Lower electrode assembly and semiconductor process chamber

Abstract

The utility model discloses a lower electrode assembly and semiconductor process chamber, the lower electrode assembly for supporting the disclosed bearing disc has the first electrode joint to the side of bearing disc facing the lower electrode assembly, and the lower electrode assembly includes first fixed seat, second fixed seat, radio frequency feed -in structure and positioning ring, the first fixed seat is superposed in the upper of second fixed seat, and the first fixed seat is opened with the hole of avoiding, radio frequency feed -in structure includes joint installation part and second electrode joint, joint installation part is connected with second fixed seat swing, and the at least part of second electrode joint is located in the hole of avoiding, and the part of second electrode joint is located in the hole of avoiding and exists the gap between the hole wall of the hole of avoiding, positioning ring is set up in second electrode joint, and is located in the hole of avoiding. The above -mentioned scheme can solve the problem of the first electrode joint and second electrode joint docking failure in the process of installing bearing disc and lower electrode assembly.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a lower electrode assembly and a semiconductor process chamber. Background Technology

[0002] The semiconductor process chamber is equipped with a lower electrode assembly and a carrier disk. The carrier disk is used to support the wafer to be processed, and the lower electrode assembly is used to support the carrier disk and apply radio frequency voltage to it to meet different process requirements.

[0003] In related technologies, a carrier disk is stacked on top of a lower electrode assembly. The side of the carrier disk facing the lower electrode assembly has a first electrode connector, and the top of the lower electrode assembly has a second electrode connector. The first electrode connector and the second electrode connector are mated to provide a path for applying radio frequency voltage to the carrier disk.

[0004] However, due to manufacturing and assembly errors, the second electrode connector may tilt relative to the base where it is installed. As a result, during the assembly of the carrier plate and the lower electrode assembly, there may be a large deviation in the docking position between the first electrode connector and the second electrode connector, leading to the failure of docking between the first electrode connector and the second electrode connector. Utility Model Content

[0005] This utility model discloses a lower electrode assembly and a semiconductor process chamber to solve the problem that the first electrode connector and the second electrode connector may fail to connect during the installation of the carrier plate and the lower electrode assembly in related technologies.

[0006] To solve the above-mentioned technical problems, this utility model is implemented as follows:

[0007] In a first aspect, this application discloses a lower electrode assembly for supporting a carrier disk, wherein the carrier disk has a first electrode connector on the side facing the lower electrode assembly, and the lower electrode assembly includes a first fixing base, a second fixing base, an RF feed structure, and a positioning ring.

[0008] The first fixing seat is stacked on top of the second fixing seat, and the first fixing seat has a clearance hole;

[0009] The radio frequency feed structure includes a connector mounting part and a second electrode connector; the second electrode connector is connected to the connector mounting part, the connector mounting part is movably connected to the second fixed base, at least a portion of the second electrode connector is located in the clearance hole, and there is a gap between the portion of the second electrode connector located in the clearance hole and the hole wall of the clearance hole.

[0010] The positioning ring is sleeved on the second electrode connector and located inside the clearance hole to adjust the angle of the central axis of the second electrode connector relative to the central axis of the clearance hole, and to fix the second electrode connector. The second electrode connector is used to dock with the first electrode connector when the carrier plate is supported on the first fixed base.

[0011] Secondly, this application also discloses a semiconductor process chamber, which includes a chamber body, the lower electrode assembly described in the first aspect, and a carrier disk disposed within the chamber body. The lower electrode assembly is disposed in the chamber body, and the carrier disk is stacked on the first fixing base.

