A germane purification filtration device

Abstract

The utility model relates to gas purification device technical field, concretely relates to a germane purification filter device, including primary filter jar, middle filter jar and post filter jar, the inside of primary filter jar is provided with active alumina drying agent, is provided with soda lime adsorbent in middle filter jar, is provided with molecular sieve filter layer, active carbon adsorption layer and metal chelation resin layer from below to top in post filter jar, the side top of primary filter jar is fixedly installed with air inlet pipe, the air outlet end of air inlet pipe inserts into active alumina drying agent, is linked through middle pipe and communicates between primary filter jar and middle filter jar, the air outlet end of middle pipe inserts into soda lime adsorbent, is linked through conveying pipe and communicates between middle filter jar and post filter jar, the air outlet end of conveying pipe inserts into molecular sieve filter layer, the side top of post filter jar is fixedly installed with filter rear pipe. The utility model has efficient filtration treatment's function through setting up primary filter jar, middle filter jar and post filter jar three -stage filtration structure, and is convenient to use.

Description

Technical Field

[0001] This utility model relates to the technical field of gas purification devices, and more specifically, to a germane purification and filtration device. Background Technology

[0002] Germanane, as an important specialty gas, has wide applications in semiconductor material preparation, solar cell manufacturing, and infrared optical device production. Its purity directly affects the performance and quality of related products. For example, in the semiconductor industry, trace impurities in germanane can lead to performance degradation or even device failure; therefore, the purity requirement for germanane is extremely high, typically exceeding 99.999%. Since various impurities are inevitably introduced during the preparation of germanane, mainly including inert gases such as hydrogen, nitrogen, and methane, as well as polar impurities such as water, carbon dioxide, and metal chlorides, purification operations are usually required to ensure purity. These purification operations typically utilize appropriate filtration devices.

[0003] Patent CN113181752B discloses a germanane collection and purification device, comprising a first gas storage tank, a condenser, and a purifier. A pretreatment device is located on one side of the first gas storage tank, and its exhaust port is connected to the pretreatment device via a pipe. A condenser is located on one side of the pretreatment device, and its inlet is connected to the condenser via a pipe. A purifier is located on one side of the condenser, and its exhaust port is connected to the purifier's inlet via a pipe. A second gas storage tank is located on one side of the purifier, and its exhaust port is connected to the second gas storage tank's inlet via a pipe. A liquid storage tank is located on one side of the pretreatment device, and its inlet is connected to the pretreatment device via a pipe. This invention, by adding a pretreatment device before purification, performs preliminary filtration and purification of the germanane gas, which can greatly improve the removal efficiency of carbon dioxide and acidic gases from the germanane gas, improve the purification efficiency of the purifier, and achieve better purification of the germanane gas.

[0004] While the aforementioned technical solutions have their respective advantages, most existing germane purification and filtration devices employ single adsorption or cryogenic distillation methods for purification. Single adsorption methods typically use adsorbents such as molecular sieves and activated carbon, which, although capable of removing some polar impurities, are ineffective at removing inert gas impurities with boiling points close to germane, increasing production costs and operational complexity. Cryogenic distillation utilizes the boiling point differences of different gases for separation, but its equipment is complex, energy-intensive, and has limited efficiency in separating low-boiling-point impurities, making it difficult to meet the demand for high-purity germane. Therefore, we propose a germane purification and filtration device. Utility Model Content

[0005] The purpose of this invention is to provide a germane purification and filtration device to address the deficiencies mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: A germane purification and filtration device includes a primary filter, a secondary filter, and a post-filter. The primary filter contains an activated alumina desiccant. The secondary filter contains a soda lime adsorbent. The post-filter contains, from bottom to top, a molecular sieve filter layer, an activated carbon adsorbent layer, and a metal chelating resin layer. An air inlet pipe is fixedly installed on the top side of the primary filter, with its outlet inserted into the activated alumina desiccant. The primary filter and the secondary filter are connected by a central connecting pipe, the inlet of which is inserted into the top interior of the primary filter, and the outlet of which is inserted into the soda lime adsorbent. The secondary filter and the post-filter are connected by a delivery pipe, the inlet of which is inserted into the top interior of the secondary filter, and the outlet of which is inserted into the molecular sieve filter layer. A post-filter pipe is fixedly installed on the top side of the post-filter.

