its position in the third direction. A first locking hole is provided on the first lens barrel, and a guide groove is provided circumferentially on the outer wall of the rotating cylinder. The fastener passes through the first locking hole and is fitted into the guide groove, rotating and adjusting along an axis parallel to the third direction. During this process, the guide groove provides precise guidance and limiting for the fastener, ensuring that the first lens barrel can be adjusted with high precision around an axis parallel to the third direction. The flexible component includes a rigid part and an elastic part that is more easily deformed than the rigid part. Utilizing the elastic deformation of the elastic part, the flexible component and its supported rotating cylinder and the first lens barrel as a whole can be moved along a first direction or a second direction, thereby realizing the position adjustment of the first lens barrel in the first direction or the second direction. Meanwhile, the elastic part is provided with a slotted structure, enabling it to generate rotational deformation about an axis parallel to the first direction or about an axis parallel to the second direction, thereby realizing the adjustment of the rotation angle of the first lens barrel about an axis parallel to the first direction or about an axis parallel to the second direction. As a result, the optical element adjustment device provided in this application has a compact structure and a simple debugging method, and can realize precise adjustment of the optical element in six degrees of freedom, ensuring the imaging quality and assembly accuracy of the optical system.

[0020] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0023] Figure 1 This is one of the structural schematic diagrams of the optical element adjustment device provided in the embodiments of this disclosure; Figure 2 This is a second schematic diagram of the optical element adjustment device provided in the embodiments of this disclosure; Figure 3This is a cross-sectional schematic diagram of the optical element adjustment device provided in the embodiments of this disclosure; Figure 4 This is a perspective view of the flexible component in the optical element adjustment device provided in the embodiments of this disclosure; Figure 5 This is a top view schematic diagram of the flexible component in the optical element adjustment device provided in the embodiments of this disclosure; Figure 6 This is a cross-sectional schematic diagram of the flexible component in the optical element adjustment device provided in the embodiments of this disclosure; Figure 7 This is the third schematic diagram of the optical element adjustment device provided in the embodiments of this disclosure.

[0024] Explanation of reference numerals in the attached figures: 1-Optical element adjustment device; 2-Eyepiece barrel; 21-First locking hole; 22-First eyepiece barrel; 23-Second eyepiece barrel; 3-Optical element; 31-First optical element; 32-Second optical element; 4-Rotating cylinder; 41-Outer cylinder wall; 42-Threaded section; 43-Guide groove; 44-Third locking hole; 5-Flexible component; 51-Protrusion; 511-Inner wall; 512-Second locking hole; 52-Flexible component; 521-Rigid part; 5211-First rigid beam; 5212-Second rigid beam; 522-Elastic part; 5221-First elastic beam; 52211-First slot; 5222-Second elastic beam; 5223-Third elastic beam; 5224-Fourth elastic beam; 523-First sidewall; 5231-First opening; 5232-Fourth opening; 524-Second sidewall; 5241-Second opening; 525-Third sidewall; 5251-Third opening; 526-Fourth sidewall; 6-Drive component; 61-First drive mechanism; 62-Second drive mechanism; 71 - First adjusting plate; 72 - Second adjusting plate; 8-Sealing ring; 9-Displacement detection component; 91-First displacement detection mechanism; 92-Second displacement detection mechanism; 10-First return spring; 11-Second return spring; 12-Positioning rod; X - First direction; Y - Second direction; Z - Third direction. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship according to the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0027] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0028] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, a direct connection, or an indirect connection through an intermediate medium; or they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0029] This application provides an optical element adjustment device, an optical system, and a semiconductor device, which will be described in detail below. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments of this application. Furthermore, in the following embodiments, the descriptions of each embodiment have their own emphasis; parts not described in detail in a certain embodiment can be referred to in the relevant descriptions of other embodiments.

