Dust removal device and tail gas filtration equipment

Abstract

The utility model provides a kind of dust removal device and tail filter equipment, dust removal device includes main part, drive unit, transmission unit, several piston units, piston unit includes cylindrical piston and piston connecting piece, each cylindrical piston bottom is towards filter top;Transmission unit includes several first concave shaft and several second concave shaft, several first concave shaft and several second concave shaft are respectively connected with each cylindrical piston by corresponding piston connecting piece one-to-one, and the height of cylindrical piston bottom connected by adjacent first concave shaft and second concave shaft is different;Drive unit is located in main part, and the one end of the shaft type structure formed by several first concave shaft and several second concave shaft is rotatably connected with drive unit, to drive each cylindrical piston to the alternate beating vibration of filter piece.The present application realizes that the dust on filter piece can be removed without disassembling filter piece, reduces maintenance cycle, improves output.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a dust removal device and a tail exhaust filtration device. Background Technology

[0002] Semiconductor device manufacturing equipment is a device that uses a gas reaction source to epitaxially grow solid thin film materials on the surface of a substrate, and it is widely used in the field of semiconductor device fabrication. During the reaction process of growing semiconductor materials, the reaction source gas is introduced into the reaction chamber. These substances react in the reaction chamber to generate the desired thin film material. At the same time, exhaust gas is also generated, which contains impurities such as dust composed of unreacted raw materials and by-products.

[0003] In existing technologies, exhaust gas is generally sent to exhaust filtration equipment for filtration. However, during the use of existing exhaust filtration equipment, as the filtration process continues, dust on the surface of the filter device increases continuously. If the dust and other impurities in the filter device are not cleaned in time, it will affect the normal operation of the filter device and cause it to become clogged. In order to prevent the filter device from becoming clogged, it is necessary to manually disassemble the filter device and clean it, which will greatly increase the maintenance cycle and reduce production efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a dust removal device and tail discharge filtration equipment, which enables the removal of dust from the filter element without disassembling the filter element, thereby reducing maintenance cycle and increasing output.

[0005] To achieve the above objectives, the dust removal device of this utility model is used to be disposed on the top of a filter element. The dust removal device includes a main body, a drive unit, a transmission unit, and several piston units. Each piston unit includes a cylindrical piston and a piston connector, with the bottom of each cylindrical piston facing the top of the filter element. The transmission unit includes several first concave shafts and several second concave shafts, which are alternately connected to form a shaft structure. The several first concave shafts and several second concave shafts are respectively connected to each of the cylindrical pistons through corresponding piston connectors, and adjacent first concave shafts are connected in a one-to-one manner. The bottom heights of the cylindrical pistons connected to the first concave shaft and the second concave shaft are different; the drive unit is located inside the main body, and one end of the shaft-shaped structure formed by the first concave shaft and the second concave shaft is rotatably connected to the drive unit, so that each first concave shaft rotates around the axis of the shaft-shaped structure and drives each connected cylindrical piston away from the filter element. During this process, each second concave shaft rotates around the axis of the shaft-shaped structure and drives each connected cylindrical piston toward the filter element, so as to realize the alternating impact and vibration action on the filter element and separate the dust from the filter element.

[0006] Preferably, the dust removal device further includes a cylindrical housing movably sleeved on the side wall of the cylindrical piston and open at both ends, the cylindrical housing being disposed within the main body. The transmission unit further includes several cam structures, several first concave shafts and several second concave shafts respectively passing through in an eccentric manner and rotatably connected to several cam structures in a corresponding manner, so that the bottom of the cam structure contacts the top surface of the piston connector during movement toward or away from the corresponding piston connector and pushes the piston connector to drive the corresponding cylindrical piston to move toward the filter element along the axial direction of the cylindrical housing. The piston unit further includes several reset members, several reset members being correspondingly disposed on the piston connector or the cylindrical piston, so that the corresponding cylindrical piston moves away from the filter element along the axial direction of the cylindrical housing.

[0007] Preferably, one end of the piston connector is rotatably connected to the corresponding first concave shaft or second concave shaft, and the other end is fixedly connected to the corresponding cylindrical piston to drive the cylindrical piston to move toward or away from the filter element, and there is a gap between adjacent cylindrical pistons so that there is no movement interference between adjacent cylindrical pistons.

[0008] Preferably, the dust removal device further includes a plurality of cylindrical housings with open ends disposed within the main body. The inner diameter of the cylindrical housing along the direction perpendicular to the axis of the shaft structure is greater than the diameter of the circular structure formed by the rotational trajectory of the first concave shaft or the second concave shaft. The cylindrical piston penetrates the cylindrical housing from the top and has a gap between it and the cylindrical housing to allow the cylindrical piston to move axially along the cylindrical housing and to allow the cylindrical piston to move radially along the cylindrical housing.

[0009] Preferably, the piston unit further includes a buffer member, the bottom of the cylindrical piston is provided with a groove, the buffer member is partially embedded in the groove, and the remaining part of the buffer member protrudes from the bottom working surface of the cylindrical piston.

