A die attach nozzle holder

Abstract

The application discloses a die-bonding suction nozzle clamping device, which comprises a base and a suction nozzle; the suction nozzle is detachably mounted on the base; the suction nozzle is provided with a first suction passage, the base is provided with a second suction passage and a third suction passage; one end of the first suction passage is located at a suction chip end of the suction nozzle, the other end of the first suction passage is communicated with one end of the second suction passage, the other end of the second suction passage is communicated with a first suction source; the suction nozzle is provided with a suction disc, one end of the third suction passage is attached to the suction disc, the other end of the third suction passage is communicated with a second suction source, the second suction source sucks air through the third suction passage, and the suction disc is adsorbed, so that the suction nozzle is adsorbed on the base. By arranging the third suction passage, the second suction source and the suction disc, the suction nozzle and the base are relatively fixed by generated negative pressure; when the suction nozzle needs to be replaced, the suction nozzle can be quickly detached and replaced by stopping the suction of the second suction source, the operation is simple, and the working efficiency is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of chip processing technology, specifically to a die-attach nozzle clamping device. Background Technology

[0002] In the existing technology, the suction cups of the die bonder have a complex structure and are directly fixed on the die bonder. When it is necessary to change the suction cup with different adsorption capacity, or when the suction cup is damaged and needs to be replaced, the replacement process is complicated and difficult to do quickly, which cannot meet the needs of rapid production. Utility Model Content

[0003] The purpose of this invention is to provide a sticky nozzle clamping device, which effectively solves the technical problem of the difficulty in quickly replacing nozzles.

[0004] To solve the above problems, this utility model discloses a film adhesive nozzle clamping device, including a base and a nozzle; the base is mounted on a film adhesive machine, and the nozzle is detachably mounted on the base; the nozzle is provided with a first suction channel, and the base is provided with a second suction channel and a third suction channel;

[0005] One end of the first air intake channel is located at the adsorption chip end of the nozzle, and the other end is connected to one end of the second air intake channel. The other end of the second air intake channel is connected to the first air intake source.

[0006] The nozzle is equipped with an adsorption plate. One end of the third air intake channel is attached to the adsorption plate, and the other end of the third air intake channel is connected to a second air intake source. The second air intake source draws air through the third air intake channel, adsorbs the adsorption plate, and causes the nozzle to adhere to the base.

[0007] Optionally, the suction nozzle includes a connector and a suction head; one end of the suction head is detachably connected to one end of the connector, and the other end of the suction head is the adsorption chip end; the adsorption disk is disposed at the other end of the connector, and the side of the adsorption disk near the base is provided with a cylindrical protrusion structure, the first air intake channel passes through the cylindrical protrusion structure and the suction head, and the outer diameter of the cylindrical protrusion structure is smaller than the inner diameter of the second air intake channel.

[0008] Optionally, the first end of the connector includes a first clamping section, an external thread section, and a nut. The first clamping section is located at the end, and the external thread section is located at the end of the first clamping section near the adsorption disk.

[0009] The clamping section includes multiple clamping plates, which are arranged in a ring structure. The inner diameter of the ring structure formed by the clamping plates is larger than the outer diameter of the suction head. The suction head is inserted into the ring structure formed by the clamping plates. The diameter of the outer wall of the ring structure gradually decreases from one end near the external thread section to the other end.

[0010] The nut includes an internal thread section and a second clamping section. The internal thread section mates with the external thread section. The second clamping section is located below the internal thread section. The inner diameter of the second clamping section gradually decreases towards the end. The second clamping section mates with the first clamping section.

[0011] Optionally, the end face of the base facing the nozzle is an adsorption surface, the second air intake channel includes a vertical first channel and a horizontal first channel, and the third air intake channel includes a vertical second channel and a horizontal second channel;

[0012] One end of the vertical first channel and one end of the vertical second channel are both disposed on the adsorption surface. The other end of the vertical first channel is connected to one end of the horizontal first channel, and the other end of the vertical second channel is connected to one end of the horizontal second channel. The other ends of the horizontal first channel and the other ends of the horizontal second channel are both disposed on the side wall of the base.

[0013] Optionally, the first vertical channel is a cylindrical blind hole structure coaxially arranged with the base, and the inner diameter of the first vertical channel is larger than the outer diameter of the cylindrical protrusion structure of the connector. The second vertical channel is a cylindrical blind hole structure, and the second vertical channel is located between the inner wall of the first vertical channel and the outer wall of the base.