[0030] like Figures 1 to 5As shown, the optical element adjustment device 1 of this application includes a lens barrel 2, a rotating cylinder 4, and a flexible component 5. The lens barrel 2 houses the optical element 3, and a first locking hole 21 is provided on the lens barrel 2. The rotating cylinder 4 is sleeved on the outer periphery of the lens barrel 2, and a threaded section 42 is provided on the outer wall 41 of the rotating cylinder 4. A guide groove 43 extending circumferentially is provided on the rotating cylinder 4. The flexible component 5 is sleeved on the outer periphery of the rotating cylinder 4. The flexible component 5 includes a protrusion 51 and a flexible component 52 connected to the protrusion 51. The inner wall 511 of the protrusion 51 is provided with a thread that mates with the threaded section 42. The flexible component 52 includes a rigid part 521 and an elastic part 522, and a slot is provided on the elastic part 522. In this application, a spatial rectangular coordinate system is established, wherein the first direction is defined as the X direction, the second direction is defined as the Y direction, and the third direction is defined as the Z direction. The X direction, Y direction, and Z direction are mutually perpendicular.

[0031] In this technical solution, such as Figure 1 As shown, the optical element adjustment device 1 adopts a multi-layer sleeve structure, with the lens tube 2 located on the innermost side. A rotating cylinder 4 is sleeved around its outer periphery, and a flexible component 5 is further sleeved around the outer periphery of the rotating cylinder 4. Figure 3 As shown, the lens barrel 2 includes a first lens barrel 22 and a second lens barrel 23, wherein the first lens barrel 22 supports and houses the first optical element 31, and the second lens barrel 23 supports and houses the second optical element 32.

[0032] like Figure 2 and Figure 3 As shown, the outer wall 41 of the rotating cylinder 4 is provided with a threaded section 42, and the inner wall 511 of the protrusion 51 of the flexible component 5 is provided with an internal threaded section that matches it. Through the threaded engagement between the rotating cylinder 4 and the flexible component 5, the rotating cylinder 4 can be driven to generate an axial displacement relative to the flexible component 5 in the third direction Z, thereby driving the first mirror tube 22 to synchronously adjust its position in the third direction Z.

[0033] like Figure 2 As shown, the first lens barrel 22 has a first locking hole 21, and the outer wall 41 of the rotating cylinder 4 has a guide groove 43 extending circumferentially. The fastener passes through the first locking hole 21 and fits into the guide groove 43, allowing for rotational adjustment along an axis parallel to the third direction Z. During this process, the guide groove 43 provides precise guidance and positioning for the fastener, ensuring that the first lens barrel 22 can be rotated with high precision around the axis parallel to the third direction Z. It should be noted that the fasteners in this solution include, but are not limited to, screws, bolts, pins, or rivets. In practical applications, other mechanical connectors capable of achieving the same fixing function can also be used according to specific requirements.

[0034] like Figures 1 to 5As shown, the flexible component 5 includes a rigid portion 521 and an elastic portion 522 that is more easily deformed than the rigid portion 521. Utilizing the elastic deformation of the elastic portion 522, the flexible component 5, its supported rotating cylinder 4, and the first lens barrel 22 can be moved as a whole along a first direction X or a second direction Y, thereby achieving position adjustment of the first lens barrel 22 in the first direction X or the second direction Y. Simultaneously, the elastic portion 522 has a slotted structure, enabling it to generate rotational deformation about an axis parallel to the first direction X or about an axis parallel to the second direction Y, thereby achieving adjustment of the rotation angle of the first lens barrel 22 about an axis parallel to the first direction X or about an axis parallel to the second direction Y.

[0035] As a result, the optical element adjustment device 1 provided in this application has a compact structure and a simple debugging method, and can realize precise adjustment of the six degrees of freedom of the optical element 3 in all attitudes, so as to ensure the imaging quality and assembly accuracy of the optical system.

[0036] It is understood that this application does not strictly limit the specific number of lens barrels 2, and their number can be flexibly configured according to actual assembly needs, and is not limited to the two in the above embodiments. At the same time, the type of optical element 3 housed by the lens barrel 2 can also be selected as needed, including but not limited to lenses, prisms, mirrors, and other optical components. In implementation scenarios containing multiple optical elements 3, the attitude of specific optical elements can be adjusted according to actual optical path adjustment needs.

[0037] In some embodiments, such as Figure 1 , Figure 3 and Figure 4 As shown, the protrusion 51 is a hollow annular structure, and a second locking hole 512 is provided on the protrusion 51. The protrusion 51 and the flexible part 52 are integrally formed.