[0012] The technical solution adopted in this utility model can achieve the following technical effects:

[0013] The lower electrode assembly disclosed in this application configures the radio frequency feed structure as including a connector mounting part and a second electrode connector. The connector mounting part is movably connected to the second fixed base. At least a portion of the second electrode connector is located in the clearance hole of the first fixed base, and there is a gap between the portion of the second electrode connector located in the clearance hole and the hole wall of the clearance hole, so that the angle of the second electrode connector relative to the first fixed base can be adjusted. By setting a positioning ring, the positioning ring can be sleeved on the second electrode connector before the carrier plate is stacked on the first fixed base, and the positioning ring can be slid along the second electrode connector into the clearance hole. Under the action of the positioning ring, the angle of the second electrode connector relative to the first fixed base can be adjusted so that the central axis of the second electrode connector coincides or approximately coincides with the central axis of the clearance hole. Thus, the accuracy of the docking between the first electrode connector and the second electrode connector can be ensured during the process of stacking the carrier plate on the first fixed base. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the lower electrode assembly and the carrier plate after assembly, as disclosed in an embodiment of this utility model;

[0015] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0016] Figure 3 This is a schematic diagram of the lower electrode assembly without the positioning ring disclosed in this embodiment of the utility model;

[0017] Figure 4 for Figure 3 Enlarged view of point B in the middle;

[0018] Figure 5 This is a schematic diagram of the structure of the lower electrode assembly after the positioning ring is installed, as disclosed in an embodiment of this utility model.

[0019] Figure 6 for Figure 5 Enlarged view of point C in the middle;

[0020] Figure 7 This is a partial structural schematic diagram of the lower electrode assembly disclosed in an embodiment of the present utility model.

[0021] Explanation of reference numerals in the attached figures:

[0022] 100 - Carrier plate, 110 - First electrode connector, 111 - First RF feed port,

[0023] 200-base,

[0024] 300 - First mounting bracket, 301 - Clearance hole, 301a - First hole section, 301b - Second hole section, 302 - Cable channel.

[0025] 400 - Second fixing seat, 401 - First groove, 402 - Positioning hole, 403 - Second groove

[0026] 500 - RF feed structure, 510 - Connector mounting part, 511 - Connector mounting part body, 512 - Positioning post, 520 - Second electrode connector, 521 - Connector body, 522 - Connector base.

[0027] 610 - Positioning ring, 611 - Annular overlap, 612 - Annular insertion part

[0028] 700-Floating Nut

[0029] 800-dust cap,

[0030] 900-RF feeder. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0032] The technical solutions disclosed in the various embodiments of this utility model are described in detail below with reference to the accompanying drawings.

[0033] Please refer to Figures 1 to 7This utility model discloses a lower electrode assembly, which is used to support a carrier disk 100, which can be used to carry a wafer. The carrier disk 100 can be an electrostatic chuck, and can also adsorb, heat, etc. on the wafer. The specific function of the carrier disk 100 can be designed according to actual process requirements.

[0034] The carrier disk 100 has a first electrode connector 110 on the side facing the lower electrode assembly. The first electrode connector 110 is used to mate with the second electrode connector 520 of the lower electrode assembly (hereinafter referred to as the lower electrode assembly) to establish a path for applying radio frequency voltage to the carrier disk 100, thereby allowing radio frequency signals to be input to the carrier disk 100.

[0035] The lower electrode assembly includes a first fixing base 300, a second fixing base 400, an RF feed structure 500, and a positioning ring 610.

[0036] The first fixing base 300 is stacked on top of the second fixing base 400. The first fixing base 300 can be a first interface plate, and the second fixing base 400 can be a second interface plate.

[0037] The lower electrode assembly may also include a base 200, which may be a ring structure. Please refer to [reference needed]. Figure 1 The edges of the first fixed seat 300 and the second fixed seat 400 can be supported on the base 200 respectively.

[0038] The first mounting base 300 has a clearance hole 301. The RF feed structure 500 includes a connector mounting portion 510 and a second electrode connector 520, which is connected to the connector mounting portion 510. The connector mounting portion 510 is movably connected to the second mounting base 400. At least a portion of the second electrode connector 520 is located within the clearance hole 301, and there is a gap between the portion of the second electrode connector 520 located within the clearance hole 301 and the wall of the clearance hole 301. Because the connector mounting portion 510 is movably connected to the second mounting base 400, and there is a gap between the second electrode connector 520 and the wall of the clearance hole 301, the second electrode connector 520 has a certain amount of movement within the clearance hole 301.