[0010] Preferably, the tail exhaust filtration device includes a filtration device, a dust collection device, and a dust removal device. The dust removal device is located at the top of the filtration device, and the cylindrical piston in the dust removal device moves toward or away from the filter element in the filtration device to alternately strike and vibrate the filter element and separate the dust from the filter element. The dust collection device is located at the bottom of the filtration device to collect the dust removed from the filter element.

[0011] Preferably, the filtering device further includes a filter housing, the top of which is provided with several piston through-parts for the cylindrical piston to pass through, and one side wall of the filter housing is provided with an exhaust gas inlet that communicates with the exhaust gas discharge pipe; the filter element includes several filter plates arranged sequentially in the filter housing along the axial direction of the axial structure, the top of the filter plates is inclined toward the exhaust gas inlet, and the projection structures of adjacent filter plates at the bottom of the filter housing are spaced apart.

[0012] Preferably, the filtration device further includes several shock-absorbing components, which are provided between the top end of the filter plate and the filter housing, and between the bottom end of the filter plate and the filter housing. Each shock-absorbing component includes a first connector and a second connector. The first connector includes a frame-shaped body, a compression spring and a compression plate disposed within the frame-shaped body, and the compression plate is disposed between the compression spring and the inner bottom of the frame-shaped body. A movable cavity is provided between the top of the compression plate and the top of the frame-shaped body, and a through portion communicating with the movable cavity is provided at the top of the frame-shaped body. The second connector includes an embedded portion and an extended portion. The embedded portion is spaced within the movable cavity, and the area of ​​the projected structure of the embedded portion at the top of the frame-shaped body is larger than the area of ​​the through portion. The extended portion is spaced from the through portion and extends away from the through portion. The outer bottom of the frame-shaped body is fixedly connected to the filter housing, and the end of the extended portion away from the embedded portion is fixedly connected to the filter plate.

[0013] Preferably, exhaust gas separators are provided between the dust removal device and the filter device, and between the filter device and the dust collection device. The exhaust gas separator includes a separator plate, a U-shaped support frame, a drive component, a transmission gear, and a transmission rack. The U-shaped support frame is disposed between the dust removal device and the filter device, or between the filter device and the dust collection device. The separator plate is slidably disposed on the U-shaped support frame. The transmission rack is fixedly disposed at the bottom of the separator plate along its length or width. The drive component is disposed at the opening of the U-shaped support frame, and the transmission gear is sleeved on the drive shaft of the drive component. The transmission rack meshes with the transmission gear to drive the separator plate to move toward or away from the opening of the U-shaped support frame.

[0014] Preferably, the other side wall of the filter housing is provided with an exhaust gas discharge section, the exhaust gas discharge pipeline is provided with a switch valve, and the exhaust gas filtration device further includes a control module and a barometer. The barometer is disposed in the exhaust gas inlet or the exhaust gas outlet. The control module is connected to the switch valve, the barometer, the drive unit, and the drive component, respectively. The control module controls the opening or closing of the switch valve, the drive unit, and the drive component according to the air pressure information detected by the barometer.

[0015] The beneficial effects of the exhaust gas filtration device and tail gas filtration equipment of this utility model are as follows:

[0016] (1) Alternating impact vibration of the filter element is achieved to shake off the dust adhering to the filter element, thereby improving the continuous impact vibration of the filter element and improving the dust removal efficiency.

[0017] (2) The filter device can automatically remove dust without disassembling it, which helps to reduce the adhesion and accumulation of dust and other impurities on the filter element, thus improving the filtration effect of the filter element.

[0018] (3) It helps to reduce or avoid large particulate impurities such as dust adsorbing on the surface of the filter element and causing large-area blockage of the filter element, which helps to extend the service life of the filter device, reduce the number of filter element replacements in the filter device, reduce the time consumed by the filter device after disassembly and installation and leak detection, and improve equipment operating efficiency and production capacity. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the dust removal device and filter element in some embodiments of this utility model;

[0020] Figure 2 This is a schematic diagram of the cam structure and piston connector in the dust removal device in some embodiments of this utility model;

[0021] Figure 3 This is a schematic diagram of the piston unit in the dust removal device in some embodiments of this utility model;

[0022] Figure 4 This is a schematic diagram of the cylindrical piston and buffer component in the dust removal device in some embodiments of this utility model;

[0023] Figure 5 This is a schematic diagram of the tail discharge filtration device in some embodiments of the present invention;

[0024] Figure 6 This is a schematic diagram of the structure of the filter device and exhaust gas separator in some embodiments of the present invention;

[0025] Figure 7 This is a schematic diagram of the structure of the shock absorber in the tail exhaust filtration device in some embodiments of this utility model;

[0026] Figure 8 This is a schematic diagram of the exhaust gas separator in some embodiments of the present invention;

[0027] Figures 1 to 8 The reference numerals in the attached figures are as follows:

