Linear multi-fingered hand

Abstract

The utility model discloses a linear type multi -finger mechanical hand relates to semiconductor wafer handling equipment, include: linear type multi -finger mechanical hand, including support, drive wheel, rotates and is installed on the support, at least two driven wheels, rotates and is installed on the support, transmission belt, is formed closed transmission loop on the drive wheel and the driven wheel around, tension adjusting assembly, including the tension pulley and adjusting part, the tension pulley with transmission belt contact, the adjusting part movable mounting is on the support, and is connected with the tension pulley, wherein, the adjusting part can drive the tension pulley through linear displacement to be close to or away from transmission belt, to continuously, reversibly adjust the tension of transmission belt. Adopt above -mentioned scheme, in limited space can adjust synchronous belt tension, and the adjustment operation is more simple, and the adjustment precision is higher.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer handling equipment technology, and in particular to a linear multi-finger robotic arm. Background Technology

[0002] In the semiconductor manufacturing industry, wafer transfer is a critical step in the chip production process, demanding extremely high precision, stability, and cleanliness. As the core actuator of the wafer transfer system, the reliability of the transmission mechanism of the linear robot directly affects the positioning accuracy and production yield of wafer handling. Currently, linear robots commonly employ synchronous belt drives due to their advantages such as compact structure, smooth transmission, and accurate transmission ratio, effectively meeting the robot's requirements for high-speed, high-precision movement.

[0003] However, in practical applications, the tension control of the synchronous belt is a key factor affecting transmission accuracy and system stability. Insufficient tension can lead to pulley slippage or wafer displacement deviation; excessive tension can cause excessive wear on the synchronous belt and pulleys, reducing lifespan and increasing energy consumption. Therefore, how to achieve high-precision and stable synchronous belt tension adjustment within a limited space has become a common concern in the industry.

[0004] Traditional synchronous belt tension adjustment methods primarily rely on adjusting the mounting position of the motor or driven pulley, such as by creating elongated holes in the base and changing the tension by loosening bolts and shifting the components. However, this method is complex, inefficient, and has low precision. More importantly, this structure requires a large amount of additional space, which contradicts the design trend of compact and miniaturized linear robots. With the increasing demands for transmission accuracy and reliability in manufacturing processes, achieving high-precision, highly controllable, and easy-to-operate synchronous belt tension adjustment within a limited space has become a technical challenge that existing technologies struggle to solve effectively. Utility Model Content

[0005] The purpose of this invention is to provide a linear multi-finger manipulator to solve the problems of traditional synchronous belt tension adjustment requiring multiple loosening and unloosening of bolts and alignment, cumbersome and time-consuming operation, and the need for additional large working space.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: Linear multi-finger robotic arms include: Support; The drive wheel is rotatably mounted on the support. At least two driven wheels are rotatably mounted on the support; A transmission belt is wrapped around the drive wheel and the driven wheel to form a closed transmission circuit; The tension adjustment assembly includes a tension wheel and an adjusting member. The tension wheel is in contact with the transmission belt, and the adjusting member is movably mounted on the support and connected to the tension wheel. The adjusting member can drive the tensioning wheel closer to or further away from the transmission belt through linear displacement, so as to continuously and reversibly adjust the tension of the transmission belt.

[0007] By adopting the above scheme, a tension adjustment component is installed in the linear multi-finger manipulator. The adjustment component is movably mounted on the support and connected to the tension wheel. Linear displacement drives the tension wheel to move relative to the transmission belt, thereby achieving continuous and reversible adjustment of the transmission belt tension. Unlike the traditional method of loosening bolts and moving the motor or driven wheel, this scheme eliminates the need for repeated disassembly and alignment, making operation simple and efficient, and avoiding a tedious and time-consuming adjustment process. Simultaneously, the micro-adjustment achieved through linear displacement significantly improves tension accuracy and reduces uncertainties caused by alignment.

[0008] Furthermore, the support includes a first branch and a second branch arranged opposite to each other, the relative distance between the first branch and the second branch is adjustable, and at least two driven wheels are respectively located on the first branch and the second branch.

[0009] By adopting the above scheme, the separate design of the first and second branches makes their relative distance adjustable, which means that the position of the driven wheel can be changed accordingly, thus having an overall tension pre-adjustment function. Combined with the fine adjustment achieved by the adjusting component, a dual tension adjustment mechanism is formed, which significantly improves the accuracy and range of tension adjustment.

[0010] Furthermore, the transmission belt is an annular synchronous belt, which has an inner transmission surface and an outer tension surface. Parts of the outer peripheral surfaces of the drive wheel and at least two driven wheels are engaged with the inner transmission surface, and the outer peripheral surface of the tension wheel abuts against the outer tension surface.

