A modular direct current servo precision actuator unit and a micro-nano attitude adjusting platform constructed by the same

Abstract

The utility model relates to the field of precision machinery, concretely relates to a modularization direct current servo precision actuator unit and micro -nano attitude adjustment platform constructed by it. The actuator unit connects direct current servo motor and screw rod through diaphragm coupling, motor drives screw rod rotation, and screw rod nut pair drives slider on screw rod nut seat and mobile push rod to move together, guide rail is installed in electric cylinder sleeve inner wall, utilizes the attraction of the inner and outer notches of electric cylinder sleeve and magnet to bolt, realizes the quick fixing of electric cylinder sleeve and guide rail, and the linear motion of slider is restrained by guide rail, ensures the accurate output displacement of mobile push rod, micro -nano attitude adjustment platform takes this actuator unit as the core, includes three active actuator units, cooperates micro -nano attitude adjustment dynamic platform, bearing attitude adjustment fixed platform, rotating platform and central restraint unit to realize multi -freedom degree micro -nano level attitude adjustment. The utility model adopts modularization design, and actuator unit supports independent dismounting and replacement, combines parallel type mechanism layout, and is suitable for high-precision working scene.

Description

Technical Field

[0001] This utility model relates to the field of precision machinery, specifically to a modular DC servo precision actuator unit and the micro-nano attitude adjustment platform constructed therefrom. Background Technology

[0002] Precision motion control technology has wide applications in micro-nano manufacturing, optical alignment, biomedical testing, and semiconductor equipment, with increasingly higher requirements for high precision, high stability, and multi-degree-of-freedom attitude adjustment capabilities. However, traditional actuators and attitude adjustment platforms have significant shortcomings in terms of structural compactness, dynamic response, and control accuracy. Currently, common actuators on the market mainly suffer from the following technical defects: First, although piezoelectric ceramic actuators can achieve nanometer-level positioning accuracy, their effective working stroke is typically only tens of micrometers, and they require a complex high-pressure drive system, which greatly limits their use in applications requiring large strokes. Second, while hydraulic or pneumatic drive solutions can provide large output forces, their response speed is slow, exhibiting significant hysteresis, and they are easily affected by factors such as ambient temperature and pressure fluctuations, making it difficult to meet the stability requirements of precision positioning.

[0003] In the field of DC servo actuators, existing technologies generally suffer from unreasonable structural design. Most traditional designs adopt a distributed layout, lacking effective integration between functional components, resulting in a complex overall structure and a large number of parts. This design not only increases assembly difficulty and maintenance costs but also easily affects system accuracy due to accumulated assembly errors. In addition, existing actuator units have extremely stringent requirements for installation accuracy; even a small installation deviation can significantly reduce system performance, making on-site debugging and maintenance exceptionally difficult. More importantly, traditional designs lack a modular concept; actuators of different specifications often require complete redesign, failing to achieve rapid configuration and flexible application, which severely restricts their widespread use in diverse application scenarios.

[0004] In the field of micro-nano attitude adjustment platforms, existing technologies also face many challenges. Traditional three-degree-of-freedom attitude adjustment platforms suffer from significant error accumulation problems and struggle to achieve high-precision multi-axis collaborative control. While parallel mechanisms have addressed the accuracy issue to some extent, their complex structure, limited workspace, and extremely high performance requirements for the drive unit make them problematic. Furthermore, the lack of effective central constraint mechanisms in existing attitude adjustment platforms leads to unnecessary vibrations and offsets during movement, severely impacting positioning accuracy and stability.

[0005] To solve the above problems, there is an urgent need for a high-precision and modular actuator unit, and to build a multi-degree-of-freedom motion micro / nano attitude adjustment platform based on it. Utility Model Content

[0006] The purpose of this invention is to provide a modular DC servo precision actuator unit and the micro / nano attitude adjustment platform constructed thereon. The modular unit design, with the DC servo actuator working in conjunction with linear guides and sliders, ensures both assembly efficiency and control accuracy. Furthermore, a parallel attitude adjustment platform is built based on this actuator unit to meet micro / nano-level attitude adjustment requirements.

