Exposure machine CCD probe condensing device

Abstract

The application provides an exposure machine CCD probe light condensing device and relates to the exposure machine alignment technical field. The exposure machine CCD probe light condensing device comprises a rack, a plurality of probes which are slidingly connected to the rack, a light condensing cover which is arranged at the bottom of the probe, a bottom opening and a top opening for receiving light rays, a light condensing cavity which is formed by the bottom opening and the top opening, a fixed connection between the light condensing cover and the lower end of the probe, a light guide column which is a transparent cylinder, the light guide column is located in the light condensing cavity, the length direction of the light guide column is the direction from the bottom opening to the top opening, the light guide column is used for guiding the light rays to the probe, a mounting plate which is fixed above the light condensing cover and is used for fixing the light condensing cover on the rack, and a through hole which is formed in the middle of the mounting plate and is used for allowing the light rays to pass through.

Description

Technical Field

[0001] This application relates to the field of exposure machine alignment technology, and in particular to a focusing device for an exposure machine CCD probe. Background Technology

[0002] Exposure machines are key pieces of equipment in semiconductor manufacturing and printed circuit board production, primarily used to precisely transfer patterns from photomasks onto substrates.

[0003] Related technologies can be found in Chinese Utility Model Patent No. CN217718427U. This utility model discloses an exposure machine, including an exposure machine body with an exposure chamber. A placement plate is slidably disposed within the exposure chamber. The exposure machine body is provided with a drive structure for controlling the movement of the placement plate. The drive structure includes a rack and a motor. The rack is fixedly installed on the side end of the placement plate, and a fixing block is fixedly installed on the end of the motor. By providing a drive structure, the placement plate can be controlled to move horizontally, making it convenient for users to place the exposed parts on the placement plate. It is easy to use and operate.

[0004] However, existing exposure machines still have the following shortcomings. When performing target identification, because the target has reflective properties, traditional light sources are usually non-integrated and non-directional. Under the illumination of traditional light sources, some light is reflected, which interferes with target identification and thus reduces exposure accuracy. Utility Model Content

[0005] This application provides a CCD probe focusing device for an exposure machine, which solves the problem that when the target point is illuminated by a traditional light source, some light is reflected, which interferes with the target point identification and thus reduces the exposure accuracy.

[0006] The technical solution adopted in the embodiments of this application is as follows: In a first aspect, embodiments of this application provide a CCD probe focusing device for an exposure machine, comprising a frame, wherein a plurality of probes are slidably connected to the frame, and further comprising... A light-collecting cover is disposed at the bottom of the probe. The light-collecting cover has a bottom opening and a top opening for receiving light. The bottom opening and the top opening form a light-collecting cavity. The light-collecting cover is fixedly connected to the lower end of the probe. A light guide column, which is a transparent cylinder, is located inside the light focusing cavity. The length direction of the light guide column is from the bottom opening to the top opening. The light guide column is used to guide light to the probe. A mounting plate is fixed above the condenser cover to secure the condenser cover to the frame. The mounting plate has a through hole in the middle for light to pass through.

[0007] By adopting the above technical solution, the focusing cavity forms a closed light-gathering environment, which can confine the scattered light entering from the top inside it, preventing light from escaping and providing a structural basis for "light concentration". The light guide column, as the core light guiding element, runs through the focusing cavity. Its specific arrangement direction can efficiently capture the confined light and guide it to the photosensitive area of ​​the probe, greatly reducing the attenuation and scattering of light during transmission and realizing the concentrated delivery of light energy. The mounting plate ensures the stability and precise alignment of the entire focusing unit relative to the frame and the probe, avoiding optical path deviation caused by vibration or displacement, and realizing the effect of confining the scattered light into directional and integrated light, reducing the light reflection effect during target identification.

[0008] In one alternative implementation, the light-concentrating cover is a cylindrical structure with a reflective layer on the inner surface of its sidewalls.

[0009] By adopting the above technical solution, the cylindrical structure provides a symmetrical and continuous inner surface, making the reflection path of light inside more controllable and consistent; the reflective layer on the inner surface can efficiently reflect the light that hits the side wall back into the focusing cavity, instead of being absorbed by the wall. This is equivalent to reusing the light energy that would otherwise be lost and concentrating it in the light guide column area in the center of the cavity, thereby improving the uniformity of light hitting the light guide column.

[0010] In one alternative implementation, the reflective layer is a diffuse reflective coating with high reflectivity.

[0011] By employing the above technical solution, the high reflectivity ensures that the vast majority of incident light is reflected back into the optical path, minimizing light energy absorption loss. The diffuse reflection characteristic means that the reflected light is scattered in multiple directions, rather than forming a concentrated reflected beam. This scattering effect allows the light to be fully mixed after multiple reflections within the focusing cavity, ultimately forming a soft and uniform background illumination. This reduces potential local bright spots that could mislead the probe, thus ensuring exposure accuracy.

[0012] In one optional implementation, the lower end face of the light guide post is a plane, and the upper end face is an outwardly convex spherical surface.

