Tray heating device and tray heating line

CN224653930UActive Publication Date: 2026-08-18CYG SEMICON EQUIP (ZHUHAI) CO LTD
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Patent Information

Application Number
CN202521719356.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-12
Publication Date
2026-08-18
Estimated Expiration
2035-08-12

AI Technical Summary

Technical Problem

相关技术中,在进行加热时,容易导致产品氧化,导致产品质量较低

Benefits of technology

[0003]本申请旨在至少解决现有技术中存在的技术问题之一。为此,本申请提出一种料盘加热装置及料盘加热产线,能够实现自动运输料盘,并对料盘上的物料进行加热,以及通过氮气对产品进行保护,降低产品在加热过程中被氧化的风险。

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a tray heating device and a tray heating production line, and relates to the technical field of semiconductor patch product production. The device comprises a first base, at least two transmission assemblies, a heating assembly and at least two nitrogen gas output pipes. The at least two transmission assemblies are arranged at intervals on the first base, and the at least two transmission assemblies are parallel to each other. The transmission assemblies are all used for transporting trays, and the transportation directions of the at least two transmission assemblies are the same. The heating assembly is located between the at least two transmission assemblies. The nitrogen gas output pipes correspond to the transmission assemblies one by one, and the nitrogen gas output pipes are arranged above the corresponding transmission assemblies along the length direction of the transmission assemblies. The nitrogen gas output pipes are provided with a plurality of output holes, and the nitrogen gas output pipes are used for being in communication with external nitrogen gas conveying equipment. The tray heating device realizes automatic transportation of trays, heating of materials on the trays, protection of products by nitrogen gas and reduction of the risk that the products are oxidized in the heating process.
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Description

Technical Field

[0001] This application relates to the field of semiconductor surface mount product manufacturing technology, and in particular to a tray heating device and a tray heating production line. Background Technology

[0002] During the manufacturing process of semiconductor surface mount products, especially when bonding semiconductor chips to a substrate or during reflow soldering, the substrate needs to be heated. The core purpose of heating is to melt the solder paste and complete the soldering to form a reliable electrical and mechanical connection. In related technologies, heating can easily lead to product oxidation, resulting in lower product quality. Utility Model Content

[0003] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a tray heating device and a tray heating production line, which can realize automatic tray transportation, heat the materials on the tray, and protect the products with nitrogen gas to reduce the risk of product oxidation during the heating process.

[0004] The tray heating device according to a first aspect embodiment of this application includes:

[0005] First base;

[0006] At least two transmission components are provided, the at least two transmission components are spaced apart from each other on the first base, the at least two transmission components are parallel to each other, the transmission components are all used to transport the material tray, and the at least two transmission components have the same transport direction;

[0007] A heating assembly located between the at least two of the transmission components;

[0008] At least two nitrogen output pipes are provided, each corresponding to a transmission component. The nitrogen output pipes are mounted above the corresponding transmission components along the length of the transmission components. Each nitrogen output pipe has multiple output holes and is used to connect with an external nitrogen delivery device.

[0009] The tray heating device according to the embodiments of this application has at least the following beneficial effects: When the tray heating device of this application is in operation, the tray is placed on at least two transfer components. Since the at least two transfer components have the same transport direction, the tray is transported via the at least two transfer components. The tray contains substrates or parts that need to be heated. During the transport of the tray, the heating components heat the tray, thereby heating the substrates or parts on the tray. Simultaneously, an external nitrogen supply device supplies nitrogen to the nitrogen output pipe, and the nitrogen output pipe outputs nitrogen to the substrates or material parts on the tray through the output hole. The nitrogen contacting the substrates or material parts reduces the risk of oxidation of the product during the heating process. Thus, this...

[0010] The proposed tray heating device enables automatic tray transport, heating of the materials on the tray, and protection of the product with nitrogen gas to reduce the risk of oxidation during the heating process.