[0028] 100. Dust removal device; 110. Main body; 120. Drive unit; 130. Transmission unit; 131. First concave shaft; 132. Second concave shaft; 133. Cam structure; 1331. Cam follower; 134. Tail end shaft; 140. Piston unit; 141. Cylindrical piston; 1411. Groove; 142. Piston connector; 1421. Connecting rod; 1422. Bearing component; 143. Cylindrical housing; 144. Buffer component; 200. Filter device; 210. Filter element; 211. Filter plate; 220. 1. Filter housing; 221. Piston through-hole; 222. Exhaust gas inlet; 223. Exhaust gas outlet; 230. Striking plate; 240. Shock absorber; 241. First connecting member; 2411. Frame-shaped body; 2412. Compression spring; 2413. Compression plate; 2414. Movable cavity; 2415. Through-hole; 242. Second connecting member; 2421. Embedded part; 2422. Extended part; 300. Dust collection device; 400. Exhaust gas separator; 410. Separator plate; 420. C-shaped support frame; 430. Driving member. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0030] To overcome the problems existing in the prior art, this utility model provides a dust removal device and tail discharge filtration equipment, which can remove dust on the filter element without disassembling the filter element, reduce maintenance cycle and increase output.

[0031] In some embodiments, reference is made to Figures 1 to 5 The dust removal device 100 is disposed on the top of the filter element 210. The dust removal device 100 includes a main body 110, a drive unit 120, a transmission unit 130, and several piston units 140. Each piston unit 140 includes a cylindrical piston 141 and a piston connector 142, with the bottom of each cylindrical piston 141 facing the top of the filter element 210. The transmission unit 130 includes several first concave shafts 131 and several second concave shafts 132, which are alternately connected to form a shaft structure. Each of the first concave shafts 131 and the second concave shafts 132 is connected to each cylindrical piston 141 in a one-to-one correspondence via the corresponding piston connector 142. Adjacent first concave shafts... The bottom heights of the cylindrical pistons 141 connected to the first concave shaft 131 and the second concave shaft 132 are different; the drive unit 120 is disposed in the main body 110, and one end of the shaft-shaped structure formed by the first concave shaft 131 and the second concave shaft 132 is rotatably connected to the drive unit 120, so that each first concave shaft 131 rotates around the axis of the shaft-shaped structure and drives each connected cylindrical piston 141 away from the filter element 210. During this process, each second concave shaft 132 rotates around the axis of the shaft-shaped structure and drives each connected cylindrical piston 141 toward the filter element 210, so as to realize the alternating impact and vibration of the filter element 210 and separate the dust from the filter element 210.

[0032] This application describes a transmission unit 130 comprising a plurality of first concave shafts 131 and a plurality of second concave shafts 132. The first concave shafts 131 and second concave shafts 132 are alternately connected to form a shaft-like structure. The plurality of first concave shafts 131 and the plurality of second concave shafts 132 are respectively connected to each of the cylindrical pistons 141 via corresponding piston connectors 142. This allows the drive unit 120 to rotate, driving the first concave shafts 131 and the plurality of second concave shafts 132 to rotate around the axis of the shaft-like structure. This, in turn, drives each cylindrical piston 141 toward or towards the shaft via the piston connectors 142. The pistons reciprocate away from the filter element 210. Furthermore, due to the different heights of the bottoms of the cylindrical pistons 141 connected to adjacent first concave shafts 131 and second concave shafts 132, the pistons 141 connected to the first concave shaft 131 and the pistons 141 connected to the second concave shaft 132 move in opposite directions. That is, during the rotation of each first concave shaft 131 around the axis of the shaft structure, causing the connected cylindrical pistons 141 to move away from the filter element 210, each second concave shaft 132 rotates around the axis of the shaft structure, causing the connected cylindrical pistons 141 to move away from the filter element 210. During the movement of the connected cylindrical pistons 141 toward the filter element 210, each of the first concave shafts 131 rotates around the axis of the shaft structure and drives the connected cylindrical pistons 141 toward the filter element 210. Simultaneously, each of the second concave shafts 132 rotates around the axis of the shaft structure and drives the connected cylindrical pistons 141 away from the filter element 210. This achieves alternating impact and vibration on the filter element 210 to shake off the dust adhering to it, thus improving the continuous impact and vibration on the filter element 210 and enhancing the dust removal efficiency. Moreover, the filter device 200 can automatically remove dust without disassembling it, which helps reduce the accumulation of dust and other impurities on the filter element 210, thereby improving the filtration effect of the filter element 210. It also helps reduce or avoid large particles of dust and other impurities adsorbing on the surface of the filter element 210 and causing large-area blockage of the filter element 210, thus extending the service life of the filter device 200, reducing the number of times the filter element in the filter device 200 needs to be replaced, and reducing the time consumed by the installation and leak detection after the filter device 200 is disassembled. This can improve the operating efficiency and production capacity of the equipment.

[0033] In this application, all the connections between the first concave shaft 131 and the piston connector 142 are on a first straight line, and all the connections between the second concave shaft 132 and the piston connector 142 are on a second straight line. The first straight line, the second straight line, and the axis extension line of the drive unit 120 are parallel to each other. The first straight line, the second straight line, and the axis extension line of the drive unit 120 are located in the same plane, and the distance from the first straight line to the axis extension line of the drive unit 120 is equal to the distance from the second straight line to the axis extension line of the drive unit 120. When the first concave shaft 131 and the second concave shaft 132 rotate around the axis extension line of the drive unit 120, i.e., the axis of the shaft structure, the centrifugal force generated by the first concave shaft 131 and the centrifugal force generated by the second concave shaft 132 partially cancel each other out, avoiding the generation of large centrifugal force that could damage the drive unit 120 and other components.