[0011] By adopting the above scheme, the engagement of the inner transmission surface with the drive wheel and driven wheel ensures the accuracy of the transmission ratio and the stability of the motion, while the contact between the outer tensioning surface and the tensioning wheel provides an independent tension adjustment path. Through the functional partitioning of the transmission surface and the tensioning surface, the synchronous belt can maintain high-precision transmission while achieving controllable tension adjustment, avoiding the impact of the tensioning process on the stability of the transmission engagement.

[0012] Furthermore, the adjusting component includes a screw and a slider, the screw being threadedly connected to the slider, and the slider being connected to the tensioning wheel; When the screw is rotated, it can drive the slider to produce a linear displacement.

[0013] By adopting the above solution, the self-locking and micro-displacement characteristics of the threaded drive are utilized to enable continuous and reversible fine-tuning of the tensioning pulley's displacement. Compared to the traditional method that relies on manually moving the motor or pulley, this solution is not only easier to operate but also achieves high-precision tensioning, ensuring that the transmission belt remains under ideal stress for an extended period.

[0014] Furthermore, the support is provided with a sliding groove, the slider part is slidably embedded in the sliding groove, and the other part of the slider is fixedly connected to the tensioning wheel.

[0015] By adopting the above scheme, the slide groove limits and guides the slider, ensuring that the slider's movement during adjustment is a strictly linear displacement, avoiding swaying or jamming. This improves the stability and controllability of tension adjustment, ensuring that the tensioning wheel can always precisely tighten or release the transmission belt.

[0016] Furthermore, the tensioning wheel includes a shaft, a bearing, and a rotating sleeve. The shaft is arranged perpendicular to the support, the bearing is located between the outer circumferential surface of the shaft and the inner wall of the rotating sleeve, and the rotating sleeve is rotatable relative to the shaft.

[0017] By adopting the above solution, the tensioning wheel can rotate smoothly through the bearing while the shaft is fixed, which significantly reduces the frictional resistance between the transmission belt and the tensioning wheel during the tensioning process, thereby slowing down wear, increasing the service life of the tensioning wheel and the transmission belt, and ensuring the smooth operation of the system.

[0018] Furthermore, the bearing includes an inner ring and an outer ring that are rotatably connected, the outer ring being fixedly connected to the rotating sleeve, and the inner ring being fixedly connected to the shaft portion.

[0019] Furthermore, the tensioning wheel also includes an upper pressure ring and a lower pressure ring, which are used to position the upper and lower end faces of the inner ring of the bearing, respectively.

[0020] By adopting the above scheme, the upper and lower pressure rings provide reliable axial positioning for the bearing, preventing loosening or displacement during long-term operation. This design improves the overall structural stability and operational reliability of the tensioner, ensuring consistent accuracy during long-term operation.

[0021] Furthermore, the tensioning wheel also includes a screw, and the shaft has a threaded hole that mates with the screw. The upper pressure ring is fastened to the inner ring of the bearing by the screw.

[0022] Furthermore, the rotating sleeve extends radially inward and is integrally formed with an outer fastening ring block. The tensioning wheel also includes a retaining ring, which has an opening along the axial direction. The retaining ring and the outer fastening ring block are disposed opposite to each other on the upper and lower end faces of the outer ring.

[0023] By adopting the above scheme, the cooperation between the outer fastening ring block and the retaining ring provides stable positioning and clamping for the outer ring of the bearing, preventing axial movement or loosening. This design provides an additional safety locking function for the tensioner wheel.

[0024] The beneficial effects of this linear multi-finger manipulator are as follows: By incorporating a tension adjustment component within the linear multi-finger manipulator, wherein the adjustment element is movably mounted on a support and connected to a tensioning wheel, the tensioning wheel can be driven to move relative to the transmission belt via linear displacement, thereby achieving continuous and reversible adjustment of the transmission belt tension. Unlike the traditional method of relying on loosening bolts and translating the motor or driven wheel, this solution eliminates the need for repeated disassembly and alignment, making operation simple and efficient, and avoiding a tedious and time-consuming adjustment process. Simultaneously, the micro-adjustment achieved through linear displacement significantly improves tension accuracy and reduces uncertainties caused by alignment. Furthermore, this solution does not rely on large-scale motor or pulley position adjustments, thus eliminating the need for additional space and facilitating a compact design of the manipulator's overall structure. Therefore, this invention not only improves the ease of operation and adjustment accuracy of synchronous belt tensioning but also effectively enhances the space utilization of the manipulator and the stability of the transmission system, thereby improving the positioning accuracy and production yield of wafer handling. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of the linear multi-finger manipulator of this utility model; Figure 2 This is a schematic diagram of the structure of the support in an embodiment of the present utility model; Figure 3 This is a schematic diagram of the tension adjustment assembly according to an embodiment of the present invention; Figure 4 This is an exploded view of the tensioning wheel according to an embodiment of the present invention; Figure 5 This is a cross-sectional view of the tensioning wheel according to an embodiment of the present utility model; Figure 6 This is a schematic diagram of the slider in an embodiment of the present invention.