[0007] This utility model is achieved using the following technical solution:

[0008] A modular DC servo precision actuator unit includes a DC servo motor, a diaphragm coupling, a lead screw, a lead screw and nut pair, a lead screw and nut seat, a movable push rod, a slider, and a guide rail. The output shaft of the DC servo motor is connected to the end of the lead screw away from the movable push rod via the diaphragm coupling. A lead screw and nut pair is fitted onto the lead screw, and one end of the lead screw and nut pair is threadedly connected to one end of the lead screw and nut seat. The other end of the lead screw and nut seat is fixedly connected to the movable push rod by bolts. The arc surface of the lead screw and nut seat has a threaded through hole. The plane opposite to the arc surface of the lead screw and nut seat is fixedly connected to the slider by bolts. The slider moves linearly on the guide rail. The output shaft of the DC servo motor drives the lead screw to rotate via the diaphragm coupling, and the lead screw and nut pair drives the movable push rod on the lead screw and nut seat to move, and the movable push rod outputs the displacement of the actuator unit.

[0009] The lead screw is fitted with a bearing near the end of the diaphragm coupling sleeve;

[0010] The diaphragm coupling is composed of two rigid metal diaphragms connected by bolts, and is transitionally connected to the bearing through a diaphragm-type intermediate component.

[0011] The end face of the guide rail away from the DC servo motor is provided with a guide rail stop ring.

[0012] The end of the movable push rod is provided with a mounting hole and is fitted with an oil-free bushing;

[0013] The actuator unit is cylindrical in shape. Its mechanical housing consists of a motor support, a motor housing, an end cover, and an electric cylinder liner, arranged sequentially from the motor end to the moving push rod end. Except for the DC servo motor, which is installed in the motor housing and motor support, all other components are enclosed in the end cover and electric cylinder liner. The motor housing and the electric cylinder liner are connected by threads. The electric cylinder liner has an oil inlet hole.

[0014] The inner surface of the electric cylinder liner that mates with the guide rail has an inner groove. The outer surface of the electric cylinder liner opposite to the inner groove has a first outer groove and a second outer groove. The inner groove has a linear array of threaded holes, and the threaded holes extend to the first outer groove which is closer to the inner groove. The second outer groove, which is farther from the inner groove, has a linear array of through holes, the diameter of which is larger than the outer diameter of the threaded holes. Each threaded hole corresponds to a through hole and is concentric. The guide rail has a cylindrical countersunk threaded hole of the same size as the threaded holes on the inner groove and is concentric. The electric cylinder liner and the guide rail are installed by placing a magnet at the threaded hole of the first outer groove and a bolt at the through hole of the second outer groove. The attraction of the magnet on the bolt is used to initially fix the bolt to the guide rail and the electric cylinder liner at the threaded hole.

[0015] A micro / nano attitude adjustment platform, including a modular DC servo precision actuator unit, further comprises a rotating platform, a micro / nano attitude adjustment moving platform, a supporting attitude adjustment stationary platform, and a central constraint unit. The rotating platform is bolted to the micro / nano attitude adjustment moving platform. The modular DC servo precision actuator unit includes first, second, and third active actuator units, which have identical structures. They are connected to the micro / nano attitude adjustment moving platform via ball joints and to the supporting attitude adjustment stationary platform via Hooke joints. A wedge is provided between the ball joints connecting the first, second, and third active actuator units and the micro / nano attitude adjustment moving platform. The central constraint unit is connected to the micro / nano attitude adjustment platform via a central Hooke joint and is connected to the supporting attitude adjustment stationary platform via a connecting seat. The centers of the ball joints and the central Hooke joint are coplanar.

[0016] The central constraint unit is obtained by removing the power and transmission device from the modular DC servo precision actuator unit, and includes an end cover, a central sleeve, a base, a movable push rod, an oil-free bushing, a guide rail stop ring, a guide rail and a slider. The central sleeve is threadedly connected to the base, and the base is provided with a threaded hole and is fixedly connected to the support attitude adjustment platform.

