A rotatable wafer cassette for production processing

Abstract

The utility model discloses a rotatable silicon wafer box for production and processing relates to the technical field of silicon wafer processing, the utility model discloses a base, the top of base is connected with the swivel seat of sliding, the top of swivel seat is provided with the silicon wafer box, still include: rotating mechanism. The utility model discloses a rotating mechanism, specifically is motor starting drive worm rotation, because the worm and the worm wheel of pivot outer wall mesh, power transmission to pivot, and then drive the rotation of the swivel seat and the silicon wafer box of fixed top, through the worm and worm wheel cooperation ensure transmission accurate, stable and large torque, adapt to different process demand, can make the silicon wafer in cleaning, coating etc. Production and processing procedure even contact processing environment, reduce the problem of partial processing uneven, improve the quality of silicon wafer processing, can also cooperate with the realization of process link of automatic production line, reduce manual intervention, improve overall production efficiency, guarantee the stable safety of silicon wafer processing.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer production technology, and in particular relates to a rotatable silicon wafer cassette for production and processing. Background Technology

[0002] Silicon wafers, as a key basic material in the semiconductor industry, are widely used in the field of electronic information. Their processing and production are complex, covering many delicate processes such as single crystal growth, cutting, grinding, polishing, and cleaning. In these processes, silicon wafer cassettes are used to load and transport silicon wafers and are an important carrier to ensure the smooth progress of silicon wafer processing. Especially in some specific processing and production processes, such as cleaning and coating, the silicon wafer cassettes need to be able to rotate flexibly to ensure that all surfaces of the silicon wafer are treated evenly.

[0003] However, some existing silicon wafer cassette structures are difficult to rotate efficiently during use. This makes it difficult for the silicon wafer to come into full and uniform contact with the processing liquid or processing environment during related processing steps, resulting in inconsistent processing effects. This not only reduces product quality but may also affect production efficiency and increase production costs due to rework, making it difficult to meet the growing demand for high-precision and high-efficiency semiconductor manufacturing. Utility Model Content

[0004] The purpose of this invention is to provide a rotatable silicon wafer cassette for production and processing. Specifically, when the silicon wafer cassette needs to be rotated, a motor starts and drives a worm gear to rotate. Because the worm gear meshes with a worm wheel on the outer wall of the rotating shaft, power is transmitted to the rotating shaft, which in turn drives the rotating seat fixed at the top and the silicon wafer cassette to rotate. The worm gear and worm wheel work together to ensure precise, stable, and high-torque transmission, adapting to different process requirements. Simultaneously, by rotating the silicon wafer cassette, the silicon wafers can be evenly contacted with the processing environment during cleaning, coating, and other production processes, reducing uneven processing and improving the quality of silicon wafer processing. It can also be integrated with automated production lines to achieve seamless process connections, reduce manual intervention, improve overall production efficiency, and ensure stable and safe silicon wafer processing. This invention solves the problem that some existing silicon wafer cassette structures are difficult to rotate efficiently during use.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution: This utility model relates to a rotatable silicon wafer cassette for production and processing, comprising a base, a rotating seat slidably connected to the top of the base, and a silicon wafer cassette mounted on the top of the rotating seat. It further comprises: a rotating mechanism mounted on the base, used to drive the silicon wafer cassette to rotate; the rotating mechanism includes a rotating shaft fixedly connected to the bottom of the rotating seat, the bottom end of the rotating shaft extending into the interior of the base and rotatably connected to the base; and a fixing mechanism mounted on the rotating seat, used to fix the silicon wafer cassette; the fixing mechanism includes an electric push rod mounted on the inner bottom wall of the rotating seat. The silicon wafer cassette is mounted on the top of the rotating seat via the fixing mechanism, and the rotating mechanism drives the silicon wafer cassette to rotate via the rotating seat. The rotating shaft is rotatably connected to the base via a bearing, and the electric push rod is mounted inside the rotating seat via bolts.