[0011] The transmission assembly includes a mounting side plate, a belt drive, a transmission belt, and at least two drive wheels. The mounting side plate is perpendicular to the first base. The at least two drive wheels are respectively mounted on opposite sides of the mounting side plate. The transmission belt is sleeved on the at least two drive wheels. The belt drive is connected to at least one drive wheel and is used to drive the drive wheel to rotate, thereby driving the transmission belt to move.

[0012] According to some embodiments of this application, the transmission assembly further includes a cover plate disposed on the mounting side plate along the length direction of the mounting side plate, and the cover plate is perpendicular to the mounting side plate, and the width of the cover plate is smaller than the width of the conveyor belt, and the nitrogen output pipe is mounted on the cover plate.

[0013] According to some embodiments of this application, a first driving component is also included. The number of transmission components is two. The two transmission components are divided into a fixed transmission component and a movable transmission component. The movable transmission component is movably mounted on the first base, and the fixed transmission component is fixed to the first base. The first driving component is connected to the movable transmission component and is used to drive the movable transmission component to move closer to or away from the fixed transmission component.

[0014] According to some embodiments of this application, the first base is provided with a horizontal slide rail arranged along a first direction, the first direction being perpendicular to the transport direction of the movable transmission component, and the mounting side plate of the movable transmission component is movably mounted on the horizontal slide rail.

[0015] According to some embodiments of this application, it further includes a second base, a mounting base, and a vertical drive assembly. The first base has an opening, the second base is fixedly connected to the mounting base and is located below the first base, the heating assembly is mounted on the second base and passes through the opening; the vertical drive assembly is fixedly mounted on the mounting base and is connected to the first base, and the vertical drive assembly is used to drive the first base to perform lifting and lowering movements.

[0016] According to some embodiments of this application, a vertical slide rail is provided on one side of the mounting base along the vertical direction, the first base is movably mounted on the vertical slide rail, the vertical drive assembly includes a vertical drive member and a vertical drive shaft, the vertical drive member is installed on the side of the mounting base opposite to the vertical slide rail, the first base is fixedly connected to the vertical drive shaft, the vertical drive shaft is connected to the drive end of the vertical drive member through a belt, and the vertical drive member is used to drive the vertical drive shaft through the belt to drive the second base to move up and down.

[0017] According to some embodiments of this application, a blocking component is also included. The blocking component includes a blocking drive and a blocking block. The blocking block is mounted on the drive end of the blocking drive. The blocking block is located on the side of the first base near the transmission end of the transmission component. The blocking drive is located between at least two of the transmission components. The blocking drive is used to drive the blocking block to perform a lifting and lowering movement so that the blocking block blocks the tray when it is raised.

[0018] A second aspect of this application provides a tray heating production line, including at least two tray heating devices as described in any one of the first aspect embodiments;

[0019] At least two of the aforementioned tray heating devices are arranged adjacent to each other.

[0020] According to some embodiments of the second aspect of this application, it further includes a feeding device and a discharging device, wherein the feeding device, at least two material tray heating devices, and the discharging device are arranged sequentially;

[0021] The feeding device is provided with a feeding mounting base. The feeding mounting base is provided with a feeding movable conveying component, a feeding fixed conveying component and a feeding drive component at intervals. The feeding movable conveying component and the feeding fixed conveying component are arranged parallel to each other on the feeding mounting base. The feeding drive component is used to drive the feeding movable conveying component to move closer to or away from the feeding fixed conveying component.

[0022] The discharge device is provided with a discharge mounting base. The discharge mounting base is provided with a discharge movable conveying component, a discharge fixed conveying component and a discharge driving component at intervals. The discharge movable conveying component and the discharge fixed conveying component are arranged parallel to each other on the discharge mounting base. The discharge driving component is used to drive the discharge movable conveying component to move closer to or away from the discharge fixed conveying component.

