A composite water washing and adsorption device for semiconductor tail gas treatment
Patent Information
- Application Number
- CN202521963981.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-12
- Publication Date
- 2026-08-21
- Estimated Expiration
- 2035-09-12
AI Technical Summary
然而单层且固定喷淋头的方式会使喷淋水洗液与尾气接触面积有限，且尾气在塔内停留时间较短，易在吸附塔内形成“喷淋死角”，尤其是塔体边缘或角落区域，尾气流经这些区域时无法与水洗液接触，直接导致尾气处理不彻底，导致部分有害成分未能充分与水洗液接触便随尾气排出，尾气净化效率难以满足日益严格的环保排放标准
本实用新型中，通过设置一号蓄水盘与二号蓄水盘双层结构，并在两者底部均匀分布喷淋头，能够实现对半导体尾气的双层喷淋水洗，相较于传统单层喷淋结构，双层喷淋可大幅增加水洗液与尾气的接触面积和接触时间，更充分地捕捉尾气中的有害成分（如颗粒物、可溶性有害气体等），显著提升尾气净化效率，同时，转动机构带动一号蓄水盘与二号蓄水盘同步转动，配合喷淋头的均匀分布，使水洗液形成旋转喷淋的动态覆盖效果，避免传统固定喷淋存在的喷淋死角问题，进一步确保尾气在吸附塔内得到全方位、无死角的水洗吸附处理，保障尾气排放达标。
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Figure CN224656386U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor exhaust gas treatment technology, specifically a composite water washing and adsorption device for semiconductor exhaust gas treatment. Background Technology
[0002] In the semiconductor manufacturing process, etching, deposition, cleaning and other processes generate exhaust gases containing particulate matter (such as silicon powder and metal oxides) and soluble harmful gases (such as hydrogen fluoride, hydrogen chloride, ammonia, etc.). If these exhaust gases are discharged directly without effective treatment, they will not only pollute the atmospheric environment, but may also harm the health of surrounding equipment and personnel. Therefore, they need to be treated by professional equipment to achieve emission standards. Currently, most semiconductor exhaust gas washing and adsorption devices commonly used in the industry adopt a single-layer spray structure, that is, spraying washing liquid into the tower through a single water storage pan or spray pipe, and using gas-liquid contact to capture harmful components. However, the single-layer and fixed spray head method limits the contact area between the spray washing liquid and the exhaust gas, and the exhaust gas has a short residence time in the tower, which easily forms "spray dead corners" in the adsorption tower, especially in the edge or corner areas of the tower. When the exhaust gas flows through these areas, it cannot come into contact with the washing liquid, which directly leads to incomplete exhaust gas treatment. As a result, some harmful components are not fully contacted with the washing liquid and are discharged with the exhaust gas, making it difficult for the exhaust gas purification efficiency to meet the increasingly stringent environmental emission standards.
[0003] Therefore, a composite water washing and adsorption device for semiconductor exhaust gas treatment is proposed to address the above problems. Utility Model Content
[0004] The purpose of this invention is to provide a composite water washing and adsorption device for semiconductor exhaust gas treatment, so as to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: A composite water washing adsorption device for semiconductor exhaust gas treatment includes an adsorption tower, an air inlet pipe fixedly connected to the top of the adsorption tower, a water pumping mechanism on the outside of the adsorption tower, and a spray adsorption mechanism inside the adsorption tower. The spray adsorption mechanism includes a water guiding hose, with a first water storage tray and a second water storage tray fixedly connected to the outside of the water guiding hose. A connecting rod is fixedly connected between the first water storage tray and the second water storage tray. Spray heads are fixedly connected to the bottom of the first water storage tray and the second water storage tray. A rotating mechanism is provided on the top of the first water storage tray. The rotating mechanism includes a motor, the output end of which is fixedly connected to a rotating shaft. A first bevel gear is fixedly connected to the end of the rotating shaft away from the motor. A second bevel gear meshes with the outer bottom of the first bevel gear, and a transmission rod is fixedly connected to the bottom of the second bevel gear.