[0014] Optionally, the adsorption surface of the base is provided with an annular groove, the annular groove is coaxially arranged with the vertical first channel, and the opening of the vertical second channel is located at the bottom of the annular groove.

[0015] Optionally, the adsorption disk is provided with a positioning post, which is perpendicular to the end face of the adsorption disk and penetrates through both end faces of the adsorption disk; the base is provided with positioning holes that cooperate with the positioning post, and there are two positioning holes, which are symmetrically arranged radially along the base.

[0016] Optionally, the base is magnetic and the connector is made of a magnetic metal; or, the connector is magnetic and the base is made of a magnetic metal.

[0017] Optionally, it also includes a nozzle holder, which has multiple nozzle placement slots, and multiple nozzles are provided, with the multiple nozzles respectively placed in the multiple nozzle placement slots;

[0018] The nozzle placement slot has an opening facing horizontally, and the opening direction of the nozzle placement slot provides an operating space. Positioning pin placement holes are provided on both sides of the nozzle placement slot. The connector includes an unloading section, which is located between the external thread section and the suction plate. The width of the nozzle placement slot is greater than the diameter of the unloading section. When the nozzle is placed in the nozzle placement slot, the unloading section engages with the nozzle placement slot.

[0019] Optionally, the upper end of the base is provided with a fixing structure, which is a protrusion formed on the side wall of the base. The protrusion extends radially outward along the base. There are multiple protrusions, which are evenly arranged around the circumference of the base. The protrusion is provided with fixing holes, and bolts are provided in the fixing holes to fix the base to the bonding machine.

[0020] Beneficial effects:

[0021] This utility model discloses a chip adhesive nozzle clamping device, including a base and a nozzle. The base is mounted on a chip adhesive machine, and the nozzle is detachably mounted on the base. The nozzle has a first suction channel, and the base has a second and a third suction channel. One end of the first suction channel is located at the chip adsorption end of the nozzle, and the other end is connected to one end of the second suction channel, which is connected to a first suction source. The nozzle has an adsorption plate, and one end of the third suction channel is attached to the adsorption plate. The other end of the third suction channel is connected to the second suction source, which draws air through the third suction channel to adsorb the adsorption plate, thus adsorbing the nozzle onto the base. By setting the third suction channel, the second suction source, and the adsorption plate, the nozzle and the base are relatively fixed by the generated negative pressure. When the nozzle needs to be replaced, simply stopping the second suction source allows for quick disassembly and replacement of the nozzle, simplifying the operation and greatly improving work efficiency. Attached Figure Description

[0022] The accompanying drawings, which form part of this utility model, are used to provide a further understanding of the utility model. The illustrative embodiments of the utility model and their descriptions are used to explain the utility model and do not constitute an undue limitation of the utility model. In the drawings:

[0023] Figure 1 This is an exploded schematic diagram of the base and nozzle disclosed in this utility model;

[0024] Figure 2 The present utility model discloses Figure 1 Sectional view along the AA direction;

[0025] Figure 3 This is a schematic diagram of the base structure disclosed in this utility model;

[0026] Figure 4 The present utility model discloses Figure 3 Sectional view along the BB direction;

[0027] Figure 5 This is a schematic diagram of the base structure from another angle disclosed in this utility model;

[0028] Figure 6 The present utility model discloses Figure 5 Sectional view along the CC direction;

[0029] Figure 7 The present utility model discloses Figure 5 Sectional view along the DD direction;

[0030] Figure 8 This is a schematic diagram of the nozzle holder disclosed in this utility model.

[0031] Explanation of reference numerals in the attached figures:

[0032] 1. Base; 11. Annular groove; 12. Positioning hole; 13. Fixing structure; 2. Nozzle; 21. Adsorption plate; 22. Connector; 221. First clamping section; 222. External thread section; 223. Nut; 224. Internal thread section; 225. Second clamping section; 226. Unloading section; 23. Suction head; 24. Cylindrical protrusion structure; 41. Vertical first channel; 42. Horizontal first channel; 51. Vertical second channel; 52. Horizontal second channel; 6. Positioning post; 7. Nozzle bracket; 71. Nozzle placement groove; 72. Operating space; 73. Positioning post placement hole. Detailed Implementation

[0033] It should be understood that in the description of this utility model, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0034] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0035] The technical solution of this utility model will be further illustrated below through specific embodiments. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The content of the embodiments does not constitute a limitation on this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0036] This utility model discloses a chip suction nozzle 2 clamping device, which is used for adsorbing and transporting chips. This device is not only suitable for chips of different sizes, but also features easy-to-replace nozzles, strong adaptability, and can greatly improve work efficiency.

