An ITO conductive film

CN224652023UActive Publication Date: 2026-08-18TRIUMPH INFORMATION DISPLAY MATERIALS (CHIZHOU) CO LTD
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Patent Information

Application Number
CN202522075305.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-25
Publication Date
2026-08-18
Estimated Expiration
2035-09-25

AI Technical Summary

Technical Problem

[0005]该技术方案采用黑色涂层既起到遮光作用也起到抗擦花的作用,不会因在聚酯薄膜中添加黑色遮光成分降低薄膜的抗撕强度,但是在实际使用时,ITO薄膜的柔韧性有一定的欠缺,不能够满足可穿戴设备等对柔性的要求

Benefits of technology

[0016] This invention combines a flexible polymer substrate, a base coating, a thermally conductive layer, a light-filtering layer, and an ITO film to enhance overall flexibility while maintaining conductivity and light transmittance, thus meeting the flexibility requirements of wearable devices and other similar applications.

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Abstract

The utility model discloses a kind of ITO conductive film, belong to ITO film technical field, the conductive film includes multilayer composite layer structure, and the top of multilayer composite layer structure is provided with protective layer;The composite layer structure is by flexible polymer base, primer coat, heat conducting layer, light filter layer and ITO film sequentially superimposed and formed. While keeping conductivity and light transmission, the flexibility of the whole can be improved to meet the flexible requirements of wearable devices etc.
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Description

Technical Field

[0001] This utility model relates to the field of ITO thin film technology, specifically to an ITO conductive film. Background Technology

[0002] ITO thin film is an n-type semiconductor material with high conductivity, high visible light transmittance, high mechanical hardness, and good chemical stability. It is the most commonly used thin film material for transparent electrodes in liquid crystal displays (LCDs), plasma display panels (PDPs), electroluminescent displays (EL / OLEDs), touch panels, solar cells, and other electronic instruments.

[0003] For example, patent CN220709969U discloses an ITO conductive film, which includes a polyester film for transparent electrodes used in electronic instruments. One surface of the polyester film is coated with a black light-shielding coating, and the other surface is sputtered with an ITO layer. A protective film is disposed on the upper surface of the ITO layer.

[0004] The above solution has the following shortcomings in practical use:

[0005] The technical solution uses a black coating that serves both as a light-blocking agent and an anti-scratch agent. The addition of black light-blocking components to the polyester film does not reduce the tear strength of the film. However, in actual use, the flexibility of the ITO film is somewhat lacking and cannot meet the flexibility requirements of wearable devices. Utility Model Content

[0006] The purpose of this invention is to provide an ITO conductive film to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] An ITO conductive film includes a multilayer composite structure, with a protective layer disposed on top of the multilayer composite structure; the composite structure is formed by sequentially stacking a flexible polymer substrate, a base coating layer, a thermally conductive layer, a light-filtering layer, and an ITO thin film.

[0009] Preferably, the thickness of the flexible polymer substrate is between 1 micrometer and 500 micrometers.

[0010] Preferably, the thickness of the base coating is between 10 nanometers and 500 nanometers.

[0011] Preferably, the thickness of the thermally conductive layer is between nanometers and 1000 nanometers.

[0012] Preferably, the thickness of the filter layer is between 50 nanometers and 500 nanometers.

[0013] Preferably, the ITO thin film is sputtered onto the surface of the filter layer to form an indium tin oxide layer, and the thickness of the ITO thin film is between 10 nanometers and 300 nanometers.

[0014] Preferably, a light-shielding layer is provided at the bottom of the multilayer composite structure, and the thickness of the light-shielding layer is between 4 micrometers and 10 micrometers.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] This invention combines a flexible polymer substrate, a base coating, a thermally conductive layer, a light-filtering layer, and an ITO film to enhance overall flexibility while maintaining conductivity and light transmittance, thus meeting the flexibility requirements of wearable devices and other similar applications. Attached Figure Description

[0017] Fig. 1 This is a schematic diagram of the structure of Embodiment 1 of the present invention;

[0018] Fig. 2 This is a schematic diagram of the structure of Embodiment 2 of this utility model.