[0006] As a further optimization of this utility model, the water pumping mechanism includes a water tank, a water pump fixedly connected to the outside of the water tank, a water delivery pipe fixedly connected to the outlet end of the water pump, rotating rods fixedly connected to the outside of the first and second water storage pans, ball bearings fixedly connected to the outside of the rotating rods, a limiting groove is formed on the inner wall of the adsorption tower, the water guiding hose is located inside the adsorption tower, and the inlet end of the water guiding hose is fixedly connected to the inside of the water delivery pipe.
[0007] As a further optimization of this utility model, the No. 1 water storage tray and the No. 2 water storage tray are installed inside the adsorption tower, and the No. 2 water storage tray is fixedly connected to the bottom of the No. 1 water storage tray by a connecting rod.
[0008] As a further optimization of this utility model, the spray heads are evenly distributed at the bottom of the No. 1 and No. 2 water storage pans, and the rotating shaft is rotatably connected to the inside of the adsorption tower.
[0009] As a further optimization of this utility model, a sealing ring is provided between the rotating shaft and the adsorption tower, and the bottom of the transmission rod is fixedly connected to the center of the top of the No. 1 water storage pan.
[0010] As a further optimization of this utility model, the water tank is fixedly connected to the outside of the adsorption tower, and the rotating rods are evenly distributed on the outside of the first and second water storage pans.
[0011] As a further optimization of this utility model, the ball is adapted to the limiting groove, and the ball is movably connected inside the limiting groove.
[0012] Compared with the prior art, the beneficial effects of this utility model are: In this invention, a double-layer structure of a No. 1 water storage tray and a No. 2 water storage tray is set up, and spray heads are evenly distributed at the bottom of both. This enables double-layer spray washing of semiconductor exhaust gas. Compared with the traditional single-layer spray structure, double-layer spraying can significantly increase the contact area and contact time between the washing liquid and the exhaust gas, more fully capturing harmful components (such as particulate matter and soluble harmful gases) in the exhaust gas, and significantly improving the exhaust gas purification efficiency. At the same time, the rotating mechanism drives the No. 1 and No. 2 water storage trays to rotate synchronously. With the even distribution of the spray heads, the washing liquid forms a dynamic coverage effect of rotating spraying, avoiding the spray dead angle problem of traditional fixed spraying. This further ensures that the exhaust gas receives all-round, dead-angle-free water washing and adsorption treatment in the adsorption tower, ensuring that the exhaust gas emissions meet the standards. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2This is a schematic diagram of the internal structure of the adsorption tower of this utility model; Figure 3 This is a schematic diagram of the outer structure of the No. 1 water storage pan of this utility model; Figure 4 This is a schematic diagram of the structure between the No. 1 and No. 2 water storage pans of this utility model; Figure 5 This is a schematic diagram of the bottom structure of the No. 1 water storage pan of this utility model; Figure 6 This utility model Figure 2 Enlarged view of the structure at point A in the middle.