[0039] A positioning ring 610 is fitted onto the second electrode connector 520 and located within the clearance hole 301. It is used to adjust the angle of the central axis of the second electrode connector 520 relative to the central axis of the clearance hole 301 and to fix the second electrode connector 520. The central axis of the second electrode connector 520 refers to the central axis extending along its length. The second electrode connector 520 is used to mate with the first electrode connector 110 when the support plate 100 is supported on the first fixed base 300.

[0040] Specifically, during the process of stacking the carrier plate 100 on the first fixed base 300, it is necessary to ensure that the central axis of the second electrode connector 520 coincides with the central axis of the clearance hole 301, or allow a small angle between the central axis of the second electrode connector 520 and the central axis of the clearance hole 301 (for example, an angle in the range of 1° to 5° does not affect the assembly) so that the second electrode connector 520 and the first electrode connector 110 can be accurately connected.

[0041] It should be noted that as long as the central axis of the second electrode connector 520 coincides with the central axis of the clearance hole 301, or the angle between the central axis of the second electrode connector 520 and the central axis of the clearance hole 301 is within the range that does not affect assembly, the second electrode connector 520 and the first electrode connector 110 can be accurately mated. This is guaranteed by the assembly tooling of the semiconductor process chamber. Since the angle of the central axis of the second electrode connector 520 relative to the central axis of the clearance hole 301 needs to be adjusted by the positioning ring 610 before the carrier plate 100 is stacked on the first fixed base 300, the manufacturing and assembly errors of the lower electrode assembly do not need to be considered too much. The grounding accuracy of the second electrode connector 520 and the first electrode connector 110 when the carrier plate 100 is stacked on the first fixed base 300 can be improved by adjusting the angle of the second electrode connector 520.

[0042] Please refer to Figure 1 and Figure 2 Taking the first fixed base 300 as a horizontally placed example, the central axis of the clearance hole 301 extends vertically. Before stacking the bearing plate 100 on the first fixed base 300, the positioning ring 610 is sleeved on the second electrode connector 520 and slid into the clearance hole 301 and fixed in the clearance hole 301 (that is, the outer wall of the positioning ring 610 is in close contact with the inner wall of the clearance hole 301). The central axis of the positioning ring 610 will coincide with the central axis of the clearance hole 301. During the process of the positioning ring 610 sliding into the clearance hole 301 and engaging with it, it will straighten the second electrode connector 520 so that the central axis of the second electrode connector 520 coincides with the central axis of the clearance hole 301, or ensure that the angle between the central axis of the second electrode connector 520 and the central axis of the clearance hole 301 is within the allowable error range, and fix the second electrode connector 520. This achieves the adjustment of the angle of the central axis of the second electrode connector 520 relative to the central axis of the clearance hole 301, and also fixes the second electrode connector 520. The problem with the related technology is that after the lower electrode assembly is assembled, the position of the RF feed structure is fixed. If manufacturing errors or assembly errors cause a large angular deviation of the RF feed structure relative to the vertical direction (exceeding the allowable error range), it will lead to the failure of the first electrode connector to dock with the second electrode connector.

[0043] The lower electrode assembly disclosed in this application configures the RF feed structure 500 as including a connector mounting portion 510 and a second electrode connector 520. The connector mounting portion 510 is movably connected to the second fixing base 400. At least a portion of the second electrode connector 520 is located within the clearance hole 301 of the first fixing base 300, and there is a gap between the portion of the second electrode connector 520 located within the clearance hole 301 and the hole wall of the clearance hole 301, allowing the angle of the second electrode connector 520 relative to the first fixing base 300 to be adjusted. By providing a positioning ring 610, the lower electrode assembly is positioned such that when the carrier plate 100 is stacked on the first fixing base 400... Before the first fixed base 300, the positioning ring 610 can be sleeved on the second electrode connector 520, and the positioning ring 610 can be slid along the second electrode connector 520 into the clearance hole 301. Under the action of the positioning ring 610, the angle of the second electrode connector 520 relative to the first fixed base 300 can be adjusted so that the central axis of the second electrode connector 520 coincides or approximately coincides with the central axis of the clearance hole 301, and the second electrode structure 520 is fixed. In this way, the accuracy of the docking between the first electrode connector 110 and the second electrode connector 520 can be ensured during the process of the carrier plate 100 being stacked on the first fixed base 300.