[0034] In some embodiments, reference is made to Figure 1 The transmission unit 130 further includes a tail shaft 134. One end of the tail shaft 134 is connected to a first concave shaft 131 or a plurality of second concave shafts 132, and the other end of the tail shaft 134 is movably connected to the side wall of the main body 110. That is, the tail shaft 134 can rotate relative to the side wall of the main body 110 to avoid affecting the drive unit 120 from rotating the first concave shaft 131 and the plurality of second concave shafts 132.

[0035] In some embodiments, reference is made to Figure 1 and Figure 2The dust removal device 100 further includes a cylindrical housing 143 movably sleeved on the side wall of the cylindrical piston 141 and open at both ends. The cylindrical housing 143 is disposed within the main body 110. The transmission unit 130 further includes several cam structures 133. Several first concave shafts 131 and several second concave shafts 132 pass through the cam structures 133 in an eccentric manner and are rotatably connected to each of the cam structures 133 in a one-to-one correspondence. This allows the bottom of the cam structure 133 to contact the top surface of the piston connector 142 during movement towards or away from the corresponding piston connector 142, pushing the piston connector 142 to drive the corresponding cylindrical piston 141 to move along the axial direction of the cylindrical housing 143 toward the filter element 210. That is, the drive unit 120 drives the first concave shaft 131 and the second concave shaft 132 to rotate around the axis of the shaft structure to drive the connected cam structures 133 to rotate. The bottom of the wheel structure 133 moves toward or away from the corresponding piston connector 142, and the cam structure 133 moves toward the piston connector 142 and contacts the top surface of the piston connector 142 during its movement, pushing the piston connector 142 to drive the corresponding cylindrical piston 141 to move toward the filter element 210 along the axial direction of the cylindrical housing 143; the piston unit 140 also includes a plurality of reset members, which are respectively disposed on the piston connector 142 or the cylindrical piston 141, so that the corresponding cylindrical piston 141 moves away from the filter element 210 along the axial direction of the cylindrical housing 143 until the cylindrical piston 141 returns to its original position, that is, the position where the top of the piston connector 142 can contact the bottom of the cam structure 133, so that the cylindrical piston 141 can reciprocate along the axial direction of the cylindrical housing 143. The cam structure 133 is simple and compact, and its motion state can be preset. It can ensure that the movement of the piston connector 142 driving the corresponding cylindrical piston 141 along the axial direction of the cylindrical housing 143 toward or away from the filter element 210 can be precisely controlled. Moreover, it can effectively limit the axial movement of the cylindrical piston 141 along the cylindrical housing 143. That is, the movement of the cylindrical piston 141 occupies little space, reducing the volume of the cylindrical housing 143, which helps to reduce the overall volume of the dust removal device 100.

[0036] In some embodiments, the reset element includes a cam follower 1331 disposed on the piston connector 142 facing the top of the cam structure 133 (e.g., Figure 2As shown in the figure, or an elastic element disposed on the cylindrical piston 141, the reset element is configured to allow the piston connector 142 to automatically move the cylindrical piston 141 away from the filter element 210 after the piston connector 142 drives the cylindrical piston 141 to move towards the filter element 210, that is, the piston connector 142 returns to a position where it can contact the cam structure 133, thus realizing the reciprocating linear motion of the cylindrical piston 141. The specific structure of the cam structure 133 and the necessary structures adapted to the cam structure 133 are common knowledge in the art and will not be described in detail here.

[0037] In some embodiments, reference is made to Figure 1 One end of the piston connector 142 is rotatably connected to the corresponding first concave shaft 131 or second concave shaft 132, and the other end is fixedly connected to the corresponding cylindrical piston 141 to drive the cylindrical piston 141 to move toward or away from the filter element 210. There is a gap between adjacent cylindrical pistons 141 to prevent movement interference. That is, when the piston connector 142 drives the cylindrical piston 141 to rotate with the first concave shaft 131 or second concave shaft 132, the rotation of one end of the piston connector 142 with the corresponding first concave shaft 131 or second concave shaft 132 keeps the piston connector 142 and the cylindrical piston 141 hanging downwards in the axial direction, ensuring that the bottom of each cylindrical piston 141 always faces the top of the filter element 210. This avoids the cylindrical piston 141 needing a large movement space for circular motion, thus helping to reduce the overall volume of the dust removal device 100.

[0038] In some embodiments, reference is made to Figure 3 The piston connector 142 includes a bearing 1422 and a connecting rod 1421. One end of the connecting rod 1421 is fixedly connected to the bearing 1422, and the other end of the connecting rod 1421 is fixedly connected to the cylindrical piston 141. The bearing 1422 is sleeved on the outside of the first concave shaft 131 or the second concave shaft 132.