[0007] Preferably, a top cover is detachably installed on the top of the rear filter tank, and a sealing ring is provided between the top cover and the top of the rear filter tank; Preferably, a support base is fixedly installed on the top of the outer side of the rear filter tank, the sealing ring is embedded in the support base, and the top cover is pressed against the sealing ring; The above two features enable sealing operations, and the top cover is removable, while the sealing ring improves the sealing effect.

[0008] Preferably, an addition pipe is fixedly installed on the top of both the primary filter tank and the secondary filter tank, and a sealing cap is threaded onto the addition pipe; This setting facilitates the addition of filter consumables.

[0009] Preferably, a discharge pipe is fixedly installed at the bottom of the primary filter tank, the intermediate filter tank, and the post-filter tank, and a discharge valve is fixedly installed on the discharge pipe; This setting facilitates the removal and replacement of worn-out filter media.

[0010] Preferably, the bottoms of the primary filter tank, the intermediate filter tank, and the post-filter tank are all funnel-shaped, and the plane of the inner wall of the funnel is inclined downward at 45° to 60°.

[0011] Preferably, the exterior of the post-filter canister is provided with a thermostatic sleeve for introducing a heating medium to heat the interior of the post-filter canister. A medium inlet pipe is fixedly installed on the bottom of one side of the thermostatic sleeve, and a medium outlet pipe is fixedly installed on the top of the other side of the thermostatic sleeve. Preferably, a side tube is fixedly installed on the bottom of the other side of the thermostatic sleeve, and a valve is fixedly installed on the side tube. The plane where the bottom wall of the thermostatic sleeve is located is inclined downward at 5°~15° towards the side tube. The above two settings enable reasonable heating operations and improve adsorption efficiency.

[0012] Compared with the prior art, the beneficial effects of this utility model are: 1. This utility model adopts a three-stage filtration structure consisting of a primary filter, a secondary filter, and a post-filter. The activated alumina desiccant in the primary filter removes moisture, the soda lime adsorbent in the secondary filter absorbs acidic impurities, and the molecular sieve filter layer, activated carbon adsorption layer, and metal chelating resin layer in the post-filter sequentially remove small molecule impurities, organic impurities, and metal ions. This achieves stepwise and efficient removal of multiple impurities in germane, solves the problem of incomplete removal by a single purification method, and improves the purity of germane to meet the requirements of high purity.

[0013] 2. This utility model achieves convenient addition and replacement of filter consumables by setting an addition pipe with a sealing cover at the top of the primary filter tank and the intermediate filter tank, setting a discharge pipe with a discharge valve at the bottom, and setting a detachable top cover at the top of the post filter tank.

[0014] 3. This utility model achieves heating operation of the adsorption process by setting a constant temperature sleeve outside the post-filter tank and introducing a heating medium to maintain a suitable temperature, thereby improving the efficiency of the adsorbent. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the exploded structure of this utility model; Figure 3 This is a partial structural schematic diagram of the present invention; The meanings of the labels in the diagram are as follows: 1. Pre-filter; 10. Activated alumina desiccant; 11. Air inlet pipe; 12. Intermediate filter; 13. Soda lime adsorbent; 14. Central through pipe; 15. Post-filter; 151. Molecular sieve filter layer; 152. Activated carbon adsorption layer; 153. Metal chelating resin layer; 16. Support base; 161. Sealing ring; 17. Top cover; 18. Post-filter pipe; 19. Delivery pipe; 2. Add tube; 20. Seal cap; 3. Discharge pipe; 30. Discharge valve; 4. Thermostatic sleeve; 40. Medium inlet pipe; 41. Medium outlet pipe; 42. Side pipe; 43. Valve. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Please see Figures 1-3 This utility model provides a technical solution: a germane purification and filtration device, including a primary filter tank 1, a secondary filter tank 12, and a post-filter tank 15. The primary filter tank 1 contains activated alumina desiccant 10. The secondary filter tank 12 contains soda lime adsorbent 13. The post-filter tank 15 contains, from bottom to top, a molecular sieve filter layer 151, an activated carbon adsorbent layer 152, and a metal chelating resin layer 153. An air inlet pipe 11 is fixedly installed on the top side of the primary filter tank 1. The inlet end of the air inlet pipe 11 is connected to a gas cylinder containing germane, and the outlet end of the air inlet pipe 11 is inserted into the activated carbon filter. Inside the alumina desiccant 10, the primary filter tank 1 and the intermediate filter tank 12 are connected by a central connecting pipe 14. The inlet end of the central connecting pipe 14 is inserted into the top of the primary filter tank 1, and the outlet end of the central connecting pipe 14 is inserted into the soda lime adsorbent 13. The intermediate filter tank 12 and the post-filter tank 15 are connected by a delivery pipe 19. The inlet end of the delivery pipe 19 is inserted into the top of the intermediate filter tank 12, and the outlet end of the delivery pipe 19 is inserted into the molecular sieve filter layer 151. A post-filter pipe 18 is fixedly installed on the top side of the post-filter tank 15, and the outlet end of the post-filter pipe 18 is used to connect to a new air cylinder. Through the above structure, germane undergoes multi-stage filtration, gradually removing moisture, acidic impurities, small molecule impurities, organic impurities, and metal ions, thereby improving the purity of germane. Finally, the purified germane is filled into a new gas cylinder.