[0037] like Figures 1-8 As shown, the adhesive nozzle 2 clamping device includes a base 1 and a nozzle 2. The base 1 is mounted on the adhesive bonding machine, and the nozzle 2 is detachably mounted on the base 1. The base 1 has an overall cylindrical structure, and a fixing structure 13 is provided at the upper end of the base 1. The fixing structure 13 is used to fix the nozzle 2 to the adhesive bonding machine. The end face of the base 1 facing the nozzle 2 is the suction surface. The nozzle 2 is provided with a first suction channel, and the base 1 is provided with a second suction channel and a third suction channel.

[0038] like Figure 1 or Figure 3 As shown, the fixing structure 13 is specifically a protrusion structure formed on the side wall of the base 1. The protrusion structure extends radially outward along the base 1. There are multiple protrusion structures, which are evenly arranged around the base 1. The protrusion structure is provided with fixing holes, and bolts are installed in the fixing holes. The base 1 is fixed to the bonding machine by the bolts.

[0039] The first suction channel has one end located at the chip adsorption end of the nozzle 2 for adsorbing the chip, and the other end connected to one end of the second suction channel. The other end of the second suction channel is connected to the first suction source. The first suction source draws air through the second suction channel and the first suction channel, ultimately adsorbing the chip.

[0040] The suction nozzle 2 is equipped with an adsorption plate 21, preferably a disc-shaped structure. After the suction nozzle 2 is installed on the base 1, one end of the third suction channel is attached to the adsorption plate 21, and the other end of the third suction channel is connected to the second suction source. The second suction source draws air through the third suction channel, adsorbing the adsorption plate 21, thus adsorbing the suction nozzle 2 onto the base 1, thereby achieving relative fixation between the suction nozzle 2 and the base 1. Therefore, in this application, the suction nozzle 2 and the base 1 are connected by generating negative pressure through adsorption, making disassembly and replacement more convenient.

[0041] In this application, the first and second air intake sources can be the same source or two different sources. When they are the same source, a closing switch can be installed in the second and third air intake channels to control air intake through either the second or third channel, or simultaneously. When they are two different sources, both sources can be controlled independently for air intake.

[0042] Specifically, such as Figure 1 and Figure 2 As shown, the suction nozzle 2 includes a connector 22 and a suction head 23. The connector 22 connects the suction head 23 and the base 1. One end of the suction head 23 is detachably connected to the first end of the connector 22. A first suction channel passes through the connector 22 and the suction head 23. The other end of the suction head 23 is an adsorption chip end, which has a conical structure. The first suction channel passes through the axis of the conical structure. An adsorption disk 21 is disposed at the second end of the connector 22. A cylindrical protrusion structure 24 is provided on the side of the adsorption disk 21 near the base 1. The first suction channel passes through the cylindrical protrusion structure 24 and the axis of the adsorption disk 21. The end of the cylindrical protrusion structure 24 near the base 1 has a rounded corner structure. Specifically, both the outer and inner walls of the cylindrical protrusion structure 24 can be provided with rounded corner structures. The outer diameter of the cylindrical protrusion structure 24 is smaller than the inner diameter of the second suction channel. After the nozzle 2 is installed on the base 1, the cylindrical protrusion 24 is inserted into the second air intake channel. The end of the cylindrical protrusion 24 is set with a rounded corner structure, making it easier for the cylindrical protrusion 24 to be inserted into the second air intake channel.