[0026] Reference numerals: 1. Body assembly; 2. Finger assembly; 3. Support; 31. First support; 32. Second support; 4. Drive wheel; 41. Motor; 42. Transmission belt; 5. Driven wheel; 6. Tension adjustment assembly; 61. Tension wheel; 611. Shaft; 612. Bearing; 613. Rotating sleeve; 614. Upper pressure ring; 615. Lower pressure ring; 616. Screw; 617. Washer; 618. Buckle; 62. Adjusting component; 621. Screw; 622. Slider; 623. Slide groove; 624. Divider; 625. Groove. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0028] The following is in conjunction with the appendix Figures 1-6 The specific embodiments of this utility model will be further described in detail below.

[0029] like Figures 1-2 As shown, in some embodiments of this utility model, a linear multi-finger robotic arm includes a body assembly 1 and a finger assembly 2. The body assembly 1 serves as a drive and mounting platform, providing a transmission mechanism and a tension adjustment mechanism. The finger assembly 2 achieves linear motion through the transmission mechanism, thereby completing the transfer of wafers between different workstations.

[0030] In some specific embodiments of this utility model, the finger assembly 2 includes at least four finger units, each finger unit including an adapter plate, a translation seat, and a finger. The translation seat is fixed to a certain position on the outer side of the transmission belt 42 by a connecting block. When the transmission belt 42 undergoes linear displacement, the translation seat moves accordingly, thereby driving the finger to extend or retract in a straight line. Through the independent driving of at least four finger units, the robot can simultaneously handle multiple workstations, achieving efficient wafer handling.

[0031] Reference Figure 3In some embodiments of this utility model, the main body component 1 includes a support 3, on which a drive wheel 4 and at least two driven wheels 5 are rotatably mounted. A transmission belt 42 surrounds the drive wheel 4 and the driven wheels 5 to form a closed transmission circuit. Specifically, the driven wheels 5 include a first driven wheel 5 and a second driven wheel 5. The rotor end of the motor 41 is coaxially fixed to the drive wheel 4. When the motor 41 starts, the drive wheel 4 drives the transmission belt 42 to generate a cyclic motion, and the driven wheels 5 rotate as they engage with the transmission belt 42, thereby realizing a closed transmission path of "drive wheel 4—transmission belt 42—first driven wheel 5—transmission belt 42—second driven wheel 5—transmission belt 42—drive wheel 4". Since the finger unit is fixedly connected to the transmission belt 42, the cyclic motion of the transmission belt 42 can be converted into the linear motion of the finger.

[0032] Reference Figure 3 In some specific embodiments of this utility model, the transmission belt 42 is an annular synchronous belt with an inner transmission surface and an outer tension surface. The outer circumferential surfaces of the drive wheel 4 and at least two driven wheels 5 mesh with the inner transmission surface to ensure the accuracy of the transmission ratio and the stability of the transmission; the tension wheel 61 abuts against the outer tension surface of the transmission belt 42 to adjust the tension of the transmission belt 42.

[0033] In some embodiments of this utility model, the tension adjustment assembly 6 includes a tension wheel 61 and an adjusting member 62. The tension wheel 61 contacts the outer tension surface of the transmission belt 42, and the adjusting member 62 is movably mounted on the support 3 and connected to the tension wheel 61. It can drive the tension wheel 61 closer to or further away from the transmission belt 42 through linear displacement, thereby realizing continuous and reversible adjustment of the tension of the transmission belt 42.