[0018] Specifically, the molecular sieve filter layer 151 can be a 13X type molecular sieve, which can further remove residual moisture and some small molecule impurities; the activated carbon adsorption layer 152 is used to adsorb organic impurities; and the metal chelating resin layer 153 can effectively remove metal ion impurities in germanane.

[0019] like Figure 3As shown, a top cover 17 is detachably mounted on the top of the post-filter tank 15 via multiple fastening bolts. A sealing ring 161 is provided between the top cover 17 and the top of the post-filter tank 15. A support base 16 is fixedly mounted on the top of the outer side of the post-filter tank 15. The top surface of the support base 16 is flush with the top surface of the post-filter tank 15. The sealing ring 161 is embedded in the support base 16, and the top cover 17 is pressed tightly onto the sealing ring 161. The cooperation between the top cover 17 and the sealing ring 161 allows the post-filter tank 15 to be easily opened for maintenance and replacement of the internal filter layer, while ensuring good sealing performance to prevent gas leakage from affecting the purification effect. The top cover 17 pressing the sealing ring 161 makes the sealing structure more stable, further enhancing the sealing performance of the post-filter tank 15 and ensuring the airtightness of the purification process.

[0020] In this embodiment, both the primary filter tank 1 and the secondary filter tank 12 are fixedly installed with an addition pipe 2, and a sealing cap 20 is threaded onto the addition pipe 2. The addition pipe 2 makes the addition of filter consumables more convenient, while the sealing cap 20 ensures the airtightness of the tank and prevents impurities from entering.

[0021] Specifically, a discharge pipe 3 is fixedly installed at the bottom of the primary filter tank 1, the intermediate filter tank 12, and the post-filter tank 15, and a discharge valve 30 is fixedly installed on the discharge pipe 3. The discharge valve 30 allows the failed filter media to be discharged smoothly, facilitating timely replacement with new media and ensuring the continuous and effective operation of the filtration device.

[0022] Furthermore, the bottoms of the primary filter tank 1, the intermediate filter tank 12, and the post-filter tank 15 are all funnel-shaped, and the plane of the inner wall of the funnel is inclined downward at 45°~60°, so that the filter consumables are more likely to gather in the discharge pipe 3 under the action of gravity, which facilitates complete discharge and reduces residue.

[0023] like Figure 3 As shown, a thermostatic sleeve 4 is provided on the outside of the post-filter tank 15 for heating the interior of the tank by introducing a heating medium. A gap exists between the outer wall of the post-filter tank 15 and the inner wall of the thermostatic sleeve 4. The top and bottom of the thermostatic sleeve 4 are connected to the outer wall of the post-filter tank 15. A medium inlet pipe 40 is fixedly installed on the bottom of one side of the thermostatic sleeve 4, and a medium outlet pipe 41 is fixedly installed on the top of the other side of the thermostatic sleeve 4. The thermostatic sleeve 4 provides a suitable temperature for the filter layer inside the post-filter tank 15 by introducing a heating medium, thereby improving the adsorption efficiency of the adsorbent and optimizing the purification effect.

[0024] like Figure 3As shown, a side tube 42 is fixedly installed on the bottom of the other side of the thermostatic sleeve 4, and a valve 43 is fixedly installed on the side tube 42. The plane where the bottom wall of the thermostatic sleeve 4 is located is inclined downward at 5°~15° towards the side tube 42, so that when adding gas medium, the condensate generated in the gap between the outer wall of the rear filter tank 15 and the inner wall of the thermostatic sleeve 4 can be discharged outward from the side tube 42.