[0023] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0024] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0025] Figure 1 This is a schematic diagram of the structure of the tray heating device according to an embodiment of this application;

[0026] Figure 2 This is a schematic diagram of the material tray heating device from another angle according to an embodiment of this application;

[0027] Figure 3 This is a partial structural schematic diagram of the tray heating device according to an embodiment of this application;

[0028] Figure 4 This is a schematic diagram of the structure of the transfer component of the tray heating device according to an embodiment of this application;

[0029] Figure 5 This is a schematic diagram of a portion of the structure of the tray heating device according to an embodiment of this application;

[0030] Figure 6 This is a schematic diagram of the material tray heating production line according to an embodiment of this application.

[0031] Figure label:

[0032] First base 100; horizontal slide rail 110;

[0033] Transmission assembly 200; mounting side plate 210; drive wheel 220; conveyor belt 230; cover plate 240;

[0034] Heating component 300;

[0035] Nitrogen outlet pipe 400; Nitrogen outlet port 410;

[0036] First drive component 500;

[0037] Mounting base 600; Vertical slide rail 610;

[0038] Vertical drive component 700; Vertical drive shaft 710;

[0039] Blocking drive component 800; Blocking component 810;

[0040] Feed mounting base 910; fixed feed transfer assembly 920; movable feed transfer assembly 930; feed drive assembly 940; discharge mounting base 950; fixed discharge transfer assembly 960; movable discharge transfer assembly 970; discharge drive assembly 980;

[0041] Second base 1000. Detailed Implementation

[0042] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0043] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0044] In the description of this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0045] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0046] In the description of this application, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0047] Referring to Figures 1 to 5, a first aspect of this application provides a tray heating device, which includes a first base 100, at least two conveying components 200, a heating component 300, and at least two nitrogen output pipes 400. The at least two conveying components 200 are spaced apart from each other on the first base 100, are parallel to each other, and are all used for conveying trays. The conveying directions of the at least two conveying components 200 are the same. The heating component 300 is located at the at least two conveying components 400.

[0048] Between components 200; nitrogen output pipes 400 correspond one-to-one with transmission components 200, and nitrogen output pipes 400 are installed above the corresponding transmission components 200 along the length direction of the transmission components 200; nitrogen output pipes 400 are provided with multiple output holes 410, and nitrogen output pipes 400 are used to connect with external nitrogen delivery equipment.

[0049] In operation, the tray heating device of this application embodiment places the tray on at least two transfer components 200. Since the at least two transfer components 200 have the same transport direction, the tray, which contains substrates or parts to be heated, is transported via these components. During the transport of the tray, the heating component 300 heats the tray, thereby heating the substrates or parts on the tray. Simultaneously, an external nitrogen supply device supplies nitrogen to the nitrogen output pipe 400, which outputs nitrogen through the output hole 410 to the substrates or material parts on the tray. The nitrogen contacting the substrates or material parts reduces the risk of oxidation of the product during heating. Thus, the tray heating device of this application achieves automatic tray transport, heating of the materials on the tray, and protection of the product with nitrogen, reducing the risk of oxidation during heating.

[0050] It should be noted that the output hole 410 can be oriented towards the material tray or towards the heating assembly 300, which is located below the material tray. Nitrogen gas is supplied to the substrate or material parts on the material tray through the output hole 410. This application embodiment does not limit the number of output holes 410; those skilled in the art can set the number of output holes 410 according to actual needs.

[0051] It should be noted that those skilled in the art can set the number of transmission components 200 and the number of nitrogen output pipes 400 according to the actual situation. The number of transmission components 200 is the same as the number of nitrogen output pipes 400, and the transmission components 200 and nitrogen output pipes 400 correspond one-to-one.

[0052] It should be noted that the heating component 300 can be a heating plate or a high-temperature furnace tube, or other heating equipment in the prior art. This application does not make specific limitations on this, and those skilled in the art can design the heating component 300 according to the actual situation. The external nitrogen delivery equipment can be a nitrogen storage tank and a gas pump, or other equipment in the prior art. This application does not make specific limitations on the external nitrogen delivery equipment, as long as it can deliver nitrogen to the nitrogen output pipe 400.

