Piezoelectric micropump vibrator structure and vibrator structure array

Abstract

The utility model discloses a piezoelectricity micropump vibrator structure and vibrator structure array, the vibrator structure includes the fixed structure of outer frame, center vibration structure and connects the plurality of elastic connecting structure of fixed structure and center vibration structure of outer frame. Elastic connecting structure includes two simply supported beams. Two simply supported beams are all linear type, and on the same straight line. The opposite end of two simply supported beams is connected with the edge of center vibration structure. The opposite end of two simply supported beams is connected with the different position of inner edge of fixed structure of outer frame respectively. The utility model discloses between center vibration structure and rectangular fixed structure of outer frame sets up four elastic connecting structures, and each elastic connecting structure adopts independent two linear type simply supported beams, makes the vibration stability of center vibration structure improve significantly, thereby has promoted the running stability of piezoelectricity micropump.

Description

Technical Field

[0001] This utility model belongs to the field of piezoelectric micropump technology, specifically relating to a piezoelectric micropump oscillator structure and oscillator structure array. Background Technology

[0002] Piezoelectric micropumps, as miniature pump devices that rely on piezoelectric ceramic oscillators to drive diaphragms to reciprocate, thereby achieving fluid transport, have been widely used in biomedicine, microfluidic chips, fuel cell cooling systems, and heat dissipation for portable electronic devices due to their small size, absence of mechanical friction parts, and fast response speed. The core component of a piezoelectric micropump is the piezoelectric oscillator structure, whose mechanical properties and vibration stability directly determine the micropump's output efficiency and lifespan.

[0003] Piezoelectric oscillator structures typically employ a rectangular or circular outer frame connected to a central vibration region via several elastic connection structures. Conventional piezoelectric oscillator structures generally suffer from the following shortcomings:

[0004] (1) Insufficient vibration stability: The number of connection points between the elastic connection structure and the outer frame and central vibration area of ​​the piezoelectric micropump oscillator is insufficient, which can easily lead to the central vibration area shifting or being subjected to uneven force during vibration, thereby affecting the stability and consistency of vibration and reducing the operational stability of the micropump.

[0005] (2) Significant stress concentration: In traditional rectangular frame and simply supported beam connection structures, there are often sharp corners in the inner corner area of ​​the outer frame and at the connection position between the simply supported beam and the outer frame. When the oscillator is in a high-frequency vibration state for a long time, these sharp inner corners are prone to stress concentration, which can lead to structural fatigue cracks or fractures, thereby affecting the mechanical stability and reliability of the piezoelectric micropump.

[0006] (3) Insufficient structural compactness: The elastic connection structure requires a large gap between the outer frame and the central vibration structure, resulting in a relatively loose overall oscillator structure, which reduces the structural compactness of the piezoelectric micropump.

[0007] In summary, existing piezoelectric micropump oscillator structures have shortcomings in terms of vibration stability, stress concentration resistance, and structural compactness, and new structural design schemes are urgently needed to overcome these defects. Summary of the Invention

[0008] The purpose of this invention is to provide a piezoelectric micropump oscillator structure and an oscillator structure array.

[0009] In a first aspect, this utility model provides a piezoelectric micropump oscillator structure, which includes an outer frame fixing structure, a central vibration structure, and multiple elastic connection structures connecting the outer frame fixing structure and the central vibration structure.

[0010] The elastic connection structure includes two simply supported beams. Both simply supported beams are straight and lie on the same straight line. The opposite ends of the two simply supported beams are connected to the edge of the central vibration structure. The opposite ends of the two simply supported beams are connected to different positions on the inner edge of the outer frame fixing structure.

[0011] Preferably, the outer frame fixing structure is rectangular. There are four elastic connection structures. The positions of the four elastic connection structures correspond one-to-one with the four sides of the outer frame fixing structure. The simply supported beams are parallel to their corresponding sides on the outer frame fixing structure. The opposite ends of two simply supported beams in the same elastic connection structure are connected to two adjacent interior corners on the outer frame fixing structure, respectively.

[0012] Preferably, the four inner corners of the outer frame fixing structure are provided with arc-shaped inner corner reinforcement structures.

[0013] Preferably, the inner edge of the elastic connection structure is smoothly connected to the edge of the inner corner reinforcement structure of the outer frame fixing structure to which it is connected.

[0014] Preferably, the outer frame fixing structure has triangular through slots at each of the four corners.

[0015] Preferably, the central vibration structure has a reinforcing part with a boss structure at the center of its side.

[0016] Preferably, the end of the simply supported beam is connected to the edge of the central vibration structure by a right-angle bend structure.

[0017] Secondly, this utility model provides an oscillator structure array, including a main body; the main body is provided with multiple hollow structures arranged in a matrix; each hollow structure is located in a grid cell divided by a grid-like segmentation path; the shape of each grid cell with a hollow structure is the same as the aforementioned piezoelectric micropump oscillator structure.

[0018] Preferably, the oscillator structure array further includes an outwardly protruding positioning portion; one or more of the outwardly protruding positioning portions are connected to the edge of the main body portion.