[0025] When using the germane purification and filtration device of this utility model, first add activated alumina desiccant 10 and quicklime adsorbent 13 through the addition pipe 2 at the top of the primary filter tank 1 and the secondary filter tank 12 respectively, tighten the sealing cap 20, and then lay the molecular sieve filter layer 151, activated carbon adsorption layer 152 and metal chelating resin layer 153 in the secondary filter tank 15 from bottom to top, and then cover the top cap 17 and press the sealing ring 161 on the support base 16. Germanane enters the primary filter tank 1 through the inlet pipe 11. After being dehydrated by the activated alumina desiccant 10, it enters the secondary filter tank 12 through the central pipe 14. Acidic impurities are removed by the soda lime adsorbent 13. Then it enters the post-filter tank 15 through the conveying pipe 19. It is filtered sequentially through the molecular sieve filter layer 151, the activated carbon adsorption layer 152, and the metal chelating resin layer 153. After the purification process is completed, it is output from the post-filter pipe 18. The thermostatic sleeve 4 is supplied with heating medium through the medium inlet pipe 40 and flows out through the medium outlet pipe 41. When replacing consumables, the discharge valve 30 is opened, and the used consumables are discharged from the discharge pipe 3.

[0026] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A germane purification and filtration device, characterized in that: The system includes a primary filter (1), a secondary filter (12), and a post-filter (15). The primary filter (1) contains an activated alumina desiccant (10). The secondary filter (12) contains a soda lime adsorbent (13). The post-filter (15) contains, from bottom to top, a molecular sieve filter layer (151), an activated carbon adsorption layer (152), and a metal chelating resin layer (153). An air inlet pipe (11) is fixedly installed on the top side of the primary filter (1). The outlet end of the air inlet pipe (11) is inserted into the activated alumina desiccant (10). The primary filter (1) and the secondary filter (15) contain... The intermediate filter tanks (12) are connected by a central pipe (14). The air inlet end of the central pipe (14) is inserted into the top of the interior of the primary filter tank (1), and the air outlet end of the central pipe (14) is inserted into the soda lime adsorbent (13). The intermediate filter tanks (12) and the post-filter tanks (15) are connected by a conveying pipe (19). The air inlet end of the conveying pipe (19) is inserted into the top of the interior of the intermediate filter tank (12), and the air outlet end of the conveying pipe (19) is inserted into the molecular sieve filter layer (151). A post-filter pipe (18) is fixedly installed on the top side of the post-filter tank (15).

2. The germane purification and filtration apparatus according to claim 1, characterized in that: The top of the post-filter tank (15) is detachably fitted with a top cover (17), and a sealing ring (161) is provided between the top cover (17) and the top of the post-filter tank (15).

3. The germane purification and filtration apparatus according to claim 2, characterized in that: A support base (16) is fixedly installed on the top of the outer side of the rear filter tank (15), the sealing ring (161) is embedded in the support base (16), and the top cover (17) is pressed on the sealing ring (161).

4. The germane purification and filtration apparatus according to claim 1, characterized in that: The top of both the primary filter tank (1) and the secondary filter tank (12) is fixedly installed with an addition pipe (2), and a sealing cap (20) is threaded onto the addition pipe (2).

5. The germane purification and filtration apparatus according to claim 1, characterized in that: The bottom of the primary filter tank (1), the intermediate filter tank (12) and the post-filter tank (15) are all fixedly installed with a discharge pipe (3), and a discharge valve (30) is fixedly installed on the discharge pipe (3).

6. The germane purification and filtration apparatus according to claim 1, characterized in that: The bottoms of the primary filter tank (1), the intermediate filter tank (12), and the post-filter tank (15) are all funnel-shaped, and the plane of the inner wall of the funnel is inclined downward at 45°~60°.

7. The germane purification and filtration apparatus according to claim 1, characterized in that: The exterior of the post-filter tank (15) is provided with a thermostatic sleeve (4) for introducing a heating medium to heat the interior of the post-filter tank (15). A medium inlet pipe (40) is fixedly installed on the bottom of one side of the thermostatic sleeve (4), and a medium outlet pipe (41) is fixedly installed on the top of the other side of the thermostatic sleeve (4).

8. The germane purification and filtration apparatus according to claim 7, characterized in that: A side tube (42) is fixedly installed on the bottom of the other side of the thermostatic sleeve (4), and a valve (43) is fixedly installed on the side tube (42). The plane of the bottom wall of the thermostatic sleeve (4) is inclined downward at 5°~15° towards the side tube (42).

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