Condensing and recycling device of high-purity electronic-grade hydrofluoric acid environment-friendly distillation system

Abstract

The utility model relates to the technical field of electronic chemical purification equipment discloses a kind of condensing recovery devices of high-purity electronic grade hydrogen fluoride acid environmental protection distillation system, including reaction kettle, and the one end of the reaction kettle is fixed with air inlet pipe, and the inside of the reaction kettle is equipped with three-stage condensing component, and the lower side of the reaction kettle is fixed with support frame symmetrically, and the bottom end of the reaction kettle is fixed with collection box, and the inner bottom wall of the collection box is equipped with flow guide component;The inner wall of the reaction kettle is provided with cylindrical cavity, and the input direction of the air inlet pipe is arranged from air inlet pipe to three-stage condensing component.This kind of condensing recovery devices of high-purity electronic grade hydrogen fluoride acid environmental protection distillation system, by three-stage condensing component, gas in the inside of reaction kettle is carried out multistage condensing work, and partition cooling is carried out.

Description

Technical Field

[0001] This utility model relates to the technical field of electronic chemical purification equipment, and in particular to a condensation and recovery device for a high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system. Background Technology

[0002] The environmentally friendly hydrofluoric acid distillation system employs fluorine-resistant materials, a sealed design, and efficient gas recovery technology to ensure that hydrofluoric acid does not leak or pollute the environment during distillation. The system is equipped with real-time monitoring and safety control measures to adjust operating conditions promptly, and improves energy efficiency and reduces waste emissions through heat recovery and wastewater treatment. This system not only complies with environmental regulations but also reduces operating costs through resource recovery and efficient treatment, providing a reliable solution for the safe and environmentally friendly recycling of hydrofluoric acid in industry.

[0003] Condensation recovery devices cool gases or vapors below their condensation point, converting volatile substances into liquid or solid states for recycling. The devices mainly consist of a condenser, cooling medium, recovery pipelines, and a control system. They are widely used in industries such as chemical, pharmaceutical, and electronics to help recover resources and reduce environmental pollution. Through the condensation process, condensation recovery devices not only improve resource utilization but also ensure that the emission of harmful gases meets environmental standards, promoting the sustainable development of industrial production.

[0004] In the existing technology, traditional condensing devices generally use a single condensing structure for condensation, resulting in low condensing efficiency and susceptibility to environmental changes. A single condensing structure may not be able to effectively distribute heat during the condensation process, causing local overheating or uneven cooling, which in turn affects the overall condensation effect and the service life of the equipment. Utility Model Content

[0005] In view of the aforementioned problems of low condensation efficiency and susceptibility to environmental changes, this utility model is proposed.

[0006] Therefore, the purpose of this utility model is to provide a condensation and recovery device for a high-purity electronic-grade hydrofluoric acid environmental distillation system. Its purpose is to perform multi-stage condensation of the gas inside the reactor through a three-stage condensation assembly, and to achieve zoned cooling.

[0007] To solve the above technical problems, this utility model provides the following technical solution: a condensation and recovery device for a high-purity electronic-grade hydrofluoric acid environmental distillation system, including a reaction vessel, an inlet pipe fixed at one end of the reaction vessel, a three-stage condensation assembly inside the reaction vessel, a support frame symmetrically fixed on the lower side of the reaction vessel, a collection box fixed at the bottom of the reaction vessel, and a flow guiding assembly provided on the inner bottom wall of the collection box;

[0008] The inner wall of the reactor is provided with a cylindrical cavity, and the input direction of the air inlet pipe is set from the air inlet pipe to the three-stage condensation assembly.

[0009] As a preferred embodiment of the condensation recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model, the three-stage condensation assembly includes a first condenser tube, a second condenser tube, and a third condenser tube arranged at equal intervals. The first condenser tube is close to the inlet pipe and fixed inside the reactor. The third condenser tube is far from the inlet pipe and fixed inside the reactor. Multiple square plates are fixed at equal intervals on the surface of the first condenser tube. Three triangular blocks are fixed at equal intervals on the surface of the second condenser tube. An obliquely arranged fixing plate is fixed on the surface of the third condenser tube.

[0010] As a preferred embodiment of the condensation recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model, the first condenser, the second condenser and the third condenser are always on the same horizontal line, and the first condenser, the second condenser and the third condenser are fixed with spiral blades inside.

