Sample holder and secondary ion mass spectrometer

Abstract

A sample holder and a secondary ion mass spectrometer, the sample holder comprising: a support frame having a through mounting slot; a sample window arranged at one end of the mounting slot, the sample window having at least one through hole formed therein, the through hole being used to expose a region of a sample to be measured; a pressing plate arranged at the other end of the mounting slot, the pressing plate having a plurality of mounting positions, the spacing between any two adjacent mounting positions being no greater than a predetermined spacing threshold; and a plurality of elastic components, the elastic components being detachably arranged at the mounting positions; wherein the sample holder is configured such that at least part of the mounting positions on the pressing plate corresponding to a region of the sample have elastic components arranged thereon, and the elastic components are adapted to form elastic contact with the sample. The present application can flexibly adjust the fixed positions and number of the elastic components according to the actual sample situation, effectively avoiding the problem of uneven stress caused by the mismatch between the fixed elastic components and the sample.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically to a sample holder and a secondary ion mass spectrometer. Background Technology

[0002] In secondary ion mass spectrometry, the sample holder is a key component for stable sample support and accurate testing. The sample holder in related technologies includes a support frame, a sample window, and a back pressure plate. The sample is placed on the sample window, and springs are fixedly installed on the back pressure plate. The position and number of springs must match the sample window to press the sample firmly against it, ensuring sample stability during testing.

[0003] However, the above sample holder has at least the following drawbacks: the position and number of springs are fixed and cannot be flexibly adjusted according to the actual sample conditions, which can easily lead to uneven force on the sample and thus affect the uniformity of the electric field. Utility Model Content

[0004] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0005] To address the existing problems, this utility model provides a sample rack, comprising:

[0006] A support frame having a through mounting groove;

[0007] A sample window is provided at one end of the mounting groove, and the sample window has at least one through hole for exposing the test area of ​​the sample.

[0008] A pressure plate is provided at the other end of the mounting groove. The pressure plate has multiple mounting positions, and the distance between two adjacent mounting positions is not greater than a preset distance threshold.

[0009] Multiple resilient components, wherein the resilient components are detachably disposed at the mounting position;

[0010] The sample holder is configured such that at least a portion of the mounting positions on the pressure plate corresponding to the sample area are provided with the elastic component, and the elastic component is adapted to form elastic contact with the sample.

[0011] In some embodiments of this application, the elastic component includes a connector, a mounting member, and an elastic member, wherein the mounting member and the elastic member are respectively disposed on opposite sides of the connector, the mounting member is detachably disposed at the mounting position, and the elastic member is configured to form elastic contact with the sample.

[0012] In some embodiments of this application, the pressure plate is provided with at least one first mating part on the side facing the sample window, and each mounting position includes one first mating part;

[0013] The mounting component includes a second mating portion adapted to the first mating portion, and the elastic component is disposed at the mounting position through a detachable mating connection between the second mating portion and the first mating portion.

[0014] In some embodiments of this application, the first mating part includes a threaded hole, the second mating part includes a threaded portion, the threaded hole has an internal thread, and the threaded portion has an external thread adapted to the internal thread.

[0015] In some embodiments of this application, the arrangement of the elastic components on the pressure plate includes at least one of the following: regular polygonal arrangement, triangular arrangement, T-shaped arrangement, array arrangement, ring arrangement, and staggered arrangement.

[0016] In some embodiments of this application, the sample window includes a window frame and a partition disposed within the window frame, the partition dividing the area within the window frame into at least two through holes;

[0017] The width of the separator is 2mm to 6.5mm, and the thickness is 0.2mm to 0.5mm.

[0018] In some embodiments of this application, the portion of the sample window facing the pressure plate that corresponds to the area between two adjacent through holes is at the same height plane.

[0019] In some embodiments of this application, the spacing between two adjacent mounting positions is 6mm to 8mm.

[0020] In some embodiments of this application, the support frame is provided with a sample inlet connection for feeding the sample holder into the secondary ion mass spectrometer.

