A general wafer cutting fluid path rapid switching channel structure

Abstract

The utility model relates to wafer cutting technical field, and disclose a general wafer cutting liquid path's quick switching channel structure, including valve body, the valve body outer end surface surrounds the arrangement and is connected with several connecting pipes no.

Description

Technical Field

[0001] This utility model relates to the field of wafer dicing technology, specifically to a general-purpose wafer dicing fluid circuit with a fast switching channel structure. Background Technology

[0002] With the rapid development of the semiconductor industry, wafer dicing, as a key link in the chip manufacturing process, has placed higher demands on dicing precision, efficiency, and the rational use of dicing fluid. In wafer dicing operations, dicing fluid plays an important role in cooling, lubrication, and chip removal. Different dicing processes and wafer materials often require different types of dicing fluid, which requires the dicing fluid path to be able to quickly and stably switch between different dicing fluids.

[0003] Traditional wafer dicing fluid switching devices have several drawbacks. First, some fluid switching structures are complex, requiring manual operation of multiple valves and pipe connections during the switching process. This is not only time-consuming but also prone to leakage due to loose connections, severely impacting dicing efficiency and quality. Second, many existing fluid switching devices lack versatility. Customized equipment is often required for different dicing processes and fluid requirements, undoubtedly increasing equipment procurement costs and maintenance complexity for companies. Furthermore, during the dicing process, the fluid often contains abrasive particles, debris, and other impurities. These impurities easily accumulate on the inner walls of fluid pipes and valve bodies, causing blockages and affecting the normal delivery of the fluid. Traditional fluid switching devices lack effective cleaning mechanisms, making it difficult to perform timely and comprehensive cleaning of the equipment's interior.

[0004] Against this backdrop, it is imperative to develop a universal rapid switching channel structure for wafer dicing fluid circuits, which can effectively solve the problems of traditional fluid circuit switching devices and provide strong support for the further development of wafer dicing technology. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a general-purpose rapid switching channel structure for wafer dicing fluid circuits, thus solving the aforementioned problems.

[0006] To achieve the above-mentioned objectives, this utility model provides the following technical solution: a general-purpose wafer dicing fluid circuit rapid switching channel structure, including a valve body, a plurality of connecting pipes II arranged and connected around the outer end surface of the valve body, a valve core sleeved in the center inside the valve body, a bracket installed in the center of the upper end surface of the valve body, a rotary motor installed on the upper end of the bracket, a liquid pump installed in the center of the lower end surface of the valve body, and a connecting pipe I connected to the upper end surface of the liquid pump.

[0007] Preferably, the rear ends of several of the connecting pipes extend to the inner wall of the valve body, and a flange is installed on the front end surface of each connecting pipe. Threaded holes are opened around the surface of the flange, and an infusion tube is correspondingly sleeved on the front end of each connecting pipe.

[0008] Preferably, each of the infusion tubes has a mounting head fixedly connected to its front end surface. Through holes are opened around the outer end of the mounting head, and bolts are fitted into the through holes. The other end of the bolts extends into the threaded hole.

[0009] Preferably, a rotating rod is connected to the center of the upper surface of the valve core, and the upper end of the rotating rod is connected to the output end of the rotary motor through the inside of the valve body and the lower surface of the bracket. A rubber scraper is installed on one side of the outer surface of the valve core.

[0010] Preferably, the rubber scraper is connected to the center of a flow guide tube, and the flow guide tube is parallel to the connecting tube. The flow guide tube extends from the rear end of the flow guide tube to the center of the valve core and is connected to the flow guide tube. The lower end of the flow guide tube passes through the interior of the valve body and extends into the interior of the pump, corresponding to the connection tube.

[0011] Preferably, a flange is installed on the lower end surface of the connecting pipe, and threaded holes are provided around the flange surface. A liquid outlet pipe is connected to the lower end surface of the connecting pipe.

[0012] Preferably, an installation head is installed on the front end surface of the liquid outlet pipe, and through holes are opened on the outer perimeter of the installation head. Bolts are respectively sleeved inside the through holes, and the other end of the bolts extends into the threaded hole of the connecting pipe.