[0017] Compared with the prior art, this utility model has the following advantages: (1) The actuator unit adopts a modular design, which supports independent disassembly and quick replacement, greatly improving the convenience of maintenance and the flexibility of use; (2) The diaphragm coupling connects the motor and the screw module, effectively eliminating the radial and angular deviations of the traditional rigid coupling, and with the linear guide rail and slider, significantly improving the overall transmission accuracy of the system; (3) The guide rail is installed inside the relatively closed electric cylinder liner by using the attraction of the magnet on the bolt, which improves the assembly efficiency; (4) The micro-nano attitude adjustment platform takes the actuator unit as the core driving component, adopts a parallel mechanism, and realizes multi-degree-of-freedom micro-nano-level attitude adjustment through multi-hinge connection. Attached Figure Description

[0018] Figure 1 This is a cross-sectional view of a modular DC servo precision actuator unit according to this utility model;

[0019] Figure 2 This is an appearance drawing of a modular DC servo precision actuator unit according to this utility model;

[0020] Figure 3 This is an exploded view of the internal structure of a modular DC servo precision actuator unit according to this utility model.

[0021] Figure 4 This is a cross-sectional view of the electric cylinder liner of a modular DC servo precision actuator unit according to this utility model;

[0022] Figure 5 This is an overall structural diagram of a micro-nano attitude adjustment platform according to this utility model;

[0023] Figure 6 This is a structural diagram of a micro / nano attitude adjustment platform of this utility model without the actuator unit assembled;

[0024] Figure 7 This is a schematic diagram of the assembly of partial parts of a micro-nano attitude adjustment platform according to this utility model.

[0025] in:

[0026] Figure 1 In the middle: 1. End cap; 2. Electric cylinder liner; 3. Motor housing; 4. Motor support; 101. Threaded hole for moving push rod;

[0027] Figure 2 In the middle section: 5. DC servo motor; 6. Diaphragm coupling; 7. Lead screw; 8. Lead screw and nut pair; 9. Lead screw and nut seat; 10. Moving push rod; 11. Slider; 12. Guide rail; 13. Bearing; 14. Diaphragm type intermediate component; 15. Guide rail stop ring; 16. Oil-free bushing;

[0028] Figure 4 In the middle: 401. Oil inlet; 402. Inner groove; 403. First outer groove; 404. Second outer groove; 405. Threaded hole in the inner groove; 406. Through hole in the second outer groove;

[0029] Figure 5 In the middle: 01. Rotating platform; 02. Micro-nano attitude adjustment platform; 03. Support attitude adjustment platform; 04. First active actuator unit; 05. Second active actuator unit; 06. Third active actuator unit; 07. Central constraint unit;

[0030] Figure 6 Chinese: 08. Hooke's joint; 09. Washer; 81. Movement constraint push rod; 82. Base; 83. Short guide rail

[0031] Figure 7 In the middle: 010. Ball joint; 011. Center Hooke joint; 012. Wedge block Detailed Implementation

[0032] To more specifically illustrate the implementation of the modular DC servo precision actuator unit and the micro / nano attitude adjustment platform constructed therefrom provided by this utility model, the technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be noted that this utility model is not limited to the implementation methods listed in the embodiments, and any equivalent transformations or adaptive adjustments based on the concept of this utility model should be covered within the protection scope of this utility model.

[0033] In the description of this utility model, it should be understood that directional or positional terms such as "upper side," "lower side," "above," "below," "inner side," and "outer side" are all based on the relative positional relationships shown in the accompanying drawings and are used only for convenience of explanation and simplification of the technical solution, without limiting the structural orientation of this utility model. Furthermore, ordinal numbers such as "first," "second," and "third" in this utility model are only used to distinguish different components or steps with the same or similar functions and do not imply any priority or hierarchical meaning.