[0044] Optionally, the positioning ring 610 can be a resin structural component. By making the positioning ring 610 a resin structural component, the positioning ring 610 can have a certain degree of elasticity, which is beneficial for the fit between the positioning ring 610 and the clearance hole 301, and can also prevent the positioning ring 610 from damaging the hole wall of the clearance hole 301. Of course, the positioning ring 610 can also be other elastic insulating components, and the material of the positioning ring 610 is not specifically limited in this embodiment.

[0045] Specifically, the first electrode connector 110 may have a first radio frequency feed hole 111, and the second electrode connector 520 may extend beyond the clearance hole 301. The second electrode connector 520 and the first radio frequency feed hole 111 may be plugged into each other.

[0046] The lower electrode assembly disclosed in this application opens a first radio frequency feed hole 111 on the first electrode connector 110 and extends the second electrode connector 520 beyond the clearance hole 301, so that the second electrode connector 520 can be inserted and mated with the first radio frequency feed hole 111, thereby making the connection between the first electrode connector 110 and the second electrode connector 520 more stable. After the positioning ring 610 adjusts the angle of the second electrode connector 520 relative to the first fixed base 300, the central axis of the second electrode connector 520 coincides with or is approximately coincident with the central axis of the clearance hole 301. During the process of the carrier plate 100 being stacked on the first fixed base 300, it can be ensured that the second electrode connector 520 is accurately inserted into the first radio frequency feed hole 111, avoiding the risk of the carrier plate 100 crushing the second electrode connector 520 due to the failure of the second electrode connector 520 to mate with the first radio frequency feed hole 111.

[0047] In another embodiment, the second electrode connector 520 has a second radio frequency feed hole, and the first electrode connector 110 can extend out of the surface of the carrier plate 100. The first electrode connector 110 is inserted into the second radio frequency feed hole.

[0048] The lower electrode assembly disclosed in this application opens a second RF feed hole on the second electrode connector 520, allowing the first electrode connector 110 to extend out of the surface of the carrier plate 100. This enables the first electrode connector 110 to be inserted into the second RF feed hole, making the connection between the first electrode connector 110 and the second electrode connector 520 more stable. After the positioning ring 610 adjusts the angle of the second electrode connector 520 relative to the first fixed base 300, the central axis of the second electrode connector 520 coincides with or is approximately coincident with the central axis of the clearance hole 301. During the process of the carrier plate 100 being stacked on the first fixed base 300, it can be ensured that the first electrode connector 110 is accurately inserted into the second RF feed hole, avoiding the risk of the first fixed base 300 crushing the first electrode connector 110 due to the failure of the first electrode connector 110 to connect with the second RF feed hole.

[0049] Optionally, the clearance hole 301 may include a first hole segment 301a and a second hole segment 301b that are interconnected. Specifically, the first hole segment 301a and the second hole segment 301b may be coaxially distributed. The first hole segment 301a may be located on the side away from the second fixing seat 400, and the diameter of the first hole segment 301a is larger than the diameter of the second hole segment 301b. The positioning ring 610 may include an annular overlapping portion 611 and an annular extending portion 612. The outer diameter of the annular overlapping portion 611 is larger than the outer diameter of the annular extending portion 612. Both the annular overlapping portion 611 and the annular extending portion 612 may be sleeved outside the second electrode connector 520. The annular extending portion 612 may be used to extend into the second hole segment 301b, and the annular overlapping portion 611 may be used to extend into the first hole segment 301a, and may overlap on the first step surface formed by the first hole segment 301a and the second hole segment 301b.