[0034] Reference Figures 3-5In some specific embodiments of this utility model, the adjusting member 62 includes a screw 621 and a slider 622. The screw 621 and the slider 622 are threadedly connected. One end of the side wall of the support 3 is provided with a groove 623 and a recess 625, and a partition 624 is formed between the recess 625 and the groove 623. The recess 625 is used to accommodate the head of the screw 621. The slider 622 is partially embedded in the groove 623 of the support 3 and can move linearly along the groove 623. The other part of the slider 622 is fixedly connected to the tensioning wheel 61. The slider 622 has a screw hole and is connected to the screw 621 by a screw 616. The slider 622 and the shaft 611 of the tensioning wheel 61 are integrally formed. When the screw 621 is rotated, the slider 622 generates a linear displacement along the groove 623, driving the tensioning wheel 61 to move synchronously: when the screw 621 rotates clockwise, the slider 622 moves towards the transmission belt 42, and the tensioning wheel 61 pushes against the transmission belt 42, thereby increasing the tension; when the screw 621 rotates counterclockwise, the slider 622 moves away from the transmission belt 42, and the pressure exerted by the tensioning wheel 61 on the transmission belt 42 decreases, thereby reducing the tension. Compared with the traditional method of loosening bolts, moving the motor 41, or the driven wheel 5, this adjustment method does not require repeated disassembly and alignment, is easy to operate, and can achieve fine micro-adjustment.

[0035] Reference Figure 4 In some embodiments of this utility model, the tensioning wheel 61 includes a shaft 611, a bearing 612, and a rotating sleeve 613. The shaft 611 is vertically mounted on the support 3, and the bearing 612 is disposed between the outer periphery of the shaft 611 and the inner wall of the rotating sleeve 613. The inner ring of the bearing 612 is fixedly connected to the shaft 611, and the outer ring is fixedly connected to the rotating sleeve 613, ensuring that the tensioning wheel 61 can rotate smoothly when subjected to the pressure of the synchronous belt. To further improve the positioning accuracy and stability, the tensioning wheel 61 also includes an upper pressure ring 614 and a lower pressure ring 615, which respectively position the upper and lower end faces of the inner ring of the bearing 612, and are fastened to the threaded holes of the shaft 611 by screws 616. Furthermore, the rotating sleeve 613 extends radially inward and is integrally formed with an outer fastening ring block. The tensioning wheel 61 also includes a retaining ring 618, which has an axial opening. The retaining ring 618 and the outer fastening ring block are disposed opposite to each other on the upper and lower end faces of the outer ring. Through the above-mentioned multi-stage positioning and limiting design, the tensioning wheel 61 is ensured to operate stably during adjustment. In addition, in some other embodiments, a washer 617 is provided between the screw 616 and the upper pressure ring 614.

[0036] In some specific embodiments of this utility model, the support 3 includes a first support 31 and a second support 32 arranged opposite to each other, and the relative distance between them is adjustable to accommodate transmission belts 42 of different sizes. By adjusting the distance between the first support 31 and the second support 32, not only can the length of the transmission path be changed, but it can also directly drive at least two driven wheels 5 mounted thereon to move synchronously, so that the transmission belt 42 maintains a smooth wrapping state as a whole.

[0037] Reference Figure 2 Furthermore, since adjusting the distance between the first support 31 and the second support 32 directly affects the center distance between the two driven pulleys 5, this adjustment is equivalent to pre-setting the overall tension of the transmission belt 42. In other words, when the distance between the supports 3 increases, the tension of the transmission belt 42 increases accordingly; when the distance between the supports 3 decreases, the tension decreases. This proves that the adjustability of the supports 3 essentially gives the driven pulleys 5 adjustability, enabling the structure to not only adapt to transmission belts 42 of different sizes, but also to achieve coarse adjustment of the tension during initial assembly or maintenance. Based on this, the present invention also provides an adjusting element 62 for more precise adjustment of the tension. This design creates a "dual adjustment mechanism": First, the relative distance adjustment between the first branch 31 and the second branch 32 provides a preset range for the tension force, keeping the transmission system within a reasonable tension range; Second, the adjusting component 62 makes minute and precise corrections to the tension force within this range, thereby avoiding the problem of insufficient adjustment accuracy or poor adaptability caused by over-reliance on a single adjustment method.

[0038] In some embodiments of this invention, besides employing a screw 621-slider 622 structure, the adjusting member 62 can also use an eccentric wheel adjustment, wedge block transmission, or miniature lead screw drive to move the tensioning wheel 61; the support structure of the tensioning wheel 61 can also be replaced with a needle roller bearing 612 or a ceramic bearing 612 to further reduce friction and wear. Through these alternative solutions, this invention can be flexibly applied in different compact spaces and transmission requirements.