[0034] A modular DC servo precision actuator unit includes a DC servo motor 5, a diaphragm coupling 6, a lead screw 7, a lead screw and nut assembly 8, a lead screw and nut seat 9, a movable push rod 10, a slider 11, and a guide rail 12. The DC servo motor 5's output shaft is connected to the end of the lead screw 7 away from the movable push rod 10 via the diaphragm coupling 6. The lead screw 7 is fitted with a lead screw and nut assembly 8, which is threaded to one end of the lead screw and nut seat 9. The other end of the lead screw and nut seat 9 is bolted to the movable push rod 10. The arc surface of the lead screw and nut seat 8 has a threaded through hole, and the slider 11 is fixedly connected to the plane opposite the arc surface of the lead screw and nut seat. The slider 11 moves linearly on the guide rail 12. The guide rail 12 constrains the movement direction of the slider 11 through a high-precision linear track, eliminating lateral offset and torsion, ensuring that the movable push rod 10 moves along a single axis, and reducing the radial wobble of the movable push rod 10.

[0035] The lead screw 7 is fitted with a bearing 13 near the end of the diaphragm coupling 6 to bear the axial force of the lead screw, reduce motion error, and improve the accuracy and stability of the entire actuator unit.

[0036] The diaphragm coupling 6 is composed of two rigid metal diaphragms connected by bolts in an alternating manner. It compensates for axial, radial and angular deviations through elastic deformation, and there is no slippage of elastic elements. The output shaft of the DC servo motor is connected to the lead screw through the diaphragm coupling to ensure accurate transmission of rotational power, and is transitionally connected to the bearing through the diaphragm-type intermediate piece 14.

[0037] The end of the movable push rod 10 is provided with a threaded hole 101, which facilitates modular connection of the modular DC servo precision actuator unit with other parts.

[0038] The end face of the guide rail 12 away from the DC servo motor is provided with a guide rail stop ring 15;

[0039] The movable push rod 10 is fitted with an oil-free bushing 16, which protects the movable push rod 10 through self-lubrication and provides stable support for guiding the movable push rod 10, thereby further ensuring motion accuracy.

[0040] The actuator unit is cylindrical in shape. Its mechanical housing consists of an end cover 1, an electric cylinder liner 2, a motor housing 3, and a motor support 4, arranged sequentially from the moving push rod end to the motor end. Except for the DC servo motor 5, which is installed in the motor housing 3 and the motor support 4, all other components are enclosed in the end cover 1 and the electric cylinder liner 2. The electric cylinder liner 2 and the motor housing 3 are connected by threads. The structure is compact, and the mechanical housing encloses the internal parts. The actuator unit is highly modular. This design not only improves the system's integration and protection performance but also facilitates maintenance and lubrication, effectively improving the overall performance and service life of the actuator unit.

[0041] The electric cylinder liner has an oil inlet hole 401 for supplying oil to the interior of the modular DC servo precision actuator unit to lubricate the transmission components.

[0042] Since the electric cylinder liner is a closed shell in the radial direction, in order to facilitate the installation of the electric cylinder liner 2 and the guide rail 12, the inner surface of the electric cylinder liner that mates with the guide rail is provided with an inner groove 402. The outer surface of the electric cylinder liner opposite to the inner groove 402 is provided with a first outer groove 403 and a second outer groove 404, respectively. The inner groove 402 has a linear array of threaded holes 405, and the threaded holes 405 extend to the first outer groove 403 which is closer to the inner groove. The second outer groove 404 which is farther from the inner groove has a linear array of through holes 406. The diameter of the through holes 406 is larger than the outer diameter of the threaded holes 403, and each threaded hole 405 corresponds to a through hole 406 and is concentric. The guide rail 12 is arrayed with cylindrical countersunk threaded holes of the same size as the threaded holes on the inner groove and concentric.

[0043] The specific assembly steps of the electric cylinder liner 2 and the guide rail 12 are as follows: a magnet is placed at the threaded hole 405 of the first outer groove, and a bolt is placed at the through hole 406 of the second outer groove. The attraction of the magnet on the bolt is used to initially fix the bolt to the guide rail and the electric cylinder liner at the threaded hole 405.