[0053] In some embodiments, refer to Figure 3 and Figure 4 The transmission assembly 200 includes a mounting side plate 210, a belt drive, a transmission belt 230, and at least two drive wheels 220. The mounting side plate 210 is perpendicular to the first base 100. At least two drive wheels 220 are respectively mounted on opposite sides of the mounting side plate 210. The transmission belt 230 is sleeved on the at least two drive wheels 220. The belt drive is connected to at least one drive wheel 220 and is used to drive the drive wheel 220 to rotate, thereby driving the transmission belt 230 to move.

[0054] It is worth noting that the belt drive component is a drive motor, which is connected to one of the transmission pulleys 220.

[0055] 220 can be directly mounted on the drive end of the drive motor, or it can be connected to the drive end of the drive motor via a transmission belt. When the drive motor starts, it drives the transmission wheel 220 to rotate, and the rotation of the transmission wheel 220 drives other transmission wheels 220 and the transmission belt.

[0056] The conveyor belt 230 moves. During transport, the bottom of the tray contacts the conveyor belt 230, so that the movement of the conveyor belt 230 drives the tray to move, thereby transporting the tray. It should be noted that this application does not limit the number of drive wheels 220, and those skilled in the art can set the number of drive wheels 220 according to actual needs.

[0057] In some embodiments, the transmission assembly 200 further includes a cover plate 240, which is disposed on the mounting side plate 210 along the length direction of the mounting side plate 210 and is perpendicular to the mounting side plate 210. The width of the cover plate 240 is smaller than the width of the conveyor belt 230, and the nitrogen output pipe 400 is mounted on the cover plate 240.

[0058] It is worth noting that the cover plate 240 and the conveyor belt 230 do not come into contact with each other to avoid the cover plate 240 obstructing the movement of the conveyor belt 230. The nitrogen output pipe 400 is mounted on the cover plate 240, so the nitrogen output pipe 400 will not obstruct the movement of the conveyor belt 230 either.

[0059] In some embodiments, the cover plate 240 is offset from the conveyor belt 230 to prevent the cover plate 240 from covering the conveyor belt 230 and preventing the tray from contacting the conveyor belt 230. For example, the cover plate 240 is located above one side of the conveyor belt 230, while the other side of the conveyor belt 230 contacts the bottom of the tray.

[0060] In some embodiments, refer to Figure 1 and Figure 2 It also includes a first drive component 500, and the number of transmission components 200 is 2. The two transmission components 200 are divided into a fixed transmission component 200 and a movable transmission component 200. The movable transmission component 200 is movably installed on the first base 100, and the fixed transmission component 200 is fixed to the first base 100. The first drive component 500 is connected to the movable transmission component 200 and is used to drive the movable transmission component 200 to move closer to or away from the fixed transmission component 200.

[0061] It is worth noting that the mounting side plate 210 of the fixed transmission component 200 is fixed to the first base 100, and the mounting side plate 210 of the movable transmission component 200 is movably mounted on the first base 100. The mounting side plate 210 of the movable transmission component 200 is connected to the driving end of the first driving component 500. The first driving component 500 drives the movable transmission component 200 to move closer to or further away from the fixed transmission component 200 to adjust the distance between the movable transmission component 200 and the fixed transmission component 200, thereby adapting to trays of different sizes. This makes the tray heating device of this embodiment more widely applicable, enabling the distance between the movable transmission component 200 and the fixed transmission component 200 to be adjusted according to the width of the tray, thus transporting trays of different widths.

[0062] In some embodiments, refer to Figure 3 The first base 100 is provided with a horizontal slide rail 110 arranged along a first direction, which is perpendicular to the transport direction of the movable transmission component 200. The mounting side plate 210 of the movable transmission component 200 is movably mounted on the horizontal slide rail 110.