[0013] By adopting the above technical solution, the outward convex spherical surface of the upper end can receive incident light from a wider angle and converge it into the interior of the column, effectively increasing the light-gathering area; while the planar structure of the lower end is conducive to the stable and vertical output of the light transmitted inside the light guide column with a small divergence angle, and accurately irradiate the photosensitive surface of the CCD probe, thus achieving the effect of precise light energy transmission.

[0014] In one alternative implementation, a filter is detachably connected inside the focusing cover.

[0015] By adopting the above technical solution, the filter can selectively filter out light of specific wavelengths that are not required for detection, making the light spectrum that enters the light guide and finally reaches the probe purer, effectively reducing interference and improving exposure accuracy.

[0016] In one alternative implementation, a buffer pad is provided at the contact portion between the filter and the condenser.

[0017] By adopting the above technical solution, the elastic material of the buffer pad can effectively absorb and isolate vibrations and impacts from the frame or the outside, prevent the brittle filter from breaking due to direct contact with the rigid focusing cover, and ensure that the filter is firmly and flexibly pressed, avoiding optical path deviation or stray light leakage caused by loosening and displacement, thus achieving the effect of improving the reliability and durability of the filter.

[0018] In one alternative implementation, the filter is provided in multiple groups.

[0019] By adopting the above technical solution, the design of multiple filters with different filtration performances enables a focusing device to diversify its detection capabilities by quickly replacing the filter modules.

[0020] In one alternative implementation, the mounting plate is connected to the frame via a hinge, allowing the mounting plate and the focusing cover fixed to the mounting plate to move within a preset range.

[0021] By adopting the above technical solution, the hinge structure allows the mounting plate and the entire condenser mask it supports to be angled around the axis, enabling users to finely adjust the spatial position and orientation of the bottom opening of the condenser mask relative to the photosensitive surface of the CCD probe, thus achieving the effect of finely adjusting the docking position according to requirements.

[0022] In summary, this application includes at least one of the following beneficial technical effects: 1. This device creates a closed light-gathering environment through a light-concentrating cover, effectively confining the escape of scattered light; the light guide column directionally guides the light to the photosensitive area of ​​the probe, significantly reducing transmission attenuation and scattering, and achieving concentrated light energy delivery. The mounting plate ensures overall stable alignment and avoids optical path misalignment, thereby improving the concentration and accuracy of light reflection during target identification; 2. A high-reflectivity diffuse reflection layer is installed on the inner wall of the light-collecting mask, which significantly reduces light energy absorption loss and forms uniform and soft illumination through multiple reflections and mixing of light, eliminating local bright spot interference. The special configuration of the upper and lower end faces of the light guide column expands the light-collecting area and ensures stable vertical output. Combined with adjustable filters, this ensures exposure accuracy and detection adaptability. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of the focusing device for a CCD probe in an exposure machine.

[0024] Figure 2 This is a schematic diagram of the internal structure of the light-concentrating mask.

[0025] Figure 3 This is a diagram showing the probe viewed from below.

[0026] Figure 4 This is a cross-sectional schematic diagram of the focusing mask.

[0027] Explanation of reference numerals in the attached diagram: 1. Connecting plate; 2. Mounting plate; 3. Condenser; 4. Top opening; 5. Filter; 6. Light guide column; 7. Spherical surface; 8. Support arm; 9. Bottom opening; 10. Probe. Detailed Implementation

[0028] The present application will be further described in detail below with reference to all the accompanying drawings in the embodiments of the present application.

[0029] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. "Fixed connection" refers to a connection where the relative positional relationship remains unchanged after the connection. It should be understood that when component A is fixedly connected to component C via component B, changes in the relative positional relationship due to deformation of components A, B, and C are permissible. The integrated structure obtained by the two components through a one-piece molding process means that during the formation of one of the two components, that component is connected to the other component, without requiring further processing (such as bonding, welding, snap-fit ​​connections, or screw connections) to connect the two components.

[0030] The directional terms mentioned in the embodiments of this application, such as "upper", "lower", "side", etc., are only for reference to the direction of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of this application, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0031] The term "multiple" refers to at least two. The term "more than" includes the stated number. The term "and / or" describes a relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. The terms "first," "second," etc., are used for descriptive purposes only and should not be construed as implying or suggesting relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0032] This application discloses a focusing device for a CCD probe of an exposure machine.

[0033] Reference Figure 1 A CCD probe focusing device for an exposure machine includes a frame made of aluminum alloy profiles, which has sufficient rigidity and stability.

[0034] Two parallel linear guide rails are provided on the upper surface of the frame, and the guide rails are fixed to the frame with bolts. The probe 10 mounting base is slidably connected to the linear guide rails via a slider, allowing the probe 10 mounting base to move along the guide rail direction. The probe 10 mounting base is made of aluminum alloy, and its bottom is threadedly connected to the CCD probe 10. The photosensitive surface of the CCD probe 10 is arranged downwards, and a connecting plate 1 is fixedly connected to one side of the mounting base. The connecting plate 1 is hinged to a mounting plate 2, allowing the mounting plate 2 to rotate around a horizontal axis within a preset angle range.