[0044] The working principle of this modular DC servo precision actuator unit is as follows: The DC servo motor 5 starts, and its output shaft drives the lead screw 7 to rotate through the diaphragm coupling 6. The two rigid metal diaphragms of the diaphragm coupling compensate for axial, radial, and angular deviations through elastic deformation, improving transmission accuracy. The rotation of the lead screw drives the lead screw nut pair to move. The lead screw nut pair 8 is connected to the lead screw nut seat 9, which in turn drives the moving push rod 10 to produce precise linear motion. The slider 11 is fixedly connected to the moving push rod 10 and achieves precise linear motion under the constraint of the guide rail 12, outputting the displacement of the actuator unit. The bearing is sleeved on the lead screw and cooperates with the diaphragm coupling to further improve motion accuracy and stability. The modular shell design encapsulates all components together to form an integrated unit, which is convenient for installation and maintenance. The innovative guide rail fixing method uses the attraction of magnets on bolts to simplify the installation process while ensuring the stability and accuracy of the connection.

[0045] A micro / nano attitude adjustment platform includes a modular DC servo precision actuator unit, a rotating platform 01, a micro / nano attitude adjustment motion platform 02, and a supporting attitude adjustment stationary platform 03. The rotating platform 01 is bolted to the micro / nano attitude adjustment motion platform 02. The modular DC servo precision actuator unit includes first, second, and third active actuator units 04, 05, and 06, which have identical structures and are connected to the micro / nano attitude adjustment platform 02 via a ball joint 010. The ball joint 08 is connected to the support and attitude adjustment platform 03. The ball joint 010, which is used to connect the first, second, and third active actuator units 04, 05, and 06, is provided with a wedge 012 between itself and the micro-nano attitude adjustment platform 02. This wedge is used to adjust the connection angle and form a contact surface compensation structure between the ball joint and the platform, which can eliminate the influence of assembly gap on motion accuracy. The central constraint actuator unit 07 is connected to the micro-nano attitude adjustment platform 02 through the central Hooke joint 011, and the centers of the ball joint 010 and the central Hooke joint 011 are coplanar.

[0046] The central constraint unit is obtained by removing the power and transmission device from the modular DC servo precision actuator unit. It includes an end cap 1, a movable constraint push rod 81, a base 82, a short guide rail 83, a slider 11, a guide rail stop ring 15, and an oil-free bushing 16. The base 82 is provided with a threaded hole for supporting the fixed connection of the attitude adjustment platform 03. The slider 11 is fixed on the movable constraint push rod 81. The movable constraint push rod 81 receives the displacement of the micro-nano attitude adjustment platform 02 and drives the slider 11 to move linearly on the short guide rail 83, which can effectively suppress undesired degrees of freedom and improve attitude adjustment accuracy.

[0047] When precise attitude adjustment at the micro-nano level is required, the first, second, and third active actuator units 04, 05, and 06 work together to precisely control the displacement of their respective moving push rods 10, thereby driving the micro-nano attitude adjustment platform 02 to achieve precise attitude adjustment. The central constraint unit 07 plays a guiding and stabilizing role.

[0048] The implementation of the modular DC servo precision actuator unit and the micro / nano attitude adjustment platform constructed therefrom disclosed in this utility model patent is not limited to the embodiments shown in the specification and drawings. Based on the technical solution of this utility model, those skilled in the art, after reading this disclosure, can combine existing technical knowledge and adopt different structural forms, connection methods, or driving schemes for equivalent substitution or optimization to achieve the same or similar functions. Therefore, the embodiments should not be construed as specific implementation methods that can only be carried out by this utility model, and any reasonable changes or improvements made based on the technical concept of this utility model are within the protection scope of this utility model.