[0014] In the diagram: 1. Adsorption tower; 2. Air inlet pipe; 3. Water pumping mechanism; 31. Water tank; 32. Water pump; 33. Water delivery pipe; 4. Spray adsorption mechanism; 41. Water guide hose; 42. No. 1 water storage tray; 43. Connecting rod; 44. No. 2 water storage tray; 45. Spray head; 46. Rotating rod; 47. Ball bearing; 48. Limiting groove; 5. Rotating mechanism; 51. Motor; 52. Rotating shaft; 53. No. 1 bevel gear; 54. No. 2 bevel gear; 55. Transmission rod. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0016] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0017] Please see Figures 1-6 This utility model provides a technical solution: A composite water washing adsorption device for semiconductor exhaust gas treatment includes an adsorption tower 1, an air inlet pipe 2 fixedly connected to the top of the adsorption tower 1, a water pumping mechanism 3 provided on the outside of the adsorption tower 1, and a spray adsorption mechanism 4 provided inside the adsorption tower 1. The spray adsorption mechanism 4 includes a water guide hose 41. A first water storage tray 42 and a second water storage tray 44 are fixedly connected to the outside of the water guide hose 41. A connecting rod 43 is fixedly connected between the first water storage tray 42 and the second water storage tray 44. A spray head 45 is fixedly connected to the bottom of the first water storage tray 42 and the second water storage tray 44. A rotating mechanism 5 is provided on the top of the first water storage tray 42. The rotating mechanism 5 includes a motor 51, the output end of which is fixedly connected to a rotating shaft 52. The end of the rotating shaft 52 away from the motor 51 is fixedly connected to a first bevel gear 53. The bottom outer side of the first bevel gear 53 is meshed with a second bevel gear 54. The bottom of the second bevel gear 54 is fixedly connected to a transmission rod 55.
[0018] It should be noted that: the No. 1 water storage pan 42 and the No. 2 water storage pan 44 are installed inside the adsorption tower, and the No. 2 water storage pan 44 is fixedly connected to the bottom of the No. 1 water storage pan 42 through the connecting rod 43. The spray heads 45 are evenly distributed at the bottom of the No. 1 water storage pan 42 and the No. 2 water storage pan 44. The rotating shaft 52 is rotatably connected to the inside of the adsorption tower 1. A sealing ring is provided between the rotating shaft 52 and the adsorption tower 1. The bottom of the transmission rod 55 is fixedly connected to the center of the top of the No. 1 water storage pan 42.
[0019] Furthermore, the No. 1 water storage tray 42 and the No. 2 water storage tray 44 adopt a "fixed upper and lower layer" structure. The number and distribution of the connecting rods 43 are crucial. They are usually evenly arranged along the circumference of the water storage trays, and the connecting rods 43 must be made of high-strength and corrosion-resistant materials. This is to prevent corrosion from long-term contact with the washing liquid and to ensure that the two water storage trays are subjected to balanced forces when rotating synchronously, preventing deformation of the water storage trays due to excessive force on one side. At the same time, the distance between the two water storage trays must be reasonably controlled: if the distance is too small, the washing liquid sprayed on the upper layer may fall into the lower water storage tray without sufficient contact with the exhaust gas, reducing the treatment efficiency; if the distance is too large, it may cause "blank zones" in the two spray areas, and the exhaust gas may be discharged directly without sufficient treatment. Therefore, the distance must be designed in conjunction with the spray range of the spray head 45 to ensure that the two spray areas are completely covered without overlap or waste.
[0020] Specifically: the water guide hose 41 must possess high pressure resistance and anti-aging properties, as it needs to simultaneously transport the washing liquid and rotate with the water storage pan. If the hose's pressure resistance is insufficient, it may rupture under the pressure of the water pump 32; if its flexibility is poor, it will generate pulling force when the water storage pan rotates, affecting the smoothness of rotation. In addition, the orifice diameter and spray angle of the spray head 45 must be uniform to ensure that the washing liquid forms a fine spray mist. A wide-angle design of 90°-120° is selected for the spray angle, combined with a uniformly distributed layout, to ensure that the spray area of a single water storage pan can completely cover the cross-section of the tower body, avoiding spray dead zones.
[0021] As a further implementation of this scheme, the pumping mechanism 3 includes a water tank 31, a water pump 32 fixedly connected to the outside of the water tank 31, a water delivery pipe 33 fixedly connected to the outlet end of the water pump 32, a rotating rod 46 fixedly connected to the outside of the first water storage pan 42 and the second water storage pan 44, a ball bearing 47 fixedly connected to the outside of the rotating rod 46, a limiting groove 48 opened on the inner wall of the adsorption tower 1, a water guide hose 41 located inside the adsorption tower 1, and the inlet end of the water guide hose 41 fixedly connected to the inside of the water delivery pipe 33.