[0019] In the picture:

[0020] 1. Flexible polymer substrate; 2. Light-shielding layer; 3. Primer layer; 4. Thermally conductive layer; 5. Filter layer; 6. ITO film; 7. Protective layer. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figs. 1-2 This utility model provides a technical solution:

[0023] Example 1:

[0024] An ITO conductive film, see attached reference. Fig. 1As shown, the conductive film includes a multilayer composite structure, which is stacked on top of each other. A protective layer 7 is disposed on the top of the multilayer composite structure. The protective layer 7 is directly attached to the upper surface of the multilayer composite structure using pressure-sensitive adhesive or other methods, and the edges of the protective layer 7 and the composite structure are aligned. The protective layer 7 is made of either an inorganic material protective film or an organic material protective film. In this embodiment, the protective layer 7 is made of silicon dioxide (SiO2), an inorganic material protective film. In applications with high optical performance requirements and relatively ordinary protection needs, silicon dioxide (SiO2) is a suitable material for such applications. The thickness of the SiO2 protective film ranges from 50 nanometers to 150 nanometers. For applications with higher protection requirements, the thickness of the silica (SiO2) protective film ranges from 100 nanometers to 200 nanometers. Thicker silica (SiO2) protective films can provide better scratch resistance and barrier properties. The composite layer structure is composed of a flexible polymer substrate 1, a base coating 3, a thermally conductive layer 4, a light filter layer 5, and an ITO film 6 stacked sequentially. It can improve the overall flexibility while maintaining conductivity and light transmittance to meet the flexibility requirements of wearable devices and other applications.

[0025] Furthermore, the thickness of the flexible polymer substrate 1 ranges from 1 micrometer to 500 micrometers. In this embodiment, the flexible polymer substrate 1 is polyimide (PI), which has the advantages of excellent thermal stability, good mechanical properties, chemical stability, and low dielectric constant. The flexible polymer substrate 1 can also be one of polyethylene terephthalate (PET), polyethylene (PE), and polydimethylsiloxane (PDMS).

[0026] Furthermore, the thickness of the base coating 3 ranges from 10 nanometers to 500 nanometers. The base coating 3 is an organosilicon base coating, which can improve adhesion. A thinner coating may be sufficient to achieve good interfacial bonding. Only tens of nanometers are needed to form an effective adhesive layer between the flexible polymer substrate and the upper material. When the base coating 3 also has barrier properties or needs to provide a smoother surface for subsequent layers, the thickness needs to be increased to between 100 nanometers and 500 nanometers.

[0027] Furthermore, the thickness of the thermal conductive layer 4 ranges from 100 nanometers to 1000 nanometers. The thermal conductive layer 4 uses one of the following thermal conductive materials: metal oxide (such as aluminum oxide, zinc oxide), graphene, and carbon nanotube. Graphene or carbon nanotube thermal conductive materials have high performance but high cost. When graphene or carbon nanotube thermal conductive materials are used, the thickness ranges from 100 nanometers to 1000 nanometers. When metal oxide (such as aluminum oxide, zinc oxide) thermal conductive materials are used, the thickness ranges from 100 nanometers to 500 nanometers in order to achieve effective heat conduction. A thinner thermal conductive layer can reduce the scattering and absorption of light, reduce the impact on the light transmittance of the entire structure, and at the same time, it can also reduce costs and weight to a certain extent.

[0028] Furthermore, the thickness of the filter layer 5 ranges from 50 nanometers to 500 nanometers. The filter layer 5 can be an inorganic pigment filter layer or an organic dye filter layer. When using an inorganic pigment (such as cerium oxide or iron oxide) filter layer, in order to achieve an effective light filtering effect, the thickness is between 50 nanometers and 200 nanometers. A thinner filter layer is beneficial to reduce excessive absorption of light and maintain good light transmittance. When using an organic dye filter layer, due to its light absorption and scattering characteristics, the thickness is between 100 nanometers and 500 nanometers to ensure effective filtering of light of specific wavelengths.