[0039] In some embodiments, reference is made to Figure 1The dust removal device 100 further includes a plurality of cylindrical housings 143 with open ends disposed within the main body 110. The inner diameter of the cylindrical housing 143 along the direction perpendicular to the axis of the shaft structure is greater than the diameter of the circular structure formed by the rotational trajectory of the first concave shaft 131 or the second concave shaft 132. The cylindrical piston 141 penetrates the cylindrical housing 143 from the top and has a gap between it and the cylindrical housing 143 to allow the cylindrical piston 141 to move axially along the cylindrical housing 143 and to allow the cylindrical piston 141 to move radially along the cylindrical housing 143. When the piston connector 142 drives the cylindrical piston 141 to rotate with the first concave shaft 131 or the second concave shaft 132, the cylindrical piston 141 will move along the cylindrical housing 143 in a direction perpendicular to the axis of the shaft structure. Since the inner diameter of the cylindrical housing 143 in the direction perpendicular to the axis of the shaft structure is greater than the diameter of the circular structure formed by the rotation trajectory of the first concave shaft 131 or the second concave shaft 132, the radial movement lead of the cylindrical piston 141 along the cylindrical housing 143 is satisfied, thereby avoiding problems such as interference and friction between the cylindrical piston 141 and the cylindrical housing 143.

[0040] In this embodiment, the direction perpendicular to the axis of the shaft-shaped structure is the direction perpendicular to the arrangement direction of the plurality of cylindrical pistons 141. In some embodiments, the cylindrical housing 143 is a cylindrical structure, and the inner diameter of the cylindrical housing 143 along the direction perpendicular to the axis of the shaft-shaped structure is the diameter of the cylindrical housing 143. In other embodiments, the cylindrical housing 143 has a rectangular structure. The inner diameter of the cylindrical housing 143 along the direction perpendicular to the axis of the shaft structure is the length of the cylindrical housing 143, and the inner diameter of the cylindrical housing 143 along the arrangement direction of the cylindrical pistons 141 is the width of the cylindrical housing 143. Since the cylindrical pistons 141 only move in the axial direction (height direction) and the length direction of the cylindrical housing 143, the inner diameter of the cylindrical housing 143 along the arrangement direction of the cylindrical pistons 141, i.e., the width of the cylindrical housing 143, can be appropriately reduced to satisfy the gap setting between the cylindrical pistons 141 and the cylindrical housing 143, so that the cylindrical housing 143 does not interfere with the movement of the cylindrical pistons 141.

[0041] In this embodiment, when the first concave shaft 131 or the second concave shaft 132 moves in a circular motion around the axis of the shaft structure, a circular motion trajectory will be formed. The diameter of the circular structure formed by the rotational motion trajectory of the first concave shaft 131 or the second concave shaft 132 is the diameter of the circular structure where the circular motion trajectory is located.

[0042] In some embodiments, reference is made to Figure 3 and Figure 4 The piston unit 140 further includes a buffer 144. The bottom of the cylindrical piston 141 is provided with a groove 1411. The buffer 144 is partially embedded in the groove 1411, and the remaining part of the buffer 144 protrudes from the bottom working surface of the cylindrical piston 141. This ensures that when the cylindrical piston 141 strikes and vibrates the filter element 210, the buffer 144 contacts the filter element 210, thereby providing a buffering effect and preventing violent impact when the piston unit 140 strikes and vibrates the filter element 210, thus providing a certain degree of protection for the filter element 210.

[0043] In some embodiments, the buffer 144 is an airbag, rubber pad, etc., which not only provides good cushioning but also helps to avoid making loud noises.

[0044] In some embodiments, reference is made to Figure 1 , Figure 5 and Figure 6 The tail exhaust filtration device includes a filter device 200, a dust collection device 300, and a dust removal device 100. The dust removal device 100 is disposed on the top of the filter device 200, and the cylindrical piston 141 in the dust removal device 100 moves toward or away from the filter element 210 in the filter device 200 to alternately strike and vibrate the filter element 210 and separate the dust from the filter element 210. The dust collection device 300 is disposed at the bottom of the filter device 200 to collect the dust removed from the filter element 210. After the filter element 210 filters the exhaust gas generated during the epitaxial growth of the semiconductor device, the dust removal device 100 alternately beats and vibrates the filter element 210 to separate the dust from the filter element 210. The dust collection device 300 then collects the dust removed from the filter element 210. This allows for timely removal of dust accumulated on the filter element 210 as needed, and timely collection and removal of the dust removed from the filter element 210, preventing large particles of dust and other impurities from adsorbing onto the surface of the filter element 210 and causing large-area clogging of the filter element 210.

[0045] In some embodiments, the dust collection device 300 includes a dust collection box and a dust suction device connected together. The dust collection box is located at the bottom of the main body 110, and the dust suction device can remove the dust in the dust collection box in a timely manner to prevent the dust in the dust collection box from splashing back into the main body 110.