[0006] Furthermore, the rotating mechanism also includes a drive assembly disposed inside the base, the drive assembly being used to provide power for the rotating shaft to drive the rotating seat to rotate; and a limiting assembly disposed at the top of the base, the limiting assembly being used to limit the rotation of the rotating seat during rotation.

[0007] Furthermore, the fixing mechanism also includes a clamping assembly disposed on a rotating base and used to clamp the silicon wafer cassette; and a transmission assembly disposed inside the rotating base and used to transmit the power of the electric push rod to the clamping assembly to drive the clamping assembly to perform clamping movement. The electric push rod provides the power foundation for the entire fixing mechanism, and the transmission assembly converts the power of the electric push rod into the power of the clamping assembly to clamp the silicon wafer cassette.

[0008] Furthermore, the drive assembly includes a motor installed on the inner bottom wall of the base. The output shaft of the motor is fixedly connected to a worm gear via a coupling. A worm wheel is fixedly connected to the outer wall of the rotating shaft. The worm wheel meshes with the worm gear and is fixedly connected to the rotating shaft by welding, thereby transmitting the power received by itself to the rotating shaft and then to the rotating seat.

[0009] Furthermore, the limiting component includes a limiting groove formed on the top of the base, and a plurality of limiting slide rods are fixedly connected to the bottom of the rotating seat. The bottom ends of the plurality of limiting slide rods extend into the interior of the limiting groove and are slidably connected to the limiting groove. The plurality of limiting slide rods are fixedly connected to the rotating seat by welding. The plurality of limiting slide rods are designed to be cylindrical, and the outer walls of the plurality of limiting slide rods are provided with annular grooves.

[0010] Furthermore, the clamping assembly includes two transmission rods that pass through the left and right sides of the rotating base respectively. Both transmission rods are slidably connected to the rotating base. A clamping plate is fixedly connected to the end of each transmission rod away from the interior of the rotating base. An anti-slip pad is fixedly connected to the end of each clamping plate that is close to each other. The two clamping plates are fixedly connected to the corresponding transmission rods by welding, and the two clamping plates are symmetrically arranged on the left and right sides of the silicon wafer cassette.

[0011] Furthermore, the transmission assembly includes two slide rods fixedly connected to the inner wall of the rotating seat, two sliders slidably connected to the outer walls of the two slide rods, and the sides of the two sliders that are far apart from each other are fixedly connected to two transmission rods respectively. A transmission block is fixedly connected to the movable end of the electric push rod, and a transmission plate is rotatably connected between the two sliders and the transmission block. The transmission block is fixedly connected to the electric push rod by welding, and two limiting blocks are fixedly connected to the bottom of the transmission block. Two limiting grooves are opened in the inner bottom wall of the rotating seat, and the two limiting blocks are slidably connected to the corresponding limiting grooves.

[0012] This utility model has the following beneficial effects: 1. This utility model, through the setting of a rotating mechanism, specifically, when the silicon wafer cassette needs to be rotated, the motor starts and drives the worm gear to rotate. Because the worm gear meshes with the worm wheel on the outer wall of the rotating shaft, the power is transmitted to the rotating shaft, thereby driving the rotating seat and silicon wafer cassette fixed at the top to rotate. The cooperation between the worm gear and the worm wheel ensures precise, stable, and high torque transmission, adapting to different process requirements. At the same time, by rotating the silicon wafer cassette, the silicon wafers can be evenly contacted with the processing environment during production and processing steps such as cleaning and coating, reducing the problem of uneven local processing, improving the quality of silicon wafer processing, and can also be used in conjunction with automated production lines to achieve process connection, reduce manual intervention, improve overall production efficiency, and ensure stable and safe silicon wafer processing.

