Adaptive lift translation device and wafer loading system

Abstract

The utility model discloses self -adaptation lifting translation device and wafer loading system for lifting wafer box translation, include: bottom plate, translation subassembly, including first driving part, first slide rail and sliding part, first driving part with first slide rail set up on bottom plate, first driving part is used for driving sliding part reciprocating motion along the length direction of first slide rail, support, with Fixed connection of sliding part, rotary support part, at least one and be configured to can rotate on support, second driving part is connected in support, wherein, rotary support part has first attitude for supporting wafer box and second attitude for avoiding wafer box, second driving part is used for driving rotary support part switches between first attitude and second attitude, adopt above -mentioned scheme, through the automatic connection of separation, support, translation, effectively avoid the interference of mechanical arm and device frame.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer transport equipment technology, and in particular to an adaptive lifting and translation device and a wafer loading system. Background Technology

[0002] In the semiconductor manufacturing and precision electronic device processing fields, wafer transfer cases are containers used to protect, transport, and store wafers during semiconductor manufacturing processes. A typical wafer transfer case includes a base, a Standard Mechanical Interface (SMIF) system, and an outer casing. The SMIF system is placed on the base, and the outer casing is fastened to the base, enclosing the SMIF system. As a crucial link connecting various process units, the degree of automation and handling accuracy of wafer transfer cases directly affects production yield and production line efficiency. Faced with smaller process nodes and higher cleanliness requirements, traditional manual or semi-automatic handling methods are no longer sufficient to meet the demands of modern large-scale, continuous production. Automated wafer case handling, lifting, and translation devices have become core equipment widely adopted in the industry.

[0003] Current wafer transfer box opening devices can only perform the opening and lowering function, that is, unfastening the base and outer cover, then lifting the outer cover and base separately and moving the base downwards to separate the base and standard mechanical interface from the outer cover. Even if existing technology can separate the base and standard mechanical interface from the outer cover, it cannot immediately perform forward / backward or vertical movement after separation. Because existing loading systems require a robotic arm to extend into the wafer transfer box, the arm is prone to interference with the frame, necessitating an increase in arm length or turning radius to improve the wafer picking stroke. This leads to an increase in the size and length of the robotic arm, affecting the wafer picking stroke and accuracy.

[0004] Therefore, how to provide a semiconductor wafer transport device that can separate the base and the outer cover while avoiding interference with the frame of the device when the robotic arm picks up the wafer box has become a key technical problem that urgently needs to be solved in the industry. Utility Model Content

[0005] The purpose of this invention is to provide an adaptive lifting and translation device and a wafer loading system to solve the technical problem that existing equipment cannot separate the base and outer cover of the wafer transfer box and remove the wafer box.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: Firstly, an adaptive lifting and translation device for lifting and translating a wafer cassette includes: Base plate; A translation component includes a first driving member, a first slide rail, and a sliding part. The first driving member and the first slide rail are disposed on the base plate, and the sliding part is slidably connected to the first slide rail. The first driving member is used to drive the sliding part to reciprocate along the length direction of the first slide rail. The bracket is fixedly connected to the sliding part; At least one rotatable support is provided and configured to rotate on the bracket; The second driving component is connected to the bracket; The rotating support member has a first posture for supporting the wafer cassette and a second posture for avoiding the wafer cassette, and the second driving member is used to drive the rotating support member to switch between the first posture and the second posture.

[0007] The beneficial effects of the adaptive lifting and translation device provided by this utility model are as follows: The safe transfer of the wafer cassette is achieved through the dynamic posture switching of the rotating support component and the coordinated movement of the translation component. During separation, the rotating support component maintains an upright, obstacle-avoiding posture, ensuring the wafer cassette descends unimpeded to the support position. Subsequently, the rotating support component switches to a horizontal posture to stably support the wafer cassette. The translation component immediately drives the wafer cassette horizontally to the robotic arm's safe wafer-picking area. This solution, through the automated connection of separation, support, and translation, effectively avoids interference between the robotic arm and the device frame, enabling the robotic arm to accurately pick up wafers in open spaces without increasing its size, while simultaneously improving the efficiency of continuous equipment operation.