[0043] Preferably, the first end of the connector 22 includes a first clamping section 221, an external thread section 222, and a nut 223. The first clamping section 221 is located at the end, and the external thread section 222 is located at the end of the first clamping section 221 near the suction plate 21. The external thread section 222 has external threads. The first clamping section 221 includes multiple clamping plates, each with a certain curvature, arranged in a ring structure. The multiple clamping plates are spaced apart and evenly distributed. The clamping plates, the external thread section 222, the suction plate 21, and the cylindrical protrusion are integrally formed. The first suction channel passes through the ring structure formed by the external thread section 222, the suction plate 21, and the clamping plates. The ring structure formed by the clamping plates, the external thread section 222, the suction plate 21, and the first suction channel are all coaxially arranged. Furthermore, the inner diameter of the ring structure formed by the clamping plates is larger than the outer diameter of the suction head 23, allowing the suction head 23 to be inserted into the ring structure formed by the clamping plates. The outer wall of the annular structure is tapered, meaning that the diameter of the outer wall gradually decreases from one end near the external thread section 222 to the other end.

[0044] like Figure 2 As shown, the nut 223 includes an internal thread section 224 and a second clamping section 225. The internal thread section 224 has an internal thread and mates with the external thread section 222. The second clamping section 225 is located below the internal thread section 224. The inner diameter of the second clamping section 225 gradually decreases towards the end. The second clamping section 225 mates with the first clamping section 221. By rotating the nut 223, the fit between the second clamping section 225 and the first clamping section 221 becomes increasingly tight. The second clamping section 225 of the nut 223 applies more and more radial pressure to the clamping plate, causing the clamping plate to clamp the suction head 23.

[0045] Specifically, such as Figures 3-7 As shown, the second air intake channel includes a vertical first channel 41 and a horizontal first channel 42, and the third air intake channel includes a vertical second channel 51 and a horizontal second channel 52.

[0046] The vertical first channel 41 and the vertical second channel 51 are both arranged along the axial direction of the base 1, while the horizontal first channel 42 and the horizontal second channel 52 are both arranged radially along the base 1. One end of the vertical first channel 41 and one end of the vertical second channel 51 are both located on the adsorption surface. The other end of the vertical first channel 41 is connected to one end of the horizontal first channel 42, and the other end of the vertical second channel 51 is connected to one end of the horizontal second channel 52. The other ends of the horizontal first channel 42 and the horizontal second channel 52 are both located on the sidewall of the base 1.

[0047] Furthermore, the vertical first channel 41 is a cylindrical blind hole structure coaxially arranged with the base 1, and the inner diameter of the vertical first channel 41 is larger than the outer diameter of the cylindrical protrusion structure 24 of the connector 22. The vertical second channel 51 is also a cylindrical blind hole structure, specifically arranged between the inner wall of the vertical first channel 41 and the outer wall of the base 1.

[0048] Preferably, the adsorption surface of the base 1 is provided with an annular groove 11, which is disposed between the inner wall of the vertical first channel 41 and the outer wall of the base 1, and the annular groove 11 and the vertical first channel 41 are coaxially arranged. The opening of the vertical second channel 51 is located at the bottom of the annular groove 11. The second air source draws air through the third air intake channel, and the suction force acts on the adsorption disk 21 corresponding to the annular groove 11 through the vertical second channel 51, generating suction force on the adsorption disk 21.

[0049] Preferably, the adsorption plate 21 is provided with a positioning post 6, which is fixedly mounted on the adsorption plate 21. The positioning post 6 is perpendicular to the end face of the adsorption plate 21 and penetrates through both end faces of the adsorption plate 21. The base 1 is provided with positioning holes 12 that cooperate with the positioning post 6. There are two positioning holes 12, which are symmetrically arranged radially along the base 1. The positioning holes 12 are located at the bottom of the annular groove 11 and are blind holes. The depth of the positioning holes 12 is greater than the protrusion height of the positioning post 6, and the part where the positioning post 6 connects to the adsorption plate 21 is a sealed connection. In this application, the positioning post 6 penetrating through both end faces of the adsorption plate 21 has two functions: first, it serves as a positioning tool when the nozzle 2 is installed on the base 1; second, it serves as a positioning tool when the nozzle 2 is placed on the nozzle holder 7.

[0050] Preferably, the base 1 is magnetic, and the connector 22 is made of a magnetic metal. Alternatively, the connector 22 is magnetic, and the base 1 is made of a magnetic metal. Whether the base 1 or the connector 22 is magnetic, this magnetism can be strong or weak. This application preferably uses weak magnetism, which allows the connection between the base 1 and the connector 22 to be secured not only by negative gas pressure but also by weak magnetic attraction. Even if the second air source suddenly stops supplying air due to a malfunction, the nozzle 2 will not immediately fall off under the magnetic attraction, ensuring the safety of the nozzle 2 and preventing damage to it.