[0013] 2. This utility model features a fixing mechanism. Specifically, when fixing the silicon wafer cassette, an electric push rod is activated, driving a transmission block to move. As the transmission block moves, a slider slides along a sliding rod via a transmission plate. The slider then moves the transmission rod, bringing the clamping plates on both sides closer together. The anti-slip protrusions on the anti-slip pads clamp and fix the silicon wafer cassette. When removing it, the electric push rod reverses its movement, causing the clamping plates to move away and releasing the fixation. The overall automation level is high, eliminating the need for manual clamping and significantly reducing the intensity and cost of manual operation. It is adaptable to wafer cassettes of different specifications, eliminating the need to design a separate fixing structure for a single size, thus reducing equipment investment. It further improves the reliability of fixing and the efficiency of loading and unloading.

[0014] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the exploded structure of this utility model; Figure 3 This is a cross-sectional structural diagram of the base of this utility model; Figure 4 This is a schematic diagram of the structure of the motor of this utility model; Figure 5 This is a schematic diagram of the transmission rod of this utility model; Figure 6 This is a schematic diagram of the structure of the electric actuator of this utility model.

[0017] The attached diagram lists the components represented by each number as follows: 1. Base; 11. Rotary seat; 111. Silicon wafer cassette; 2. Rotation mechanism; 21. Rotating shaft; 22. Drive assembly; 221. Motor; 222. Worm gear; 223. Worm wheel; 23. Limiting assembly; 231. Limiting groove; 232. Limiting slide bar; 3. Fixing mechanism; 31. Electric push rod; 32. Clamping assembly; 321. Transmission rod; 322. Clamping plate; 323. Anti-slip pad; 33. Transmission assembly; 331. Slide bar; 332. Slider; 333. Transmission block; 334. Transmission plate. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figure 1-6As shown, this utility model is a rotatable silicon wafer cassette for production and processing, including a base 1, a rotating seat 11 slidably connected to the top of the base 1, and a silicon wafer cassette 111 mounted on the top of the rotating seat 11. It also includes: a rotating mechanism 2, mounted on the base 1, used to drive the silicon wafer cassette 111 to rotate; the rotating mechanism 2 includes a rotating shaft 21 fixedly connected to the bottom of the rotating seat 11, the bottom end of the rotating shaft 21 extending into the interior of the base 1 and rotatably connected to the base 1; and a fixing mechanism 3, mounted on the rotating seat 11, used to fix the silicon wafer cassette 111; the fixing mechanism 3 includes an electric push rod 31 mounted on the inner bottom wall of the rotating seat 11. The silicon wafer cassette 111 is mounted on the top of the rotating seat 11 via the fixing mechanism 3, and the rotating mechanism 2 drives the silicon wafer cassette 111 to rotate via the rotating seat 11. The rotating shaft 21 is rotatably connected to the base 1 via a bearing. The rotating mechanism 1 is bolted inside the rotating base 11; the rotating mechanism 2 also includes a drive assembly 22, which is located inside the base 1 and provides power for the rotating shaft 21 to drive the rotating base 11 to rotate; a limiting assembly 23, which is located on the top of the base 1 and limits the rotating base 11 during rotation; the fixing mechanism 3 also includes a clamping assembly 32, which is located on the rotating base 11 and clamps the silicon wafer cassette 111; and a transmission assembly 33, which is located inside the rotating base 11 and transmits the power of the electric push rod 31 to the clamping assembly 32 to drive the clamping assembly 32 to perform clamping movement. The electric push rod 31 provides the power foundation for the fixing mechanism 3 as a whole, and the transmission assembly 33 converts the power of the electric push rod 31 into the power of the clamping assembly 32 to clamp the silicon wafer cassette 111.