[0021] According to another aspect of this application, a secondary ion mass spectrometer is provided, comprising the sample holder described in any one of the above-mentioned methods.

[0022] The sample holder and secondary ion mass spectrometer of this application, by setting multiple mounting positions on the pressure plate with the distance between two adjacent mounting positions not exceeding a preset distance threshold, and adopting a detachable assembly structure of elastic components and mounting positions, can flexibly adjust the fixed position and number of elastic components according to the actual sample conditions. This allows the elastic components to act precisely on the corresponding area of ​​the sample and form a stable elastic contact, effectively avoiding the problem of uneven force caused by mismatch between the elastic components and the sample under fixed settings. This ensures the consistency of the sample and sample window fit, helps maintain the uniformity of the electric field during the test, and improves the accuracy of secondary ion mass spectrometry. Attached Figure Description

[0023] The following drawings, which are incorporated herein by reference as part of this invention, are provided for understanding the invention. The drawings illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention.

[0024] In the attached image:

[0025] Figure 1 A schematic diagram of the sample window structure in the related technology is shown.

[0026] Figure 2 A schematic diagram of the sample holder according to a specific embodiment of the present invention is shown.

[0027] Figure 3 A schematic diagram of the support frame according to a specific embodiment of the present invention is shown.

[0028] Figure 4 A schematic diagram of the sample window according to a specific embodiment of the present invention is shown.

[0029] Figure 5 The diagram shows a structural schematic of a pressure plate with an elastic component according to a specific embodiment of the present invention.

[0030] Figure 6 A schematic diagram of the structure of an elastic component according to a specific embodiment of the present invention is shown.

[0031] Figure 7 A schematic diagram of the structure of a sample according to a specific embodiment of the present invention is shown. Detailed Implementation

[0032] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with the present invention.

[0033] It should be understood that this invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this invention to those skilled in the art. In the drawings, for clarity, the dimensions of layers and regions, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0034] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this utility model, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion.

[0035] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0036] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0037] The sample holder in the related technology includes a support frame, a sample window, and a back pressure plate, on which the sample is placed. Springs are fixed to the back pressure plate; the position and number of springs must match the sample window to press the sample firmly against it, ensuring sample stability during testing.

[0038] However, the above sample holder has at least the following drawbacks: the position and number of springs are fixed and cannot be flexibly adjusted according to the actual sample conditions, which can easily lead to uneven force on the sample and thus affect the uniformity of the electric field.

[0039] To address at least one of the aforementioned technical problems, this application provides a sample holder, comprising:

[0040] A support frame having a through mounting groove;

[0041] A sample window is provided at one end of the mounting groove, and the sample window has at least one through hole for exposing the test area of ​​the sample.

[0042] A pressure plate is provided at the other end of the mounting groove. The pressure plate has multiple mounting positions, and the distance between two adjacent mounting positions is not greater than a preset distance threshold.

[0043] Multiple resilient components, wherein the resilient components are detachably disposed at the mounting position;

[0044] The sample holder is configured such that the elastic component is disposed at a mounting position on the pressure plate corresponding to the sample area, and the elastic component is adapted to form elastic contact with the sample.

[0045] According to the sample holder of this application, by setting multiple mounting positions on the pressure plate, and the distance between two adjacent mounting positions is not greater than a preset distance threshold, and by adopting a detachable assembly structure of elastic components and mounting positions, the fixed position and number of elastic components can be flexibly adjusted according to the actual sample conditions. This allows the elastic components to act precisely on the corresponding area of ​​the sample and form a stable elastic contact, effectively avoiding the problem of uneven force caused by mismatch between the elastic components and the sample under fixed settings. This ensures the consistency of the sample and sample window fit, which is beneficial to maintaining the uniformity of the electric field during the test and improving the accuracy of secondary ion mass spectrometry.

[0046] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0047] The following is for reference. Figures 2-6 A sample holder according to one embodiment of this application is described. The sample holder includes:

[0048] Support frame 210, support frame 210 has a through mounting groove;

[0049] The sample window 220 is located at one end of the mounting groove. The sample window 220 has at least one through hole 222, which is used to expose the test area 310 of the sample.