[0038] In this technical solution, the protrusion 51 is embedded inside the flexible component 52, and the protrusion 51 has a hollow annular structure. Its internal space is used to support and accommodate the rotating cylinder 4 and the second lens barrel 23. A second locking hole 512 is provided on the cylinder wall of the protrusion 51 for fasteners to pass through, thereby realizing the locking and fixing of the relevant components. At the same time, the outer cylinder wall of the protrusion 51 is also provided with scale lines to indicate the rotation direction and rotation angle of the rotating cylinder 4 (and the first lens barrel 22), thereby facilitating the assembly and adjustment of the optical element 3.

[0039] It is understood that, based on the above embodiments, the protrusion 51 may not be embedded inside the flexible component 52, but may instead be positioned above the flexible component 52 according to actual assembly requirements. Furthermore, the inner diameter of the hollow annular structure of the protrusion 51 is adapted to the outer diameter of the rotating cylinder 4 to ensure effective fit between the two. In terms of manufacturing process, the protrusion 51 and the flexible component 52 can be manufactured using an integral molding process, or they can be molded separately according to actual needs and then fixed together by a connecting structure.

[0040] In some embodiments, such as Figure 5 and Figure 6 As shown, in the flexible member 52: the rigid part 521 includes a first rigid beam 5211 and a second rigid beam 5212, and the elastic part 522 includes a first elastic beam 5221, a second elastic beam 5222, a third elastic beam 5223, and a fourth elastic beam 5224. The two ends of the first rigid beam 5211 are connected to the first elastic beam 5221 and the second elastic beam 5222, respectively, and the two ends of the second rigid beam 5212 are connected to the third elastic beam 5223 and the fourth elastic beam 5224, respectively.

[0041] In this technical solution, the flexible component 52 is integrally formed into a rigid part 521 and an elastic part 522, and the rigid part 521 and the elastic part 522 are made of the same material. The first rigid beam 5211 and the second rigid beam 5212 are high-rigidity structures, not easily deformed; the first elastic beam 5221, the second elastic beam 5222, the third elastic beam 5223, and the fourth elastic beam 5224 are easily deformable structures. In terms of connection layout, the first rigid beam 5211 extends along the first direction X, with two elastic beams connected to each end; the second rigid beam 5212 extends along the second direction Y, with two more elastic beams connected to each end. By using a structure where the first rigid beam 5211 and the second rigid beam 5212 connect to multiple elastic beams, a stable guiding mechanism is formed. This alternating arrangement of rigid and elastic beams not only ensures the flexibility of the flexible component 52 in the first direction X and the second direction Y, enabling sensitive micro-displacement adjustment, but also utilizes the high stiffness of the rigid beams to constrain the degrees of freedom in other non-working directions, improving the structural stiffness and anti-interference capability of the flexible component 52 in non-adjustment directions, thereby achieving high-precision decoupled adjustment. As a result, compared to existing flexible deformation structures, the flexible component 52 structure provided in this solution is more streamlined. By using only two rigid beams, it effectively achieves displacement adjustment of the optical element 3 along the first direction X and the second direction Y, significantly reducing structural complexity while ensuring multi-degree-of-freedom adjustment functionality.

[0042] In some embodiments, such as Figures 4 to 6As shown, the first elastic beam 5221 and the second elastic beam 5222 are centrally symmetrical about the central axis OO' of the protrusion 51, and the third elastic beam 5223 and the fourth elastic beam 5224 are centrally symmetrical about the central axis OO' of the protrusion 51. The extension direction of the first rigid beam 5211 is perpendicular to the extension direction of the second rigid beam 5212.

[0043] In this technical solution, the specific structure of the flexible component 52 is as follows: the first elastic beam 5221 and the second elastic beam 5222 extend along the second direction Y, are parallel to each other, and form an axisymmetric structure; the third elastic beam 5223 and the fourth elastic beam 5224 extend along the first direction X, are parallel to each other, and form an axisymmetric structure. Furthermore, the extension direction of the first rigid beam 5211 is perpendicular to the extension direction of the second rigid beam 5212, thus forming an orthogonal arrangement in the plane.