[0020] The drive assembly 22 includes a motor 221 installed on the inner bottom wall of the base 1. The output shaft of the motor 221 is fixedly connected to a worm gear 222 via a coupling. A worm wheel 223 is fixedly connected to the outer wall of the shaft 21. The worm wheel 223 meshes with the worm gear 222. When the motor 221 starts, it drives the worm gear 222 to rotate. When the worm gear 222 rotates, it drives the shaft 21 to rotate through meshing with the worm wheel 223, thereby driving the rotating seat 11 and the silicon wafer cassette 111 on the top of the rotating seat 11 to rotate. The limiting assembly 23 includes a limiting groove 231 formed on the top of the base 1. Several limiting rods 232 are fixedly connected to the bottom of the rotating seat 11. The bottom ends of the several limiting rods 232 extend into the interior of the limiting groove 231 and slide in connection with the limiting groove 231. When the rotating seat 11 rotates, it drives the several limiting rods 232 to slide within the limiting groove 231. The rotating seat 11 is limited by the cooperation of several limiting slide rods 232 and limiting slide grooves 231. By setting the rotating mechanism 2, specifically, when the silicon wafer box 111 needs to be rotated, the motor 221 starts and drives the worm gear 222 to rotate. Because the worm gear 222 meshes with the worm wheel 223 on the outer wall of the rotating shaft 21, the power is transmitted to the rotating shaft 21, which in turn drives the rotating seat 11 and the silicon wafer box 111 fixed at the top to rotate. The cooperation of the worm gear 222 and the worm wheel 223 ensures accurate, stable and large torque transmission, which can adapt to different process requirements. At the same time, by rotating the silicon wafer box 111, the silicon wafer can be evenly contacted with the processing environment in the production and processing processes such as cleaning and coating, reducing the problem of uneven local processing, improving the quality of silicon wafer processing, and can also cooperate with the automated production line to realize process connection, reduce manual intervention, improve overall production efficiency, and ensure the stability and safety of silicon wafer processing.

[0021] The clamping assembly 32 includes two transmission rods 321 passing through the left and right sides of the rotating base 11, respectively. Both transmission rods 321 are slidably connected to the rotating base 11. A clamping plate 322 is fixedly connected to the end of each transmission rod 321 away from the interior of the rotating base 11. An anti-slip pad 323 is fixedly connected to the end of each clamping plate 322 that is close to each other. The side of each anti-slip pad 323 that is close to each other is designed with anti-slip protrusions to increase the coefficient of friction with the silicon wafer cassette 111. The transmission assembly 33 includes two sliding rods 331 fixedly connected to the inner wall of the rotating base 11. Two sliders 332 are slidably connected to the outer walls of the two sliding rods 331. The sides of the two sliders 332 that are far from each other are fixedly connected to the two transmission rods 321, respectively. A transmission block 333 is fixedly connected to the movable end of the electric push rod 31. A transmission plate 334 is rotatably connected between each slider 332 and the transmission block 333. When the electric push rod 31 is activated, it drives the transmission block 333 to move, thus increasing the friction coefficient with the silicon wafer cassette 111. When the moving block 333 moves, it is limited by the limiting block and the limiting groove. When the transmission block 333 moves, it drives the two sliders 332 to move through the transmission plate 334. In turn, the two sliders 332 drive the transmission rod 321 and the clamping plate 322 to move through the two sliders 332. By setting the fixing mechanism 3, specifically when fixing the silicon wafer cassette 111, the electric push rod 31 is activated to drive the transmission block 333 to move. When the transmission block 333 moves, it drives the sliders 332 to slide along the slide rod 331 through the transmission plate 334. The sliders 332 drive the transmission rod 321 to move, so that the clamping plates 322 on both sides are brought closer together. The anti-slip protrusions of the anti-slip pad 323 clamp and fix the silicon wafer cassette 111. When it is removed, the electric push rod 31 moves in the opposite direction, and the clamping plates 322 move away to release the fixation. The overall automation level is high, and no manual clamping is required, which greatly reduces the intensity and cost of manual operation. It is compatible with different specifications of wafer cassettes, and there is no need to design a separate fixing structure for a single size, which reduces equipment investment. It further improves the fixing reliability and loading and unloading efficiency.