[0008] Furthermore, the first driving component includes a first cylinder, the bracket includes at least two swing boxes, the first cylinder is mounted on the base plate, the output end of the first cylinder is fixedly connected to the sliding part, and at least two swing boxes are mounted on both sides of the sliding part.

[0009] Furthermore, the rotating support includes at least two opposing support blocks, each support block having a support groove, and each support block being fixedly connected to a swing shaft, the swing shaft rotatably passing through the swing box, and the second driving member being used to drive the swing shaft to rotate around its own axis.

[0010] Furthermore, the second driving component includes a second cylinder, a connecting plate, a second slide rail, and at least two swing plates. The second cylinder and the second slide rail are mounted on the sliding part. The first slide rail and the second slide rail are distributed in parallel. The swing plates are slidably connected to the second slide rail. The output end of the second cylinder is fixedly connected to the connecting plate. At least two of the swing plates are located on both sides of the connecting plate.

[0011] Furthermore, one end of the swing shaft is pivotally connected to a swing column; the end of the swing column away from the swing shaft is coaxially fixed with the inner ring of the bearing; the outer ring of the bearing is rotatably embedded in the arc-shaped slot of the swing plate, and the outer ring rotates and abuts against the inner wall of the arc-shaped slot; wherein, when the swing plate moves along the length direction of the second slide rail, it drives the outer ring of the bearing to roll and slide along the trajectory of the arc-shaped slot, thereby forcing the swing shaft to rotate around its own axis through the swing column.

[0012] Furthermore, both the output ends of the first driving member and the second driving member are provided with floating joints, which are used to buffer the vibration margin generated by the operation of the first driving member and the second driving member.

[0013] Furthermore, the side of the first cylinder opposite to its own output shaft is rotatably connected to the base plate.

[0014] Furthermore, the support block includes a first block and a second block, the first block being fixedly connected to the swing shaft, and the second block being detachably connected to the first block.

[0015] Secondly, this utility model provides a wafer loading system, including the aforementioned adaptive lifting and translation device, and further comprising: A frame, on which two workstations are provided; An unlocking mechanism is installed on the frame and close to the workstation. The unlocking mechanism is used to release the lock between the bottom tray and the outer cover of the wafer transfer box. A lifting mechanism is disposed within the frame and located below the unlocking mechanism; A support platform is connected to the lifting mechanism, and the support platform is used to support the base.

[0016] Furthermore, the unlocking mechanism includes: The third cylinder has a pin fixedly connected to one end; A turntable is rotatably mounted on the support platform. The turntable is equipped with an unlocking pin, which is used to unlock the base and the outer cover. The rotary plate is pivotally connected at one end to the pin shaft, and at the other end to the turntable shaft. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the adaptive lifting and translation device of this utility model; Figure 2 This is a schematic diagram of the structure of the rotating support component according to an embodiment of the present utility model; Figure 3 This is a schematic diagram of the state of the wafer transport box according to an embodiment of the present invention; Figure 4This is a schematic diagram of the wafer loading system according to an embodiment of the present invention; Figure 5 This is a schematic diagram illustrating the separation of the base and outer cover in an embodiment of the present invention; Figure 6 This is a schematic diagram of the unlocking pin in an embodiment of the present utility model; Figure 7 This is a schematic diagram of the unlocking mechanism according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the lifting mechanism in an embodiment of the present utility model.

[0018] Reference numerals: 1. Base plate; 2. Translation assembly; 21. First driving component; 22. First slide rail; 23. Slider; 24. Support plate; 3. Bracket; 31. Swing box; 4. Rotary support component; 41. Support block; 411. Support groove; 42. Swing shaft; 5. Second driving component; 51. Connecting plate; 52. Second slide rail; 53. Swing plate; 54. Arc-shaped slot; 55. Bearing; 56. Swing column; 6. Frame; 7. Unlocking mechanism; 71. Third cylinder; 72. Pin; 73. Turntable; 74. Unlocking pin; 75. Rotary plate; 8. Lifting mechanism; 81. Motor; 82. Drive pulley; 83. Driven pulley; 84. Synchronous belt; 85. Lead screw; 86. Lead screw nut; 87. Fixed seat; 88. Bearing platform; 89. Third slide rail; 9. Wafer transfer box; 91. Wafer box; 92. Outer cover. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0020] The following is in conjunction with the appendix Figure 1-5 The specific embodiments of this utility model will be further described in detail below.