[0051] In this application, the diameter of the first suction channel located inside the suction head 23 is between 0.1mm and 10mm. The specific diameter can be determined according to the actual size of the chip. The smaller and lighter the chip, the less adsorption force is required, and the smaller the diameter of the first suction channel is. The larger and heavier the chip, the greater the adsorption force is required, and the larger the diameter of the first suction channel is.

[0052] Furthermore, such as Figure 8As shown, this application also includes a nozzle holder 7, which is used to hold nozzles 2 of different specifications to meet the adsorption requirements of different chips. The main difference between the different specifications of nozzles 2 lies in the diameter of the first suction channel inside the suction head 23, which can be set between 0.1mm and 10mm as needed. The nozzle holder 7 is provided with multiple nozzle placement slots 71, and multiple nozzles 2 are provided, which are placed in multiple nozzle placement slots 71.

[0053] Specifically, the nozzle placement slot 71 has a horizontal opening, a receiving space below it, an operating space 72 in the opening direction, and positioning pin placement holes 73 on both sides. The connector 22 includes an unloading section 226 located between the external thread section 222 and the suction plate 21. The width of the nozzle placement slot 71 is greater than the diameter of the unloading section 226 but smaller than the diameters of the nut 223 and the suction plate 21. When the nozzle 2 is placed into the nozzle placement slot 71, the unloading section 226 engages with it. The nozzle bracket 7 is placed on one side of the pick-and-place machine for convenient and quick nozzle 2 replacement.

[0054] In actual operation, the die bonder's operating arm, carrying the nozzle 2, adsorbs and transports the chip. When it is necessary to replace the nozzle 2, the die bonder's operating arm rotates above the nozzle support 7, first moving the nozzle 2 to the operating space 72, then moving it horizontally along the opening of the nozzle placement slot 71, inserting the nozzle 2 into the empty nozzle placement slot 71, so that the unloading section 226 of the connector 22 mates with the opening of the nozzle placement slot 71. At the same time, the nozzle 2 is rotated so that the positioning post 6 on the connector 22 aligns with the positioning post placement hole 73. Finally, the second air source stops suction, and the die bonder's operating arm is raised. Since the nozzle 2 is stuck in the nozzle placement slot 71, it can easily detach from the base 1 on the die bonder's operating arm, thus completing the unloading of the nozzle 2. Similarly, when installing a new nozzle 2 onto the base 1 on the operating arm of the die bonder, move the operating arm above the nozzle 2 to be installed, align the positioning hole 12 on the base 1 with the positioning post 6 of the nozzle 2, move the operating arm downwards so that the base 1 contacts the nozzle 2, at which point the second suction source draws air and adsorbs the nozzle 2 onto the base 1. Move the operating arm horizontally along the opening direction of the nozzle placement groove 71 so that the nozzle 2 detaches from the nozzle placement groove 71 and enters the operating space 72. Then lift the operating arm upwards to complete the replacement of the nozzle 2.

[0055] The applicant declares that the above are only specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model fall within the protection and disclosure scope of this utility model.

Claims

1. A film suction nozzle clamping device, characterized in that, Includes a base (1) and a nozzle (2); The base (1) is mounted on the die bonder, and the nozzle (2) is detachably mounted on the base (1); the nozzle (2) is provided with a first suction channel, and the base (1) is provided with a second suction channel and a third suction channel; One end of the first suction channel is located at the adsorption chip end of the nozzle (2), and the other end is connected to one end of the second suction channel. The other end of the second suction channel is connected to the first suction source. The nozzle (2) is provided with an adsorption plate (21). One end of the third air intake channel is attached to the adsorption plate (21), and the other end of the third air intake channel is connected to the second air intake source. The second air intake source draws air through the third air intake channel and adsorbs the adsorption plate (21), so that the nozzle (2) is adsorbed on the base (1).

2. The adhesive nozzle clamping device according to claim 1, characterized in that, The suction nozzle (2) includes a connector (22) and a suction head (23); one end of the suction head (23) is detachably connected to one end of the connector (22), and the other end of the suction head (23) is the adsorption chip end; the adsorption disk (21) is disposed at the other end of the connector (22), and the adsorption disk (21) has a cylindrical protrusion structure (24) on the side near the base (1), and the first air intake channel passes through the cylindrical protrusion structure (24) and the suction head (23), and the outer diameter of the cylindrical protrusion structure (24) is smaller than the inner diameter of the second air intake channel.