[0046] In some embodiments, reference is made to Figure 6The filter device 200 further includes a filter housing 220, and the filter element 210 is disposed inside the filter housing 220. The top of the filter housing 220 is provided with several piston through-parts 221 through which the cylindrical piston 141 passes. One side wall of the filter housing 220 is provided with an exhaust gas inlet 222 that communicates with the exhaust gas discharge pipe. The bottom of the filter housing 220 is provided with a dust removal port (not shown in the figure) that communicates with the dust collection device 300, i.e., the dust collection box.

[0047] In some embodiments, the filter element 210 is integral, and a plurality of the cylindrical pistons 141 are arranged sequentially on the top of the filter element 210 along the axial direction of the shaft structure, and alternately strike and vibrate the top of the filter element 210 to separate dust from the filter element 210.

[0048] In other embodiments, reference is made to Figure 6 The filter element 210 includes a plurality of filter plates 211 arranged sequentially along the axis of the axial structure within the filter housing 220. The top of each filter plate 211 is inclined toward the exhaust gas inlet 222, and the projection structures of adjacent filter plates 211 at the bottom of the filter housing 220 are spaced apart. This ensures that when the cylindrical piston 141 alternately strikes and vibrates the filter plates 211, the dust separated from each filter plate 211 will not fall onto adjacent filter plates 211, which is beneficial to improving the dust removal efficiency of the filter plates 211.

[0049] In some embodiments, the number of filter plates 211 is less than or equal to the number of cylindrical pistons 141, that is, the filter plates 211 and the cylindrical pistons 141 can be arranged in a one-to-one correspondence. When the thickness of the filter plate 211 along the axial direction of the shaft structure is large, two or more cylindrical pistons 141 can be arranged on the top of the filter plate 211 to improve the dust removal efficiency of the filter plate 211.

[0050] In some embodiments, reference is made to Figure 6 The filter element 210 also includes a plurality of striking plates 230, which are arranged one-to-one at the top end of the filter plate 211 to serve as striking points when the cylindrical piston 141 falls.

[0051] In some embodiments, the filtration device 200 further includes several shock absorbers 240. The shock absorbers 240 are provided between the top end of the filter plate 211 and the filter housing 220, and between the bottom end of the filter plate 211 and the filter housing 220. The filter plate 211 will vibrate due to the alternating impact of the cylindrical piston 141. The shock absorbers 240 provided between the filter plate 211 and the filter housing 220 help to reduce the vibration transmission between the filter plate 211 and the filter housing 220, and avoid adverse effects on the filter housing 220 and other components.

[0052] In some specific embodiments, reference is made to Figure 6 The filter plate 211 is provided with three parts, namely a first filter plate, a second filter plate and a third filter plate. The shock absorber 240 is provided with nine parts. Two shock absorbers 240 are provided between the top part of the first filter plate and the filter housing 220, between the top part of the second filter plate and the filter housing 220, and between the top part of the third filter plate and the filter housing 220. One shock absorber 240 is provided between the bottom part of the first filter plate and the filter housing 220, between the bottom part of the second filter plate and the filter housing 220, and between the bottom part of the third filter plate and the filter housing 220.

[0053] In some embodiments, reference is made to Figure 7The shock absorber 240 includes a first connector 241 and a second connector 242. The first connector 241 includes a frame-shaped body 2411, a compression spring 2412 and a compression plate 2413 disposed within the frame-shaped body 2411. The compression plate 2413 is disposed between the compression spring 2412 and the inner bottom of the frame-shaped body 2411, and a movable cavity 2414 is provided between the top of the compression plate 2413 and the top of the frame-shaped body 2411. The top of the frame-shaped body 2411 has a through portion 2415 communicating with the movable cavity 2414. The second connector 242 includes an embedded portion 2421 and an extended portion 2422. The recessed portion 2421 is spaced within the movable cavity 2414, and the area of ​​the projected structure of the recessed portion 2421 on the top of the frame-shaped body 2411 is larger than the area of ​​the through portion 2415, so that the recessed portion 2421 cannot detach from the frame-shaped body 2411. The extended portion 2422 is spaced apart from the through portion 2415 and extends in a direction away from the through portion 2415, that is, the thickness of the extended portion 2422 is greater than the depth of the movable cavity 2414. The outer bottom of the frame-shaped body 2411 is fixedly connected to the filter housing 220, and the end of the extended portion 2422 away from the recessed portion 2421 is fixedly connected to the filter plate 211. When the filter plate 211 vibrates, it causes the extension portion 2422 to vibrate, which in turn causes the embedded portion 2421 to move within the movable cavity 2414. When the embedded portion 2421 presses the compression plate 2413 and the compression spring 2412, the vibration force is weakened or eliminated by the compression spring 2412, thereby reducing the vibration transmission between the filter plate 211 and the filter housing 220 and avoiding adverse effects on the filter housing 220 and other components.

[0054] In some embodiments, the second connector 242 is a one-piece molded structure.