Claims

1. A modular DC servo precision actuator unit, comprising a DC servo motor, a diaphragm coupling, a lead screw, a lead screw and nut pair, a lead screw and nut seat, a movable push rod, a slider, and a guide rail, characterized in that: The output shaft of the DC servo motor is connected to the lead screw via a diaphragm coupling. A lead screw and nut assembly is fitted onto the lead screw, and one end of the lead screw and nut assembly is fixedly connected to the lead screw and nut seat. The other end of the lead screw and nut seat is fixedly connected to the movable push rod via bolts. A through hole is opened on the arc surface of the lead screw and nut seat. The slider is fixedly connected to the plane opposite the arc surface of the lead screw and nut seat. A guide rail is installed to constrain the linear movement of the slider. The output shaft of the DC servo motor drives the lead screw to rotate via the diaphragm coupling. The lead screw and nut assembly drives the lead screw and nut seat and the movable push rod to move, and the displacement of the actuator unit is output by the movable push rod. The lead screw is fitted with a bearing near the end of the diaphragm coupling. The inner ring of the bearing is engaged with the lead screw, and the outer ring is fixed to the support structure of the electric cylinder sleeve. The diaphragm coupling consists of two rigid metal diaphragms connected together, and is transitionally connected to the bearing via a diaphragm-type intermediate component. The guide rail is equipped with a guide rail stop ring; The end of the movable push rod is provided with a mounting hole and is fitted with an oil-free bushing; The actuator unit is enclosed in a columnar shape. Its outer shell consists of a motor support, a motor housing, an end cover, and an electric cylinder liner, from the motor end to the moving push rod end. Except for the DC servo motor, which is installed in the motor housing and motor support, all other components are enclosed in the end cover and electric cylinder liner. The electric cylinder liner is provided with an oil inlet. The inner surface of the electric cylinder liner has an inner groove, and the outer surface of the electric cylinder liner opposite to the inner groove has a first outer groove and a second outer groove, respectively. The first outer groove and the second outer groove are symmetrically designed. The inner groove has a linear array of threaded holes, and the threaded holes extend to the first outer groove which is closer to the inner groove. The second outer groove, which is farther from the inner groove, has a linear array of through holes, the diameter of which is larger than the outer diameter of the threaded holes. Each threaded hole and the through hole correspond one-to-one and are concentric, forming a through-type assembly channel. The guide rail has a cylindrical countersunk threaded hole of the same size as the threaded hole on the inner groove and is concentric. The guide rail is fixedly installed inside the electric cylinder liner. The guide rail is placed in the inner groove of the electric cylinder liner. A magnet is placed at the threaded hole of the first outer groove, and a bolt is placed at the through hole of the second outer groove. The attraction between the magnet and the bolt is used to fix the guide rail to the electric cylinder liner.

2. A micro / nano attitude adjustment platform for a modular DC servo precision actuator, characterized in that: The device includes a modular DC servo precision actuator unit as described in claim 1, further comprising a rotating platform, a micro / nano attitude adjustment platform, a support attitude adjustment platform, and a central constraint unit. The modular DC servo precision actuator unit includes first, second, and third active actuator units, which are evenly distributed circumferentially around the central constraint unit between the micro / nano attitude adjustment platform and the support attitude adjustment platform. These active actuator units are connected to the micro / nano attitude adjustment platform via ball joints and to the support attitude adjustment platform via Hooke joints. An inclined block is provided between the ball joints connecting the first, second, and third active actuator units and the micro / nano attitude adjustment platform. The central constraint unit is connected to the micro / nano attitude adjustment platform via a central Hooke joint, and the centers of the ball joints and the central Hooke joint are coplanar. The central constraint unit is obtained by removing the power and transmission device from the modular DC servo precision actuator unit, and includes an end cap, a central sleeve, a base, a movable constraint push rod, an oil-free bushing, a guide rail stop ring, a short guide rail, and a slider. The base is provided with a threaded hole for supporting the fixed connection of the attitude adjustment platform. The slider is fixed on the movable constraint push rod, which receives the displacement of the micro-nano attitude adjustment platform and drives the slider to move linearly on the short guide rail.

Images