[0050] A pressure plate 230 is provided at the other end of the mounting groove. The pressure plate 230 has multiple mounting positions 231, and the distance between two adjacent mounting positions 231 is not greater than a preset distance threshold.

[0051] Multiple elastic components 240 are detachably disposed at mounting position 231;

[0052] The sample holder is configured such that at least a portion of the mounting position 231 on the pressure plate 230 corresponding to the sample area is provided with an elastic component 240, and the elastic component 240 is adapted to form elastic contact with the sample.

[0053] In actual operation, the sample holder is used as follows: First, the sample window 220 is assembled into one end of the mounting groove of the support frame 210, ensuring its position is stable; then, the sample is placed on the side of the sample window 220 facing the mounting groove, and each through hole 222 on the sample window 220 precisely exposes the corresponding test area 310 of the sample. Next, based on the number of samples, their shape, geometric dimensions, and the spatial distribution characteristics of the test area 310, at least some of the mounting positions 231 on the pressure plate 230 corresponding to the sample are selected to assemble the elastic component 240; finally, the pressure plate 230 equipped with the elastic component 240 is fixed to the other end of the mounting groove, so that the elastic component 240 forms elastic contact with the sample surface, and uniform pressure is applied to the sample through elastic force, ensuring that the sample and the sample window 220 are tightly and uniformly fitted.

[0054] The assembly of the elastic component 240 follows the principle of on-demand configuration: it is not necessary to set the elastic component 240 on all mounting positions 231 in the corresponding sample area. Instead, it can be selectively set according to the number of samples, their shape and outline, geometric dimensions and the spatial distribution characteristics of the area to be tested 310. The elastic component 240 can be assembled on all corresponding mounting positions 231 or only on some mounting positions 231 corresponding to the key stress area of ​​the sample. This allows the position and number of the elastic component 240 to be flexibly adjusted according to the actual sample conditions.

[0055] Through the above design, on the one hand, the pressure plate 230 is provided with multiple mounting positions 231, and the distance between two adjacent mounting positions 231 is no greater than a preset distance threshold. This forms a high-density distribution of mounting positions on the pressure plate 230, ensuring a sufficient number of mounting positions per unit area. On the other hand, each mounting position 231 and the elastic component 240 adopt a detachable connection structure, allowing the elastic component 240 to be flexibly assembled or disassembled according to actual needs. The combination of these two features gives the ability to flexibly adjust the installation position and number of the elastic component 240 according to the sample shape, size, and spatial distribution of the test area 310. By selectively assembling the elastic component 240 on at least some of the mounting positions 231 in the corresponding sample area, it can be ensured that the elastic component 240 accurately acts on the key stress points of the sample, effectively avoiding the problem of local stress imbalance caused by the mismatch between the elastic component 240 and the sample shape under a fixed layout, thereby achieving uniform fit between the sample and the sample window 220.

[0056] Furthermore, the stable elastic contact formed between the elastic component 240 and the sample, combined with a uniformly applied contact, effectively avoids electric field distortion caused by localized force deviations in the sample. This design not only ensures the stability and consistency of the electric field environment during secondary ion mass spectrometry testing but also helps improve the stability of secondary ion signal collection, thereby enhancing the accuracy and reliability of the test and analysis results.

[0057] In specific application scenarios, the assembly position and quantity of the elastic components 240 can be flexibly adjusted according to the number of samples, their shape and geometric dimensions, and the spatial distribution characteristics of the area to be tested 310, so that the elastic components 240 form diverse arrangement configurations on the pressure plate 230. For example, multiple elastic components 240 can be arranged in a regular polygonal (e.g., square, regular pentagon, regular hexagon, etc.), a triangular, a T-shaped, an array, a ring, or an interlaced arrangement, etc., without specific limitations in this application. Of course, it can be understood that the arrangement configuration of the elastic components 240 can also be a combination of the above-mentioned arrangement configurations. Through the above-mentioned diverse arrangement design, it is possible to adapt to the force balance requirements of different samples, ensure that the distribution of elastic force is compatible with the structural characteristics of the sample, and thus achieve uniform pressure on the sample.