[0021] like Figures 1-2As shown, in some embodiments of this utility model, the adaptive lifting and translation device includes a base plate 1, a translation component 2, a bracket 3, a rotating support 4, and a second driving component 5. The translation component 2 includes a first driving component 21, a first slide rail 22, and a sliding part. The first driving component 21 and the first slide rail 22 are both fixedly mounted on the base plate 1. The sliding part is slidably connected to the first slide rail 22 and is used for reciprocating movement along the length of the first slide rail 22. The bracket 3 is fixedly connected to the sliding part and is used to support the rotating support 4. The rotating support 4 is disposed on the bracket 3 and can rotate around a swing axis 42 on the bracket 3. The second driving component 5 is used to drive the rotating support 4 to switch between a supporting posture (i.e., a first posture) and an avoidance posture (i.e., a second posture) of the wafer cassette 91, realizing safe and efficient loading and unloading operations of the wafer cassette 91. By coordinating translational movement and rotational posture, precise connection and safe transfer of the wafer cassette 91 can be quickly completed in space-constrained scenarios, improving automated connection efficiency and reducing interference risks.

[0022] In some embodiments of this utility model, the sliding part includes a slider 23 and a support plate 24. The slider 23 is slidably fitted with the first slide rail 22, and the support plate 24 is mounted on the slider 23 to support the swing box 31 structure. At least two swing boxes 31 are located on both sides of the support plate 24 and serve as the base of the rotating support 4, providing support for its rotational movement. This structural arrangement achieves symmetrical support of the support, which helps the wafer cassette 91 maintains its posture stability during high-precision loading, while avoiding tilting or swaying caused by unilateral support.

[0023] In some embodiments of this utility model, the first driving member 21 includes a first cylinder, which is mounted on the base plate 1, and its output end is fixedly connected to the sliding part, thereby driving the sliding part to move along the first slide rail 22 to realize the horizontal transfer of the wafer cassette 91. In order to enhance structural stability and dynamic symmetry, at least two swing boxes 31 are also installed on both sides of the sliding part to support multiple rotating support members 4 and improve lifting stability.

[0024] In some specific embodiments of this utility model, the rotating support member 4 includes at least two support blocks 41, each support block 41 having a support groove 411 for stably supporting the wafer cassette 91. A swing shaft 42 is fixedly connected to each support block 41, passing through a swing box 31 and capable of rotating around its axis. A second driving member 5 drives the swing shaft 42 to rotate the support block 41, completing the attitude transition from an avoidance state to a supporting state. In some specific embodiments of this utility model, there are two swing boxes 31, each with two swing shafts 42 and two support blocks 41. The four support blocks 41 respectively form a four-corner support layout.

[0025] In some embodiments of this utility model, the second driving component 5 includes a second cylinder, a connecting plate 51, a second slide rail 52, and at least two swing plates 53. Both the second cylinder and the second slide rail 52 are mounted on the sliding portion, and the second slide rail 52 is arranged parallel to the first slide rail 22. The connecting plate 51 is pushed by the second cylinder, causing the swing plates 53 to slide on the second slide rail 52. The at least two swing plates 53 are located at both ends of the connecting plate 51, and are used to drive the rotating support components 4 on both sides to rotate synchronously through a linkage mechanism. The first driving component 21 and the second driving component 5 adopt a cylinder-driven method, which can achieve the advantages of fast response speed and stable output force, and is particularly suitable for semiconductor packaging and loading applications that require frequent movement and high reliability.

[0026] In some specific embodiments of this utility model, to achieve trajectory driving of the swing plate 53, each swing plate 53 has an arc-shaped slot 54 on its outer periphery. A bearing 55 is rotatably connected inside the slot. The outer ring of the bearing 55 fits with the inner wall of the arc-shaped slot 54 and can slide along the length of the slot, thus achieving rotation. The bearing 55 is connected to the swing shaft 42 via a swing column 56. The two ends of the swing column 56 are coaxially rotatably connected to the swing shaft 42 and the inner ring of the bearing 55, respectively. The connecting plate 51 is moved by the second cylinder, causing the swing plate 53 to slide, thereby forcing the swing shaft 42 to rotate, thus achieving the switching of the support posture.