[0063] It is worth noting that the first drive assembly 500 can drive the mounting side plate 210 of the movable transmission assembly 200 to perform linear reciprocating motion along the horizontal slide rail 110, thereby making the movement of the movable transmission assembly 200 smoother. It should be noted that there can be multiple horizontal slide rails 110, and the mounting side plate 210 of the movable transmission assembly 200 can be movably mounted in multiple horizontal slide rails 110 simultaneously, enabling smoother movement of the movable transmission assembly 200.

[0064] In some embodiments, the first drive assembly 500 is a linear drive screw, and the mounting side plate 210 of the movable transmission assembly 200...

[0065] Connected to a linear drive screw, the linear drive screw can drive the mounting side plate 210 of the movable transmission assembly 200 to reciprocate.

[0066] In some embodiments, the system further includes a second base 1000, a mounting base 600, and a vertical drive assembly. The first base 100 has an opening, the second base 1000 is fixedly connected to the mounting base 600, and the second base 1000 is located below the first base 100. The heating assembly 300 is fixedly installed on the second base 1000 and passes through the opening. The vertical drive assembly is fixedly installed on the mounting base 600 and connected to the first base 100. The vertical drive assembly is used to drive the first base 100 to perform lifting and lowering movements.

[0067] It is worth noting that the heating component 300 is located below the material tray, and the vertical drive component is used to drive the first base 100 to move up and down, thereby driving the movable transmission component 200 and the fixed transmission component 200 to move up and down, thus adjusting the distance between the heating component 300 and the material tray. The first base 100 is provided with an opening to prevent the heating component 300 from obstructing the movement of the first base 100.

[0068] In some embodiments, a vertical slide rail 610 is provided on one side of the mounting base 600 along the vertical direction. The second base 1000 is movably mounted on the vertical slide rail 610. The vertical drive assembly includes a vertical drive member 700 and a vertical drive shaft 710. The vertical drive member 700 is mounted on the side of the mounting base 600 opposite to the vertical slide rail 610. The first base 100 is fixedly connected to the vertical drive shaft 710. The vertical drive shaft 710 is connected to the drive end of the vertical drive member 700 through a belt. The vertical drive member 700 is used to drive the vertical drive shaft 710 through the belt to drive the first base 100 to perform lifting and lowering movements.

[0069] It is worth noting that the vertical drive component 700 and the vertical slide rail 610 are respectively located on opposite sides of the mounting base 600, which makes the structure of the tray heating device more compact and reduces the space occupied by the tray heating device. The vertical drive component 700 is a motor, and the vertical drive shaft 710 can be a lead screw. The vertical drive component 700 drives the vertical drive shaft 710 to rotate via a belt, thereby driving the first base 100 to move up and down. When the first base 100 moves up and down, it moves along the vertical slide rail 610, so that the movement of the first base 100 is smooth and the risk of shaking during the movement is reduced.

[0070] In some embodiments, a blocking component is further included, which includes a blocking drive 800 and a blocking block. The blocking block is mounted on the drive end of the blocking drive 800 and is located on the side of the first base 100 near the transmission end of the transmission component. The blocking drive 800 is located between at least two transmission components 200. The blocking drive 800 is used to drive the blocking block to perform a lifting and lowering movement so that the blocking block blocks the tray when it is raised.

[0071] It is worth noting that the blocking drive component 800 is a drive cylinder. The drive cylinder drives the blocking block to move up and down. When the blocking block rises, it blocks the material tray so that the material tray does not move with the conveyor belt 230 of the transmission component 200. This keeps the material tray above the heating component 300, which makes it easier for the heating component 300 to heat the material tray and also makes it easier to adjust the heating time of the material tray.

[0072] A second aspect of this application provides a tray heating production line, including at least two trays as described in the first aspect embodiment.

