A multi-stage filtering device of a high-purity electronic-grade chemical precision filtering system

Abstract

The utility model relates to chemical preparation purification technical field discloses a kind of high-purity electronic grade chemical precision filtration system multistage filter device, including filter structure, support frame, separation structure and scrape structure, filter structure is installed on support frame, separation structure and scrape structure are respectively installed in the inside of filter structure, separation structure includes annular frame, chute, first filter cylinder, second filter cylinder, motor and sealing shaft sleeve, first filter cylinder is rotatably connected with annular frame by sliding block and chute, second filter cylinder and the horizontal portion of first filter cylinder are respectively provided with threaded hole, bolt is screw mounted on threaded hole, motor is fixedly installed on the outer bottom wall of cylinder by support plate, the motor shaft of motor is fixedly connected through the bottom wall and first filter cylinder of cylinder, sealing shaft sleeve is fixedly installed on the bottom wall of cylinder.The utility model is separated by being set up structure, can accelerate liquid-solid separation process, further improve filtration speed and liquid removal effect.

Description

Technical Field

[0001] This utility model relates to the field of chemical preparation and purification technology, and in particular to a multi-stage filtration device for a precision filtration system for high-purity electronic-grade chemicals. Background Technology

[0002] High-purity electronic-grade chemicals have wide applications in high-tech fields such as semiconductors and optoelectronics. Their purity and cleanliness are directly related to product performance and production yield. In order to meet the strict control requirements for impurity particles, metal ions and organic matter, a multi-stage filtration system is usually required during the preparation or transportation process. The multi-stage filtration device achieves graded filtration from coarse to fine by sequentially setting filtration units of different precision, effectively ensuring the high purity quality of chemicals and the stable operation of the system.

[0003] In existing technologies, the filtration process relies solely on gravity or pressure. The solution easily forms a dense filter cake on the surface of the filter media, leading to increased filtration resistance, decreased flow rate, and easy clogging of the filter media due to particle accumulation, resulting in low filtration efficiency. Utility Model Content

[0004] Given that the existing filtration process relies solely on gravity or pressure, the solution easily forms a dense filter cake on the surface of the filter media, leading to increased filtration resistance, decreased flow rate, and easy clogging of the filter media due to particle accumulation, resulting in low filtration efficiency, this utility model is proposed.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a multi-stage filtration device for a high-purity electronic-grade chemical precision filtration system, comprising a filtration structure, a support frame, a separation structure, and a scraping structure. The filtration structure is mounted on the support frame, and the separation structure and scraping structure are respectively installed inside the filtration structure. The separation structure includes an annular frame, a slide groove, a first filter cylinder, a second filter cylinder, a motor, and a sealing bushing. The first filter cylinder is rotatably connected to the annular frame via a slider and a slide groove. The horizontal portions of the second filter cylinder and the first filter cylinder are respectively provided with threaded holes, and threaded bolts are threaded onto the threaded holes. The motor is fixedly mounted on the outer bottom wall of the cylinder via a support plate, and the motor shaft passes through the bottom wall of the cylinder and is fixedly connected to the first filter cylinder. The sealing bushing is fixedly mounted on the bottom wall of the cylinder.

[0006] As a preferred embodiment of the multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system of this utility model, the filtration structure includes a cylinder and a cylinder cover. The cylinder is fixedly installed on the top of the support frame, the cylinder cover is snapped onto the top of the cylinder, an inlet pipe is fixedly installed on the cylinder cover, and a drain pipe is fixedly connected to the bottom of the cylinder.

[0007] As a preferred embodiment of the multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system of this utility model, the annular frame is fixedly installed on the inner wall of the cylinder, the sliding groove is provided at the top of the annular frame, the slider is fixedly installed at the top horizontal part of the first filter cylinder, the slider extends into the sliding groove, and the slider and the sliding groove are slidably connected.

[0008] As a preferred embodiment of the multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system of this utility model, the second filter cylinder is disposed inside the cylinder body and inside the first filter cylinder, and the pore size of the second filter cylinder is larger than that of the first filter cylinder.

[0009] As a preferred embodiment of the multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system of this utility model, the motor shaft of the motor passes through the sealing bushing, and the motor shaft is rotatably connected to the sealing bushing and the bottom wall of the cylinder respectively.

[0010] As a preferred embodiment of the multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system of this utility model, the scraping structure includes a fixed sleeve, a connecting rod, a mounting plate, and a scraper. The fixed sleeve is fixedly installed on the motor shaft of the motor, the connecting rod is fixedly installed on the side wall of the fixed sleeve, the mounting plate is fixedly installed on the end of the connecting rod away from the fixed sleeve, and the scraper is fixedly installed on the mounting plate.