[0035] The mounting plate 2 has a light-transmitting hole in the middle, which is positioned to correspond to the position of the light emitted by the CCD probe 10, allowing the light to pass through completely. The mounting plate 2 is made of stainless steel sheet by stamping and bending.

[0036] Reference Figure 1 and Figure 3 The mounting plate 2 is detachably connected to a light-concentrating cover 3 via bolts. The light-concentrating cover 3 is a cylindrical structure, injection molded from polycarbonate material. Inside the light-concentrating cover 3, a cylindrical focusing cavity is formed. The top of the focusing cavity has a circular top opening 4 for receiving light, and the bottom has a circular bottom opening 9, the diameter of which is slightly smaller than that of the top opening 4. The inner surface of the sidewalls of the light-concentrating cover 3 is sandblasted and then coated with a high-reflectivity diffuse white coating made of barium sulfate-based composite material.

[0037] Reference Figure 2 and Figure 4The focusing cavity also contains a light guide post 6, which is CNC machined from optical-grade acrylic material and has a cylindrical structure. The upper surface of the light guide post 6 is machined into an outwardly convex spherical surface 7, and the radius of curvature of the spherical surface 7 has been optically optimized. The lower surface of the light guide post 6 is a precision polished flat surface. The light guide post 6 is fixed in the focusing cavity by three circumferentially distributed support arms 8.

[0038] Reference Figure 1 and Figure 2 Inside the light-concentrating cover 3, above the light guide column 6, there is a filter 5 mounting groove, and a filter 5 is installed thereon. A rubber buffer pad is embedded in the mounting groove. The filter 5 is made of a circular optical glass substrate, and the device is equipped with multiple sets of filters 5 with different spectral characteristics. The operator can select filters 5 with different filtration performance according to different needs.

[0039] The implementation principle of the CCD probe focusing device of this application embodiment is as follows: Light first enters the focusing cavity through the central through-hole of the mounting plate. The high reflectivity diffuse reflection coating on the inner wall of the focusing cavity plays a key role: its micro-rough surface scatters the incident light in multiple directions, forming a uniform diffuse reflection light field. This design effectively avoids flares that may be generated by specular reflection, and at the same time, it guides the light energy that might otherwise be absorbed back into the optical path through multiple reflections. Subsequently, the light guide column 6 located in the center of the focusing cavity captures these diffuse reflection rays through the spherical structure at its upper end. The curved surface characteristics of the sphere allow it to receive incident light at a larger angle. The light is transmitted forward inside the light guide column 6 through the principle of total internal reflection, and finally outputs through the lower plane with a small divergence angle, accurately projecting onto the photosensitive surface of the CCD probe 10.

[0040] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of this application can be combined with each other, and any combination of features in different embodiments is also within the protection scope of this application. That is to say, the multiple embodiments described above can also be arbitrarily combined according to actual needs.

[0041] It should be noted that all the above-mentioned figures are exemplary illustrations of this application and do not represent the actual size of the product. Furthermore, the dimensional proportions between the components in the figures are not intended to limit the actual product of this application. The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A CCD probe focusing device for an exposure machine, comprising a frame, wherein a plurality of probes (10) are slidably connected to the frame, characterized in that: It also includes, A light-collecting cover (3) is provided at the bottom of the probe (10). The light-collecting cover (3) has a bottom opening (9) and a top opening (4) for receiving light. The bottom opening (9) and the top opening (4) constitute a light-collecting cavity. The light-collecting cover (3) is fixedly connected to the lower end of the probe (10). The light guide (6) is a transparent cylinder. The light guide (6) is located inside the focusing cavity. The length direction of the light guide (6) is from the bottom opening (9) to the top opening (4). The light guide (6) is used to guide the light to the probe (10). Mounting plate (2) is fixed above the light-concentrating cover (3) to fix the light-concentrating cover (3) on the frame. The mounting plate (2) has a through hole in the middle for light to pass through.

2. The CCD probe focusing device for an exposure machine as described in claim 1, characterized in that: The light-concentrating cover (3) is a cylindrical structure, and its inner surface of the side wall is provided with a reflective layer.

3. The CCD probe focusing device for an exposure machine as described in claim 2, characterized in that: The reflective layer is a diffuse reflection coating with high reflectivity.

4. The CCD probe focusing device for an exposure machine as described in claim 1, characterized in that: The lower end face of the light guide post (6) is a plane, and the upper end face is an outwardly convex spherical surface (7).

5. The CCD probe focusing device for an exposure machine as described in claim 1, characterized in that: The light-concentrating cover (3) has a detachable filter (5) inside.

6. The CCD probe focusing device for an exposure machine as described in claim 5, characterized in that: The contact portion between the filter (5) and the condenser (3) is provided with a buffer pad.

7. The CCD probe focusing device for an exposure machine as described in claim 5, characterized in that: The filter (5) is provided in multiple sets.

8. The CCD probe focusing device for an exposure machine as described in claim 1, characterized in that: The mounting plate (2) is connected to the frame via a hinge, allowing the mounting plate (2) and the focusing cover (3) fixed on the mounting plate (2) to move within a preset range.

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