[0022] It should be noted that: the water tank 31 is fixedly connected to the outside of the adsorption tower 1, the rotating rod 46 is evenly distributed on the outside of the first water storage pan 42 and the second water storage pan 44, the ball bearing 47 is adapted to the limiting groove 48, and the ball bearing 47 is movably connected inside the limiting groove 48.
[0023] Furthermore, the meshing accuracy of the first bevel gear 53 and the second bevel gear 54 directly affects the transmission efficiency. The modules of the two gears must be consistent, and the meshing clearance must be controlled within 0.1-0.2mm. If the clearance is too large, it will cause "idling" during power transmission, affecting the stability of the water storage tray's rotation speed. If the clearance is too small, it will increase gear wear and shorten service life. At the same time, the "top center fixed" design of the transmission rod 55 and the first water storage tray 42 is crucial to ensuring the smooth rotation of the water storage tray. If the fixed position is off-center, it will cause centrifugal force to be generated when the water storage tray rotates, which will lead to severe friction between the ball bearing 47 and the limiting groove 48. This will not only increase the load on the motor 51, but may also cause the water storage tray to tilt and the spray to be uneven.
[0024] Specifically: the sealing ring between the rotating shaft 52 and the adsorption tower 1 must be made of oil-resistant and heat-resistant fluororubber. The cross-sectional shape of the sealing ring is U-shaped to ensure that it can fit tightly against the shaft wall when the rotating shaft 52 rotates, effectively preventing the leakage of exhaust gas and moisture in the tower. If the seal fails, it will not only cause exhaust gas to overflow and pollute the environment, but may also allow moisture to enter the motor 51 and cause a short circuit fault in the motor 51. In addition, the surface of the rotating shaft 52 needs to be chrome-plated to reduce the friction coefficient with the sealing ring, extend the service life of the sealing ring, and improve the rust resistance of the rotating shaft 52.
[0025] Work process: When the composite water washing adsorption device for semiconductor exhaust gas treatment is working, the semiconductor exhaust gas to be treated first enters the adsorption tower 1 through the air inlet pipe 2 fixedly connected to the top of the adsorption tower 1. At the same time, the water pumping mechanism 3 on the outside of the adsorption tower 1 is started. The water pump 32 fixedly connected to the outside of the water tank 31 in the water pumping mechanism 3 draws out the water washing liquid in the water tank 31 and delivers it to the water guide hose 41 located inside the adsorption tower 1 through the water delivery pipe 33 fixedly connected to the water outlet end of the water pump 32. The water inlet end of the water guide hose 41 is fixedly connected to the inside of the water delivery pipe 33. The water guide hose 41 then delivers the water washing liquid to the first water storage pan 42 and the second water storage pan 44 fixedly connected to its outside. When the washing liquid fills the No. 1 water storage pan 42 and the No. 2 water storage pan 44, it will be sprayed outward through the spray nozzles 45 evenly distributed at the bottom of the two. At this time, the rotating mechanism 5 set on the top of the No. 1 water storage pan 42 starts to operate. The output end of the motor 51 in the rotating mechanism 5 drives the rotating shaft 52 to rotate inside the adsorption tower 1. The No. 1 bevel gear 53 fixedly connected to the end of the rotating shaft 52 away from the motor 51 rotates accordingly, thereby driving the No. 2 bevel gear 54 meshing with its outer bottom to rotate. The transmission rod 55 fixedly connected to the bottom of the No. 2 bevel gear 54 drives the No. 1 water storage pan 42 and the No. 2 water storage pan 44 to rotate synchronously. During the rotation of the water storage pans, the ball bearings 47, which are fixedly connected to the outer side of the rotating rods 46 evenly distributed on the outer side of the No. 1 water storage pan 42 and the No. 2 water storage pan 44, move within the limiting grooves 48 opened on the inner wall of the adsorption tower 1. This provides guidance and support for the rotation of the water storage pans, preventing deviation. Ultimately, the No. 1 water storage pan 42 and the No. 2 water storage pan 44 drive the spray head 45 to rotate and spray simultaneously, so that the washing liquid forms a dynamic spray coverage in the adsorption tower 1 with all-round and no dead angles. This ensures full contact with the semiconductor tail gas entering from the air inlet pipe 2, and removes harmful components in the tail gas through water washing and adsorption, thus completing the semiconductor tail gas treatment process.