3. The adhesive nozzle clamping device according to claim 2, characterized in that, The first end of the connector (22) includes a first clamping section (221), an external thread section (222), and a nut (223). The first clamping section (221) is located at the end, and the external thread section (222) is located at the end of the first clamping section (221) near the adsorption plate (21). The first clamping section (221) includes a plurality of clamping plates, which are arranged in a ring structure. The inner diameter of the ring structure formed by the clamping plates is larger than the outer diameter of the suction head (23). The suction head (23) is inserted into the ring structure formed by the clamping plates. The diameter of the outer wall of the ring structure gradually decreases from one end near the external thread section (222) to the other end. The nut (223) includes an internal thread section (224) and a second clamping section (225). The internal thread section (224) mates with the external thread section (222). The second clamping section (225) is located below the internal thread section (224). The inner diameter of the second clamping section (225) gradually decreases towards the end. The second clamping section (225) mates with the first clamping section (221).

4. The adhesive nozzle clamping device according to claim 3, characterized in that, The end face of the base (1) facing the nozzle (2) is an adsorption surface. The second air intake channel includes a vertical first channel (41) and a horizontal first channel (42). The third air intake channel includes a vertical second channel (51) and a horizontal second channel (52). One end of the vertical first channel (41) and one end of the vertical second channel (51) are both disposed on the adsorption surface. The other end of the vertical first channel (41) is connected to one end of the horizontal first channel (42). The other end of the vertical second channel (51) is connected to one end of the horizontal second channel (52). The other ends of the horizontal first channel (42) and the other ends of the horizontal second channel (52) are both disposed on the side wall of the base (1).

5. The adhesive nozzle clamping device according to claim 4, characterized in that, The first vertical channel (41) is a cylindrical blind hole structure coaxially arranged with the base (1). The inner diameter of the first vertical channel (41) is larger than the outer diameter of the cylindrical protrusion structure (24) of the connector (22). The second vertical channel (51) is a cylindrical blind hole structure. The second vertical channel (51) is located between the inner wall of the first vertical channel (41) and the outer wall of the base (1).

6. The adhesive nozzle clamping device according to claim 5, characterized in that, The base (1) has an annular groove (11) on its adsorption surface. The annular groove (11) is coaxial with the vertical first channel (41). The opening of the vertical second channel (51) is located at the bottom of the annular groove (11).

7. The adhesive nozzle clamping device according to claim 6, characterized in that, The adsorption disk (21) is provided with a positioning post (6), the positioning post (6) is perpendicular to the end face of the adsorption disk (21), and the positioning post (6) penetrates through the two end faces of the adsorption disk (21); the base (1) is provided with a positioning hole (12) that cooperates with the positioning post (6), there are two positioning holes (12), and the two positioning holes (12) are symmetrically arranged radially along the base (1).

8. The adhesive nozzle clamping device according to claim 7, characterized in that, The base (1) is magnetic, and the connector (22) is made of magnetic metal; or, the connector (22) is magnetic, and the base (1) is made of magnetic metal.

9. The adhesive nozzle clamping device according to claim 8, characterized in that, It also includes a nozzle support (7), which has multiple nozzle placement slots (71) and multiple nozzles (2), which are respectively placed in the multiple nozzle placement slots (71); The nozzle placement groove (71) has an opening facing horizontally, and the opening direction of the nozzle placement groove (71) is provided with an operating space (72). The nozzle placement groove (71) has positioning pin placement holes (73) on both sides. The connector (22) includes an unloading section (226), which is located between the external thread section (222) and the suction plate (21). The groove width of the nozzle (2) placement groove is greater than the diameter of the unloading section (226). When the nozzle (2) is placed in the nozzle placement groove (71), the unloading section (226) cooperates with the nozzle placement groove (71).

10. The adhesive nozzle clamping device according to claim 9, characterized in that, The upper end of the base (1) is provided with a fixing structure (13). The fixing structure (13) is a protrusion structure formed on the side wall of the base (1). The protrusion structure extends radially outward along the base (1). There are multiple protrusion structures. The multiple protrusion structures are evenly arranged around the base (1). The protrusion structure is provided with fixing holes. Bolts are provided in the fixing holes. The base (1) is fixed to the bonding machine by means of the bolts.

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