[0044] In some embodiments, the optical element adjustment device 1 further includes a driving assembly 6, which includes a first driving mechanism 61 and a second driving mechanism 62. The first driving mechanism 61 is configured to drive a first elastic beam 5221 and a second elastic beam 5222 to move synchronously along a first direction X. The second driving mechanism 62 is configured to drive a third elastic beam 5223 and a fourth elastic beam 5224 to move synchronously along a second direction Y.

[0045] In this technical solution, the output end of the first driving mechanism 61 passes through the third opening 5251 on the third sidewall 525 of the flexible member 52 and abuts against the first elastic beam 5221. By driving the first elastic beam 5221 and the second elastic beam 5222 to move along the first direction X, the first lens barrel 22 is displaced along the first direction X, thereby achieving position adjustment of the first lens barrel 22 in the first direction X. Similarly, the output end of the second driving mechanism 62 passes through the fourth opening 5232 on the first sidewall 523 of the flexible member 52 and abuts against the third elastic beam 5223. By driving the third elastic beam 5223 and the fourth elastic beam 5224 to move along the second direction Y, the first lens barrel 22 is displaced along the second direction Y, thereby achieving position adjustment of the first lens barrel 22 in the second direction Y. It should be noted that the first driving mechanism 61 and the second driving mechanism 62 can specifically adopt piezoelectric ceramic actuators or other actuation mechanisms with corresponding driving functions.

[0046] In some embodiments, each elastic beam of the elastic portion 522 has two slots at its end, and the two slots are symmetrically distributed vertically. The slots on the first elastic beam 5221 and the second elastic beam 5222 are centrally symmetrically distributed about the central axis OO' of the protrusion 51, and the slots on the third elastic beam 5223 and the fourth elastic beam 5224 are centrally symmetrically distributed about the central axis OO' of the protrusion 51.

[0047] In this technical solution, each elastic beam has two slots, which are distributed vertically along the third direction Z. Specifically, the upper slot faces upwards, and the lower slot faces downwards. As a preferred embodiment of the slots, the specific structure can be constructed as a U-shaped slot (for example, the upper slot is a regular U-shape, and the lower slot is an inverted U-shape), or it can be a V-shaped slot, a rectangular slot, or a circular through hole, etc. Taking the first elastic beam 5221 as an example, a first slot 52211 is formed on it. The slots on the first elastic beam 5221 and the slots on the second elastic beam 5222 are symmetrically distributed about the central axis OO'; similarly, the slots on the third elastic beam 5223 and the slots on the fourth elastic beam 5224 are also symmetrically distributed about the central axis OO'. Therefore, based on the above structure, the U-shaped groove structure symmetrically arranged vertically along the third direction Z ensures that the elastic beam maintains the center of force when deformed under stress, effectively preventing force distortion or accidental twisting caused by slotting on only one side. Simultaneously, the symmetrical arrangement of the two grooves evenly distributes stress, avoiding damage caused by excessive local force concentration, and improving the durability and reliability of the flexible component 52. Furthermore, the symmetrical distribution of the grooves between the pair of parallel elastic beams about the central axis OO' ensures the consistency of deformation pace of the pair of elastic beams under stress, avoiding uneven internal force or jamming caused by uneven stiffness on both sides. This makes the overall micro-displacement deformation of the flexible component 52 more stable and smooth, thereby improving the accuracy and stability of optical element adjustment.

[0048] In some embodiments, such as Figures 4 to 6 As shown, the slots on the first elastic beam 5221 and the second elastic beam 5222 are configured to undergo rotational deformation about an axis parallel to the first direction X. The slots on the third elastic beam 5223 and the fourth elastic beam 5224 are configured to undergo rotational deformation about an axis parallel to the second direction Y.

[0049] In this technical solution, the slotted structures on the first elastic beam 5221 and the second elastic beam 5222 are configured to rotate around an axis parallel to the first direction X (i.e., Rx rotation), thereby driving the first lens barrel 22 to rotate synchronously by Rx. Similarly, the slotted structures on the third elastic beam 5223 and the fourth elastic beam 5224 are configured to rotate around an axis parallel to the second direction Y (i.e., Ry rotation), thereby driving the first lens barrel 22 to rotate synchronously by Ry. Based on the above structure, the slotted design on each elastic beam enables the attitude adjustment of the first lens barrel 22 in both the Rx and Ry degrees of freedom.