[0058] In related technologies, such as Figure 1 As shown, the sample window 121 of the sample holder adopts a multi-independent window design. Due to the three-dimensional height difference between the windows 122, a three-dimensional partition structure 123 is formed. Only one sample can be placed on a single window 122, which brings at least the following drawbacks: First, the sample size adaptability is limited. Due to the spatial constraints of the three-dimensional partition structure 123, it can only accommodate standard samples of specific sizes. Large-sized samples cannot be loaded, and small-sized samples are easy to fall off from the window 122. Second, if large samples need to be tested, they need to be cut into pieces. After the samples are cut into pieces, it is difficult to carry out comparative experiments on adjacent points. Third, the sample preparation is difficult. It is necessary to accurately measure and prepare standard samples of specific sizes. Fourth, the sample preparation is repeated many times. When performing uniformity tests on multiple adjacent points on the same wafer, samples need to be prepared multiple times, which is cumbersome.

[0059] In comparison, such as Figure 4As shown, on the side of the sample window 220 facing the pressure plate 230, the portion corresponding to the area between two adjacent through holes 222 is at the same height plane. That is, in this application, the portion of the sample window 220 corresponding to the area between two adjacent through holes 222 has no three-dimensional partition structure, or it can be said that the area of ​​the sample window 220 corresponding to the separator 221 has no three-dimensional partition structure. This design, by eliminating the spatial constraints of the three-dimensional partition structure, can specifically solve the above-mentioned defects: First, it breaks through the size limitation, which can accommodate large-sized samples (direct loading without cutting) and stably place small-sized samples (avoiding detachment), improving the sample size adaptability; Second, large samples do not need to be cut into pieces, and the original state of adjacent points can be completely preserved, ensuring the feasibility of comparative experiments of adjacent points; Third, it does not require the strict preparation of standard samples of specific sizes, reducing the difficulty of sample preparation; Fourth, it can directly test the uniformity of multiple adjacent points of the sample in the accommodating space without multiple sample preparations, simplifying the operation process.

[0060] In related technologies, the separator of sample window 121 has a width of 1 mm and a thickness of 0.2 mm. Its mechanical strength is poor, and it is prone to deformation after long-term use, which in turn causes uneven electric field distribution and introduces test errors.

[0061] In this application, such as Figure 4 As shown, the sample window 220 includes a window frame and a partition 221 disposed within the window frame. The partition 221 divides the area within the window frame into at least two through holes 222. The width of the partition 221 is set to 2mm to 6.5mm, and the thickness is set to 0.2mm to 0.5mm. By increasing the width and thickness of the partition 221, its mechanical strength is significantly improved, effectively avoiding the problem of uneven electric field distribution caused by the deformation of the partition 221, thereby reducing test errors.

[0062] It is worth noting that the number of through holes 222 separated by the separator 221 can be set according to actual conditions and is not limited thereto. For example, Figure 4 The central partition 221 divides the area within the window frame into nine through holes 222. Figure 7 The sample 300 has 9 test areas 310, and each through hole 222 can expose one test area 310.

[0063] In some embodiments, the shape of the sample window 220 in this application may be a square, a circle, or any other suitable shape, and there is no limitation thereto.

[0064] In related technologies, springs are fixed to a back pressure plate by rectangular pressure strips, with gaps existing in the back pressure plate area between adjacent rectangular pressure strips. This leads to at least the following drawbacks: First, the structural strength is limited, and stress concentration easily forms at the gaps, which may cause deformation of the back pressure plate after long-term stress, affecting the stability of the spring's compression; second, the flexibility of spring arrangement is restricted, as springs can only be installed in the rectangular pressure strip area, and cannot be installed in the gap area, making it difficult to adapt to the complex distribution of stress points on the sample.