[0050] The lower electrode assembly disclosed in this application configures the clearance hole 301 as including a first hole segment 301a and a second hole segment 301b that are interconnected, with the diameter of the first hole segment 301a being larger than the diameter of the second hole segment 301b. The positioning ring 610 is configured as including an annular overlapping portion 611 and an annular extending portion 612, with the outer diameter of the annular overlapping portion 611 being larger than the outer diameter of the annular extending portion 612. This allows the annular extending portion 612 to extend into the second hole segment 301b and the annular overlapping portion 611 to extend into the first hole segment 301a. By using the first hole segment 301a and the second hole segment 301b as positioning references, the positioning ring 610 is positioned more accurately, thereby improving the positioning accuracy of the positioning ring 610 relative to the second electrode connector 520.

[0051] Accuracy of angle adjustment. The annular overlapping part 611 extends into the first hole section 301a and overlaps on the first step surface formed by the first hole section 301a and the second hole section 301b, so that the first step surface can limit the positioning ring 610 in the extension direction of the central axis of the clearance hole 301, and prevent the positioning ring 610 from extending too much into the clearance hole 301.

[0052] Furthermore, the second electrode connector 520 may include a connector body 521 and a connector base 522 that are connected to each other in the extension direction of the central axis of the clearance hole 301. The connector base 522 is connected to the connector mounting part 510. The outer diameter of the connector body 521 may be smaller than the outer diameter of the connector base 522. A second stepped surface may be formed at the connection between the connector body 521 and the connector base 522. The end of the annular extension 612 may be in limiting contact with the second stepped surface.

[0053] The lower electrode assembly disclosed in this application configures the second electrode connector 520 as including a connector body 521 and a connector base 522. The outer diameter of the connector body 521 is smaller than the outer diameter of the connector base 522. A second stepped surface is formed at the connection between the connector body 521 and the connector base 522, so that the end of the annular extension 612 makes a limiting contact with the second stepped surface to limit the second electrode connector 520 in the extension direction of the central axis of the clearance hole 301, thereby making the position of the second electrode connector 520 in the extension direction of the central axis of the clearance hole 301 more accurate.

[0054] There are various ways to connect the connector mounting portion 510 of the RF feed structure 500 to the second fixing base 400. For example, the connector mounting portion 510 and the second fixing base 400 can be connected by a ball joint. In another embodiment, a first groove 401 can be provided on the side of the second fixing base 400 facing the first fixing base 300. The connector mounting portion 510 can include a connector mounting portion body 511, which can be movably disposed in the first groove 401 and can be engaged with the first fixing base 300 at the upper limit of the groove opening of the first groove 401.

[0055] The lower electrode assembly disclosed in this application has a first groove 401 on the side of the second fixing seat 400 facing the first fixing seat 300, so that the main body 511 of the connector mounting part 510 is movably disposed in the first groove 401. Thus, the connector mounting part 510 and the second fixing seat 400 are movably connected through the assembly relationship between the second fixing seat 400 and the first fixing seat 300, which helps to reduce the number of components in the lower electrode assembly.

[0056] Optionally, a positioning hole 402 may be provided at the bottom of the first groove 401. The connector mounting part 510 may also include a positioning post 512, which is connected to the connector mounting part body 511. The outer diameter of the positioning post 512 may be smaller than the outer diameter of the connector mounting part body 511. The positioning post 512 may pass through the positioning hole 402. The outer diameter of the positioning post 512 is smaller than the diameter of the positioning hole 402, thereby ensuring the movable connection between the connector mounting part 510 and the second fixed seat 400. The outer diameter of the connector mounting part body 511 is larger than the diameter of the positioning hole 402, thereby allowing the connector mounting part body 511 to be supported at the bottom of the first groove 401.

[0057] The lower electrode assembly disclosed in this application provides a positioning hole 402 at the bottom of the first groove 401, and sets the connector mounting part 510 to include a positioning post 512. The positioning post 512 is connected to the main body 511 of the connector mounting part and passes through the positioning hole 402. Since the positioning hole 402 has a positioning function for the RF feed structure 500 during installation, it is beneficial to improve the accuracy of the position of the RF feed structure 500 during installation.