[0013] Compared with the prior art, this utility model provides a fast switching channel structure for a universal wafer dicing fluid path, which has the following advantages:

[0014] With multiple connecting pipes arranged in a ring, various types of cutting fluids can be connected at the same time. Whether it is cutting wafers of different materials or different processing stages of the same wafer, the fluid path can be switched by rotating the valve core to meet the diverse cutting process requirements. This avoids the waste of time and economic costs caused by frequently changing equipment to adapt to different cutting fluids, and greatly improves the applicability of the equipment to various cutting scenarios.

[0015] The infusion pipe and connecting pipe 2, connecting pipe 1 and the outlet pipe all adopt a connection method combining mounting heads, bolts and flanges to ensure the sealing and stability of the connection between each component, effectively prevent cutting fluid leakage, maintain stable operation, and when the valve core rotates, the rubber scraper cleans the inner wall of the valve body at the same time. This not only prevents cutting fluid residue and impurity accumulation and ensures smooth fluid flow, but also reduces wear on the equipment caused by impurity accumulation, extends the service life of the equipment, and ensures continuous and stable cutting operations. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the rotary motor structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the valve core structure of this utility model.

[0019] In the diagram: 1. Valve body; 2. Liquid pump; 3. Connecting pipe one; 4. Bolt one; 5. Discharge pipe; 6. Connecting pipe two; 7. Infusion pipe; 8. Bolt two; 9. Support; 10. Rotary motor; 11. Valve core; 12. Rotating rod; 13. Guide pipe one; 14. Rubber scraper; 15. Guide pipe two. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figure 1-3 A general-purpose wafer dicing fluid circuit rapid switching channel structure includes a valve body 1, with several connecting pipes 6 arranged around the outer surface of the valve body 1, a valve core 11 sleeved in the center inside the valve body 1, a bracket 9 installed in the center of the upper surface of the valve body 1, a rotary motor 10 installed on the upper end of the bracket 9, a liquid pump 2 installed in the center of the lower surface of the valve body 1, and a connecting pipe 3 connected to the upper surface of the liquid pump 2.

[0022] Furthermore, the rear ends of several connecting pipes 6 extend to the inner wall of the valve body 1, and flanges are installed on the front end surface of each connecting pipe 6. Threaded holes are opened around the surface of the flanges, and infusion pipes 7 are correspondingly sleeved on the front end of each connecting pipe 6.

[0023] Furthermore, each of the front end surfaces of the infusion tube 7 is fixedly connected with an installation head. Through holes are opened around the outer end of the installation head, and bolts 8 are respectively fitted inside the through holes, with the other end of bolts 8 extending into the threaded hole.

[0024] Furthermore, a rotating rod 12 is connected to the center of the upper surface of the valve core 11. The upper end of the rotating rod 12 is connected to the output end of the rotary motor 10 through the interior of the valve body 1 and the lower surface of the bracket 9. A rubber scraper 14 is installed on one side of the outer surface of the valve core 11.

[0025] Furthermore, a guide tube 13 is connected to the center of the rubber scraper 14, and the guide tube 13 and the connecting tube 2 6 are arranged in parallel. The guide tube 2 15 is connected to the center of the valve core 11 at the rear end of the guide tube 13. The lower end of the guide tube 2 15 passes through the inside of the valve body 1 and extends into the inside of the liquid pump 2, where it is connected to the connecting tube 1 3.

[0026] Furthermore, a flange is installed on the lower end surface of the connecting pipe 3, and threaded holes are provided around the flange surface. An outlet pipe 5 is connected to the lower end surface of the connecting pipe 3.

[0027] Furthermore, an installation head is installed on the front end surface of the liquid outlet pipe 5. Through holes are opened on the outer perimeter of the installation head. Bolts 4 are respectively fitted inside the through holes. The other end of the bolts 4 extends into the threaded hole of the connecting pipe 3.

[0028] Valve body 1: As the main frame of the entire structure, it provides the foundation for the installation and support of other components. Its interior is hollow to accommodate components such as valve core 11, and multiple connecting pipes 6 are arranged around its exterior to connect and integrate various liquid passages.

[0029] Liquid pump 2: Installed at the center of the lower end surface of valve body 1, it is the power source for conveying cutting fluid. After starting, it generates suction, which causes the cutting fluid to flow in the liquid path, drawing the cutting fluid in through guide pipe 2 and outputting it through connecting pipe 3.

[0030] Connecting pipe 3: One end is connected to the upper surface of the pump 2, and the other end is connected to the outlet pipe through flange and bolt 4. Its function is to transport the cutting fluid pumped by the pump 2 to the outlet pipe 5. It is the channel for transporting the cutting fluid from the pump 2 to the outlet pipe 5.