[0027] In some specific embodiments of this utility model, the rotating support 4 achieves attitude switching from 0° to 90° under the action of the second driving member 5. Specifically, referring to... Figure 6 When the second cylinder is in the extended state, it drives the swing plate 53 to move along the second slide rail 52 through the connecting plate 51. At this time, the swing shaft 42 drives the support block 41 to be in the 0° state, forming an avoidance posture, which facilitates the descent of the wafer box.

[0028] exist Figure 7 In another operating condition shown, the second cylinder is in a fully retracted state, and the connecting plate 51 drives the swing plate 53 to slide in the opposite direction, causing the swing shaft 42 to rotate, ultimately driving the support block 41 to rotate to a 90° horizontal position. In this state, the support block 41 reliably supports the bottom of the wafer cassette through its support groove 411, achieving stable support for the wafer cassette 91. This switching process converts the translational motion of the linear cylinder into rotational motion, resulting in smooth operation and controllable angles, significantly improving the posture flexibility and spatial adaptability of the support mechanism. The posture switching process between 0° and 90° is achieved collaboratively through the transmission structure, including the swing shaft 42, swing column 56, bearing 55, and arc-shaped slot 54.

[0029] Furthermore, this 0°–90° attitude transition coordinates with the horizontal movement of the sliding part: when the support block 41 is in the 0° avoidance state, the sliding part can move horizontally on the first slide rail 22, quickly transferring the wafer cassette to the designated position; after the support block 41 switches to the 90° lifting state, the wafer cassette is stably positioned in the safe pick-up area for accurate gripping by the robotic arm. This combined action effectively solves problems such as positional interference and spatial conflicts between traditional pallets / mechanisms.

[0030] In some embodiments of this utility model, the output ends of both the first driving member 21 and the second driving member 5 are provided with floating joints. The floating joints are used to absorb the micro-vibrations or offsets generated during the driving process, thereby improving the overall stability and reliability of the mechanism. By setting a floating connection structure, the mechanical shock and vibration generated during the operation of the mechanism can be significantly reduced, effectively protecting the transmission components and extending the service life of the equipment, which is particularly suitable for high-frequency start-stop scenarios.

[0031] In some specific embodiments of this utility model, the side of the first cylinder opposite to its output shaft is rotatably connected to the base plate 1 via a pin 72. This rotatable connection method can enhance the installation freedom of the cylinder and reduce vibration or off-center load caused by long-term operation. At the same time, it prevents vibration or off-center load during operation from affecting the life of the mechanism and improves the overall reliability of the machine.

[0032] In some embodiments of this utility model, the support block 41 adopts a split structure, including a first block and a second block. The first block is fixedly connected to the swing shaft 42, serving as the main part of the supporting structure and achieving attitude conversion together with the swing shaft 42; the second block is detachably installed on the first block, used for quick adjustment and replacement according to the structural features of different specifications of the wafer transfer box 9.

[0033] In some specific embodiments of this utility model, to accommodate wafer transfer boxes 9 of different sizes or with different bottom structures, the upper surfaces of the first and second blocks are respectively provided with support grooves 411 for supporting the bottom support structure of the wafer transfer box 91. Specifically, the support groove 411 on the first block can not only serve as a support part directly used for large-size wafer transfer boxes 9, but also as a snap-fit ​​groove structure that mates with the second block. When the second block is installed, the second block is inserted into and snapped into the support groove 411 of the first block through its lower flange structure, thereby completing positioning and stable support.

[0034] In some specific embodiments of this utility model, the detachable connection between the first and second blocks can be a snap-fit ​​structure, a positioning pin engagement structure, a screw fixing structure, etc., preferably a screw connection, which makes the connection reliable, easy to assemble, and convenient for maintenance and replacement during long-term use. Furthermore, when the second block is not installed, the first block can be used independently for supporting large-size wafer transfer boxes 9, using its own support groove 411 to directly support the bottom structure of the wafer box 91; while when the second block is installed on the first block, its support groove 411 moves upward to adapt to models with shallower bottoms or smaller sizes of wafer boxes 91. By replacing the second block, the size adaptation of different wafer boxes 91 can be completed without changing the entire support structure.