[0022] A specific application of this embodiment is as follows: When using this device, the base 1 is first installed in a processing equipment, such as a cleaning equipment for cleaning silicon wafers or a coating equipment for coating silicon wafers, using bolts. When it is necessary to rotate the silicon wafer cassette 111, the motor 221 installed on the inner bottom wall of the base 1 is started, and its output shaft drives the worm gear 222 to rotate through a coupling. Since the worm gear 222 meshes with the worm wheel 223 fixedly connected to the outer wall of the rotating shaft 21, the rotation of the worm gear 222 will drive the worm wheel 223 to rotate, thereby driving the rotating shaft 21 fixedly connected to the worm wheel 223 to rotate. The top end of the rotating shaft 21 is fixedly connected to the rotating seat 11, so the rotation of the rotating shaft 21 will drive the rotating seat 11 to rotate. The rotating seat 11 and the silicon wafer cassette 111 on top of the rotating seat 11 rotate together. Due to the cooperation between the worm gear 222 and the worm wheel 223, the transmission ratio is precise, the operation is smooth and the torque is large. It can accurately control the rotation angle and speed to adapt to different process requirements, and can maintain stable rotation when the silicon wafer cassette 111 is fully loaded with silicon wafers. During the rotation of the rotating seat 11, several limiting slide rods 232 fixedly connected to its bottom will slide in the annular limiting slide groove 231 opened on the top of the base 1. Through the cooperation between the limiting slide rods 232 and the limiting slide groove 231, the rotation of the rotating seat 11 is limited, ensuring that the rotating seat 11 remains stable during rotation and avoiding deviation or shaking.

[0023] When it is necessary to fix the silicon wafer cassette 111, the silicon wafer cassette 111 is first placed on top of the rotating base 11. Then, the electric push rod 31 installed on the inner bottom wall of the rotating base 11 is activated, and its movable end drives the transmission block 333 to move. During the movement, the transmission block 333 is limited by the limiting block at its bottom cooperating with the limiting groove on the inner bottom wall of the rotating base 11. At the same time, the transmission block 333 drives the two sliders 332 to slide on the two sliding rods 331 fixed on the inner wall of the rotating base 11 through the two transmission plates 334 rotatably connected to it. Since the two sliders 332 are fixedly connected to the two transmission rods 321 respectively, the sliding of the sliders 332 will drive the two transmission rods 321 to slide on the rotating base 11, thereby causing the two... The clamping plates 322 at the ends of the transmission rods 321 away from the inside of the rotating seat 11 move closer to each other, and finally clamp and fix the silicon wafer cassette 111 by the anti-slip pads 323 on the two clamping plates 322. The anti-slip protrusions on the anti-slip pads 323 can increase the friction coefficient with the silicon wafer cassette 111, ensuring a more stable fixation. When it is necessary to remove the silicon wafer cassette 111, the electric push rod 31 drives the transmission block 333 to move in the opposite direction. Through the above transmission process, the two clamping plates 322 move away from each other, releasing the fixation of the silicon wafer cassette 111, thereby greatly improving the fixation reliability and loading and unloading efficiency, while avoiding the silicon wafer cassette 111 from shifting, slipping or hard contact damage, and facilitating the installation and fixation of different silicon wafer cassettes 111.

[0024] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0025] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A rotatable silicon wafer cassette for production and processing, comprising a base (1), wherein a rotating seat (11) is slidably connected to the top of the base (1), and a silicon wafer cassette (111) is disposed on the top of the rotating seat (11), characterized in that, Also includes: A rotating mechanism (2) is mounted on a base (1) and is used to rotate a silicon wafer cassette (111). The rotating mechanism (2) includes a rotating shaft (21) fixedly connected to the bottom of the rotating base (11), the bottom end of which extends into the interior of the base (1) and is rotatably connected to the base (1); and Fixing mechanism (3), which is mounted on the rotating seat (11), is used to fix the silicon wafer cassette (111). The fixing mechanism (3) includes an electric push rod (31) installed on the bottom wall inside the rotating seat (11). Among them, the silicon wafer box (111) is installed on the top of the rotating seat (11) through the fixing mechanism (3), the rotating mechanism (2) drives the silicon wafer box (111) to rotate through the rotating seat (11), the rotating shaft (21) is rotatably connected to the base (1) through the bearing, and the electric push rod (31) is installed inside the rotating seat (11) through bolts.