[0055] In some embodiments, reference is made to Figure 6 and Figure 8Both the dust removal device 100 and the filter device 200, and the filter device 200 and the dust collection device 300, are provided with exhaust gas separators 400. Each exhaust gas separator 400 includes a separator plate 410, a U-shaped support frame 420, a drive component 430, a transmission gear, and a transmission rack. The U-shaped support frame 420 is disposed between the dust removal device 100 and the filter device 200, or between the filter device 200 and the dust collection device 300. The partition plate 410 is slidably disposed on the U-shaped support frame 420. The transmission rack is fixedly disposed on the bottom of the partition plate 410 along the length or width direction of the partition plate 410. The driving member 430 is disposed at the opening of the U-shaped support frame 420, and the transmission gear is sleeved on the drive shaft of the driving member 430. The transmission rack meshes with the transmission gear to drive the partition plate 410 to move toward or away from the opening of the U-shaped support frame 420. That is, the forward rotation of the driving member 430 drives the transmission gear to rotate, causing the transmission rack to mesh with the transmission gear and move the partition plate 410 away from the opening of the U-shaped support frame 420, so that the partition plate 410 covers and seals the U-shaped support frame 420, thereby separating the dust removal device 100 and the filter device 200, and the filter device 200 and the dust collection device 300, so that when the filter device 200 filters the exhaust gas, it can prevent the exhaust gas from entering the dust removal device 100 and the dust collection device 300; the reverse rotation of the driving member 430 drives the transmission gear to rotate The rotation causes the transmission rack to mesh with the transmission gear, thereby moving the partition plate 410 toward the opening of the U-shaped support frame 420, so that the U-shaped support frame 420 opens, even if the partition plate 410 does not obstruct the U-shaped support frame 420, so that the dust removal device 100 and the filter device 200 are connected, so that the cylindrical piston 141 passes through the U-shaped support frame 420 and enters the filter housing to alternately strike and vibrate the filter element 210, and so that the filter device 200 and the dust collection device 300 are connected, so that the dust collection device 300 collects the dust that falls from the filter device 200.

[0056] In this embodiment, when the transmission rack is fixedly disposed at the bottom of the partition plate 410 along its length, an opening is provided on one short sidewall of the C-shaped support frame 420, and the partition plate 410 slides along its length. When the transmission rack is fixedly disposed at the bottom of the partition plate 410 along its width, an opening is provided on one long sidewall of the C-shaped support frame 420, and the partition plate 410 slides along its width.

[0057] In some embodiments, the inner sidewall of the U-shaped support frame 420 is also provided with a guide rail adapted to the sidewall of the partition plate 410, so that the partition plate 410 can slide smoothly and quickly.

[0058] In some embodiments, the inner sidewall of the C-shaped support frame 420 is also provided with a C-shaped seal, so that the partition plate 410 can maintain good sealing with the C-shaped support frame 420 after it covers the C-shaped support frame 420, which helps to prevent exhaust gas from entering the dust removal device 100 and the dust collection device 300.

[0059] In some embodiments, reference is made to Figure 6 The filter housing 220 has an exhaust gas discharge section 223 on its other side wall. The exhaust gas discharge pipeline is equipped with a switch valve. The exhaust gas filtration device also includes a control module and a barometer. The barometer is located at the exhaust gas inlet 222 or the exhaust gas outlet 223. The control module is connected to the switch valve, the barometer, the drive unit 120, and the drive component 430, respectively. The control module controls the opening or closing of the switch valve, the drive unit 120, and the drive component 430 based on the air pressure information detected by the barometer, so as to realize automatic start of dust removal.

[0060] In this embodiment, when the barometer is installed in the exhaust gas inlet 222, the control module determines that the air pressure in the exhaust gas inlet 222 is greater than the air pressure threshold based on the air pressure information; or when the barometer is installed in the exhaust gas outlet 223, the control module determines that the air pressure in the exhaust gas outlet 223 is less than the air pressure threshold based on the air pressure information. Then, the control module controls the closing of the switching valve to stop supplying exhaust gas to the filter device 200. Afterwards, the control module controls the opening of the drive component 430 and moves the partition plate 410 toward the opening of the U-shaped support frame 420, so that the dust removal device 100 and the filter device 200, and the filter device 200 and the dust collection device 300 are connected... The control module then controls the opening of the drive unit 120, causing the drive unit 120 to rotate the first concave shaft 131 and the second concave shaft 132 around the axis of the shaft structure, and causing the connected cylindrical pistons 141 to move towards or away from the filter element 210. This achieves alternating impact and vibration on the filter element 210, separating dust from it. The dust on the filter plate 211 falls into the dust collection device 300. Therefore, when cleaning dust from the filter element 210, the filter device can automatically remove dust without disassembling the filter element 210, reducing the maintenance cycle of the filter element 210 and increasing the output of semiconductor device manufacturing equipment. The air pressure threshold can be set according to actual needs to improve the filtration effect of the filter element and prevent large particles such as dust from adsorbing onto the surface of the filter element and causing large-area clogging.

[0061] In other embodiments, dust removal can be initiated manually.