[0019] Preferably, each intersection of the grid-like segmentation paths is provided with a cross-shaped groove. The cross-shaped groove includes a straight slot extending along two orthogonal segmentation paths.

[0020] The present invention has the following beneficial effects.

[0021] 1. This utility model improves the vibration stability of the central vibration structure by setting four elastic connection structures between the central vibration structure and the rectangular outer frame fixing structure. Each elastic connection structure adopts two independent straight simply supported beams, thereby improving the operational stability of the piezoelectric micropump.

[0022] 2. This utility model sets arc-shaped inner corner reinforcement structures at the four inner corner positions of the outer frame fixed structure, and at the same time makes the edges of the simply supported beam and the inner corner reinforcement structure smoothly connected, reducing the stress concentration effect in the inner corner area of ​​the oscillator structure and the elastic connection point, improving the mechanical stability and reliability of the piezoelectric micropump oscillator structure during long-term vibration, and extending its service life.

[0023] 3. This utility model uses a combination of a straight, simply supported beam and a right-angle bending structure to connect the outer frame fixing structure and the central vibration structure. While ensuring vibration performance, it reduces the gap between the outer frame fixing structure and the central vibration structure, thereby improving the structural compactness of the piezoelectric micropump.

[0024] 4. The oscillator structure array provided by this utility model is provided with a matrix-arranged hollow structure and a grid-like dividing path, which enables multiple oscillator structures to be efficiently divided and formed by laser cutting and other methods, improving the convenience and consistency of batch processing and reducing manufacturing costs.

[0025] 5. This utility model provides an outwardly protruding positioning part on the outer periphery of the oscillator structure array, which enables the array to be effectively constrained and positioned during processing, thereby ensuring the consistency of the dimensional and positional accuracy of the multiple piezoelectric micropump oscillator structures formed after segmentation and improving the overall product quality. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of the present utility model;

[0027] Figure 2 This is a schematic diagram of the connection of the simply supported beam in Embodiment 1 of this utility model;

[0028] Figure 3 This is a structural schematic diagram of Embodiment 2 of the present invention.

[0029] Figure 4 This is a structural schematic diagram of Embodiment 3 of the present invention.

[0030] Reference numerals in the attached drawings: 1. Outer frame fixed structure; 2. Elastic connection structure; 2-1. Simply supported beam; 2-2. Right angle bending structure; 3. Central vibration structure; 3-1. Reinforcing part; 4. Inner corner reinforcement structure; 5. Triangular through groove; 6. Main body; 7. Outwardly protruding positioning part; 8. Cross-shaped groove. Detailed Implementation

[0031] The present invention will be further described below with reference to the accompanying drawings.

[0032] Example 1

[0033] like Figure 1As shown, a piezoelectric micropump oscillator structure is a sheet-like, integrated structure, including an outer frame fixing structure 1, an elastic connection structure 2, and a central vibration structure 3. The four sides of the central vibration structure 3 are connected to the inner peripheral edge of the outer frame fixing structure 1 through multiple elastic connection structures 2.

[0034] The outer frame fixing structure 1 is rectangular. The central vibration structure 3 is circular. The geometric center of the central vibration structure 3 coincides with that of the outer frame fixing structure 1. The four inner corners of the outer frame fixing structure 1 are provided with arc-shaped inner corner reinforcement structures 4 to reduce stress concentration. Triangular through slots 5 are provided at each of the four corners of the outer frame fixing structure 1. The triangular through slots 5 can reduce the weight of the piezoelectric micropump oscillator structure and disperse the stress on the piezoelectric micropump oscillator structure. Simultaneously, the triangular through slots 5 can also reduce the constraint around the piezoelectric micropump, lower the frequency, and increase the amplitude.

[0035] There are four elastic connection structures 2 in total. The positions of the four elastic connection structures 2 correspond one-to-one with the four sides of the outer frame fixing structure 1. Each elastic connection structure 2 includes two simply supported beams 2-1 in parallel. The simply supported beams 2-1 are straight and parallel to the corresponding sides of the outer frame fixing structure 1. The two simply supported beams 2-1 in the same elastic connection structure 2 are on the same straight line.

[0036] The opposite ends of the two simply supported beams 2-1 in the same elastic connection structure 2 are connected to the edge of the central vibration structure 3 by a right-angle bending structure 2-2. The opposite ends of the two simply supported beams 2-1 in the same elastic connection structure 2 are respectively connected to two adjacent inner corners on the outer frame fixing structure 1.

[0037] The inner edge of the elastic connection structure 2 (i.e. the edge near the central vibration structure 3) is connected to the end of the inner corner reinforcement structure 4 of the outer frame fixing structure 1 connected to it by an arc-shaped contour, so that the inner edge of the elastic connection structure 2 and the inner corner contour of the outer frame fixing structure 1 are smoothly transitioned without sharp angles, thereby improving the reliability of the connection between the elastic connection structure 2 and the outer frame fixing structure 1 and improving the service life of the piezoelectric micropump oscillator structure.