[0011] As a preferred embodiment of the condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model, the triangular block is an isosceles triangle, and the inclination angle of the inclined planes on both sides of the triangular block is 10° to 15°.

[0012] As a preferred embodiment of the condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model, the inclined angle of the fixed plate is 70° to 85°, and the surface of the fixed plate is provided with a plurality of obliquely arranged vent holes.

[0013] As a preferred embodiment of the condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model, a drain trough is provided below the cavity, an inlet is provided on the inner side of the top of the collection box at a position corresponding to the drain trough, and an outlet is provided at the bottom of one end of the collection box.

[0014] As a preferred embodiment of the condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model, the flow guiding component includes a flow guiding block, and multiple flow guiding blocks are fixed inside the collection box at positions corresponding to the liquid inlet. The two ends of the flow guiding block are fixed with partitions, and the two sides of the flow guiding block are provided with flow guiding plates fixed on the collection box. A drain block is fixed on one side of the flow guiding plate.

[0015] As a preferred embodiment of the condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model, the length of the drain block is the same as the inner wall length of the collection box, the inclination angle of the drain block is 10° to 15°, and the lower end of the drain block is close to the outlet.

[0016] Compared with the prior art, the present invention has at least the following beneficial effects:

[0017] 1. This invention utilizes a three-stage condensation assembly to perform multi-stage condensation of the gas inside the reactor, achieving zoned cooling. This gradually lowers the gas temperature, ensuring optimal condensation at different stages. Precise temperature control allows for easier condensation at varying temperatures, improving overall condensation efficiency. It also facilitates the staged capture of components with different boiling points, resulting in a higher recovery rate of high-purity hydrofluoric acid. Different substances are separated at different condensation stages, reducing losses, lowering the concentration of hydrofluoric acid gas, reducing corrosion risk, and extending equipment lifespan.

[0018] 2. This utility model, through the combination of a collection box and a flow guiding component, can effectively and quickly recover condensed liquid, reduce the residence time of liquid in the equipment, thereby accelerating the recovery process of condensed liquid. The efficient liquid recovery reduces solvent waste, improves the overall recovery efficiency, reduces the risk of errors during manual operation or improper liquid handling, improves the degree of automation of operation, and makes the entire condensation recovery process more stable and reliable. At the same time, it can avoid liquid overflow or retention, ensuring that the condensed liquid can flow smoothly and without loss into the collection box, thereby improving the liquid recovery rate. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model.

[0020] Figure 2 This is a schematic diagram of the internal structure of the condensation recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model;

[0021] Figure 3 This is a schematic diagram of the three-stage condensation component structure of the condensation recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model;

[0022] Figure 4 This is a schematic diagram of the collection box and flow guiding component of the condensation recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model.

[0023] Figure 5 This is a schematic diagram of the external overall structure of the condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmental distillation system of this utility model.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Reactor; 101. Cavity; 102. Drainage tank; 2. Inlet pipe; 3. Three-stage condenser assembly; 301. First condenser tube; 302. Second condenser tube; 303. Third condenser tube; 304. Square plate; 305. Triangular block; 306. Fixing plate; 307. Vent hole; 308. Spiral plate; 4. Support frame; 5. Collection box; 501. Liquid inlet; 502. Liquid outlet; 6. Flow guiding assembly; 601. Flow guiding block; 602. Baffle; 603. Flow guiding plate; 604. Drainage block. Detailed Implementation

[0026] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0027] Example 1

[0028] Reference Figures 1-3 This is the first embodiment of the present invention, which provides a condensation recovery device for a high-purity electronic-grade hydrofluoric acid environmental distillation system. The condensation recovery device for the high-purity electronic-grade hydrofluoric acid environmental distillation system includes a reaction vessel 1, an air inlet pipe 2 fixed at one end of the reaction vessel 1, a three-stage condensation assembly 3 inside the reaction vessel 1, a support frame 4 symmetrically fixed on the lower side of the reaction vessel 1, a collection box 5 fixed at the bottom end of the reaction vessel 1, and a flow guiding assembly 6 provided on the inner bottom wall of the collection box 5.