[0062] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A dust removal device, characterized in that, The dust removal device is designed to be mounted on top of a filter element. It includes a main body, a drive unit, a transmission unit, and several piston units. Each piston unit includes a cylindrical piston and a piston connector, with the bottom of each cylindrical piston facing the top of the filter element. The transmission unit includes a plurality of first concave shafts and a plurality of second concave shafts. The first concave shafts and the second concave shafts are alternately connected to form a shaft structure. The plurality of first concave shafts and the plurality of second concave shafts are respectively connected to each of the cylindrical pistons through the corresponding piston connectors. The bottom heights of the cylindrical pistons connected to adjacent first concave shafts and second concave shafts are different. The drive unit is located inside the main body. One end of the shaft-shaped structure formed by a plurality of first concave shafts and a plurality of second concave shafts is rotatably connected to the drive unit. During the process of each first concave shaft rotating around the axis of the shaft-shaped structure and driving each connected cylindrical piston away from the filter element, each second concave shaft rotating around the axis of the shaft-shaped structure and driving each connected cylindrical piston toward the filter element, thereby realizing the alternating impact and vibration action on the filter element and separating the dust from the filter element.

2. The dust removal device according to claim 1, characterized in that, It also includes a cylindrical housing that is movably fitted onto the side wall of the cylindrical piston and has openings at both ends, the cylindrical housing being disposed within the main body; The transmission unit further includes several cam structures, several first concave shafts and several second concave shafts respectively pass through in an eccentric manner and are rotatably connected to several cam structures one by one, so that the bottom of the cam structure contacts the top surface of the piston connector during the movement of the piston connector towards or away from the corresponding piston connector and pushes the piston connector to drive the corresponding cylindrical piston to move towards the filter element along the axial direction of the cylindrical housing. The piston unit further includes a plurality of reset members, which are respectively disposed on the piston connector or the cylindrical piston, so that the corresponding cylindrical piston moves away from the filter element along the axial direction of the cylindrical housing.

3. The dust removal device according to claim 1, characterized in that, One end of the piston connector is rotatably connected to the corresponding first concave shaft or second concave shaft, and the other end is fixedly connected to the corresponding cylindrical piston to drive the cylindrical piston to move toward or away from the filter element. There is a gap between adjacent cylindrical pistons so that there is no movement interference between adjacent cylindrical pistons.

4. The dust removal device according to claim 3, characterized in that, The dust removal device further includes several cylindrical housings with open ends disposed within the main body. The inner diameter of the cylindrical housing along the direction perpendicular to the axis of the shaft structure is greater than the diameter of the circular structure formed by the rotational trajectory of the first concave shaft or the second concave shaft. The cylindrical piston penetrates the cylindrical housing from the top and has a gap between it and the cylindrical housing to allow the cylindrical piston to move axially along the cylindrical housing and to allow the cylindrical piston to move radially along the cylindrical housing.

5. The dust removal device according to claim 1, characterized in that, The piston unit also includes a buffer member. The bottom of the cylindrical piston is provided with a groove, the buffer member is partially embedded in the groove, and the remaining part of the buffer member protrudes from the bottom working surface of the cylindrical piston.

6. A tail-end filtration device, characterized in that, The device includes a filter, a dust collection device, and a dust removal device as described in any one of claims 1 to 5. The dust removal device is disposed at the top of the filter and a cylindrical piston in the dust removal device moves toward or away from the filter element in the filter to alternately strike and vibrate the filter element and separate dust from the filter element. The dust collection device is disposed at the bottom of the filter to collect the dust removed from the filter element.

7. The tail-exhaust filtration device according to claim 6, characterized in that, The filter device also includes a filter housing, the top of which is provided with several piston through-parts for the cylindrical piston to pass through, and one side wall of the filter housing is provided with an exhaust gas inlet that is connected to the exhaust gas discharge pipe. The filter element includes several filter plates arranged sequentially along the axial direction of the axial structure within the filter housing. The top of each filter plate is inclined toward the exhaust gas inlet, and adjacent filter plates are spaced apart in the projection structure at the bottom of the filter housing.

8. The tail-exhaust filtration device according to claim 7, characterized in that, Exhaust gas separators are provided between the dust removal device and the filter device, and between the filter device and the dust collection device; The exhaust gas separator includes a separator plate, a U-shaped support frame, a drive component, a transmission gear, and a transmission rack. The U-shaped support frame is disposed between the dust removal device and the filter device, or between the filter device and the dust collection device. The separator plate is slidably disposed on the U-shaped support frame. The transmission rack is fixedly disposed at the bottom of the separator plate along its length or width. The drive component is disposed at the opening of the U-shaped support frame, and the transmission gear is sleeved on the drive shaft of the drive component. The transmission rack meshes with the transmission gear to drive the separator plate to move toward or away from the opening of the U-shaped support frame.

9. The tail-exhaust filtration device according to claim 8, characterized in that, The other side wall of the filter housing is provided with an exhaust gas discharge section, and the exhaust gas discharge pipeline is provided with a switch valve. The exhaust gas filtration device also includes a control module and a barometer. The barometer is located at the exhaust gas inlet or the exhaust gas outlet. The control module is connected to the switch valve, the barometer, the drive unit, and the drive component, respectively. The control module controls the opening or closing of the switch valve, the drive unit, and the drive component based on the air pressure information detected by the barometer.

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