[0011] The beneficial effects of this utility model are:

[0012] 1. Through the set separation structure, the second filter cartridge is placed inside the first filter cartridge, and the solution is filtered in two stages, which effectively improves the filtration accuracy and impurity removal efficiency. The structure is compact and stable with bolt fixation, which is easy to disassemble and maintain. The first filter cartridge is rotated under the drive of the motor and slides in the slide groove through the slider. Combined with the centrifugal separation principle, the liquid-solid separation process can be accelerated, further improving the filtration speed and liquid removal effect. It has dual functions of high-efficiency filtration and rapid separation, and is suitable for application scenarios with strict cleanliness requirements such as high-purity chemicals.

[0013] 2. Through the designed scraping structure, the filter components and scraping device are synchronously driven by the motor. The scraper continuously scrapes off the residual liquid film on the inner wall of the cylinder, reducing the loss of valuable chemicals, preventing secondary pollution caused by the accumulation of impurities, and avoiding manual intervention, thereby improving the efficiency of continuous production and product consistency. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a cross-sectional view of the present invention;

[0017] Figure 3 This is a cross-sectional view of the cylindrical body of this utility model;

[0018] Figure 4 This is a schematic diagram of the separation structure of this utility model;

[0019] Figure 5 This is a schematic diagram of the scraping structure of this utility model.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1. Filter structure; 11. Cylinder body; 12. Cylinder cover; 13. Inlet pipe; 14. Drain pipe; 2. Support frame; 3. Separation structure; 301. Ring frame; 302. Slide groove; 303. First filter cylinder; 304. Sliding block; 305. Second filter cylinder; 306. Threaded hole; 307. Bolt; 308. Motor; 309. Support plate; 310. Sealing bushing; 4. Scraper structure; 41. Fixing sleeve; 42. Connecting rod; 43. Mounting plate; 44. Scraper. Detailed Implementation

[0022] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0023] Example 1

[0024] Refer to attached figure Figure 1 - Appendix Figure 5This is the first embodiment of the present invention, which provides a multi-stage filtration device for a high-purity electronic-grade chemical precision filtration system. The device includes a filtration structure 1, a support frame 2, a separation structure 3, and a scraping structure 4. The filtration structure 1 is mounted on the support frame 2. The separation structure 3 and the scraping structure 4 are respectively mounted inside the filtration structure 1. The filtration structure 1 includes a cylinder 11 and a cylinder cover 12. The cylinder 11 is fixedly mounted on the top of the support frame 2. The cylinder cover 12 is snapped onto the top of the cylinder 11. An inlet pipe 13 is fixedly mounted on the cylinder cover 12. A drain pipe 14 is fixedly connected to the bottom of the cylinder 11. The inlet pipe 13 and the drain pipe 14 are respectively connected to the interior of the cylinder 11.

[0025] The separation structure 3 includes an annular frame 301, a first filter cylinder 303, a second filter cylinder 305, a support plate 309, and a sealing bushing 310. The annular frame 301 is fixedly installed on the inner wall of the cylinder 11. A groove 302 is provided at the top of the annular frame 301. The first filter cylinder 303 is disposed inside the cylinder 11. A slider 304 is fixedly installed on the top horizontal part of the first filter cylinder 303. The slider 304 extends into the groove 302, and the slider 304 and the groove 302 are slidably connected. The second filter cylinder 305 is disposed inside the cylinder 11 and inside the first filter cylinder 303. The aperture wall of the second filter cylinder 305 is first passed through... The filter cartridge 303 has a large aperture. The horizontal portions of the second filter cartridge 305 and the first filter cartridge 303 are respectively provided with threaded holes 306. Threaded bolts 307 are installed on the threaded holes 306. The support plate 309 is fixedly installed on the outer bottom wall of the cylinder 11. The motor 308 is fixedly installed on the support plate 309. The motor shaft of the motor 308 passes through the bottom wall of the cylinder 11 and is fixedly connected to the first filter cartridge 303. The sealing bushing 310 is fixedly installed on the bottom wall of the cylinder 11. The motor shaft of the motor 308 passes through the sealing bushing 310 and is rotatably connected to the sealing bushing 310. The sealing bushing 310 seals the motor shaft of the motor 308.