[0035] In some specific embodiments of this utility model, the wafer loading system further includes a frame 6 assembly, on which two workstations for placing and operating the wafer cassette 91 are provided. In addition, it includes an unlocking mechanism 7, a lifting mechanism 8, and a support platform 88, wherein the support platform 88 is mounted on the lifting mechanism 8, located below the unlocking mechanism 7, and is used to support the base of the wafer cassette 91.

[0036] In some specific embodiments of this utility model, the unlocking mechanism 7 is located near the workstation and includes a third cylinder 71, a pin 72, a turntable 73, and a rotating plate 75. The pin 72 is fixedly mounted on one end of the third cylinder 71, while the turntable 73 is rotatably embedded in the support platform 88. The turntable 73 has an unlocking pin 74 for unlocking the base and outer cover 92 of the wafer cassette 91. One end of the rotating plate 75 is pivotally connected to the pin 72, and the other end is pivotally connected to the turntable 73. The action of the third cylinder 71 rotates the turntable 73, causing the unlocking pin 74 to release the locking structure between the base and the outer cover 92, thus automating the wafer cassette 91 loading process in conjunction with the lifting mechanism 8. Specifically, the unlocking process is as follows: the third cylinder 71 extends, and the rotating plate 75 drives the turntable 73 to rotate via the pin 72. The turntable 73 then rotates the unlocking pin 74, unlocking the base and outer cover 92.

[0037] In some embodiments of this invention, the lifting mechanism 8 is used to drive the bottom support of the wafer cassette 91 to achieve vertical lifting movement. The lifting mechanism 8 includes a motor 81, a drive pulley 82, a driven pulley 83, a synchronous belt 84, a lead screw 85, a lead screw 85 nut, a fixed base 87, a bracket, a support platform 88, and a third slide rail 89. In some specific embodiments of this invention, the output end of the motor 81 is fixedly connected to the drive pulley 82 via a key connection to ensure efficient power transmission and rotational synchronization. The drive pulley 82 rotates under the drive of the motor 81 and is linked with the driven pulley 83 via the synchronous belt 84, thereby driving the driven pulley 83 to rotate synchronously. Further, the driven pulley 83 is fixedly connected to one end of the lead screw 85 via its central axis, thereby driving the lead screw 85 to rotate around its own axis during rotation. The lead screw 85 is installed between upper and lower lead screw 85 seats, and the two end lead screw 85 seats provide axial limiting and radial support to ensure the guiding accuracy of its rotation. In some embodiments of the present invention, the lead screw 85 and the lead screw 85 nut are threadedly engaged. When the lead screw 85 rotates, the lead screw 85 nut moves vertically up and down along the axial direction of the lead screw 85 under its drive. The lead screw 85 nut is connected to the bracket via a fixed seat 87 connected below it, driving the bracket and the support platform 88 above the bracket to move up and down synchronously. Further, the bracket is slidably connected to a third slide rail 89 set on the frame 6. During the lifting and lowering process, the bracket is guided along the third slide rail 89 to achieve stable vertical lifting and lowering action, avoid lateral deviation, and improve overall motion accuracy. The support platform 88 is installed on the bracket and is used to support the bottom support of the wafer transfer box 91; the support platform 88 moves up and down with the bracket, thereby realizing the lifting and lowering action of the bottom support of the wafer box 91.

[0038] The working principle of this utility model is as follows: During the working process, the wafer transfer box 9 is placed on the platform of the standard mechanized interface system. The standard mechanized interface system automatically recognizes the wafer transfer box 9. The unlocking mechanism 7 unlocks the base of the wafer transfer box 9 from the outer cover 92. The lifting mechanism 8 drives the base and the wafer box 91 to move downward. During this process, marking and detection are performed (not shown in the figure). When the wafer box 91 moves down to the height of the support block 41 of the lifting and translation component 2, the second cylinder of the adaptive lifting and translation device switches from the extended state to the retracted state, so that the support block rotates from 0° to 90°, that is, from the avoidance position to the receiving position. The lifting mechanism 8 drives the base to continue to move downward, and the base separates from the wafer box 91. The wafer box 91 is located on the four support blocks 41. Then, the second cylinder is driven to extend, and the adaptive lifting and translation device moves forward as a whole through the pallet 24, so that the robot can take away the wafer box 91.