[0065] In comparison, such as Figure 5 As shown, the pressure plate 230 in this application adopts an integral structure and a gapless design, which can specifically solve the above problems: First, it improves the structural integrity and mechanical stability, eliminates the stress concentration hazards caused by gaps, enhances the overall rigidity of the pressure plate 230, reduces the risk of deformation during long-term use, and ensures the consistency of pressure applied by the elastic component 240; Second, it expands the degree of freedom of arrangement of the elastic component 240, and the mounting positions 231 can be evenly set on the overall surface, so that the elastic component 240 can be flexibly configured in any area according to the sample stress requirements, and adapt to more diverse sample shapes.

[0066] In some embodiments, the distance between two adjacent mounting positions 231 is not greater than a preset distance threshold. The preset distance threshold can be limited according to the actual situation. For example, the preset distance threshold can be 8mm, 8.5mm, 9mm or any other suitable value, and there is no limitation on it.

[0067] Of course, it is understandable that, in order to avoid installation interference between two adjacent mounting positions 231, the distance between two adjacent mounting positions 231 should not be too small. For example, the distance between two adjacent mounting positions 231 is 6mm to 8mm, or it can be any other suitable value, which is not limited.

[0068] Among them, such as Figure 5 As shown, for the multiple mounting positions 231 on the pressure plate 230, each mounting position 231 can correspond to a threshold-detachable elastic component 240. Of course, as explained above, in specific application scenarios, it is not necessary to install elastic components 240 on all mounting positions 231. Instead, the assembly position and number of elastic components 240 can be flexibly adjusted according to the number of samples, their shape and geometry, and the spatial distribution characteristics of the test area 310.

[0069] It should be noted that, Figure 5In the illustration, to visually demonstrate the one-to-one detachable connection between the mounting position 231 and the elastic component 240, the elastic component 240 is depicted as being parallel to the surface of the pressure plate 230. However, in actual applications, the elastic component 240 is perpendicular to the surface of the pressure plate 230, i.e., the axis of the elastic element 243 mentioned below (the axis of the elastic element 243 can be found in [reference]). Figure 6 It should be the surface perpendicular to the pressure plate 230.

[0070] In some embodiments, such as Figure 6 As shown, the elastic component 240 includes a connector 241, a mounting component 242, and an elastic component 243. The mounting component 242 and the elastic component 243 are respectively disposed on opposite sides of the connector 241. The mounting component 242 is detachably disposed at the mounting position 231, and the elastic component 243 is configured to form elastic contact with the sample.

[0071] Specifically, the connector 241 has opposing first and second sides (the opposing first and second sides can be opposing first and second surfaces, or opposing first and second ends, etc.), the mounting member 242 is fixedly connected to the first side of the connector 241, and the elastic member 243 is fixedly connected to the second side of the connector 241. The end of the mounting member 242 away from the connector 241 is detachably connected to the mounting position 231, and the end of the elastic member 243 away from the connector 241 is configured to form elastic contact with the sample to provide a stable elastic force.

[0072] The elastic element 243 can be a spring, a sheet, or the like, and there are no restrictions on its use.

[0073] Furthermore, the pressure plate 230 has at least one first mating part on the side facing the sample window 220, and each mounting position 231 includes a first mating part; the mounting member 242 includes a second mating part adapted to the first mating part, and the elastic component 240 is disposed at the mounting position 231 through the second mating part and the first mating part in a detachable engagement.

[0074] The first mating part and the matching second mating part can be a threaded detachable connection structure, a magnetic detachable connection structure, a snap-on detachable connection structure, etc., and there is no limitation on this. For example, the first mating part includes a threaded hole, and the second mating part includes a threaded part. The threaded hole has an internal thread, and the threaded part has an external thread that matches the internal thread. The elastic component 240 is detachably disposed on the mounting position 231 of the pressure plate 230 by means of threads.

[0075] In some embodiments, the sample holder further includes a base disposed on the side of the sample window 220 away from the sample, for supporting the sample window 220. The base supports the sample window 220 to achieve a suspended arrangement of the sample holder. While stably supporting the sample window 220, it can prevent the sample from directly contacting the placement surface, thereby preventing foreign objects on the placement surface from scratching the sample surface and ensuring the integrity of the sample surface.