[0029] The inner wall of the reactor 1 is provided with a cylindrical cavity 101, and the input direction of the inlet pipe 2 is set from the inlet pipe 2 to the three-stage condenser assembly 3;

[0030] The cylindrical cavity design provides a uniform condensation space, ensuring full contact between steam and the condensation components; the air inlet pipe is directed towards the three-stage condensation components, directly guiding steam into the condensation area and improving condensation efficiency.

[0031] The three-stage condensation assembly 3 includes a first condenser tube 301, a second condenser tube 302, and a third condenser tube 303 arranged at equal intervals. The first condenser tube 301 is close to the inlet pipe 2 and fixed inside the reactor 1. The third condenser tube 303 is far from the inlet pipe 2 and fixed inside the reactor 1. Multiple square pieces 304 are fixed at equal intervals on the surface of the first condenser tube 301. Three triangular blocks 305 are fixed at equal intervals on the surface of the second condenser tube 302. An obliquely arranged fixing plate 306 is fixed on the surface of the third condenser tube 303.

[0032] The square plates increase the surface area, accelerate initial condensation, and initially separate low-boiling-point impurities; through staged condensation, the temperature is gradually reduced, achieving efficient graded purification of high-purity hydrofluoric acid; the horizontally aligned design of the condenser tubes ensures a stable vapor flow path and avoids turbulence affecting the condensation effect.

[0033] The first condenser tube 301, the second condenser tube 302, and the third condenser tube 303 are always on the same horizontal line. The first condenser tube 301, the second condenser tube 302, and the third condenser tube 303 are fixed with spiral blades 308 inside.

[0034] The spiral fins increase the contact area between the refrigerant and the inner wall of the condenser tube, improve heat exchange efficiency, and enhance the condensation effect at each stage.

[0035] The shape of the triangular block 305 is an isosceles triangle, and the inclination angle of the two sides of the triangular block 305 is 10° to 15°.

[0036] The inclined plane of the isosceles triangular block promotes the rapid sliding of condensed droplets, preventing droplets from lingering and affecting subsequent condensation; the triangular structure optimizes airflow distribution and enhances condensation efficiency in the mid-temperature range.

[0037] The fixing plate 306 has an inclination angle of 70° to 85°, and the surface of the fixing plate 306 is provided with a plurality of obliquely arranged vent holes 307;

[0038] The angled fixing plate guides the liquid to drip naturally, while the vent holes allow gas to pass through but prevent liquid backflow, ensuring the purity of the final condensation.

[0039] Example 2

[0040] Reference Figures 1-5 This is the second embodiment of the present utility model. The difference between this embodiment and the first embodiment is that: a drain trough 102 is provided below the cavity 101, an inlet 501 is provided on the inner side of the top of the collection box 5 at a position corresponding to the drain trough 102, and an outlet 502 is provided at the bottom of one end of the collection box 5.

[0041] The drain tank and the inlet are precisely aligned to ensure that the condensate is transferred to the collection box without leakage, reducing losses.

[0042] The flow guiding assembly 6 includes a flow guiding block 601. Multiple flow guiding blocks 601 are fixed inside the collection box 5 at positions corresponding to the liquid inlet 501. Two partitions 602 are fixed at both ends of the flow guiding block 601. Flow guiding plates 603 are fixed on the collection box 5 on both sides of the flow guiding block 601. A drain block 604 is fixed on one side of the flow guiding plate 603.

[0043] The length of the drain block 604 is the same as the inner wall length of the collection box 5. The tilt angle of the drain block 604 is 10° to 15°. The lower end of the drain block 604 is closer to the outlet 502.

[0044] The guide block directs the liquid flow, the baffle prevents overflow, and the guide plate and drain block work together to guide the liquid to the outlet, achieving efficient and residue-free collection; the length of the drain block matches the inner wall of the collection box to avoid dead corners where the liquid stagnates and ensures complete discharge.

[0045] The remaining structure is the same as that in Example 1.

[0046] Based on embodiments 1-2, the working principle of this utility model is as follows: The user inputs steam into the interior of the reactor 1 through the air inlet pipe 2. The steam inside the reactor 1 is condensed by the three-stage condensation assembly 3. The support frame 4 on the side of the reactor 1 can provide stable support for the equipment. After condensation, the liquid can be received through the collection box 5 and discharged and collected through the flow guiding assembly 6.