[0039] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. An adaptive lifting and translation device for lifting and translating a wafer cassette (91), characterized in that, include: Base plate (1); The translation component (2) includes a first driving member (21), a first slide rail (22) and a sliding part. The first driving member (21) and the first slide rail (22) are disposed on the base plate (1). The sliding part is slidably connected to the first slide rail (22). The first driving member (21) is used to drive the sliding part to reciprocate along the length direction of the first slide rail (22). The bracket (3) is fixedly connected to the sliding part; At least one rotating support (4) is provided and configured to rotate on the bracket (3); The second drive unit (5) is connected to the bracket (3); The rotating support (4) has a first posture for supporting the wafer cassette (91) and a second posture for avoiding the wafer cassette (91), and the second driving member (5) is used to drive the rotating support (4) to switch between the first posture and the second posture.

2. The adaptive lifting and translation device according to claim 1, characterized in that, The first driving component (21) includes a first cylinder, the bracket (3) includes at least two swing boxes (31), the first cylinder is mounted on the base plate (1), the output end of the first cylinder is fixedly connected to the sliding part, and at least two swing boxes (31) are mounted on both sides of the sliding part.

3. The adaptive lifting and translation device according to claim 2, characterized in that, The rotating support (4) includes at least two opposing support blocks (41), each support block (41) has a support groove (411), and each support block (41) is fixedly connected to a swing shaft (42). The swing shaft (42) rotates through the swing box (31), and the second driving member (5) is used to drive the swing shaft (42) to rotate around its own axis.

4. The adaptive lifting and translation device according to claim 3, characterized in that, The second driving component (5) includes a second cylinder, a connecting plate (51), a second slide rail (52), and at least two swing plates (53). The second cylinder and the second slide rail (52) are mounted on the sliding part. The first slide rail (22) and the second slide rail (52) are distributed in parallel. The swing plates (53) are slidably connected to the second slide rail (52). The output end of the second cylinder is fixedly connected to the connecting plate (51). At least two of the swing plates (53) are located on both sides of the connecting plate (51).

5. The adaptive lifting and translation device according to claim 4, characterized in that, One end of the swing shaft (42) is pivotally connected to a swing column (56); the end of the swing column (56) away from the swing shaft (42) is coaxially fixed with the inner ring of the bearing (55); the outer ring of the bearing (55) is rotatably embedded in the arc-shaped slot (54) of the swing plate (53), and the outer ring rotatably abuts against the inner wall of the arc-shaped slot (54); When the swing plate (53) moves along the length of the second slide rail (52), it drives the outer ring of the bearing (55) to roll and slide along the arc-shaped slot (54) trajectory, thereby forcing the swing shaft (42) to rotate around its own axis through the swing column (56).

6. The adaptive lifting and translation device according to claim 1, characterized in that, Both the first drive unit (21) and the second drive unit (5) are provided with floating joints at their output ends. The floating joints are used to buffer the vibration margin generated by the operation of the first drive unit (21) and the second drive unit (5).

7. The adaptive lifting and translation device according to claim 2, characterized in that, The first cylinder is rotatably connected to the base plate (1) on the side opposite to its own output shaft.

8. The adaptive lifting and translation device according to claim 3, characterized in that, The support block (41) includes a first block and a second block. The first block is fixedly connected to the swing shaft (42), and the second block and the first block are detachably connected.

9. A wafer loading system, comprising the adaptive lifting and translation device as described in any one of claims 1-8, characterized in that, Also includes: The frame (6) has two workstations. The unlocking mechanism (7) is set on the frame (6) and close to the work station. The unlocking mechanism (7) is used to release the lock between the bottom support and the outer cover (92) of the wafer transfer box (9). The lifting mechanism (8) is located within the frame (6) and below the unlocking mechanism (7); The support platform (88) is connected to the lifting mechanism (8) and is used to support the base.

10. The wafer loading system according to claim 9, characterized in that, The unlocking mechanism (7) includes: The third cylinder (71) has a pin (72) fixedly connected to one end; A turntable (73) is rotatably mounted on the support platform (88). The turntable (73) is provided with an unlocking pin (74), which is used to unlock the base and the outer cover (92). The rotary plate (75) is pivotally connected at one end to the pin (72), and the other end of the rotary plate (75) is pivotally connected to the turntable (73).

Images