[0076] In some embodiments, such as Figure 2 As shown, the support frame 210 is provided with a sample introduction connection part 260 for feeding the sample holder into the secondary ion mass spectrometer. The sample introduction connection part 260 can be implemented as a snap-fit ​​structure, a magnetic coupling structure, etc., and there is no limitation on it.

[0077] According to another aspect of this application, a secondary ion mass spectrometer is provided, including a sample holder.

[0078] The sample holder can be implemented as described above, and will not be repeated here.

[0079] It is worth noting that the sample holder of this application is applicable not only to secondary ion mass spectrometers, but also to any other suitable testing instruments, without any limitation.

[0080] In summary, the sample holder and secondary ion mass spectrometer according to the embodiments of this application, by setting multiple mounting positions on the pressure plate, with the distance between two adjacent mounting positions not exceeding a preset distance threshold, and adopting a detachable assembly structure of elastic components and mounting positions, allows for flexible adjustment of the fixed position and number of elastic components according to the actual sample conditions. This enables the elastic components to accurately act on the corresponding area of ​​the sample and form a stable elastic contact, effectively avoiding the problem of uneven force caused by mismatch between the elastic components and the sample under fixed settings. This ensures the consistency of the sample and sample window fit, helps maintain the uniformity of the electric field during the test, and improves the accuracy of secondary ion mass spectrometry testing.

[0081] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0082] Similarly, it should be understood that, in order to simplify this application and aid in understanding one or more aspects of the application, various features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of application is that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0083] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0084] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A sample holder, characterized in that, include: A support frame having a through mounting groove; A sample window is provided at one end of the mounting groove, and the sample window has at least one through hole for exposing the test area of ​​the sample. A pressure plate is provided at the other end of the mounting groove. The pressure plate has multiple mounting positions, and the distance between two adjacent mounting positions is not greater than a preset distance threshold. Multiple resilient components, wherein the resilient components are detachably disposed at the mounting position; The sample holder is configured such that at least a portion of the mounting positions on the pressure plate corresponding to the sample area are provided with the elastic component, and the elastic component is adapted to form elastic contact with the sample.

2. The sample holder as described in claim 1, characterized in that, The elastic component includes a connector, a mounting component, and an elastic element. The mounting component and the elastic element are respectively disposed on opposite sides of the connector. The mounting component is detachably disposed at the mounting position. The elastic element is configured to form elastic contact with the sample.

3. The sample holder as described in claim 2, characterized in that, The pressure plate is provided with at least one first mating part on the side facing the sample window, and each mounting position includes one first mating part; The mounting component includes a second mating portion adapted to the first mating portion, and the elastic component is disposed at the mounting position through a detachable mating connection between the second mating portion and the first mating portion.

4. The sample holder as described in claim 3, characterized in that, The first mating part includes a threaded hole, and the second mating part includes a threaded portion. The threaded hole has an internal thread, and the threaded portion has an external thread that is adapted to the internal thread.

5. The sample holder as described in claim 1, characterized in that, The arrangement of the elastic components on the pressure plate includes at least one of the following: regular polygonal arrangement, triangular arrangement, T-shaped arrangement, array arrangement, ring arrangement, and staggered arrangement.

6. The sample holder as described in claim 1, characterized in that, The sample window includes a window frame and a partition disposed within the window frame, the partition dividing the area within the window frame into at least two through holes; The width of the separator is 2mm to 6.5mm, and the thickness is 0.2mm to 0.5mm.

7. The sample holder as described in claim 1 or 6, characterized in that, On the side of the sample window facing the pressure plate, the portion corresponding to the area between two adjacent through holes is at the same height plane.

8. The sample holder as described in claim 1, characterized in that, The distance between two adjacent mounting positions is 6mm to 8mm.

9. The sample holder as described in claim 1, characterized in that, The support frame is provided with a sample inlet connection for feeding the sample holder into the secondary ion mass spectrometer.

10. A secondary ion mass spectrometer, characterized in that, The sample holder includes any one of claims 1 to 9.

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