[0039] The working principle of the linear multi-finger manipulator provided by this utility model is as follows: When the motor 41 drives the drive wheel 4 to rotate, the transmission belt 42 generates a cyclic motion in the closed loop formed between the drive wheel 4 and at least two driven wheels 5, driving the translation seat fixed on the transmission belt 42 to make linear displacement, thereby realizing the extension and retraction movement of the finger assembly 2 in a linear direction for handling wafers. In this process, the adjusting component 62 adjusts the tension of the transmission belt 42 by driving the linear displacement of the tensioning wheel 61. Furthermore, the linear displacement control driven by the screw 621 can precisely adjust the contact pressure between the tensioning wheel 61 and the transmission belt 42, thereby realizing continuous and reversible adjustment of the tension of the transmission belt 42. On the other hand, when the tension of the transmission belt 42 is too high, which may lead to increased friction and accelerated wear, the tensioning wheel 61 can be moved backward by rotating the screw 621 counterclockwise to appropriately release the tension and extend the service life of the transmission belt 42 and the wheel system. It can be seen that the adjusting component 62 not only keeps the tension within a stable range during operation, but also realizes dual-layer control from coarse adjustment to fine adjustment. It works in conjunction with the overall adjustment mechanism of the support 3 spacing, effectively solving the problems of repeated disassembly and assembly, low efficiency and low adjustment accuracy of traditional manipulator tension adjustment.

[0040] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A linear multi-finger robotic arm, characterized in that, include: Support (3); The drive wheel (4) is rotatably mounted on the support (3); At least two driven wheels (5) are rotatably mounted on the support (3); A transmission belt (42) is wrapped around the drive wheel (4) and the driven wheel (5) to form a closed transmission circuit; The tension adjustment assembly (6) includes a tension wheel (61) and an adjusting member (62). The tension wheel (61) is in contact with the transmission belt (42). The adjusting member (62) is movably mounted on the support (3) and connected to the tension wheel (61). The adjusting member (62) can drive the tensioning wheel (61) to move closer to or further away from the transmission belt (42) by linear displacement, so as to continuously and reversibly adjust the tension of the transmission belt (42).

2. The linear multi-finger robotic hand according to claim 1, characterized in that, The support (3) includes a first support (31) and a second support (32) arranged opposite to each other. The relative distance between the first support (31) and the second support (32) is adjustable, and at least two driven wheels (5) are located on the first support (31) and the second support (32) respectively.

3. The linear multi-finger robotic hand according to claim 1, characterized in that, The transmission belt (42) is an annular synchronous belt. The annular synchronous belt has an inner transmission surface and an outer tension surface. Parts of the outer peripheral surfaces of the drive wheel (4) and at least two driven wheels (5) are engaged with the inner transmission surface, and the outer peripheral surface of the tension wheel (61) abuts against the outer tension surface.

4. The linear multi-finger robotic hand according to claim 1, characterized in that, The adjusting component (62) includes a screw (621) and a slider (622), the screw (621) being threadedly connected to the slider (622), and the slider (622) being connected to the tensioning wheel (61); When the screw (621) is rotated, it can drive the slider (622) to produce a linear displacement.

5. The linear multi-finger robotic hand according to claim 4, characterized in that, The support (3) is provided with a groove (623), and part of the slider (622) is slidably embedded in the groove (623), while the other part of the slider (622) is fixedly connected to the tension wheel (61).

6. The linear multi-finger robotic hand according to claim 4, characterized in that, The tensioning wheel (61) includes a shaft (611), a bearing (612), and a rotating sleeve (613). The shaft (611) is arranged perpendicular to the support (3). The bearing (612) is located between the outer circumferential surface of the shaft (611) and the inner wall of the rotating sleeve (613). The rotating sleeve (613) can rotate relative to the shaft (611).

7. The linear multi-finger robotic hand according to claim 6, characterized in that, The bearing (612) includes an inner ring and an outer ring that are rotatably connected. The outer ring is fixedly connected to the rotating sleeve (613), and the inner ring is fixedly connected to the shaft (611).

8. The linear multi-finger robotic hand according to claim 7, characterized in that, The tensioning wheel (61) also includes an upper pressure ring (614) and a lower pressure ring (615), which are used to position the upper and lower end faces of the inner ring of the bearing (612), respectively.

9. The linear multi-finger robotic hand according to claim 8, characterized in that, The tensioning wheel (61) also includes a screw (616), and the shaft (611) has a threaded hole that mates with the screw (616). The upper pressure ring (614) is fastened to the inner ring of the bearing (612) by the screw (616).

10. The linear multi-finger robotic hand according to claim 7, characterized in that, The rotating sleeve (613) extends radially inward and is integrally formed with an outer fastening ring block. The tensioning wheel (61) also includes a retaining ring (618). The retaining ring (618) has an opening along the axial direction. The retaining ring (618) and the outer fastening ring block are disposed opposite to each other on the upper and lower end faces of the outer ring.

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