[0058] Optionally, the second fixing seat 400 may have a second groove 403 on the side opposite to the first groove 401. The positioning hole 402 can connect the first groove 401 and the second groove 403. The positioning pin 512 extends into the second groove 403 through the positioning hole 402. The outer diameter of the positioning pin 512 is smaller than the inner diameter of the second groove 403. The portion of the positioning pin 512 extending into the second groove 403 has external threads. The lower electrode assembly may also include a floating nut 700, which can be threadedly engaged with the positioning pin 512. The floating nut 700 has a movable clearance between itself and the inner wall of the second groove 403. For example, please refer to... Figure 7 There may be a gap n between the floating nut 700 and the bottom of the second groove 403. When a dust cap 800 is provided at the opening of the second groove 403, there may be a gap m between the floating nut 700 and the dust cap 800. There may be a gap o between the floating nut 700 and the side wall of the second groove 403.

[0059] The lower electrode assembly disclosed in this application has an external thread on the portion of the positioning post 512 that extends into the second groove 403, allowing the positioning post 512 to pass through the positioning hole 402 and extend into the second groove 403, and to engage with the floating nut 700. As a result, under the constraint of the second groove 403, the movement margin of the second electrode connector 520 is relatively small, which is beneficial for subsequent adjustment of the angle of the second electrode connector and fixation of the second electrode connector.

[0060] Optionally, the lower electrode assembly may also include a dust cap 800, which can cover the opening of the second recess 403. The dust cap 800 can protect the RF feed structure 500, thereby reducing the adhesion of dust and other foreign objects to the RF feed structure 500, and thus mitigating the impact on the transmitted RF signal.

[0061] In an optional embodiment, the lower electrode assembly may further include an RF feeder 900 located below the carrier plate 100. Both the first fixing base 300 and the second fixing base 400 are annular structures, and both can be fitted over the RF feeder 900. The first fixing base 300 may have a cable channel 302. The lower electrode assembly may also include a cable that passes through the cable channel 302, with both ends connected between the second electrode connector 520 and the RF feeder 900. The RF feeder 900 can transmit RF signals to the carrier plate 100 sequentially via the cable, the second electrode connector 520, and the first electrode connector 110. The cable passing through the cable channel 302 provides protection for the cable.

[0062] This application also discloses a semiconductor process chamber. The disclosed semiconductor process chamber can be a chamber for etching processes, or a chamber for deposition processes or other processes. The embodiments of this application do not impose specific limitations on this.

[0063] The disclosed semiconductor process chamber includes a chamber body, a lower electrode assembly disclosed in the above embodiments, and a carrier disk 100 disposed in the chamber body. The lower electrode assembly is disposed in the chamber body, and the carrier disk 100 is stacked on the first fixing seat 300.

[0064] The semiconductor process chamber disclosed in this application, by setting the lower electrode assembly disclosed in the above embodiments, ensures the accuracy of the docking between the first electrode connector 110 and the second electrode connector 520 during the process of the carrier disk 100 being stacked on the first fixed base 300.

[0065] The above embodiments of this utility model mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be described in detail here.

[0066] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, the present invention is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of the present invention without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of the present invention.

Claims

1. A lower electrode assembly for supporting a carrier disk (100), the carrier disk (100) having a first electrode connector (110) on the side facing the lower electrode assembly, characterized in that, The lower electrode assembly includes a first fixing base (300), a second fixing base (400), an RF feed structure (500), and a positioning ring (610). The first fixing seat (300) is stacked on top of the second fixing seat (400), and the first fixing seat (300) is provided with a clearance hole (301). The radio frequency feed structure (500) includes a connector mounting portion (510) and a second electrode connector (520); the second electrode connector (520) is connected to the connector mounting portion (510), the connector mounting portion (510) is movably connected to the second fixing seat (400), at least a portion of the second electrode connector (520) is located inside the clearance hole (301), and there is a gap between the portion of the second electrode connector (520) located inside the clearance hole (301) and the hole wall of the clearance hole (301); The positioning ring (610) is sleeved on the second electrode connector (520) and located in the clearance hole (301) to adjust the angle of the central axis of the second electrode connector (520) relative to the central axis of the clearance hole (301) and to fix the second electrode connector (520). The second electrode connector (520) is used to dock with the first electrode connector (110) when the carrier plate (100) is supported on the first fixing seat (300).