[0050] In some embodiments, such as Figure 6As shown, the flexible member 52 includes a first opening 5231 formed on the first sidewall 523 and a second opening 5241 formed on the second sidewall 524. The first opening 5231 allows the insertion of a first adjusting plate 71, one end of which undergoes rotational deformation due to slots on the first elastic beam 5221 and the second elastic beam 5222. The second opening 5241 allows the insertion of a second adjusting plate 72, one end of which undergoes rotational deformation due to slots on the third elastic beam 5223 and the fourth elastic beam 5224.

[0051] In this technical solution, the drive assembly 6 further includes a third drive mechanism and a fourth drive mechanism. When the first adjustment plate 71 is inserted into the first opening 5231, the output end of the third drive mechanism drives the first adjustment plate 71 and transmits the driving force to the slots of the first elastic beam 5221 and the second elastic beam 5222 through the end of the first adjustment plate 71, thereby driving the first elastic beam 5221 and the second elastic beam 5222 to rotate around the axis (i.e., Rx rotation), and thus driving the first lens barrel 22 to rotate synchronously by Rx to adjust its posture. Similarly, when the second adjustment plate 72 is inserted into the second opening 5241, the output end of the fourth drive mechanism drives the second adjustment plate 72 and transmits the driving force to the slots of the third elastic beam 5223 and the fourth elastic beam 5224 through the end of the second adjustment plate 72, thereby driving the third elastic beam 5223 and the fourth elastic beam 5224 to rotate around the axis (i.e., Ry rotation), and thus driving the first lens barrel 22 to rotate synchronously by Ry to adjust its posture.

[0052] In some embodiments, in the drive assembly 6, the first drive mechanism 61 is configured to drive the first elastic beam 5221 and the second elastic beam 5222 to move synchronously along the first direction X. The second drive mechanism 62 is configured to drive the third elastic beam 5223 and the fourth elastic beam 5224 to move synchronously along the second direction Y. The third drive mechanism is configured to drive the first elastic beam 5221 (and the slot) and the second elastic beam 5222 (and the slot) to rotate synchronously about an axis parallel to the first direction X. The fourth drive mechanism is configured to drive the third elastic beam 5223 and the fourth elastic beam 5224 to rotate synchronously about an axis parallel to the second direction Y. This achieves attitude adjustment of the X, Y, Rx, and Ry degrees of freedom of the first lens barrel 22, i.e., the first optical element 31.

[0053] In some embodiments, such as Figure 3 As shown, the threaded section 42 is threaded into the inner wall 511 and is locked by fasteners passing through the second locking hole 512 to adjust and fix the position of the rotating cylinder 4 in the third direction Z.

[0054] In this technical solution, by rotating the rotating cylinder 4, its threaded section 42 engages with the inner wall 511, thereby driving the rotating cylinder 4 to move along the third direction Z to the target height, thus adjusting the position of the rotating cylinder 4 (i.e., the first lens barrel 22 and the first optical element 31) in the third direction Z. Subsequently, fasteners are used to pass through the second locking hole 512 for locking to fix the position.

[0055] In some embodiments, such as Figures 1 to 3 As shown, the screw passes through the first locking hole 21 and the guide groove 43 to fix the position of the lens barrel 2 and the rotating barrel 4 in the third direction Z. The screw rotates along the guide groove 43 and is locked by the fastener passing through the third locking hole 44 to adjust and fix the rotation angle of the lens barrel 2 about the axis parallel to the third direction.

[0056] In this technical solution, a screw is inserted into the first locking hole 21 and extends into the guide groove 43, thereby fixing the first lens barrel 22 and the rotating cylinder 4 relative to each other in the third direction. Based on this, by rotating the first lens barrel 22, the screw is driven to move circumferentially along the trajectory of the guide groove 43, thereby driving the first lens barrel 22 to rotate with high precision around an axis parallel to the third direction Z (i.e., Rz rotation). When the rotating cylinder 4 rotates to the target angle, a fastener is used to lock it through the third locking hole 44 to fix the position. Furthermore, the preferred adjustment sequence of the optical element adjustment device in this solution is: first, adjust the position in the third direction Z; second, adjust the rotation around the third direction Z axis (i.e., Rz rotation); third, adjust the position in the X and Y directions; and finally, adjust the rotation around the X and Y axes (i.e., Rx rotation and Ry rotation), thereby achieving high-precision attitude adjustment of the optical element 3 with six degrees of freedom.