[0031] Bolt 4: Used to connect connecting pipe 3 and outlet pipe 5. By engaging with the mounting head and flange on connecting pipe 3 and outlet pipe 5, the two are tightly connected together, ensuring the stability and sealing of the connection and preventing cutting fluid leakage.

[0032] Discharge pipe 5: Connected to connecting pipe 3 via bolt 4, it is the final outlet channel for the cutting fluid. It delivers the cutting fluid to the wafer dicing equipment, providing the necessary cutting fluid for the dicing operation.

[0033] Connecting pipe 2 6: It is arranged around the outer end surface of valve body 1, and its rear end extends to the inner wall of valve body 1. The front end is equipped with a flange with a threaded hole for connection to the infusion pipe 7. Multiple connecting pipes 2 6 can be connected to different infusion pipes 7 to realize the access of various cutting fluids.

[0034] Infusion tube 7: Its front end is connected to the flange at the front end of connecting tube 2 6 via a mounting head and bolt 2, and is connected to the external cutting fluid connection end. Its function is to introduce external cutting fluid into connecting tube 2 6, providing a cutting fluid source for the entire fluid circuit.

[0035] Bolt 28: Used to connect the infusion tube 7 and the connecting tube 26. It mates with the through hole of the mounting head of the infusion tube 7 and the threaded hole on the flange of the connecting tube 26 to ensure a tight connection between the infusion tube 7 and the connecting tube 26, thus guaranteeing the sealing during the delivery of the cutting fluid.

[0036] Bracket 9: Installed in the center of the upper surface of valve body 1, it mainly serves to support the rotary motor 10, providing a stable mounting platform for the rotary motor 10 and ensuring the stability of the rotary motor 10 during operation.

[0037] Rotary motor 10: Installed on the upper end of bracket 9, its output end is connected to valve core 11 through rotating rod 12. When it is necessary to switch the cutting fluid path, the rotary motor 10 is started, driving the rotating rod 12 to rotate, thereby causing valve core 11 to rotate in valve body 1, realizing the switching of fluid path.

[0038] Valve core 11: It is fitted inside the center of the valve body 1 and can rotate inside the valve body 1. By rotating, the relative positions of the first guide pipe 13 and the second connecting pipe 6 are changed, so as to realize the connection and switching of different liquid circuits. At the same time, the rubber scraper 14 installed on the outer end of the valve core 11 can clean the inner wall of the valve body 1.

[0039] Rotating rod 12: One end is connected to the center of the upper surface of valve core 11, and the other end is connected to the output end of rotary motor 10 through the inside of valve body 1 and the lower surface of bracket 9. Its function is to transmit the power of rotary motor 10 to valve core 11, so that valve core 11 can rotate with rotary motor 10.

[0040] Guide pipe 13: Installed in the center of the rubber scraper 14, parallel to the connecting pipe 2 6. When the valve core 11 is rotated to the designated position, the guide pipe 13 aligns with one of the connecting pipes 2 6, allowing the cutting fluid in the connecting pipe 2 6 to flow into the guide pipe 13, which is the transition channel for the cutting fluid to enter the guide pipe 2 15 from the connecting pipe 2 6.

[0041] Rubber scraper 14: Installed on one side of the outer end surface of valve core 11, rotating synchronously with valve core 11. During rotation, it cleans the inner wall of valve body 1 to prevent cutting fluid residue and impurity accumulation, ensuring unobstructed and clean fluid passages.

[0042] Flow guide tube 2 15: The rear end is connected to flow guide tube 1 13, and the lower end extends through the inside of valve body 1 to the inside of pump 2, and is connected to connecting tube 1 3. Its function is to transport the cutting fluid in flow guide tube 1 13 to pump 2. It is the channel for transporting the cutting fluid from flow guide tube 1 13 to pump 2.