[0038] In this embodiment, the elastic connection structure 2 helps to reduce the gap between the outer frame fixing structure 1 and the central vibration structure 3, thereby improving the structural compactness of the piezoelectric micropump oscillator structure.

[0039] In this embodiment, the four uniformly distributed elastic connection structures 2 form eight straight simply supported beams, which can improve the vibration stability and consistency of the central vibration structure 3, increase the vibration frequency, and enable the piezoelectric ceramic, as the actuating element, to achieve the same pumping performance at a lower amplitude, thereby enhancing the stability and reliability of the piezoelectric ceramic and reducing the risk of breakage.

[0040] In some embodiments, the central vibration structure 3 has a reinforcing part 3-1 with a boss structure at the center of its side.

[0041] Example 2

[0042] like Figure 3 As shown, an array of oscillator structures, in sheet form, is used to divide and form the piezoelectric micropump oscillator structure provided in Example 1.

[0043] The oscillator structure array includes a main body 6 and an outwardly protruding positioning part 7. The outwardly protruding positioning part 7 is disposed around the periphery of the main body 6 and is used to constrain the circumferential position of the oscillator structure array during processing.

[0044] The main body 6 has multiple hollow structures arranged in a matrix. Each hollow structure is located within a grid unit (i.e., the rectangular area enclosed by the dotted lines in the figure) divided by a grid-like dividing path (corresponding to the dotted lines in the figure).

[0045] Each grid cell with a hollow structure has the same shape as the piezoelectric micropump oscillator structure provided in Example 1.

[0046] The oscillator structure array is used to form multiple independent piezoelectric micropump oscillator structures through segmentation methods such as laser cutting.

[0047] Example 3

[0048] An oscillator structure array, the difference between this embodiment and embodiment 1 is:

[0049] like Figure 4 As shown, based on the structure of Embodiment 1, the main body 6 of this embodiment is provided with a cross-shaped groove 8 at each intersection of the grid-like dividing path. The cross-shaped groove 8 includes a straight slot extending along two orthogonal dividing paths. Because the cross-shaped groove 8 is on the dividing path, its pre-grooved structure can reduce the stress effect brought about by the dicing process, reduce the wear of the dicing blade, and increase the dicing rate.

Claims

1. A piezoelectric micropump oscillator structure, comprising an outer frame fixing structure (1), a central vibration structure (3), and multiple elastic connection structures (2) connecting the outer frame fixing structure (1) and the central vibration structure (3); characterized in that: The elastic connection structure (2) includes two simply supported beams (2-1); both simply supported beams (2-1) are straight and on the same straight line; the opposite ends of the two simply supported beams (2-1) are connected to the edge of the central vibration structure (3); the opposite ends of the two simply supported beams (2-1) are connected to different positions of the inner edge of the outer frame fixing structure (1).

2. The piezoelectric micropump vibrator structure according to claim 1, characterized in that: The outer frame fixing structure (1) is rectangular; there are four elastic connection structures (2); the positions of the four elastic connection structures (2) correspond one-to-one with the four sides of the outer frame fixing structure (1); the simply supported beams (2-1) are parallel to the corresponding sides on the outer frame fixing structure (1); the opposite ends of the two simply supported beams (2-1) in the same elastic connection structure (2) are connected to the two adjacent inner corners on the outer frame fixing structure (1) respectively.

3. The piezoelectric micropump vibrator structure according to claim 2, characterized in that: The outer frame fixing structure (1) has arc-shaped inner corner reinforcement structures (4) at its four inner corner positions.

4. The piezoelectric micropump oscillator structure according to claim 3, characterized in that: The inner edge of the elastic connection structure (2) is smoothly connected to the edge of the inner corner reinforcement structure (4) of the outer frame fixing structure (1) connected to itself.

5. The piezoelectric micropump oscillator structure according to claim 2, characterized in that: The outer frame fixing structure (1) has triangular through slots (5) on all four corners.

6. The piezoelectric micropump oscillator structure according to claim 1, characterized in that: The side of the central vibration structure (3) is provided with a boss structure reinforcement.

7. The piezoelectric micropump oscillator structure according to claim 1, characterized in that: The end of the simply supported beam (2-1) is connected to the edge of the central vibration structure (3) by a right-angle bending structure (2-2).

8. An array of oscillator structures, comprising a main body (6); characterized in that: The main body (6) is provided with multiple hollow structures arranged in a matrix; each hollow structure is located in a grid cell divided by a grid-like segmentation path; the shape of each grid cell with a hollow structure is the same as the piezoelectric micropump oscillator structure described in any one of claims 1-7.

9. The oscillator structure array according to claim 8, characterized in that: It also includes an outwardly protruding positioning portion (7); one or more of the outwardly protruding positioning portions (7) are connected to the edge of the main body portion (6).

10. The oscillator structure array according to claim 8, characterized in that: Each intersection of the grid-like dividing path is provided with a cross-shaped groove (8); the cross-shaped groove (8) includes a straight slit extending along two orthogonal dividing paths.

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