[0057] It is understood that in this technical solution, the number of locking holes on the first lens barrel 22 is equal to the number of guide grooves 43 on the rotating barrel 4.

[0058] In some embodiments, such as Figure 2 and Figure 3 As shown, a sealing ring 8 is also provided between the lens barrel 2 and the flexible component 5.

[0059] In this technical solution, a sealing ring 8 is also provided between the flexible component 52 of the flexible assembly 5 and the second lens barrel 23. The sealing ring 8 is used to prevent dust, water vapor and other contaminants from entering the lens during the adjustment of the flexible component 52 in the third direction and during the normal operation of the device, thereby improving the imaging quality and reliability of the lens.

[0060] In some embodiments, such as Figure 5 and Figure 6As shown, the optical element adjustment device further includes a displacement detection assembly 9, which includes a first displacement detection mechanism 91 and a second displacement detection mechanism 92. The first displacement detection mechanism 91 is configured to detect the displacement of the flexible member 52 along a first direction X, and the second displacement detection mechanism 92 is configured to detect the displacement of the flexible member 52 along a second direction Y.

[0061] In this technical solution, the first displacement detection mechanism 91 is disposed adjacent to the second elastic beam 5222, and can detect the displacement of the second elastic beam 5222 along the first direction X, thereby characterizing the displacement of the flexible member 52 along the first direction X. Similarly, the second displacement detection mechanism 92 is disposed adjacent to the fourth elastic beam 5224, and can detect the displacement of the fourth elastic beam 5224 along the second direction Y, thereby characterizing the displacement of the flexible member 52 along the second direction Y.

[0062] In some embodiments, such as Figure 7 As shown, the optical element adjustment device 1 of this scheme also includes a first return spring 10 sleeved on the positioning rod 12. When the first drive mechanism 61 drives the first elastic beam 5221 and the second elastic beam 5222 to move along the first direction X, the first return spring 10 is compressed by force; when the first drive mechanism 61 stops driving, the first return spring 10 can elastically recover from the compressed state to the initial state, thereby driving the first elastic beam 5221 and the second elastic beam 5222 to reset. In addition, the positioning rod 12 can provide axial guidance for the first return spring 10, ensuring its motion accuracy and stability during deformation. It should be noted that the figure only uses the first direction X as an example for setting the return spring and positioning rod. This structure can also be applied to the second direction Y, that is, the corresponding return spring and positioning rod can also be configured in the second direction Y.

[0063] In some embodiments, such as Figure 3 As shown, the optical element adjustment device 1 of this scheme also includes a second reset spring 11. When the third drive mechanism drives the first elastic beam 5221 (and slot) and the slot of the second elastic beam 5222 (and slot) to rotate around an axis parallel to the first direction X, the second reset spring 11 is compressed by force; when the third drive mechanism stops driving, the second reset spring 11 can elastically recover from the compressed state to the initial state, thereby driving the first elastic beam 5221 (and slot) and the second elastic beam 5222 (and slot) to reset. It should be noted that the figure only uses the Rx attitude adjustment setting reset spring as an example for illustration. This structure can also be applied to Ry attitude adjustment, that is, a corresponding reset spring can also be configured in Ry attitude adjustment.

[0064] In some embodiments of this application, an optical system is also provided, which includes an optical element adjustment device as described in any of the above technical solutions. Since the optical element adjustment device in this optical system has the same technical features as the aforementioned optical element adjustment device, both can solve the same technical problem and achieve the same technical effect.

[0065] In some embodiments of this application, a semiconductor device is also provided, which includes an optical element adjustment device as described in any of the above technical solutions, or an optical system as described in any of the above technical solutions. Since the optical element adjustment device and optical system in this semiconductor device have the same technical features as the aforementioned optical element adjustment device and optical system, they can solve the same technical problems and achieve the same technical effects.

[0066] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0067] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of protection of the claims. Furthermore, specific examples have been used in the specification to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application, and the content of this specification should not be construed as a limitation of this application.