[0043] Before the cutting operation begins, the infusion pipe 7 is connected to the external cutting fluid connection end. Since the infusion pipe 7 is connected to the flange at the front end of the connecting pipe 6 via the mounting head and bolt 8, the sealing and stability of the connection are ensured, and the cutting fluid can flow smoothly from the infusion pipe 7 into the connecting pipe 6. The valve core 11 is sleeved in the center inside the valve body 1. The upper end of the valve core 11 is connected to the output end of the rotary motor 10 via the rotating rod 12. When it is necessary to switch the cutting fluid path, the rotary motor 10 is started, driving the rotating rod 12 to rotate, which in turn causes the valve core 11 to rotate inside the valve body 1. The rubber scraper 14 installed on one side of the outer surface of the valve core 11 rotates synchronously with the valve core 11. During the rotation, it cleans the inner wall of the valve body 1 to prevent cutting fluid residue and impurity accumulation. This is achieved by the relative position change between the guide pipe 13 in the center of the rubber scraper 14 and the connecting pipe 6. The fluid path switching involves parallel arrangement of guide pipe 13 and connecting pipe 2 6. When valve core 11 rotates to the designated position, guide pipe 13 aligns with one of the connecting pipes 2 6. At this time, the cutting fluid in connecting pipe 2 6 flows into guide pipe 13. The rear end of guide pipe 13 is connected to guide pipe 2 15, which extends to the center of valve core 11. The cutting fluid flows into guide pipe 2 15 through guide pipe 13. The lower end of guide pipe 2 15 extends through the inside of valve body 1 to the inside of pump 2, where it is connected to connecting pipe 1 3. After pump 2 starts, it generates suction to draw the cutting fluid in guide pipe 2 15 into the pump, and then outputs it through connecting pipe 1 3. Connecting pipe 1 3 and outlet pipe 5 are connected by mounting head, bolt 1 4, and flange to ensure the stability and sealing of the connection. The cutting fluid finally flows out from outlet pipe 5 and is delivered to the wafer cutting equipment.

[0044] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A universal wafer cutting fluid path quick switching channel structure comprising a valve body (1), characterized in that: The outer surface of the valve body (1) is surrounded by several connecting pipes (6), the valve core (11) is sleeved in the center inside the valve body (1), a bracket (9) is installed in the center of the upper surface of the valve body (1), a rotary motor (10) is installed at the upper end of the bracket (9), a liquid pump (2) is installed in the center of the lower surface of the valve body (1), and a connecting pipe (3) is connected to the upper surface of the liquid pump (2).

2. The quick switching channel structure of a general wafer cutting fluid path according to claim 1, characterized in that: The rear ends of several of the connecting pipes (6) extend to the inner wall of the valve body (1). A flange is installed on the front end surface of each connecting pipe (6). Threaded holes are opened around the flange surface. An infusion tube (7) is correspondingly sleeved on the front end of each connecting pipe (6).

3. The quick switching channel structure of a general wafer cutting fluid path according to claim 2, characterized in that: The infusion tube (7) is fixedly connected to the front end surface with an installation head. Through holes are opened around the outer end of the installation head, and bolts (8) are respectively sleeved inside the through holes. The other end of bolts (8) extends into the threaded hole.

4. The quick switching channel structure of a general wafer cutting fluid path according to claim 1, characterized in that: A rotating rod (12) is connected to the center of the upper surface of the valve core (11). The upper end of the rotating rod (12) is connected to the output end of the rotary motor (10) through the inside of the valve body (1) and the lower surface of the bracket (9). A rubber scraper (14) is installed on one side of the outer surface of the valve core (11).

5. The quick switching channel structure of a general wafer cutting fluid path according to claim 4, characterized in that: The rubber scraper (14) is connected to a flow guide tube (13) in the center, and the flow guide tube (13) and the connecting tube (6) are arranged in parallel. The flow guide tube (15) extends to the center of the valve core (11) at the rear end of the flow guide tube (13). The flow guide tube (15) extends through the interior of the valve body (1) to the interior of the liquid pump (2) and is connected to the connecting tube (3) in a corresponding manner.

6. The quick switching channel structure of a general wafer cutting fluid path according to claim 5, characterized in that: A flange is installed on the lower end surface of the connecting pipe (3), and threaded holes are provided around the flange surface. A liquid outlet pipe (5) is connected to the lower end surface of the connecting pipe (3).

7. The quick switching channel structure of a general wafer cutting fluid path according to claim 6, characterized in that: The front end surface of the liquid outlet pipe (5) is equipped with an installation head. A through hole is opened on the outer end of the installation head around the perimeter. Bolts (4) are respectively fitted inside the through hole. The other end of the bolts (4) extends into the threaded hole of the connecting pipe (3).

Images