2. The rotatable silicon wafer cassette for production and processing according to claim 1, characterized in that, The rotating mechanism (2) further includes a drive assembly (22), which is disposed inside the base (1). The drive assembly (22) provides power for the rotating shaft (21) to drive the rotating seat (11) to rotate; and Limiting component (23), which is disposed on the top of the base (1), is used to limit the rotation of the rotating seat (11) during rotation.

3. A rotatable silicon wafer cassette for production and processing according to claim 2, characterized in that, The fixing mechanism (3) further includes a clamping assembly (32), which is disposed on the rotating base (11) and is used to clamp the silicon wafer cassette (111); and The transmission assembly (33) is located inside the rotating seat (11). The transmission assembly (33) is used to transmit the power of the electric push rod (31) to the clamping assembly (32) so as to drive the clamping assembly (32) to perform clamping motion. Among them, the electric push rod (31) provides the power base for the entire fixing mechanism (3), and the transmission component (33) converts the power of the electric push rod (31) into the power of the clamping component (32) to clamp the silicon wafer box (111).

4. A rotatable silicon wafer cassette for production and processing according to claim 2, characterized in that, The drive assembly (22) includes a motor (221) installed on the inner bottom wall of the base (1). The output shaft of the motor (221) is fixedly connected to a worm (222) via a coupling. A worm wheel (223) is fixedly connected to the outer wall of the shaft (21). The worm wheel (223) meshes with the worm (222). The motor (221) is bolted to the inner bottom wall of the base (1), and the motor (221) provides the power base for the rotating mechanism (2).

5. A rotatable silicon wafer cassette for production and processing according to claim 2, characterized in that, The limiting component (23) includes a limiting groove (231) opened on the top of the base (1), and a number of limiting rods (232) are fixedly connected to the bottom of the rotating seat (11). The bottom ends of the number of limiting rods (232) extend into the interior of the limiting groove (231) and are slidably connected to the limiting groove (231). The limiting slide (231) is designed as an annular shape, and the cross-section of the limiting slide (231) is cross-shaped.

6. A rotatable silicon wafer cassette for production and processing according to claim 3, characterized in that, The clamping assembly (32) includes two transmission rods (321) that pass through the left and right sides of the rotating seat (11) respectively. Both transmission rods (321) are slidably connected to the rotating seat (11). A clamping plate (322) is fixedly connected to one end of each transmission rod (321) away from the interior of the rotating seat (11). An anti-slip pad (323) is fixedly connected to one end of each clamping plate (322) that is close to each other. Both transmission rods (321) are designed in a U-shape, with one of them passing through the rotating seat (11) and slidingly connected to the rotating seat (11), while the other is higher than the top of the rotating seat (11) and does not contact the rotating seat (11).

7. A rotatable silicon wafer cassette for production and processing according to claim 3, characterized in that, The transmission assembly (33) includes two slide rods (331) fixedly connected to the inner wall of the rotating seat (11). Two sliders (332) are slidably connected to the outer walls of the two slide rods (331). The sides of the two sliders (332) that are far apart from each other are fixedly connected to two transmission rods (321). A transmission block (333) is fixedly connected to the movable end of the electric push rod (31). A transmission plate (334) is rotatably connected between the two sliders (332) and the transmission block (333). The two slide rods (331) are fixedly connected to the inner wall of the rotating seat (11) by welding. The two slide rods (331) are symmetrically set to provide a support base for the transmission assembly (33) as a whole, while also limiting and guiding the two sliders (332).

Images