2. The lower electrode assembly according to claim 1, characterized in that, The clearance hole (301) includes a first hole segment (301a) and a second hole segment (301b) that are interconnected. The first hole segment (301a) is located on the side away from the second fixing seat (400), and the diameter of the first hole segment (301a) is larger than the diameter of the second hole segment (301b). The positioning ring (610) includes an annular overlapping portion (611) and an annular extending portion (612). The outer diameter of the annular overlapping portion (611) is larger than the outer diameter of the annular extending portion (612). Both the annular overlapping portion (611) and the annular extending portion (612) are sleeved outside the second electrode connector (520). The annular extending portion (612) is used to extend into the second hole segment (301b), and the annular overlapping portion (611) is used to extend into the first hole segment (301a) and overlaps on the first step surface formed by the first hole segment (301a) and the second hole segment (301b).

3. The lower electrode assembly according to claim 2, characterized in that, The second electrode connector (520) includes a connector body (521) and a connector base (522) connected to each other in the extension direction of the central axis of the clearance hole (301). The connector base (522) is connected to the connector mounting part (510). The outer diameter of the connector body (521) is smaller than the outer diameter of the connector base (522). A second stepped surface is formed at the connection between the connector body (521) and the connector base (522). The end of the annular extension (612) is in limiting contact with the second stepped surface.

4. The lower electrode assembly according to claim 1, characterized in that, The second fixing seat (400) has a first groove (401) on the side facing the first fixing seat (300); The connector mounting part (510) includes a connector mounting part body (511), which is movably disposed in the first groove (401) and engages with the first fixing seat (300) at the upper limit of the groove opening of the first groove (401).

5. The lower electrode assembly according to claim 4, characterized in that, The bottom of the first groove (401) is provided with a positioning hole (402). The connector mounting part (510) further includes a positioning post (512), which is connected to the main body (511) of the connector mounting part. The outer diameter of the positioning post (512) is smaller than the outer diameter of the main body (511) of the connector mounting part, and the positioning post (512) passes through the positioning hole (402).

6. The lower electrode assembly according to claim 5, characterized in that, The second fixing seat (400) has a second groove (403) on the side opposite to the first groove (401). The positioning hole (402) connects the first groove (401) and the second groove (403). The positioning pin (512) passes through the positioning hole (402) and extends into the second groove (403). The portion of the positioning pin (512) extending into the second groove (403) is provided with external threads. The lower electrode assembly also includes a floating nut (700), which is threadedly engaged with the positioning post (512) and has a movable gap with the inner wall of the second groove (403).

7. The lower electrode assembly according to claim 6, characterized in that, The lower electrode assembly also includes a dust cap (800) which covers the opening of the second groove (403).

8. The lower electrode assembly according to claim 1, characterized in that, The lower electrode assembly also includes an RF feeder (900), which is located below the carrier plate (100). The first fixing base (300) and the second fixing base (400) are both annular structures and are both sleeved outside the RF feeder (900). The first fixing base (300) has a cable channel (302). The lower electrode assembly also includes a cable, which passes through the cable channel (302) and the two ends of the cable are connected between the second electrode connector (520) and the RF feeder (900).

9. The lower electrode assembly according to claim 1, characterized in that, The positioning ring (610) is a resin structural component.

10. The lower electrode assembly according to claim 1, characterized in that, The first electrode connector (110) has a first radio frequency feed hole (111), and the second electrode connector (520) extends beyond the clearance hole (301), and the second electrode connector (520) is inserted into the first radio frequency feed hole (111); or, The second electrode connector (520) has a second radio frequency feed hole, and the first electrode connector (110) extends out of the surface of the carrier plate (100). The first electrode connector (110) is inserted into the second radio frequency feed hole.

11. A semiconductor process chamber, characterized in that, It includes a chamber body, a lower electrode assembly as described in any one of claims 1 to 10, and a support plate (100) disposed within the chamber body, wherein the lower electrode assembly is disposed in the chamber body, and the support plate (100) is stacked on the first fixing seat (300).

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