[0073] The tray heating device is provided, and at least two tray heating devices are arranged adjacent to each other.

[0074] It should be noted that this application does not specify the exact number of tray heating devices, and those skilled in the art can set the number of tray heating devices according to actual needs. Multiple tray heating devices are arranged adjacent to each other, and the conveyor belts 230 of the movable transmission components 200 of adjacent tray heating devices are in a straight line, and the conveyor belts 230 of the fixed transmission components 200 of adjacent tray heating devices are in a straight line, so that the trays can be transported between multiple tray heating devices.

[0075] In operation, the tray heating device places the tray on at least two transfer components 200. Since the at least two transfer components 200 have the same transport direction, the tray, which contains substrates or parts to be heated, is transported via these components. During transport, the heating components 300 heat the tray, thereby heating the substrates or parts on it. Simultaneously, an external nitrogen supply device supplies nitrogen to the nitrogen output pipe 400, which outputs nitrogen through the output hole 410 to the substrates or parts on the tray. The nitrogen contacting the substrates or parts reduces the risk of oxidation during heating. Thus, the tray heating device of this application achieves automatic tray transport, heating of the materials on the tray, and protection of the product with nitrogen, reducing the risk of oxidation during heating.

[0076] It should be noted that since the tray heating production line includes the tray heating device of the first aspect embodiment, the corresponding contents of the tray heating device in the first aspect embodiment can be applied to the tray heating production line of the second aspect, and have the same implementation principle and technical effect. To avoid redundancy, it will not be described in detail here.

[0077] In some embodiments, referring to FIG5, the tray heating production line further includes a feeding device and a discharging device, wherein the feeding device, at least two tray heating devices, and the discharging device are arranged sequentially.

[0078] The feeding device is provided with a feeding mounting base 910. The feeding mounting base 910 is provided with a feeding movable conveying component 930, a feeding fixed conveying component 920 and a feeding drive component 940 at intervals. The feeding movable conveying component 930 and the feeding fixed conveying component 920 are arranged parallel to each other on the feeding mounting base 910. The feeding drive component 940 is used to drive the feeding movable conveying component 930 to move closer to or away from the feeding fixed conveying component 920.

[0079] The discharge device is provided with a discharge mounting base 950. The discharge mounting base 950 is provided with a discharge movable conveying component 970, a discharge fixed conveying component 960 and a discharge drive component 980 at intervals. The discharge movable conveying component 970 and the discharge fixed conveying component 960 are arranged parallel to each other on the discharge mounting base 950. The discharge drive component 980 is used to drive the discharge movable conveying component 970 to move closer to or away from the discharge fixed conveying component 960.

[0080] It is worth noting that the feed conveyor assembly 930 and the discharge conveyor assembly 970 have the same structure as the movable transmission assembly 200. The feed fixed conveyor assembly 920 and the discharge fixed conveyor assembly 960 have the same structure as the fixed transmission assembly 200. The feed drive assembly 940 and the discharge drive assembly 980 have the same structure as the first drive assembly 500.

[0081] When the material tray heating production line is running, the material tray is first placed in the feeding device, and then conveyed to the material tray heating device, through multiple material trays...

[0082] The heating device heats the material tray and then conveys it to the discharge device, which removes the tray to complete the unloading process.

[0083] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application. Furthermore, unless otherwise specified, the embodiments and features described in the embodiments of this application can be combined with each other.

Claims

1. A material tray heating device, characterized in that, include: First base; At least two transmission components are provided, the at least two transmission components are spaced apart from each other on the first base, the at least two transmission components are parallel to each other, the transmission components are all used to transport the material tray, and the at least two transmission components have the same transport direction; A heating assembly located between the at least two of the transmission components; At least two nitrogen output pipes are provided, each corresponding to a transmission component. The nitrogen output pipes are mounted above the corresponding transmission components along the length of the transmission components. Each nitrogen output pipe has multiple output holes and is used to connect with an external nitrogen delivery device.