[0047] The steam undergoes a first condensation process via the first condenser tube 301 and the square plate 304, reducing the temperature to 18 to 22 degrees Celsius. Then, the steam undergoes a second condensation process via the second condenser tube 302 and the triangular block 305, reducing the temperature to -6 to -4 degrees Celsius. Finally, the steam undergoes a third condensation process via the third condenser tube 303 and the fixing plate 306, reducing the temperature to -10 to -8 degrees Celsius. Due to the shape characteristics of the triangular block 305 and the fixing plate 306, the cooled hot air condenses on their surfaces and drips naturally into the cavity 101 due to gravity. The liquid is then guided into the collection box 5 via the drain trough 102.

[0048] The vent holes 307 on the surface of the fixed plate 306 allow gas to pass through and prevent liquid backflow. The first condenser tube 301, the second condenser tube 302 and the third condenser tube 303 are all filled with refrigerants of different materials. The spiral blades 308 can effectively increase the contact area between the first condenser tube 301, the second condenser tube 302 and the third condenser tube 303 and the refrigerant.

[0049] The liquid flowing through the drain trough 102 will naturally flow to the inlet 501 and fall onto the top of the guide block 601. The guide block 601 will guide the liquid to the surface of the drain block 604. The baffle 602 and the guide plate 603 can prevent the liquid from overflowing. Finally, the drain block 604 will guide the liquid to the outlet 502 and collect it.

[0050] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A condensation and recovery device for a high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system, comprising a reaction vessel (1), characterized in that: An air inlet pipe (2) is fixed at one end of the reactor (1). A three-stage condensation assembly (3) is provided inside the reactor (1). A support frame (4) is symmetrically fixed on the lower side of the reactor (1). A collection box (5) is fixed at the bottom of the reactor (1). A flow guiding assembly (6) is provided on the inner bottom wall of the collection box (5). The inner wall of the reactor (1) is provided with a cylindrical cavity (101), and the input direction of the air inlet pipe (2) is set from the air inlet pipe (2) to the three-stage condensation assembly (3).

2. The condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system according to claim 1, characterized in that: The three-stage condensation assembly (3) includes a first condenser (301), a second condenser (302), and a third condenser (303) arranged at equal intervals. The first condenser (301) is close to the inlet pipe (2) and fixed inside the reactor (1). The third condenser (303) is far from the inlet pipe (2) and fixed inside the reactor (1). Multiple square pieces (304) are fixed at equal intervals on the surface of the first condenser (301). Three triangular blocks (305) are fixed at equal intervals on the surface of the second condenser (302). An obliquely arranged fixing plate (306) is fixed on the surface of the third condenser (303).

3. The condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system according to claim 2, characterized in that: The first condenser (301), the second condenser (302) and the third condenser (303) are always on the same horizontal line, and the first condenser (301), the second condenser (302) and the third condenser (303) are fixed with spiral blades (308) inside.

4. The condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system according to claim 2, characterized in that: The triangular block (305) is an isosceles triangle, and the inclination angle of the inclined planes on both sides of the triangular block (305) is 10° to 15°.

5. The condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system according to claim 2, characterized in that: The fixing plate (306) has an inclination angle of 70° to 85°, and the surface of the fixing plate (306) is provided with a plurality of obliquely arranged ventilation holes (307).

6. The condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system according to claim 1, characterized in that: A drain trough (102) is provided below the cavity (101), and an inlet (501) is provided on the inner side of the top of the collection box (5) at a position corresponding to the drain trough (102). An outlet (502) is provided at the bottom of one end of the collection box (5).

7. The condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system according to claim 1, characterized in that: The flow guiding assembly (6) includes a flow guiding block (601). Multiple flow guiding blocks (601) are fixed inside the collection box (5) at positions corresponding to the liquid inlet (501). Partitions (602) are fixed at both ends of the flow guiding block (601). Flow guiding plates (603) are fixed on the collection box (5) on both sides of the flow guiding block (601). A drain block (604) is fixed on one side of the flow guiding plate (603).

8. The condensation and recovery device of the high-purity electronic-grade hydrofluoric acid environmentally friendly distillation system according to claim 7, characterized in that: The length of the drain block (604) is the same as the inner wall length of the collection box (5), the tilt angle of the drain block (604) is 10° to 15°, and the lower end of the drain block (604) is close to the outlet (502).

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