[0026] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A composite water washing adsorption device for semiconductor exhaust gas treatment, comprising an adsorption tower (1), characterized in that: An air inlet pipe (2) is fixedly connected to the top of the adsorption tower (1), a water pumping mechanism (3) is provided on the outside of the adsorption tower (1), and a spray adsorption mechanism (4) is provided inside the adsorption tower (1). The spray adsorption mechanism (4) includes a water guide hose (41), a first water storage tray (42) and a second water storage tray (44) are fixedly connected to the outside of the water guide hose (41), a connecting rod (43) is fixedly connected between the first water storage tray (42) and the second water storage tray (44), a spray head (45) is fixedly connected to the bottom of the first water storage tray (42) and the second water storage tray (44), and a rotating mechanism (5) is provided on the top of the first water storage tray (42). The rotating mechanism (5) includes a motor (51), the output end of which is fixedly connected to a rotating shaft (52), and the end of the rotating shaft (52) away from the motor (51) is fixedly connected to a first bevel gear (53). The bottom outer side of the first bevel gear (53) is meshed with a second bevel gear (54), and the bottom of the second bevel gear (54) is fixedly connected to a transmission rod (55).
2. The composite water washing adsorption device for semiconductor tail gas treatment according to claim 1, characterized in that: The pumping mechanism (3) includes a water tank (31), a water pump (32) is fixedly connected to the outside of the water tank (31), a water delivery pipe (33) is fixedly connected to the outlet end of the water pump (32), a rotating rod (46) is fixedly connected to the outside of the first water storage pan (42) and the second water storage pan (44), a ball bearing (47) is fixedly connected to the outside of the rotating rod (46), a limiting groove (48) is opened on the inner wall of the adsorption tower (1), the water guide hose (41) is located inside the adsorption tower (1), and the water inlet end of the water guide hose (41) is fixedly connected to the inside of the water delivery pipe (33).
3. The composite water washing adsorption device for semiconductor tail gas treatment according to claim 1, characterized in that: The No. 1 water storage pan (42) and the No. 2 water storage pan (44) are installed inside the adsorption tower (1), and the No. 2 water storage pan (44) is fixedly connected to the bottom of the No. 1 water storage pan (42) by a connecting rod (43).
4. The composite water washing adsorption device for semiconductor tail gas treatment according to claim 1, characterized in that: The spray heads (45) are evenly distributed at the bottom of the first water storage pan (42) and the second water storage pan (44), and the rotating shaft (52) is rotatably connected to the inside of the adsorption tower (1).
5. The composite water washing adsorption device for semiconductor tail gas treatment according to claim 1, characterized in that: A sealing ring is provided between the rotating shaft (52) and the adsorption tower (1), and the bottom of the transmission rod (55) is fixedly connected to the center of the top of the No. 1 water storage pan (42).
6. The composite water washing adsorption device for semiconductor tail gas treatment according to claim 2, characterized in that: The water tank (31) is fixedly connected to the outside of the adsorption tower (1), and the rotating rod (46) is evenly distributed on the outside of the first water storage pan (42) and the second water storage pan (44).
7. The composite water washing adsorption device for semiconductor tail gas treatment according to claim 2, characterized in that: The ball (47) is adapted to the limiting groove (48), and the ball (47) is movably connected inside the limiting groove (48).