[0026] During use, the second filter cartridge 305 is placed inside the first filter cartridge 303, and the threaded holes 306 are aligned. Then, bolts 307 are screwed in to fix the second filter cartridge 305 and the first filter cartridge 303. Solution is introduced into the inlet pipe 13, and the solution enters the cylinder 11 and falls into the second filter cartridge 305. The solution is filtered by the second filter cartridge 305, and the filtered solution enters the first filter cartridge 303 for secondary filtration. The motor 308 is started, and the motor shaft of the motor 308 drives the first filter cartridge 303 to rotate. The first filter cartridge 303 slides in the slide groove 302 through the slider 304, thereby centrifuging the solution in the first filter cartridge 303. The filtered solution enters the cylinder 11, and the solution inside the cylinder 11 is collected through the drain pipe 14.

[0027] Example 2

[0028] Refer to attached figure Figure 2 and attached Figure 5 This is the second embodiment of the present invention, which differs from the first embodiment in that:

[0029] The scraping structure 4 includes a fixed sleeve 41, a connecting rod 42, a mounting plate 43, and a scraper 44. The fixed sleeve 41 is fixedly mounted on the motor shaft of the motor 308. The connecting rod 42 is fixedly mounted on the side wall of the fixed sleeve 41. The mounting plate 43 is fixedly mounted on the end of the connecting rod 42 away from the fixed sleeve 41. The scraper 44 is fixedly mounted on the mounting plate 43. The mounting plate 43 is in contact with the inner wall of the cylinder 11.

[0030] During use, when the motor shaft of motor 308 rotates, it drives the fixed sleeve 41 to rotate. The fixed sleeve 41 drives the mounting plate 43 to rotate through the connecting rod 42. The mounting plate 43 drives the scraper 44 to rotate, so that the mounting plate 43 scrapes the inner wall of the cylinder 11, thereby scraping the solution adhering to the inner wall of the cylinder 11 and causing the solution to fall to the bottom of the cylinder 11.

[0031] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A multi-stage filtration device for a precision filtration system of high-purity electronic-grade chemicals, characterized in that: The system includes a filter structure (1), a support frame (2), a separation structure (3), and a scraping structure (4). The filter structure (1) is mounted on the support frame (2). The separation structure (3) and the scraping structure (4) are respectively installed inside the filter structure (1). The separation structure (3) includes an annular frame (301), a slide groove (302), a first filter cylinder (303), a second filter cylinder (305), a motor (308), and a sealing bushing (310). The first filter cylinder (303) is connected by a slider (304) and a slide groove (302). The second filter cylinder (305) and the first filter cylinder (303) are rotatably connected to the ring frame (301). The horizontal parts of the second filter cylinder (305) and the first filter cylinder (303) are respectively provided with threaded holes (306). The threaded holes (306) are threaded with bolts (307). The motor (308) is fixedly installed on the outer bottom wall of the cylinder (11) through the support plate (309). The motor shaft of the motor (308) passes through the bottom wall of the cylinder (11) and is fixedly connected to the first filter cylinder (303). The sealing bushing (310) is fixedly installed on the bottom wall of the cylinder (11).

2. The multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system according to claim 1, characterized in that: The filter structure (1) includes a cylinder (11) and a cylinder cover (12). The cylinder (11) is fixedly installed on the top of the support frame (2). The cylinder cover (12) is snapped onto the top of the cylinder (11). An inlet pipe (13) is fixedly installed on the cylinder cover (12). A drain pipe (14) is fixedly connected to the bottom of the cylinder (11).

3. The multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system according to claim 1, characterized in that: The annular frame (301) is fixedly installed on the inner wall of the cylinder (11), the slide groove (302) is provided at the top of the annular frame (301), the slider (304) is fixedly installed at the top horizontal part of the first filter cylinder (303), the slider (304) extends into the slide groove (302), and the slider (304) and the slide groove (302) are slidably connected.

4. The multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system according to claim 3, characterized in that: The second filter cartridge (305) is disposed inside the cylinder (11) and inside the first filter cartridge (303), and the aperture of the second filter cartridge (305) is larger than that of the first filter cartridge (303).

5. The multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system according to claim 4, characterized in that: The motor shaft of the motor (308) passes through the sealing bushing (310), and the motor shaft of the motor (308) is rotatably connected to the sealing bushing (310) and the bottom wall of the cylinder (11).

6. The multi-stage filtration device of the high-purity electronic-grade chemical precision filtration system according to claim 1, characterized in that: The scraping structure (4) includes a fixed sleeve (41), a connecting rod (42), a mounting plate (43), and a scraper (44). The fixed sleeve (41) is fixedly mounted on the motor shaft of the motor (308). The connecting rod (42) is fixedly mounted on the side wall of the fixed sleeve (41). The mounting plate (43) is fixedly mounted on the end of the connecting rod (42) away from the fixed sleeve (41). The scraper (44) is fixedly mounted on the mounting plate (43).

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