2. The material tray heating device according to claim 1, characterized in that, The transmission assembly includes a mounting side plate, a belt drive, a transmission belt, and at least two drive wheels. The mounting side plate is perpendicular to the first base. The at least two drive wheels are respectively mounted on opposite sides of the mounting side plate. The transmission belt is sleeved on the at least two drive wheels. The belt drive is connected to at least one drive wheel and is used to drive the drive wheel to rotate, thereby driving the transmission belt to move.

3. The material tray heating device according to claim 2, characterized in that, The transmission assembly also includes a cover plate, which is disposed on the mounting side plate along the length of the mounting side plate and is perpendicular to the mounting side plate. The width of the cover plate is smaller than the width of the conveyor belt, and the nitrogen output pipe is mounted on the cover plate.

4. The material tray heating device according to claim 1, characterized in that, It also includes a first driving component. The number of transmission components is 2. The two transmission components are divided into a fixed transmission component and a movable transmission component. The movable transmission component is movably mounted on the first base, and the fixed transmission component is fixed to the first base. The first driving component is connected to the movable transmission component and is used to drive the movable transmission component to move closer to or away from the fixed transmission component.

5. The material tray heating device according to claim 4, characterized in that, The first base is provided with a horizontal slide rail arranged along a first direction, which is perpendicular to the transport direction of the movable transmission component. The mounting side plate of the movable transmission component is movably mounted on the horizontal slide rail.

6. The material tray heating device according to claim 4, characterized in that, It also includes a second base, a mounting base, and a vertical drive assembly. The first base has an opening. The second base is fixedly connected to the mounting base and is located below the first base. The heating assembly is mounted on the second base and passes through the opening. The vertical drive assembly is fixedly mounted on the mounting base and is connected to the first base. The vertical drive component is used to drive the first base to move up and down.

7. The material tray heating device according to claim 6, characterized in that, A vertical slide rail is provided on one side of the mounting base along the vertical direction. The first base is movably mounted on the vertical slide rail. The vertical drive assembly includes a vertical drive component and a vertical drive shaft. The vertical drive component is installed on the side of the mounting base opposite to the vertical slide rail. The first base is fixedly connected to the vertical drive shaft. The vertical drive shaft is connected to the drive end of the vertical drive component via a belt. The vertical drive component is used to drive the vertical drive shaft via the belt to drive the first base to move up and down.

8. The material tray heating device according to claim 1, characterized in that, It also includes a blocking assembly, which includes a blocking drive and a blocking block. The blocking block is installed on the driving end of the blocking drive and is located on the side of the first base near the transmission end of the transmission assembly. The blocking drive is located between at least two of the transmission assemblies. The blocking drive is used to drive the blocking block to move up and down so that the blocking block blocks the tray when it is raised.

9. A tray heating production line, characterized in that, Includes at least two tray heating devices as described in claim 1; At least two of the aforementioned tray heating devices are arranged adjacent to each other.

10. The material tray heating production line according to claim 9, characterized in that, It also includes a feeding device and a discharging device, wherein the feeding device, at least two material tray heating devices, and the discharging device are arranged in sequence; The feeding device is provided with a feeding mounting base. The feeding mounting base is provided with a feeding movable conveying component, a feeding fixed conveying component and a feeding drive component at intervals. The feeding movable conveying component and the feeding fixed conveying component are arranged parallel to each other on the feeding mounting base. The feeding drive component is used to drive the feeding movable conveying component to move closer to or away from the feeding fixed conveying component. The discharge device is provided with a discharge mounting base. The discharge mounting base is provided with a discharge movable conveying component, a discharge fixed conveying component and a discharge driving component at intervals. The discharge movable conveying component and the discharge fixed conveying component are arranged parallel to each other on the discharge mounting base. The discharge driving component is used to drive the discharge movable conveying component to move closer to or away from the discharge fixed conveying component.