[0029] Furthermore, an indium tin oxide layer is deposited on the surface of the filter layer 5 by sputtering an ITO thin film 6. The thickness of the ITO thin film 6 ranges from 10 nanometers to 300 nanometers. In applications with relatively low conductivity requirements but high light transmittance requirements, such as some simple flexible touch panels, the thickness of the ITO thin film 6 is between 10 nanometers and 50 nanometers. For applications requiring high conductivity, such as high-performance flexible displays or flexible circuits with strict signal transmission requirements, the thickness of the ITO thin film 6 is between 100 nanometers and 300 nanometers.

[0030] Furthermore, a light-shielding layer 2 is provided at the bottom of the multi-layer composite structure. The thickness of the light-shielding layer 2 ranges from 4 micrometers to 10 micrometers. The light-shielding coating is composed of a mixture of carbon black particles, film-forming resin, dispersant, curing agent, and catalyst. This mixture undergoes a cross-linking reaction after heating, which further improves the performance of high light-shielding, high hardness, and scratch resistance.

[0031] The preparation process in this embodiment is as follows: A flexible polymer substrate 1 is prepared using physical vapor deposition (PVD) technology. The substrate is cleaned to remove surface impurities and contaminants. A base layer 3 is deposited on the flexible polymer substrate 1 using PVD, chemical vapor deposition (CVD), or spin coating. A thermally conductive layer 4 is deposited on the base layer 3 using PVD, CVD, or other suitable methods. A light filter layer 5 is deposited on the thermally conductive layer 4 using sputtering, evaporation, or other methods. An ITO film 6 is deposited on the light filter layer 5 using PVD or other methods. Following these steps, the flexible polymer substrate 1, base layer 3, thermally conductive layer 4, light filter layer 5, and ITO film 6 are sequentially and alternately stacked to form a multilayer composite structure. After each layer is deposited, appropriate heat treatment or other treatments can be performed to improve the interlayer bonding and performance. The prepared multilayer composite structure is then post-treated, such as annealing or UV curing, to improve the overall performance and stability of the structure.

[0032] Example 2:

[0033] Please see the appendix Fig. 2 This utility model provides another technical solution:

[0034] The difference between this embodiment and Embodiment 1 is that an ITO conductive film is provided, which includes a multilayer composite layer structure. The multilayer composite layer structure is stacked and a protective layer 7 is provided on the top of the multilayer composite layer structure. The composite layer structure is formed by sequentially stacking a flexible polymer substrate 1, a base coating layer 3, a filter layer 5, a thermally conductive layer 4, and an ITO film 6. This structure can improve the overall flexibility while maintaining conductivity and light transmittance, so as to meet the flexibility requirements of wearable devices and the like.

[0035] By changing the positions of the filter layer 5 and the thermally conductive layer 4, the filter layer 5 is positioned away from the ITO film 6, thus reducing the direct impact of the filter layer 5 on the conductivity of the ITO film 6.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An ITO conductive film, the conductive film comprising a multilayer composite layer structure, characterized in that, A silicon dioxide protective layer is provided on the top of the multilayer composite structure; The composite layer structure is composed of a flexible polymer substrate, a base coating, a thermally conductive layer, a filter layer, and an ITO film stacked sequentially.

2. The ITO conductive film according to claim 1, characterized in that, The flexible polymer substrate is a polyimide film with a thickness ranging from 1 micrometer to 500 micrometers.

3. The ITO conductive film according to claim 1, characterized in that, The base coating is an organosilicon base coating with a thickness ranging from 10 nanometers to 500 nanometers.

4. The ITO conductive film according to claim 1, characterized in that, The thermally conductive layer is one of an oxide material layer, a graphene material layer, or a carbon nanotube material layer, with a thickness ranging from 100 nanometers to 1000 nanometers.

5. The ITO conductive film according to claim 1, characterized in that, The filter layer is an inorganic pigment filter layer with a thickness ranging from 50 nanometers to 500 nanometers.

6. The ITO conductive film according to claim 1, characterized in that, The ITO thin film is sputtered onto the surface of the filter layer to form an indium tin oxide layer, and the thickness of the ITO thin film ranges from 10 nanometers to 300 nanometers.

7. The ITO conductive film according to claim 1, characterized in that, The bottom of the multilayer composite structure is provided with a light-shielding layer, the thickness of which ranges from 4 micrometers to 10 micrometers.

Citation Information

Patent Citations

  • ITO conductive film

    CN220709969U