Claims

1. An optical element adjustment device, characterized in that, include: The lens barrel contains optical elements, and a first locking hole is provided on the lens barrel; A rotating cylinder is fitted around the outer periphery of the lens tube. The outer wall of the rotating cylinder is provided with a threaded section, and a guide groove extending circumferentially is provided on the rotating cylinder. A flexible component is sleeved on the outer periphery of the rotating cylinder. The flexible component includes a protrusion and a flexible component connected to the protrusion. The inner wall of the protrusion is provided with a thread that mates with the threaded section. The flexible component includes a rigid part and an elastic part. The elastic part is provided with a slot.

2. The optical element adjustment device according to claim 1, characterized in that, The protrusion is a hollow annular structure, and a second locking hole is provided on the protrusion; The protrusion and the flexible component are integrally formed.

3. The optical element adjustment device according to claim 1, characterized in that, In the flexible component: The rigid part includes a first rigid beam and a second rigid beam; The elastic part includes a first elastic beam, a second elastic beam, a third elastic beam, and a fourth elastic beam; The two ends of the first rigid beam are respectively connected to the first elastic beam and the second elastic beam; The two ends of the second rigid beam are respectively connected to the third elastic beam and the fourth elastic beam.

4. The optical element adjustment device according to claim 3, characterized in that, The first elastic beam and the second elastic beam are centrally symmetrical about the central axis of the protrusion. The third elastic beam and the fourth elastic beam are centrally symmetrical about the central axis of the protrusion; The extension direction of the first rigid beam is perpendicular to the extension direction of the second rigid beam.

5. The optical element adjustment device according to claim 3 or 4, characterized in that, It also includes a drive component, which includes a first drive mechanism and a second drive mechanism; The first drive mechanism is configured to drive the first elastic beam and the second elastic beam to move synchronously along a first direction; The second drive mechanism is configured to drive the third elastic beam and the fourth elastic beam to move synchronously along the second direction.

6. The optical element adjustment device according to claim 3, characterized in that, Each elastic beam in the elastic section has two slots at its end. The two slots are symmetrically distributed vertically.

7. The optical element adjustment device according to claim 6, characterized in that, The slots on the first elastic beam and the second elastic beam are centrally symmetrical about the central axis of the protrusion. The slots on the third and fourth elastic beams are centrally symmetrical about the central axis of the protrusion.

8. The optical element adjustment device according to claim 6 or 7, characterized in that, The slots on the first elastic beam and the second elastic beam are configured to undergo rotational deformation about an axis parallel to the first direction; The slots on the third and fourth elastic beams are configured to undergo rotational deformation about an axis parallel to the second direction.

9. The optical element adjustment device according to claim 8, characterized in that, The flexible member includes a first opening formed in the first sidewall and a second opening formed in the second sidewall; The first opening allows the first adjusting plate to be inserted, and one end of the first adjusting plate acts on the slots on the first elastic beam and the second elastic beam to undergo rotational deformation. The second opening allows the second adjusting plate to be inserted, and one end of the second adjusting plate rotates and deforms due to the slots on the third and fourth elastic beams.

10. The optical element adjustment device according to claim 2, characterized in that, The threaded section engages with the threaded inner wall and is locked by a fastener passing through the second locking hole, thereby adjusting and fixing the rotating cylinder in a third-direction upward position.

11. The optical element adjustment device according to claim 1, characterized in that, The screw passes through the first locking hole and the guide groove to fix the lens barrel and the rotating barrel in a third-party upward position; The screw rotates along the guide groove and is locked by a fastener passing through the third locking hole to adjust and fix the rotation angle of the lens barrel about an axis parallel to the third direction.

12. The optical element adjustment device according to claim 1, characterized in that, A sealing ring is also provided between the lens barrel and the flexible component.

13. The optical element adjustment device according to claim 1, characterized in that, It also includes a displacement detection component, which includes a first displacement detection mechanism and a second displacement detection mechanism; The first displacement detection mechanism is configured to detect the displacement of the flexible member along a first direction; The second displacement detection mechanism is configured to detect the displacement of the flexible member along a second direction.

14. An optical system, characterized in that, include: The optical element adjustment device as described in any one of claims 1 to 13.

15. A semiconductor device, characterized in that, include: The optical element adjustment device as described in any one of claims 1 to 13, or the optical system as described in claim 14.

Images